EP0425634A1 - Connection device between the body and the mouth-piece of a vacuum pipette - Google Patents

Connection device between the body and the mouth-piece of a vacuum pipette

Info

Publication number
EP0425634A1
EP0425634A1 EP19900907119 EP90907119A EP0425634A1 EP 0425634 A1 EP0425634 A1 EP 0425634A1 EP 19900907119 EP19900907119 EP 19900907119 EP 90907119 A EP90907119 A EP 90907119A EP 0425634 A1 EP0425634 A1 EP 0425634A1
Authority
EP
European Patent Office
Prior art keywords
end piece
tip
cylinder
toroids
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19900907119
Other languages
German (de)
French (fr)
Inventor
Bernard Poli
Gérard CHINCHOLLE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Recif SA
Original Assignee
Recif SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Recif SA filed Critical Recif SA
Publication of EP0425634A1 publication Critical patent/EP0425634A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L25/00Constructive types of pipe joints not provided for in groups F16L13/00 - F16L23/00 ; Details of pipe joints not otherwise provided for, e.g. electrically conducting or insulating means
    • F16L25/01Constructive types of pipe joints not provided for in groups F16L13/00 - F16L23/00 ; Details of pipe joints not otherwise provided for, e.g. electrically conducting or insulating means specially adapted for realising electrical conduction between the two pipe ends of the joint or between parts thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005Vacuum work holders
    • B25B11/007Vacuum work holders portable, e.g. handheld
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Definitions

  • the invention relates more particularly to the technical sector of microelectronics.
  • a pipette comprises a body receiving at one of its ends, a gripping tip shaped to grip the wafer by suction.
  • the body is connected to a suction pump and has a control member to subject or not, at will, the nozzle to the action of vacuum.
  • the electrostatic charges on the plates increase the contamination so that the particles which polarize in the laminar flow can be bent and have a curved trajectory and not a vertical one. The particles therefore tend to stick to the wafer.
  • the dipole bond between the particles and the wafer makes removal of said particles very difficult. This presence of particles can reduce the yield on certain types of circuit.
  • the invention has set itself the aim of remedying these drawbacks, in a safe and effective manner, by proposing a coupling device between the body and the end piece capable of solving the problem posed of ensuring the evacuation of electrostatic charges.
  • the problem is to ensure a mechanical connection with electrical conduction using organic materials for the design of the entire pipette. These materials are very lightly loaded with carbon fiber, so that the electrical conduction is insufficient or unreliable.
  • the coupling device comprises at least one means capable of ensuring the discharge of electrostatic charges, said means being arranged at the coupling of the end piece and the body of so as to be in contact with both a part of said body and said nozzle, this means being made of conductive material.
  • the means is a cylinder arranged transversely to one of the ends of the body between two toroids made of deformable flexible material for tight coupling and a corresponding bearing of the end piece.
  • the cylinder is partially embedded in the thickness of the body by being offset in height so that under the effect of the elasticity of the toroids, the end piece is pushed back onto the cylinder to improve the mechanical contact.
  • the device according to the invention finds a particularly advantageous application in the case of a pipette whose body and tip are made of organi ⁇ cal materials loaded with carbon fiber.
  • the body is made of fluorinated polyvinylidene and the tip of poly-ether-ether-ketone.
  • Figure 1 is an exterior view of an exemplary embodiment of a vacuum pipette.
  • Figure 2 is, on a larger scale, a partial view in longitudinal section showing the connecting device, between the body and the tip of the pipette.
  • Figure 3 is a perspective cross-fail ⁇ consi ⁇ sidered along line 3-3 of Figure 2.
  • the pipette has a body (1) receiving at one of these ends, a tip (2).
  • the other end of the body (1) is arranged to be connected to a vacuum pump, for example.
  • a member (3) controllable from outside the body (1) ensures, in combination with internal arrangements of said body, the creation of the vacuum at will or not, at the end piece.
  • the coupling of the body (1) and the end piece (2) is effected by means of two toroids (5) and (6) in flexible deformable material, to ensure a tight coupling.
  • toroids are housed in two corresponding grooves formed in the bore of the body (1).
  • the body (1) and the end piece (2) are made of organic materials loaded with carbon fiber. More particularly, the body (1) is made of fluorinated polyvinylidene while the end piece (2) is made of poly-ether-ether-ketone. In a known manner, the body and one end can be obtained directly by injection.
  • a means (4) capable of ensuring the evacuation of electrostatic charges.
  • This means (4) is determined, after assembly, to be in contact, both with a part of the body (1) and the end piece (2).
  • the means (-) is produced in a conductive material.
  • This means (4) is constituted by a cylinder disposed transversely inside the body (1).
  • the cylinder (4) is disposed transversely between the two tori (5) and (6).
  • the cylinder (4) is, moreover, embedded in the thickness of the body, being offset in height, to overflow inside the bore of said body, so that under the effect of the elasticity of the toroids (5) and (6), the fitting part (2a) of the end piece (2) is pushed back onto said cylinder (4), to improve the mechanical contact.

