EP0283773A3 - Miniaturized secondary electron multiplier and its manufacturing procedure - Google Patents

Miniaturized secondary electron multiplier and its manufacturing procedure Download PDF

Info

Publication number
EP0283773A3
EP0283773A3 EP88103116A EP88103116A EP0283773A3 EP 0283773 A3 EP0283773 A3 EP 0283773A3 EP 88103116 A EP88103116 A EP 88103116A EP 88103116 A EP88103116 A EP 88103116A EP 0283773 A3 EP0283773 A3 EP 0283773A3
Authority
EP
European Patent Office
Prior art keywords
secondary electron
electron multiplier
dynodes
manufacturing procedure
good
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88103116A
Other languages
German (de)
Other versions
EP0283773B1 (en
EP0283773A2 (en
Inventor
Wolfgang Dr. Ehrfeld
Herbert Dr. Moser
Dietrich Dr. Munchmeyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to AT88103116T priority Critical patent/ATE76537T1/en
Publication of EP0283773A2 publication Critical patent/EP0283773A2/en
Publication of EP0283773A3 publication Critical patent/EP0283773A3/en
Application granted granted Critical
Publication of EP0283773B1 publication Critical patent/EP0283773B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/32—Secondary emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3425—Metals, metal alloys

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

The invention relates to a secondary electron multiplier with discrete dynodes. The invention is based on the object, in comparison with the indicated prior art, of producing a miniaturised secondary electron multiplier, and arrays thereof, which require very little space, have good time resolution, good sensitivity and good flexibility for moulding. The object is achieved in that the dynodes are micro-structured and are fitted on an insulating substrate plate which is provided with electrical conductor tracks for the connection of the dynodes.
EP88103116A 1987-03-20 1988-03-02 Miniaturized secondary electron multiplier and its manufacturing procedure Expired - Lifetime EP0283773B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT88103116T ATE76537T1 (en) 1987-03-20 1988-03-02 MICRO-SECONDARY ELECTRON MULTIPLE AND METHOD FOR ITS MANUFACTURE.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3709298 1987-03-20
DE19873709298 DE3709298A1 (en) 1987-03-20 1987-03-20 MICRO SECONDARY ELECTRONIC MULTIPLIER AND METHOD FOR THE PRODUCTION THEREOF

Publications (3)

Publication Number Publication Date
EP0283773A2 EP0283773A2 (en) 1988-09-28
EP0283773A3 true EP0283773A3 (en) 1990-02-07
EP0283773B1 EP0283773B1 (en) 1992-05-20

Family

ID=6323660

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88103116A Expired - Lifetime EP0283773B1 (en) 1987-03-20 1988-03-02 Miniaturized secondary electron multiplier and its manufacturing procedure

Country Status (5)

