EP0327185A3 - Dispositif de mesure de dépôt de particules en temps réel - Google Patents
Dispositif de mesure de dépôt de particules en temps réel Download PDFInfo
- Publication number
- EP0327185A3 EP0327185A3 EP19890200247 EP89200247A EP0327185A3 EP 0327185 A3 EP0327185 A3 EP 0327185A3 EP 19890200247 EP19890200247 EP 19890200247 EP 89200247 A EP89200247 A EP 89200247A EP 0327185 A3 EP0327185 A3 EP 0327185A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- monitor
- real time
- time particle
- fallout
- particle fallout
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
- G01N15/0227—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging using imaging, e.g. a projected image of suspension; using holography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/031—Multipass arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/152,198 US4825094A (en) | 1988-02-04 | 1988-02-04 | Real time particle fallout monitor with tubular structure |
US152198 | 1988-02-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0327185A2 EP0327185A2 (fr) | 1989-08-09 |
EP0327185A3 true EP0327185A3 (fr) | 1991-07-10 |
Family
ID=22541902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19890200247 Withdrawn EP0327185A3 (fr) | 1988-02-04 | 1989-02-03 | Dispositif de mesure de dépôt de particules en temps réel |
Country Status (3)
Country | Link |
---|---|
US (1) | US4825094A (fr) |
EP (1) | EP0327185A3 (fr) |
JP (1) | JPH01301145A (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2560362B2 (ja) * | 1987-12-18 | 1996-12-04 | 富士通株式会社 | 多重反射鏡 |
US5133602A (en) * | 1991-04-08 | 1992-07-28 | International Business Machines Corporation | Particle path determination system |
US5262841A (en) * | 1991-10-16 | 1993-11-16 | Tsi Incorporated | Vacuum particle detector |
JP2529661B2 (ja) * | 1993-08-20 | 1996-08-28 | アネルバ株式会社 | 粒子検出装置 |
US5412221A (en) * | 1994-04-26 | 1995-05-02 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Particle fallout/activity sensor |
US5686996A (en) * | 1995-05-25 | 1997-11-11 | Advanced Micro Devices, Inc. | Device and method for aligning a laser |
US5565984A (en) * | 1995-06-12 | 1996-10-15 | Met One, Inc. | Re-entrant illumination system for particle measuring device |
US5870186A (en) * | 1997-07-15 | 1999-02-09 | The United States Of America As Represented By The Administrator National Aeronautics And Space Administration | Detector for particle surface contamination |
EP1432972A1 (fr) * | 2001-09-07 | 2004-06-30 | Inficon, Inc. | Procede de traitement du signal destine a la surveillance, in situ, des particules par un faisceau d'exploration |
JP5780584B2 (ja) * | 2011-03-11 | 2015-09-16 | セイコーインスツル株式会社 | パーティクルカウンタ |
JP2012189493A (ja) * | 2011-03-11 | 2012-10-04 | Seiko Instruments Inc | 粒子検出器 |
US8976245B2 (en) * | 2011-12-09 | 2015-03-10 | The United States Of America, As Represented By The Secretary Of The Navy | Optical orbital debris spotter |
US10739241B2 (en) | 2014-12-17 | 2020-08-11 | Schlumberger Technology Corporation | Test apparatus for estimating liquid droplet fallout |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4155653A (en) * | 1977-10-14 | 1979-05-22 | The United States Of America As Represented By The Secretary Of The Navy | Smoke-measuring transducer |
US4452068A (en) * | 1982-02-23 | 1984-06-05 | The United States Of America As Represented By The United States Department Of Energy | Grooved impactor and inertial trap for sampling inhalable particulate matter |
EP0231542A2 (fr) * | 1985-12-10 | 1987-08-12 | High Yield Technology | Détecteur de particules pour des appareils de traitement de wafers et procédé pour la détection d'un particule |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3708675A (en) * | 1969-09-19 | 1973-01-02 | Furukawa Electric Co Ltd | Smoke detector in which air entrance and egress are located in oppositely disposed surfaces which are shaped to cause an air velocity differential |
CH546989A (de) * | 1972-12-06 | 1974-03-15 | Cerberus Ag | Verfahren und vorrichtung zur brandmeldung. |
DE3030499C2 (de) * | 1980-08-12 | 1982-05-27 | Siemens AG, 1000 Berlin und 8000 München | Anordnung zur Feststellung von Partikeln in einer Gasströmung |
EP0200553B1 (fr) * | 1985-05-01 | 1990-12-19 | Nippondenso Co., Ltd. | Détecteur optique de poussières |
-
1988
- 1988-02-04 US US07/152,198 patent/US4825094A/en not_active Expired - Fee Related
-
1989
- 1989-02-03 EP EP19890200247 patent/EP0327185A3/fr not_active Withdrawn
- 1989-02-04 JP JP1024790A patent/JPH01301145A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4155653A (en) * | 1977-10-14 | 1979-05-22 | The United States Of America As Represented By The Secretary Of The Navy | Smoke-measuring transducer |
US4452068A (en) * | 1982-02-23 | 1984-06-05 | The United States Of America As Represented By The United States Department Of Energy | Grooved impactor and inertial trap for sampling inhalable particulate matter |
EP0231542A2 (fr) * | 1985-12-10 | 1987-08-12 | High Yield Technology | Détecteur de particules pour des appareils de traitement de wafers et procédé pour la détection d'un particule |
Also Published As
Publication number | Publication date |
---|---|
JPH01301145A (ja) | 1989-12-05 |
US4825094A (en) | 1989-04-25 |
EP0327185A2 (fr) | 1989-08-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): DE FR GB |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
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AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): DE FR GB |
|
17P | Request for examination filed |
Effective date: 19920109 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19930901 |