Abstract

Dispositif de liaison entre le corps et l'embout d'une pipette à vide. Le dispositif de liaison est remarquable en ce qu'il comprend au moins un moyen (4) apte à assurer l'évacuation des charges électrostatiques.Connection device between the body and the tip of a vacuum pipette. The connection device is remarkable in that it comprises at least one means (4) capable of ensuring the evacuation of electrostatic charges.

Description

Dispositif de liaison entre le corps et l'embout d'une pipette à vide. Connection device between the body and the tip of a vacuum pipette.
L'invention concerne plus particulièrement le secteur technique de la micro-électronique.The invention relates more particularly to the technical sector of microelectronics.
Généralement, les pipettes à vide sont utilisées pour le transport des plaquettes de silicum. Pour l'essentiel, une pipette comprend un corps recevant à l'une de ses extrémités , un embout de préhension conformé pour saisir la plaquette par succion. Le corps est relié à une pompe aspirante et présente un organe de commande pour soumettre ou non, à volonté, l'embout à l'action du vide.Generally, vacuum pipettes are used to transport the silicon wafers. Essentially, a pipette comprises a body receiving at one of its ends, a gripping tip shaped to grip the wafer by suction. The body is connected to a suction pump and has a control member to subject or not, at will, the nozzle to the action of vacuum.
On peut citer par exemple, le brevet français N. 8518635 qui enseigne un accouplement étanche de l'embout par rapport au corps , aux moyens dé deux tores , en matière souple déformable.We can cite for example, French patent N. 8518635 which teaches a tight coupling of the end piece with respect to the body, by means of two toroids, made of deformable flexible material.
II s'avère que les plaquettes sont chargées plus ou moins d'électricité statique, de même que les mains de l'opérateur lors de la manipulation desdites plaquettes. La présence de cette électricité statique peut provoquer des micro-décharges entre la plaquette considérée et la masse , ce qui peut endommager les jonctions P.N. ou autre, consti¬ tuant les circuits intégrés.It turns out that the plates are more or less charged with static electricity, as are the operator's hands when handling said plates. The presence of this static electricity can cause micro-discharges between the considered wafer and the mass, which can damage the P.N. or other junctions, constituting the integrated circuits.
En outre, les charges électrostatiques sur les pla¬ quettes , augmentent la contamination de sorte que les par- ticules qui se polarisent dans le flux laminaire, peuvent être infléchies et avoir une trajectoire courbe et non pas verticale. Les particules ont donc tendance à se coller sur la plaquette.In addition, the electrostatic charges on the plates increase the contamination so that the particles which polarize in the laminar flow can be bent and have a curved trajectory and not a vertical one. The particles therefore tend to stick to the wafer.
La liaison dipôle entre les particules et la plaquette rend l'enlèvement desdites particules très difficile. Cette présence de particules peut réduire le rendement sur cer¬ tains types de circuit.The dipole bond between the particles and the wafer makes removal of said particles very difficult. This presence of particles can reduce the yield on certain types of circuit.
La revue IBM TECHNICAL DISCLOSURE BULLETIN, publiée le 7 décembre 1987, divulgue d'une manière très générale ce problème de dissipation des charges électrostatiques. Tou¬ tefois , aucune solution concrète apte à résoudre un tel problème n'est suggérée par cette revue.The journal IBM TECHNICAL DISCLOSURE BULLETIN, published on December 7, 1987, generally discloses this problem of dissipation of electrostatic charges. However, no concrete solution capable of solving such a problem is suggested by this review.
L'invention s'est fixée pour but de remédier à ces inconvénients, d'une manière sûre et efficace, en proposant un dispositif d'accouplement entre le corps et l'embout apte à résoudre le problème posé d'assurer l'évacuation des charges électrostatiques.The invention has set itself the aim of remedying these drawbacks, in a safe and effective manner, by proposing a coupling device between the body and the end piece capable of solving the problem posed of ensuring the evacuation of electrostatic charges.
