EP0423298A1 - Connection element between a working tool and a vacuum network - Google Patents

Connection element between a working tool and a vacuum network

Info

Publication number
EP0423298A1
EP0423298A1 EP90907129A EP90907129A EP0423298A1 EP 0423298 A1 EP0423298 A1 EP 0423298A1 EP 90907129 A EP90907129 A EP 90907129A EP 90907129 A EP90907129 A EP 90907129A EP 0423298 A1 EP0423298 A1 EP 0423298A1
Authority
EP
European Patent Office
Prior art keywords
tube
hose
flexible
element according
pipette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP90907129A
Other languages
German (de)
French (fr)
Inventor
Gérard CHINCHOLLE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Recif SA
Original Assignee
Recif SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Recif SA filed Critical Recif SA
Publication of EP0423298A1 publication Critical patent/EP0423298A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L11/00—Hoses, i.e. flexible pipes
    • F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
    • F16L11/12—Hoses, i.e. flexible pipes made of rubber or flexible plastics with arrangements for particular purposes, e.g. specially profiled, with protecting layer, heated, electrically conducting
    • F16L11/127—Hoses, i.e. flexible pipes made of rubber or flexible plastics with arrangements for particular purposes, e.g. specially profiled, with protecting layer, heated, electrically conducting electrically conducting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L11/00—Hoses, i.e. flexible pipes
    • F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
    • F16L11/10—Hoses, i.e. flexible pipes made of rubber or flexible plastics with reinforcements not embedded in the wall

Definitions

  • Connection element between a "working tool and a vacuum network is Connection element between a "working tool and a vacuum network.
  • the invention relates more particularly but not exclusively to the vacuum pipettes used in particular for the transfer of silicon wafers.
  • connection between the body of the pipette and the like and a vacuum pump for example takes place by means of a hose.
  • Problems can arise with the generation of particles resulting from static electricity.
  • the said wafers are charged with static electricity which can cause micro-discharges.
  • the pipettes or the like are generally executed in organic materials which are lightly loaded with carbon fiber so that the electrical conduction is insufficient.
  • the hose can be bent and create a bend capable of temporarily interrupting the effect of the vacuum, which can cause breakage of the wafer, the latter being no longer mainte ⁇ naked.
  • the problem posed is to have a non-particle generating connection element, which cannot interrupt the vacuum when it is folded while being of a reduced weight and capable of ensuring electrical conduction.
  • the element consists of a hose of conductive material housed inside a tube of flexible and insulating material, said hose being arranged to be non-generator of particles by ensuring continuity. electrical contact with the pipette body.
  • hose tré ities receives a coupling member made of conductive material capable of cooperating with a part of the pipette body, the other end of said flexible hose receiving a coupling member made of conductive material capable of being connected to the vacuum network .
