EP0545064A3 - Device for filtering charged particles, energy filter, analyser using such an energy filter, electron-bombardment ion source and analyser using said electron-bombardment ion source - Google Patents

Device for filtering charged particles, energy filter, analyser using such an energy filter, electron-bombardment ion source and analyser using said electron-bombardment ion source Download PDF

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Publication number
EP0545064A3
EP0545064A3 EP19920118282 EP92118282A EP0545064A3 EP 0545064 A3 EP0545064 A3 EP 0545064A3 EP 19920118282 EP19920118282 EP 19920118282 EP 92118282 A EP92118282 A EP 92118282A EP 0545064 A3 EP0545064 A3 EP 0545064A3
Authority
EP
European Patent Office
Prior art keywords
analyser
electron
ion source
energy filter
bombardment ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19920118282
Other languages
German (de)
Other versions
EP0545064B1 (en
EP0545064A2 (en
Inventor
Gerhard Dr. Phys. Rettinghaus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of EP0545064A2 publication Critical patent/EP0545064A2/en
Publication of EP0545064A3 publication Critical patent/EP0545064A3/en
Application granted granted Critical
Publication of EP0545064B1 publication Critical patent/EP0545064B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
EP92118282A 1991-12-02 1992-10-26 Device for filtering charged particles, energy filter and analyser using such an energy filter Expired - Lifetime EP0545064B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH353691 1991-12-02
CH3536/91 1991-12-02
CH353691 1991-12-02

Publications (3)

Publication Number Publication Date
EP0545064A2 EP0545064A2 (en) 1993-06-09
EP0545064A3 true EP0545064A3 (en) 1993-08-04
EP0545064B1 EP0545064B1 (en) 2001-08-08

Family

ID=4258111

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92118282A Expired - Lifetime EP0545064B1 (en) 1991-12-02 1992-10-26 Device for filtering charged particles, energy filter and analyser using such an energy filter

Country Status (4)

Country Link
US (1) US5365064A (en)
EP (1) EP0545064B1 (en)
JP (1) JP3435179B2 (en)
DE (1) DE59209914D1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5672870A (en) * 1995-12-18 1997-09-30 Hewlett Packard Company Mass selective notch filter with quadrupole excision fields
US5598001A (en) * 1996-01-30 1997-01-28 Hewlett-Packard Company Mass selective multinotch filter with orthogonal excision fields
US6867414B2 (en) * 2002-09-24 2005-03-15 Ciphergen Biosystems, Inc. Electric sector time-of-flight mass spectrometer with adjustable ion optical elements
US7679051B2 (en) * 2006-05-17 2010-03-16 Southwest Research Institute Ion composition analyzer with increased dynamic range
CN102484027A (en) * 2009-07-17 2012-05-30 克拉-坦科股份有限公司 Charged-particle Energy Analyzer
US8294093B1 (en) * 2011-04-15 2012-10-23 Fei Company Wide aperature wien ExB mass filter
US8835866B2 (en) 2011-05-19 2014-09-16 Fei Company Method and structure for controlling magnetic field distributions in an ExB Wien filter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0223520A1 (en) * 1985-11-07 1987-05-27 Vg Instruments Group Limited Charged particle energy analyser

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU29047A1 (en) * 1932-03-08 1933-01-31 В.П. Михайлик Adaptation for automatic control of the volume of the measuring device depending on temperature
GB1387173A (en) * 1971-03-22 1975-03-12 Hitachi Ltd Energy analyzer of the coaxial cylindrical type
US4126781A (en) * 1977-05-10 1978-11-21 Extranuclear Laboratories, Inc. Method and apparatus for producing electrostatic fields by surface currents on resistive materials with applications to charged particle optics and energy analysis
JPS5830697B2 (en) * 1977-08-29 1983-06-30 株式会社日立製作所 Charged particle energy analyzer
US4758722A (en) * 1980-05-12 1988-07-19 La Trobe University Angular resolved spectrometer
SU1411850A1 (en) * 1986-07-07 1988-07-23 Предприятие П/Я В-8754 Deflector-type energy analyzer
SU1492397A1 (en) * 1986-12-23 1989-07-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Device for transportation and power analysis of charged particles

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0223520A1 (en) * 1985-11-07 1987-05-27 Vg Instruments Group Limited Charged particle energy analyser

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
REVIEW OF SCIENTIFIC INSTRUMENTS, Band 44, Nr. 7, Juli 1973, Seiten 873-876, New York, US; A.D. McLACHLAN et al.: "A soft X-ray source for photoelectron spectroscopy" *
SOVIET INVENTIONS ILLUSTRATED, Woche 8905, 15. März 1989, Nr. N89-029047, Derwent Publications Ltd, London, GB; & SU-A-1411 850 (VOLKOV) 23-07-1988 *
SOVIET INVENTIONS ILLUSTRATED, Woche 9004, 7. März 1990, Nr. N90-022454, Derwent Publications Ltd, London, GB; & SU-A-1492 397 (AS USSR ANALYT. INST.) 07-07-1989 *

Also Published As

Publication number Publication date
DE59209914D1 (en) 2001-09-13
JPH05251036A (en) 1993-09-28
EP0545064B1 (en) 2001-08-08
US5365064A (en) 1994-11-15
EP0545064A2 (en) 1993-06-09
JP3435179B2 (en) 2003-08-11

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