Le problème posé est d'assurer une liaison mécanique avec conduction électrique en utilisant des matériaux orga¬ niques pour la conception de l'ensemble de la pipette. Ces matériaux sont très faiblement chargés en fibre de carbone, de sorte que la conduction électrique est insuffisante ou peu fiable.The problem is to ensure a mechanical connection with electrical conduction using organic materials for the design of the entire pipette. These materials are very lightly loaded with carbon fiber, so that the electrical conduction is insufficient or unreliable.
Dans ces conditions , le problème posé est résolu en ce que le dispositif d'accouplement comprend au moins un moyen apte à assurer 1 ' évacuation des charges électrostatiques , ledit moyen étant disposé au niveau de l'accouplement de l'embout et du corps de manière à être en contact à la fois avec une partie dudit corps et dudit embout, ce moyen étant réalisé en matériau conducteur.Under these conditions, the problem posed is solved in that the coupling device comprises at least one means capable of ensuring the discharge of electrostatic charges, said means being arranged at the coupling of the end piece and the body of so as to be in contact with both a part of said body and said nozzle, this means being made of conductive material.
Pour résoudre le problème posé d'assurer une liaison mécanique avec conduction électrique, tout en ayant pour objectif d'avoir un accouplement parfaitement étanche , le moyen est un cylindre disposé transversalement à l'une des extrémités du corps entre deux tores en matière souple déformable pour l'accouplement étanc e d'une portée corres¬ pondante de l'embout. Le cylindre est noyé partiellement dans l'épaisseur du corps en étant décalé en hauteur de sorte que sous l'effet de l'élasticité des tores, l'embout soit repoussé sur le cylindre pour améliorer le contact mécanique.To solve the problem posed of ensuring a mechanical connection with electrical conduction, while having the objective of having a perfectly sealed coupling, the means is a cylinder arranged transversely to one of the ends of the body between two toroids made of deformable flexible material for tight coupling and a corresponding bearing of the end piece. The cylinder is partially embedded in the thickness of the body by being offset in height so that under the effect of the elasticity of the toroids, the end piece is pushed back onto the cylinder to improve the mechanical contact.
Le dispositif selon l'invention trouve une application particulièrement avantageuse dans le cas d'une pipette dont le corps et l'embout sont réalisés en matériaux organi¬ ques chargés en fibre de carbone. Le corps est exécuté en polyvinylidène fluoré et l'embout en poly-éther-éther- cétone.The device according to the invention finds a particularly advantageous application in the case of a pipette whose body and tip are made of organi¬ cal materials loaded with carbon fiber. The body is made of fluorinated polyvinylidene and the tip of poly-ether-ether-ketone.
L'invention est exposée ci-après, plus en détail, à l'aide des dessins annexés dans lesquels :The invention is set out below, in more detail, using the appended drawings in which:
La figure 1 est une vue extérieure d'un exemple de réalisation de pipette à vide. figure 2 est, à une échelle plus importante, une vue partielle en coupe longitudinale, montrant le disposi¬ tif de liaison, entre le corps et l'embout de la pipette.Figure 1 is an exterior view of an exemplary embodiment of a vacuum pipette. Figure 2 is, on a larger scale, a partial view in longitudinal section showing the connecting device, between the body and the tip of the pipette.
La figure 3 est une vue en coupΛ transversale consi¬ dérée selon la ligne 3-3 de la figure 2.Figure 3 is a perspective cross-fail Λ consi¬ sidered along line 3-3 of Figure 2.
