EP0451939A3 - Recording apparatus with a recording head having a wiring substrate - Google Patents

Recording apparatus with a recording head having a wiring substrate Download PDF

Info

Publication number
EP0451939A3
EP0451939A3 EP19910301490 EP91301490A EP0451939A3 EP 0451939 A3 EP0451939 A3 EP 0451939A3 EP 19910301490 EP19910301490 EP 19910301490 EP 91301490 A EP91301490 A EP 91301490A EP 0451939 A3 EP0451939 A3 EP 0451939A3
Authority
EP
European Patent Office
Prior art keywords
wiring substrate
layers
recording
recording head
recording apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19910301490
Other versions
EP0451939B1 (en
EP0451939A2 (en
Inventor
Yasutomo Canon Kabushiki Kaisha Watanabe
Hideo Canon Kabushiki Kaisha Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2042533A external-priority patent/JP2726137B2/en
Priority claimed from JP2049873A external-priority patent/JP2771008B2/en
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0451939A2 publication Critical patent/EP0451939A2/en
Publication of EP0451939A3 publication Critical patent/EP0451939A3/en
Application granted granted Critical
Publication of EP0451939B1 publication Critical patent/EP0451939B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/19—Assembling head units

Abstract

In the wiring portion in the wiring substrate constituting the recording head of a liquid spray type recording apparatus, the electroconductive layers (30, 141) comprises at least two layers, the protective layer of the electroconductive layer includes at least two unit layers (35, 36, 142, 144), one of them being formed so that it has a shape and size different has a size and shape different from those of the through hole(s) (35a, 36a) in remaining unit protective layer(s) (35, 36, 142, 144), thereby assuring the formation of electric connection portion and improving durability of the electric connection portion. <IMAGE>
EP91301490A 1990-02-26 1991-02-25 Recording apparatus with a recording head having a wiring substrate Expired - Lifetime EP0451939B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP42533/90 1990-02-26
JP2042533A JP2726137B2 (en) 1990-02-26 1990-02-26 Wiring electrode substrate, ink jet recording head and ink jet recording apparatus having the wiring electrode substrate
JP49873/90 1990-02-28
JP2049873A JP2771008B2 (en) 1990-02-28 1990-02-28 Recording device and recording head

Publications (3)

Publication Number Publication Date
EP0451939A2 EP0451939A2 (en) 1991-10-16
EP0451939A3 true EP0451939A3 (en) 1991-12-11
EP0451939B1 EP0451939B1 (en) 1996-01-17

Family

ID=26382245

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91301490A Expired - Lifetime EP0451939B1 (en) 1990-02-26 1991-02-25 Recording apparatus with a recording head having a wiring substrate

Country Status (4)

Country Link
EP (1) EP0451939B1 (en)
AT (1) ATE133111T1 (en)
DE (1) DE69116414T2 (en)
ES (1) ES2082129T3 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344809A1 (en) * 1988-06-03 1989-12-06 Canon Kabushiki Kaisha Liquid emission recording head, substrate therefor and liquid emission recording apparatus utilizing said head
EP0352142A2 (en) * 1988-07-22 1990-01-24 Canon Kabushiki Kaisha Ink jet recording
EP0380366A2 (en) * 1989-01-27 1990-08-01 Canon Kabushiki Kaisha Substrate for recording head and recording head

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619639A (en) * 1979-07-27 1981-02-24 Hitachi Ltd Semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344809A1 (en) * 1988-06-03 1989-12-06 Canon Kabushiki Kaisha Liquid emission recording head, substrate therefor and liquid emission recording apparatus utilizing said head
EP0352142A2 (en) * 1988-07-22 1990-01-24 Canon Kabushiki Kaisha Ink jet recording
EP0380366A2 (en) * 1989-01-27 1990-08-01 Canon Kabushiki Kaisha Substrate for recording head and recording head

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, vol. 5, no. 70 (E-56)[742] May 12, 1981; & JP-A-56 019 639 (AKIHIRO TOMOSAWA ET AL.) February 24, 1981 *

Also Published As

Publication number Publication date
EP0451939B1 (en) 1996-01-17
EP0451939A2 (en) 1991-10-16
ES2082129T3 (en) 1996-03-16
ATE133111T1 (en) 1996-02-15
DE69116414D1 (en) 1996-02-29
DE69116414T2 (en) 1996-06-05

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