Country Link
US (1) US4990827A (en)
EP (1) EP0283773B1 (en)
JP (1) JPS63279553A (en)
AT (1) ATE76537T1 (en)
DE (1) DE3709298A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5077504A (en) * 1990-11-19 1991-12-31 Burle Technologies, Inc. Multiple section photomultiplier tube
FR2676862B1 (en) * 1991-05-21 1997-01-03 Commissariat Energie Atomique MULTIPLIER STRUCTURE OF CERAMIC ELECTRONS, PARTICULARLY FOR A PHOTOMULTIPLIER AND METHOD OF MANUFACTURING THE SAME.
US5545367A (en) * 1992-04-15 1996-08-13 Soane Technologies, Inc. Rapid prototype three dimensional stereolithography
US5264693A (en) * 1992-07-01 1993-11-23 The United States Of America As Represented By The Secretary Of The Navy Microelectronic photomultiplier device with integrated circuitry
US5412265A (en) * 1993-04-05 1995-05-02 Ford Motor Company Planar micro-motor and method of fabrication
US5656807A (en) * 1995-09-22 1997-08-12 Packard; Lyle E. 360 degrees surround photon detector/electron multiplier with cylindrical photocathode defining an internal detection chamber
WO1998019341A1 (en) 1996-10-30 1998-05-07 Nanosystems, Inc. Microdynode integrated electron multiplier
US6115634A (en) * 1997-04-30 2000-09-05 Medtronic, Inc. Implantable medical device and method of manufacture
US5943223A (en) * 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss
EP1445670A1 (en) * 2003-02-06 2004-08-11 ETA SA Manufacture Horlogère Suisse Balance-spring resonator spiral and its method of fabrication
GB2409927B (en) * 2004-01-09 2006-09-27 Microsaic Systems Ltd Micro-engineered electron multipliers
US7427835B2 (en) * 2005-03-31 2008-09-23 Hamamatsu Photonics K.K. Photomultiplier including a photocathode, a dynode unit, a focusing electrode, and an accelerating electrode
US7397184B2 (en) * 2005-03-31 2008-07-08 Hamamatsu Photonics K.K. Photomultiplier
US7317283B2 (en) * 2005-03-31 2008-01-08 Hamamatsu Photonics K.K. Photomultiplier
EP1818736A1 (en) * 2006-02-09 2007-08-15 The Swatch Group Research and Development Ltd. Shockproof collet
DE102015200739B3 (en) 2015-01-19 2016-03-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. CIRCUIT ACCUMULATOR FOR ACCELERATING CHARGING SUPPLEMENTS AND METHOD FOR PRODUCING A CIRCUIT ACCUMULATOR

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2674661A (en) * 1948-08-12 1954-04-06 Rca Corp Electron multiplier device
US4034255A (en) * 1975-11-28 1977-07-05 Rca Corporation Vane structure for a flat image display device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2836760A (en) * 1955-03-08 1958-05-27 Egyesuelt Izzolampa Electron multiplier
US2868994A (en) * 1955-10-24 1959-01-13 Rca Corp Electron multiplier
US4041343A (en) * 1963-07-12 1977-08-09 International Telephone And Telegraph Corporation Electron multiplier mosaic
US3551841A (en) * 1967-01-30 1970-12-29 Philips Corp Thin film laser device employing an optical cavity
FR2000354A1 (en) * 1968-01-18 1969-09-05 Matsushita Electric Ind Co Ltd
GB1434053A (en) * 1973-04-06 1976-04-28 Mullard Ltd Electron multipliers
DE2338481C2 (en) * 1973-07-28 1985-07-04 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Device for rapid measurement of the change in radiation intensity over time
FR2445018A1 (en) * 1978-12-22 1980-07-18 Anvar ELECTRON MULTIPLIER TUBE WITH AXIAL MAGNETIC FIELD
JPS6042573B2 (en) * 1979-01-24 1985-09-24 浜松ホトニクス株式会社 Secondary electron multiplier electrode
JPS5856781B2 (en) * 1980-07-07 1983-12-16 日景 ミキ子 Screw fastening method using intermediary material
FR2549288B1 (en) * 1983-07-11 1985-10-25 Hyperelec ELECTRON MULTIPLIER ELEMENT, ELECTRON MULTIPLIER DEVICE COMPRISING THE MULTIPLIER ELEMENT AND APPLICATION TO A PHOTOMULTIPLIER TUBE
DE8415886U1 (en) * 1984-05-24 1984-08-23 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe DEVICE FOR QUICKLY MEASURING THE RADIATION INTENSITY

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2674661A (en) * 1948-08-12 1954-04-06 Rca Corp Electron multiplier device
US4034255A (en) * 1975-11-28 1977-07-05 Rca Corporation Vane structure for a flat image display device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, Band NS-32, Nr. 6, Dezember 1985, Seiten 3996-4000, IEEE, New York, US; D.K. LYNN et al.: "Thermionic integrated circuits: electronics for hostile environments" *

Also Published As

Publication number Publication date
DE3709298C2 (en) 1990-02-08
EP0283773B1 (en) 1992-05-20
US4990827A (en) 1991-02-05
ATE76537T1 (en) 1992-06-15
JPS63279553A (en) 1988-11-16
EP0283773A2 (en) 1988-09-28
DE3709298A1 (en) 1988-09-29

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