EP0392992A3 - Clean gas valve using a metal-to-metal seal - Google Patents

Clean gas valve using a metal-to-metal seal Download PDF

Info

Publication number
EP0392992A3
EP0392992A3 EP19900830151 EP90830151A EP0392992A3 EP 0392992 A3 EP0392992 A3 EP 0392992A3 EP 19900830151 EP19900830151 EP 19900830151 EP 90830151 A EP90830151 A EP 90830151A EP 0392992 A3 EP0392992 A3 EP 0392992A3
Authority
EP
European Patent Office
Prior art keywords
metal
seal
avoids
gas valve
clean gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19900830151
Other languages
German (de)
French (fr)
Other versions
EP0392992B1 (en
EP0392992A2 (en
Inventor
Michael E. Jones
Joseph H. Nichols
Charles M. Obermeyer
Ronald G. Hendry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cryolab Inc
Original Assignee
Cryolab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cryolab Inc filed Critical Cryolab Inc
Publication of EP0392992A2 publication Critical patent/EP0392992A2/en
Publication of EP0392992A3 publication Critical patent/EP0392992A3/en
Application granted granted Critical
Publication of EP0392992B1 publication Critical patent/EP0392992B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/02—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with screw-spindle
    • F16K1/06—Special arrangements for improving the flow, e.g. special shape of passages or casings
    • F16K1/10—Special arrangements for improving the flow, e.g. special shape of passages or casings in which the spindle is inclined to the general direction of flow

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Details Of Valves (AREA)

Abstract

A sealed valve intended for use in ultrahigh purity applications uses a metal-to-metal seal in a crucial, but unaccessible, portion of the valve. The metal-to-metal seal avoids the use of a weld which because of the location could not be adequately cleaned, and avoids the use of an O-ring seal. The O-ring seal typically would have a leak rate on the order of 10⁻⁷ standard cubic centimeters per second of helium, but the metal-to-metal seal provides a leakage rate of less than 10⁻¹³ sccm/s. In the preferred embodiment, the seal is formed by forcing a conical part into the opening of a bore. The force used is small enough to avoid permanent deformation of the sealing parts, and thus the seal can be opened and closed any number of times without degradation.
EP90830151A 1989-04-10 1990-04-06 Clean gas valve using a metal-to-metal seal Expired - Lifetime EP0392992B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/335,378 US4911411A (en) 1989-04-10 1989-04-10 Clean gas valve using a metal-to-metal seal
US335378 1989-04-10

Publications (3)

Publication Number Publication Date
EP0392992A2 EP0392992A2 (en) 1990-10-17
EP0392992A3 true EP0392992A3 (en) 1991-05-15
EP0392992B1 EP0392992B1 (en) 1995-09-06

Family

ID=23311531

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90830151A Expired - Lifetime EP0392992B1 (en) 1989-04-10 1990-04-06 Clean gas valve using a metal-to-metal seal

Country Status (5)

Country Link
US (1) US4911411A (en)
EP (1) EP0392992B1 (en)
JP (1) JP2733864B2 (en)
KR (1) KR900016663A (en)
DE (1) DE69022095T2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5385334A (en) * 1993-07-16 1995-01-31 Carten Controls Inc. Fluid flow valve
US5687952A (en) * 1995-10-11 1997-11-18 Wave Corporation Water faucet poppet valve
TW471031B (en) * 1997-01-08 2002-01-01 Ebara Corp Vapor feed supply system
WO1999035422A1 (en) * 1998-01-09 1999-07-15 Swagelok Company Seal for a modular flow devices
US6032958A (en) * 1998-03-31 2000-03-07 Hydril Company Bi-directional pressure-energized metal seal
DE19825574A1 (en) * 1998-06-08 1999-12-09 Evertz Hydrotechnik Gmbh & Co Biased controllable flow limiting valve, in particular spray valve, and spray bar
USD421092S (en) * 1998-06-30 2000-02-22 Veriflo Corporation Valve
US20150060708A1 (en) * 2013-08-30 2015-03-05 Swagelok Company Bellows valve with valve body cylinder adapter

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2391808A (en) * 1942-08-19 1945-12-25 Continental Motors Corp Fuel atomizer
DE3215799A1 (en) * 1982-04-28 1983-11-03 Leonhard Schleicher Südmo-Armaturenfabrik GmbH, 7081 Riesbürg Aseptic valve
EP0244185A2 (en) * 1986-04-28 1987-11-04 Nupro Company Bellows valve

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE674901C (en) * 1936-08-05 1939-04-25 Rossweiner Metallwarenfabrik C Valve for heating systems
FR2500108B1 (en) * 1981-02-17 1986-01-24 Gemignani Francois ISOLATION OR SHUT-OFF VALVE

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2391808A (en) * 1942-08-19 1945-12-25 Continental Motors Corp Fuel atomizer
DE3215799A1 (en) * 1982-04-28 1983-11-03 Leonhard Schleicher Südmo-Armaturenfabrik GmbH, 7081 Riesbürg Aseptic valve
EP0244185A2 (en) * 1986-04-28 1987-11-04 Nupro Company Bellows valve

Also Published As

Publication number Publication date
JP2733864B2 (en) 1998-03-30
JPH02286988A (en) 1990-11-27
KR900016663A (en) 1990-11-14
US4911411A (en) 1990-03-27
DE69022095D1 (en) 1995-10-12
EP0392992B1 (en) 1995-09-06
EP0392992A2 (en) 1990-10-17
DE69022095T2 (en) 1996-02-15

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