  • each of the coupling members consists of a bushing, one of the ends of which allows the hose to be fixed while the other extremity has a fitting surface.
  • the ends of the tube are projecting from the coupling or ⁇ gans to be adapted on connection parts in which are engaged the fitting surfaces of said members.
  • the problem posed of avoiding the formation of a bend capable of momentarily interrupting the effect of the vacuum is solved in that the hose is produced in the form of a spring with contiguous turns to ensure a large urn flexibility of the tube without generation of restoring stresses when bent or otherwise deformed.
  • the tube receiving the hose is made of silicone.
  • FIG. 1 shows an embodiment of a tool in the form of a pipette, connected according to the characteristics of the invention of a vacuum pump;
  • FIG. 2 is a large scale a longitudinal sectional view showing one connecting element considered as such;
  • Figure 3 is a cross-sectional view taken along line 3.3. of Figure 2;
  • FIG. 4 is a partial sectional view on a large scale showing the coupling of the connecting element according to the invention with a part of the body of the pipette.
  • FIG. 1 illustrates a working tool in the form of a pipette (A) coupled by a connecting element (E) to a vacuum network such as a pump (P).
  • a pipette is given by way of non-limiting indication, it being underlined that the invention applies to any member or tool having to be connected to a vacuum network.
  • a pipette co-takes a body (1) receiving at one of its ends a gripping tip (2) for in particular the manipulation of silicon wafers. The other end of the body (1) is arranged to be coupled via the connecting element (E) to the vacuum network (P).
  • the connecting element (E) consists of a hose (3) made of conductive material housed inside a tube (4) made of flexible and insulating material.
  • the hose (3) is shaped and arranged in particular at each of its ends to be non-generator of particles by ensuring continuity of electrical contact with the body of the pipette in the example considered.
  • the lexible (3) is produced in the form of a spring with contiguous turns to ensure great flexibility of the tube (4) without generation of restoring stresses when it is bent or otherwise deformed.
  • the tube (4) is made of silicone or other material having the same characteristics.
  • One of the ends of the spring (3) receives a coupling member (5) of conductive material capable of cooperating with a part of the body (1) of the pipette.
  • the other end of the spring (3) receives a coupling member (6) identical to the member (5) to be connected to the vacuum network (P).
  • each of the coupling members (5) and (6) consists of a socket one of whose ends (5a-6a) allows the fixing of the spring (3) while the other end (5b-6b) has a fitting surface.
  • Each end of the spring (3) is screwed into the corresponding parts (5a-6a) of the sockets (5) and (6).
  • connection parts (la) and (PI) that respectively presents l end of the pipette body (1) and of the vacuum pump (P) and in which are engaged the fitting surfaces (5b- 6b) of said members (5) and (6).
  • connection parts (la) and (PI) that respectively presents l end of the pipette body (1) and of the vacuum pump (P) and in which are engaged the fitting surfaces (5b- 6b) of said members (5) and (6).
  • the characteristics of the spring used are suitably determined to solve the problem posed and achieve the desired objectives.