Comme le montre la figure 1 , la pipette présente un corps (1) recevant à l'une de ces extrémités, un embout (2). L'autre extrémité du corps (1) est agencé pour être reliée à une pompe à vide, par exemple. Un organe (3) commandable à partir de l'extérieur du corps (1) assure, en combinaison avec des agencements internes dudit corps , la mise à volonté ou non du vide, au niveau de l'embout.As shown in Figure 1, the pipette has a body (1) receiving at one of these ends, a tip (2). The other end of the body (1) is arranged to be connected to a vacuum pump, for example. A member (3) controllable from outside the body (1) ensures, in combination with internal arrangements of said body, the creation of the vacuum at will or not, at the end piece.
L'accouplement du corps (1) et de l'embout (2) s'ef¬ fectue au moyen de deux tores (5) et (6) eh matière souple déformable, pour assurer un accouplement étanche. Ces deux - A -The coupling of the body (1) and the end piece (2) is effected by means of two toroids (5) and (6) in flexible deformable material, to ensure a tight coupling. These two - AT -
tores sont logés dans deux gorges correspondantes formées dans l'alésage du corps (1).toroids are housed in two corresponding grooves formed in the bore of the body (1).
D'une manière avantageuse, le corps (1) et l'embout (2) sont réalisés en matériaux organiques chargés en fibre de carbone. Plus particulièrement, le corps (1) est exécuté en polyvinylidène fluoré tandis que l'embout (2) est réali¬ sé en poly-éther-éther-cétone. D'une manière connue, le corps et 1 ' embout peuvent être obtenus , directement par injection.Advantageously, the body (1) and the end piece (2) are made of organic materials loaded with carbon fiber. More particularly, the body (1) is made of fluorinated polyvinylidene while the end piece (2) is made of poly-ether-ether-ketone. In a known manner, the body and one end can be obtained directly by injection.
Selon l'invention, au niveau de l'accouplement, de l'embout (2) et du corps (1) est disposé un moyen (4) apte à assurer l'évacuation des charges électrostatiques. Ce moyen (4) est déterminé, après montage, pour être en con- tact, à la fois avec une partie du corps (1) et de l'embout (2).According to the invention, at the coupling, the end piece (2) and the body (1) is arranged a means (4) capable of ensuring the evacuation of electrostatic charges. This means (4) is determined, after assembly, to be in contact, both with a part of the body (1) and the end piece (2).
Compte-tenu du problème posé d'assurer l'évacuation des charges électrostatiques, d'une part, et de la nature des matériaux constituant le corps et l'embout, d'autre part, le moyen ( -- ) est réalisé en un matériau conducteur. Ce moyen (4) est constitué par un cylindre disposé trans¬ versalement à l'in-térieur du corps (1).Given the problem posed of ensuring the evacuation of electrostatic charges, on the one hand, and the nature of the materials constituting the body and the end piece, on the other hand, the means (-) is produced in a conductive material. This means (4) is constituted by a cylinder disposed transversely inside the body (1).
Comme le montrent les figures 2 et 3 , le cylindre (4) est diposé transversalement entre les deux tores (5) et (6). Le cylindre (4) est, en outre, noyé dans l'épaisseur du corps, en étant décalé en hauteur, pour déborder à l'intérieur de l'alésage dudit corps, de sorte que sous l'effet de l'élasticité des tores (5) et (6), la partie d'emmanchement (2a) de l'embout (2) soit repoussée sur ledit cylindre (4) , pour améliorer le contact mécanique.As shown in Figures 2 and 3, the cylinder (4) is disposed transversely between the two tori (5) and (6). The cylinder (4) is, moreover, embedded in the thickness of the body, being offset in height, to overflow inside the bore of said body, so that under the effect of the elasticity of the toroids (5) and (6), the fitting part (2a) of the end piece (2) is pushed back onto said cylinder (4), to improve the mechanical contact.
Il en résulte donc un contact mécanique et électrique entre le corps (1) et l'embout (2) correspondant à une concentration suffisante en fibre de carbone. Les avantages ressortent bien de la description. This therefore results in mechanical and electrical contact between the body (1) and the nozzle (2) corresponding to a sufficient concentration of carbon fiber. The advantages are apparent from the description.