Abstract

L'élément de liaison est remarquable en ce qu'il est constitué par un flexible (3) en matériau conducteur logé à l'intérieur d'un tube (4) en matière souple et isolante, ledit flexible (3) étant agencé pour être non générateur de particules en assurant une continuité de contact électrique avec le corps de pipette.The connecting element is remarkable in that it consists of a flexible (3) of conductive material housed inside a tube (4) of flexible and insulating material, said flexible (3) being arranged to be non-generator of particles by ensuring continuity of electrical contact with the pipette body.

Description

Elément de liaison entre un outil de"travail et un réseau de vide. Connection element between a "working tool and a vacuum network.
L'invention concerne plus particulièrement mais non exclusivement les pipettes à vide utilisées notamment pour le transfert des plaquettes de silicium.The invention relates more particularly but not exclusively to the vacuum pipettes used in particular for the transfer of silicon wafers.
Généralement, la liaison entre le corps de la pipette et autre et une pompe à vide par exemple, s'effectue au moyen d'un flexible. Des problèmes peuvent apparaître au niveau de génération de particules résultant de l'électri¬ cité statique. En effet, dans le cas de manipulation des plaquettes de silicium, il apparaît que lesdites plaquet¬ tes sont chargées en électricité statique ce qui peut provoquer des micro-décharges. Par ailleurs, les pipettes ou autres sont généralement exécutées en matériaux organi¬ ques faiblement chargés en fibre de carbone de sorte que la conduction électrique est insuffisante.Generally, the connection between the body of the pipette and the like and a vacuum pump for example, takes place by means of a hose. Problems can arise with the generation of particles resulting from static electricity. In fact, in the case of handling the silicon wafers, it appears that the said wafers are charged with static electricity which can cause micro-discharges. Furthermore, the pipettes or the like are generally executed in organic materials which are lightly loaded with carbon fiber so that the electrical conduction is insufficient.
De même, lors de certaines manipulations, le flexible peut être courbé et créer un coude susceptible d'interrom- pre momentanément l'effet du vide ce qui peut provoquer la casse de la plaquette, cette dernière n'étant plus mainte¬ nue.Likewise, during certain manipulations, the hose can be bent and create a bend capable of temporarily interrupting the effect of the vacuum, which can cause breakage of the wafer, the latter being no longer mainte¬ naked.
Selon l'invention, le problème posé est d'avoir un élément de liaison non générateur de particules, ne pouvant interrompre le vide lorsqu'il est plié tout en étant d'un poids réduit et apte à assurer la conduction électrique.According to the invention, the problem posed is to have a non-particle generating connection element, which cannot interrupt the vacuum when it is folded while being of a reduced weight and capable of ensuring electrical conduction.
Un tel problème est résolu en ce que l'élément est constitué par un flexible en matériau conducteur logé à l'intérieur d'un tube en matière souple et isolante, ledit flexible étant agencé pour être non générateur de parti¬ cules en assurant une continuité de contact électrique avec le corps de pipette.Such a problem is solved in that the element consists of a hose of conductive material housed inside a tube of flexible and insulating material, said hose being arranged to be non-generator of particles by ensuring continuity. electrical contact with the pipette body.
Pour résoudre le problème posé à ' assurer un contact électrique fiable avec le corps de pipette,1 ' ne des ex- tré ités du flexible reçoit un organe d'accouplement en matériau conducteur apte à coopérer avec une partie du corps de pipette, l'autre extrémité dudit flexible rece¬ vant un organe d'accouplement en matériau conducteur apte à être connecté sur le réseau du vide.To solve the problem of ensuring reliable electrical contact with the pipette body, hose tré ities receives a coupling member made of conductive material capable of cooperating with a part of the pipette body, the other end of said flexible hose receiving a coupling member made of conductive material capable of being connected to the vacuum network .
Avantageusement, chacun des organes d'accouplement est constitué par une douille dont l'une des extrémités permet la fixation du flexible tandis que l'autre extrémi¬ té présente une portée d'emmanchement. Les extrémités du tube sont en débordement des or¬ ganes d'accouplement pour être adaptées sur des parties de raccordement dans lesquelles sont engagées les portées d'emmanchement desdits organes.Advantageously, each of the coupling members consists of a bushing, one of the ends of which allows the hose to be fixed while the other extremity has a fitting surface. The ends of the tube are projecting from the coupling or¬ gans to be adapted on connection parts in which are engaged the fitting surfaces of said members.
Plus particulièrement, le problème posé d'éviter la formation d'un coude susceptible d'interrompre momentané¬ ment l'effet du vide, est résolu en ce que le flexible est réalisé sous forme d'un ressort à spires jointives pour assurer urne grande flexibilité du tube sans génération de contraintes de rappel lorsqu'il est courbé ou autrement déformé.More particularly, the problem posed of avoiding the formation of a bend capable of momentarily interrupting the effect of the vacuum, is solved in that the hose is produced in the form of a spring with contiguous turns to ensure a large urn flexibility of the tube without generation of restoring stresses when bent or otherwise deformed.
Le tube recevant le flexible est en silicone.The tube receiving the hose is made of silicone.
L'invention est exposée ci-après plus en détail à l'aide des dessins annexés dans lesquels : - la figure 1 montre une exemple de réalisation d'un outil sous forme d'une pipette, reliée selon les caracté¬ ristiques de l'invention à une pompe à vide ;The invention is set out below in more detail with the aid of the accompanying drawings in which: - Figure 1 shows an embodiment of a tool in the form of a pipette, connected according to the characteristics of the invention of a vacuum pump;
- la figure 2 est à grande échelle une vue en coupe longitudinale montrant 1 ' élément de liaison considéré en tant que tel ;- Figure 2 is a large scale a longitudinal sectional view showing one connecting element considered as such;
- la figure 3 est une vue en coupe transversale considérée selon la ligne 3.3. de la figure 2 ;- Figure 3 is a cross-sectional view taken along line 3.3. of Figure 2;
- la figure 4 est une vue partielle en coupe et à grande échelle montrant l'accouplement de l'élément de liaison selon l'invention avec une partie du corps de la pipette.- Figure 4 is a partial sectional view on a large scale showing the coupling of the connecting element according to the invention with a part of the body of the pipette.
On a illustré, figure 1, un outil de travail sous forme d'une pipette (A) accouplée par un élément de liai¬ son (E) à un réseau de vide tel qu'une pompe (P). L'exemple d'une pipette est donné à titre indicatif nullement limitatif étant souligné que l'invention s'ap¬ plique à tout organe ou outil devant être relié à un réseau de vide. Pour une meilleure compréhension de la suite de la description, on rappelle qu'une pipette co - prend un corps (1) recevant à l'une de ses extrémités un embout de préhension (2) pour notamment la manipulation des plaquettes de silicium. L'autre extrémité du corps (1) est agencée pour être accouplée par l'intermédiaire de l'élément de liaison (E) au réseau de vide (P). Selon l'invention, l'élément de liaison (E) est constitué par un flexible (3) en matériau conducteur logé à l'intérieur d'un tube (4) en matière souple et isolante. Le flexible (3) est conformé et agencé notamment à chacune de ses extrémités pour être non générateur de particules en assurant une continuité de contact électrique avec le corps de la pipette dans l'exemple considéré.FIG. 1 illustrates a working tool in the form of a pipette (A) coupled by a connecting element (E) to a vacuum network such as a pump (P). The example of a pipette is given by way of non-limiting indication, it being underlined that the invention applies to any member or tool having to be connected to a vacuum network. For a better understanding of the rest of the description, it is recalled that a pipette co-takes a body (1) receiving at one of its ends a gripping tip (2) for in particular the manipulation of silicon wafers. The other end of the body (1) is arranged to be coupled via the connecting element (E) to the vacuum network (P). According to the invention, the connecting element (E) consists of a hose (3) made of conductive material housed inside a tube (4) made of flexible and insulating material. The hose (3) is shaped and arranged in particular at each of its ends to be non-generator of particles by ensuring continuity of electrical contact with the body of the pipette in the example considered.
Comme le montre notamment la figure 2 , le lexible (3) est réalisé sous forme d'un ressort à spires jointives pour assurer une grande flexibilité du tube (4) sans génération de contraintes de rappel lorsqu'il est courbé ou autrement déformé. Le tube (4) est réalisé en silicone ou autre matériau ayant les mêmes caractéristiques.As shown in particular in FIG. 2, the lexible (3) is produced in the form of a spring with contiguous turns to ensure great flexibility of the tube (4) without generation of restoring stresses when it is bent or otherwise deformed. The tube (4) is made of silicone or other material having the same characteristics.