Claims

R E V E N D I C A T I O N S R E V E N D I C A T I O N S
-1- Dispositif de liaison entre le corps et l'embout d'une pipette à vide, comprenant au moins, un moyen (4) apte à assurer l'évacuation des charges électrostatiques, caracté¬ risé en ce que ledit moyen (4) est disposé au niveau de l'accouplement de l'embout (2) et du corps (1) de manière à être en contact à la fois avec une partie dudit corps et dudit embout, le moyen (4) étant réalisé en matériau con¬ ducteur.-1- Connecting device between the body and the tip of a vacuum pipette, comprising at least one means (4) capable of ensuring the evacuation of electrostatic charges, caracté¬ ized in that said means (4) is arranged at the coupling of the end piece (2) and the body (1) so as to be in contact with both a part of said body and said end piece, the means (4) being made of material con¬ conductor.
-2- Dispositif selon la revendication 1, caractérisé en ce que le moyen (4) est un cylindre disposé transversalement à l'une des extrémités du corps (1) entre deux tores (5) et (6), en matière souple déformable pour l'accouplement étan¬ che d'une portée correspondante de l'embout (2).-2- Device according to claim 1, characterized in that the means (4) is a cylinder arranged transversely at one end of the body (1) between two toroids (5) and (6), made of flexible material deformable for etan¬ che coupling of a corresponding range of the nozzle (2).
-3- Dispositif selon la revendication 2, caractérisé en ce que le cylindre (4) est noyé partiellement dans l'épaisseur du corps (1) en étant décalé en hauteur de sorte que sous l'effet de l'élasticité des tores, l'embout (2) soit re- poussé sur le cylindre (4) pour améliorer le contact méca¬ nique.-3- Device according to claim 2, characterized in that the cylinder (4) is partially embedded in the thickness of the body (1) being offset in height so that under the effect of the elasticity of the toroids, l 'end piece (2) is pushed back onto the cylinder (4) to improve mechanical contact.
-4- Dispositif selon l'une quelconque des revendications 1 à 3, caractérisé en ce que le corps (1) et l'embout (2) sont réalisés en matériaux organiques chargés en fibre de carbone.-4- Device according to any one of claims 1 to 3, characterized in that the body (1) and the tip (2) are made of organic materials loaded with carbon fiber.
-5- Dispositif selon la revendication 4, caractérisé en ce que le corps est exécuté en polyvinylidène fluoré et l'em¬ bout en poly-éther-éther-cétone. -5- Device according to claim 4, characterized in that the body is executed in fluorinated polyvinylidene and the tip in poly-ether-ether-ketone.
EP19900907119 1989-04-26 1990-04-25 Connection device between the body and the mouth-piece of a vacuum pipette Withdrawn EP0425634A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8905942A FR2646491B1 (en) 1989-04-26 1989-04-26 CONNECTION DEVICE BETWEEN THE BODY AND THE NOZZLE OF A VACUUM PIPETTE
FR8905942 1989-04-26

Publications (1)

Publication Number Publication Date
EP0425634A1 true EP0425634A1 (en) 1991-05-08

Family

ID=9381420

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19900907119 Withdrawn EP0425634A1 (en) 1989-04-26 1990-04-25 Connection device between the body and the mouth-piece of a vacuum pipette

Country Status (3)

Country Link
EP (1) EP0425634A1 (en)
FR (1) FR2646491B1 (en)
WO (1) WO1990012977A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5280979A (en) * 1991-06-20 1994-01-25 Recif, S.A. Tip for a vacuum pipette with improved electrostatic discharge properties
EP0826209B1 (en) * 1995-05-19 1999-11-03 Seagate Technology, Inc. Electrical grounding system for instruments used in assembling disc drives
WO2012177900A1 (en) 2011-06-22 2012-12-27 Research Triangle Institute, International Bipolar microelectronic device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244797A (en) * 1961-04-22 1966-04-05 Cedric H Watson Pipe joint structure incorporating electrical conductivity means
DE2631502A1 (en) * 1976-07-13 1978-01-19 Siemens Ag Suction type forceps for small components - have passage from union to nozzle formed by groove covered by plate
FR2593424B1 (en) * 1985-12-10 1989-07-21 Recif Sa VACUUM PIPETTE, PARTICULARLY FOR TRANSFERRING SILICON WAFERS

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9012977A1 *

Also Published As

Publication number Publication date
WO1990012977A1 (en) 1990-11-01
FR2646491A1 (en) 1990-11-02
FR2646491B1 (en) 1991-08-23

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