L'une des extrémités du ressort (3) reçoit un organe d'accouplement (5) en matériau conducteur apte à coopérer avec une partie du corps (1) de pipette. L'autre extrémité du ressort (3) reçoit un organe d'accouplement (6) identi¬ que à l'organe (5) pour être connecté sur le réseau du vide (P) .One of the ends of the spring (3) receives a coupling member (5) of conductive material capable of cooperating with a part of the body (1) of the pipette. The other end of the spring (3) receives a coupling member (6) identical to the member (5) to be connected to the vacuum network (P).
Comme le montre la figure 2 , chacun des organes d'accouplement (5) et (6) est constitué par une douille dont l'une des extrémités (5a-6a) permet la fixation du ressort (3) tandis que l'autre extrémité (5b-6b) présente une portée d'emmanchement. Chacune des extrémités du res¬ sort (3) est vissée dans les parties correspondantes (5a- 6a) des douilles (5) et (6).As shown in Figure 2, each of the coupling members (5) and (6) consists of a socket one of whose ends (5a-6a) allows the fixing of the spring (3) while the other end (5b-6b) has a fitting surface. Each end of the spring (3) is screwed into the corresponding parts (5a-6a) of the sockets (5) and (6).
Les extrémités (4a) et (4b) du tube (4) apparaissent en débordement de chacun des organes d'accouplement (5) et (6) pour être adaptées sur les parties de raccordement (la) et (PI) que présente respectivement l'extrémité du corps de pipette (1) et de la pompe à vide (P) et dans lesquelles sont engagées les portées d'emmanchement (5b- 6b) desdits organes (5) et (6). On réalise dans ces condi¬ tions un contact électrique fiable avec le corps de pipet¬ te tout en respectant la contrainte d'étanchéité au vide. Les avantages résultant des caractéristiques des éléments de liaison selon l'invention, peuvent être expo¬ sés comme suit, compte-tenu de l'utilisation du ressort ( 3) qui permet :The ends (4a) and (4b) of the tube (4) appear in overflow from each of the coupling members (5) and (6) to be adapted on the connection parts (la) and (PI) that respectively presents l end of the pipette body (1) and of the vacuum pump (P) and in which are engaged the fitting surfaces (5b- 6b) of said members (5) and (6). Under these conditions, reliable electrical contact is made with the body of the pipet while respecting the vacuum tightness constraint. The advantages resulting from the characteristics of the connecting elements according to the invention can be exhibited as follows, taking into account the use of the spring (3) which allows:
- d'avoir une continuité électrique sans contamina- tion particulaire par opposition au tube silicone chargé de poudre de carbone,- to have electrical continuity without particulate contamination as opposed to the silicone tube loaded with carbon powder,
- de ne pas pincer le tube et par conséquent inter¬ rompre momentanément l'action du vide lors de certaines manipulations dans lesquelles l'élément de liaison se trouve courbé d'une manière importante, supprimant tout risque de casse des plaquettes ,- not to pinch the tube and consequently temporarily interrupt the action of the vacuum during certain manipulations in which the connecting element is curved in a significant way, eliminating any risk of breakage of the plates,
- de réduire l'épaisseur du tube qui sous l'effet de l'action du vide s'applatit sur le ressort qui fait office d'armature en préservant une section constante ; il en résulte un poids réduit et une amélioration du confort d 'utilisation,- to reduce the thickness of the tube which under the effect of the action of the vacuum is applied to the spring which acts as a frame while preserving a constant section; this results in a reduced weight and an improvement in the comfort of use,
- une grande flexibilité du tube lequel ne génère pas de contrainte de rappel lorsqu'il est courbé ou autrement travaillé. on souligne également que l 'emploi des organes d 'ac- couplement (5) et (6) assure une fixation sûre et efficace du ressort à l'intérieur du tube en combinaison avec le corps de la pipette et la pompe à vide tout en assurant un contact électrique fiable d'une part, entre ledit ressort et le corps de pipette et d'autre part, entre ledit res¬ sort et la pompe à vide.- a great flexibility of the tube which does not generate restoring stress when it is bent or otherwise worked. it is also emphasized that the use of the organs of ac- coupling (5) and (6) ensures a safe and effective fixing of the spring inside the tube in combination with the body of the pipette and the vacuum pump while ensuring reliable electrical contact on the one hand, between said spring and the pipette body and on the other hand, between said res¬ and the vacuum pump.
Bien évidemment, les caractéristiques du ressort employé sont convenablement déterminées pour résoudre le problème posé et atteindre les objectifs recherchés. Obviously, the characteristics of the spring used are suitably determined to solve the problem posed and achieve the desired objectives.

Claims

REVENDICATIONS
-1- Elément de liaison entre un outil de travail , notam¬ ment une pipette et un réseau de vide, caractérisé en ce qu'il est constitué par un flexible (3) en matériau con¬ ducteur logé à l'intérieur d'un tube (4) en matière souple et isolante, ledit flexible (3) étant agencé pour être non générateur de particules en assurant une continuité de contact électrique avec le corps de pipette.-1- Connecting element between a working tool, in particular a pipette and a vacuum network, characterized in that it is constituted by a flexible hose (3) made of conductive material housed inside a tube (4) made of flexible and insulating material, said flexible tube (3) being arranged to be non-generator of particles by ensuring continuity of electrical contact with the pipette body.
-2- Elément selon la revendication 1, caractérisé en ce que l'une des extrémités du flexible (3) reçoit un organe d'accouplement (5)- en matériau conducteur apte à coopérer avec une partie du corps de pipette, l'autre extrémité dudit flexible recevant un organe d'accouplement (6) en matériau conducteur apte à être connecté sur le réseau du vide.-2- Element according to claim 1, characterized in that one of the ends of the hose (3) receives a coupling member (5) - of conductive material capable of cooperating with part of the pipette body, the other end of said hose receiving a coupling member (6) made of conductive material capable of being connected to the vacuum network.
-3- Elément selon la revendication 2, caractérisé en ce que chacun des organes d'accouplement (5-6) est constitué par une douille dont l'une des extrémités permet la fixa- tion du flexible (3) tandis que l'autre extrémité présente une portée d'emmanchement.-3- Element according to claim 2, characterized in that each of the coupling members (5-6) consists of a bushing, one of the ends of which allows the flexible (3) to be fixed while the other end has a fitting surface.
-4- Elément selon la revendication 3, caractérisé en ce que les extrémités du tube (4) sont en débordement des organes d'accouplement (5-6) pour être adaptées sur des parties de raccordement dans lesquelles sont engagées les portées d'emmanchement desdits organes.-4- Element according to claim 3, characterized in that the ends of the tube (4) are projecting from the coupling members (5-6) to be adapted on connection parts in which are engaged the fitting surfaces of said organs.
-5- Elément selon la revendication 1, caractérisé en ce que le flexible (3) est réalisé sous forme d'un ressort à spires jointives pour assurer une 'grande flexibilité du tube sans génération de contraintes de rappel lorsqu'il est courbé ou autrement déformé.-5- Element according to claim 1, characterized in that the hose (3) is made in the form of a spring with contiguous turns to ensure ' great flexibility of the tube without generation of restoring stresses when bent or otherwise deformed.
-6- Elément selon la revendication 1, caractérisé en ce que le tube (4) recevant le flexible est en silicone. -6- Element according to claim 1, characterized in that the tube (4) receiving the hose is silicone.
EP90907129A 1989-04-26 1990-04-25 Connection element between a working tool and a vacuum network Withdrawn EP0423298A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8905943 1989-04-26
FR8905943A FR2646492B1 (en) 1989-04-26 1989-04-26 CONNECTING ELEMENT BETWEEN A WORKING TOOL AND A VACUUM NETWORK

Publications (1)

Publication Number Publication Date
EP0423298A1 true EP0423298A1 (en) 1991-04-24

Family

ID=9381421

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90907129A Withdrawn EP0423298A1 (en) 1989-04-26 1990-04-25 Connection element between a working tool and a vacuum network

Country Status (4)

Country Link
EP (1) EP0423298A1 (en)
KR (1) KR920700373A (en)
FR (1) FR2646492B1 (en)
WO (1) WO1990012975A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1593155A (en) * 1968-11-12 1970-05-25
GB1379544A (en) * 1971-02-01 1975-01-02 Moss T F Airlines fitted with internal coil springs
DE2832763C3 (en) * 1978-07-26 1982-01-21 Volkswagenwerk Ag, 3180 Wolfsburg Inner helix for a hose and hose arrangement with helical support
US4662404A (en) * 1981-05-15 1987-05-05 Leveen Harry H Flexible tubing
US4618178A (en) * 1985-06-07 1986-10-21 Clifford L. Hutson Hand held vacuum actuated pickup instrument

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9012975A1 *

Also Published As

Publication number Publication date
WO1990012975A1 (en) 1990-11-01
KR920700373A (en) 1992-02-19
FR2646492B1 (en) 1991-08-30
FR2646492A1 (en) 1990-11-02

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