EP0280984A1 - Rotary vacuum pump - Google Patents

Rotary vacuum pump Download PDF

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Publication number
EP0280984A1
EP0280984A1 EP88102560A EP88102560A EP0280984A1 EP 0280984 A1 EP0280984 A1 EP 0280984A1 EP 88102560 A EP88102560 A EP 88102560A EP 88102560 A EP88102560 A EP 88102560A EP 0280984 A1 EP0280984 A1 EP 0280984A1
Authority
EP
European Patent Office
Prior art keywords
stator
rotor
particles
fins
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88102560A
Other languages
German (de)
French (fr)
Other versions
EP0280984B1 (en
Inventor
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
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Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT88102560T priority Critical patent/ATE62531T1/en
Publication of EP0280984A1 publication Critical patent/EP0280984A1/en
Application granted granted Critical
Publication of EP0280984B1 publication Critical patent/EP0280984B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a rotary vacuum pump comprising a stator and a rotor, the rotor being driven in rotation inside the stator and the stator comprising a suction inlet and a discharge outlet.
  • Such pumps for example molecular or turbomolecular pumps which maintain pressures between 1 mb and 10 ⁇ 10 mb, rotate at very high speeds and the rotor support bearings, as well as the air gap of the electric drive motor and the dynamic seal separating the active part of the pump, the part containing the motor and the bearings can thus be affected by the suction of physical particles of very small dimensions which can in the long run deteriorate these organs.
  • the present invention aims to overcome these drawbacks and relates to a vacuum pump, for example molecular or turbomolecular as defined above, characterized in that the rotor carries, suction side, at least one wheel provided with fins inclined so as to project radially any solid particles aspirated towards an annular stator collecting tank having a circular opening opening into the cavity of the stator and located in the plane of projection of said particles by said fins.
  • the turbomolecular pump shown comprises a stator 1 and a rotor 2 mounted in the stator and supported in rotation by bearings 3 and 4. It is driven in rotation by an electric motor 5.
  • the stator 1 is divided into two parts, the first part of which comprises a stator cavity 6 provided with a plurality of stages of fixed fins 7 and the second part of which comprises a recess 8 in which the bearings 3, 4 and the motor are located. 5.
  • the rotor 2 Inside the stator cavity 6, the rotor 2 carries a series of rotor finned discs 10 alternating with the stages of fixed stator fins 7.
  • the stator 1 further comprises a suction inlet 11 and a discharge outlet orifice 12.
  • the rotor 1 in order to avoid sucking solid material particles, is provided, on the suction side upstream of the finned discs 10, with a wheel 13 provided with inclined fins 14. Thanks to these fins 14 , the particles are projected radially by centrifugal force and are collected in an annular collecting tank 15 of the stator 1 comprising a circular opening 16 which opens into the stator cavity 6 at the plane of projection of the particles by the fins.
  • a wheel 13 has been placed, there could possibly be several superimposed.
  • the fins 14 can be inclined at a much greater angle than the fins of the suction stages 10.
  • the wheel 13 with fins 14 can be fixed at a variable distance of the first compression stage.
  • the inclination of the fins 14 also depends on these parameters.
  • the volume of the collecting tank 15 may be such that there is at most to empty it only once a year.
  • An indicator 17 makes it possible to assess the filling level of the collector 15.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)

Abstract

A rotary vacuum pump comprising a stator (1) and a rotor (2), the rotor being rotated inside the stator and the stator including a suction inlet (11) and an exhaust outlet orifice (12), wherein the suction end of the rotor carries at least one wheel (13) having sloping vanes (14) such that any solid particles that may be sucked in are projected thereby in a radial direction towards an annular stator collector tank (15) having a circular opening (16) opening out into the stator cavity (6) and situated in the plane in which said particles are projected by said vanes (14).

Description

La présente invention concerne une pompe à vide, rotative comprenant un stator et un rotor, le rotor étant entraîné en rotation à l'intérieur du stator et le stator comportant une entrée d'aspiration et un orifice de sortie de refoulement.The present invention relates to a rotary vacuum pump comprising a stator and a rotor, the rotor being driven in rotation inside the stator and the stator comprising a suction inlet and a discharge outlet.

De telles pompes par exemple des pompes moléculaires ou turbomoléculaires qui entretiennent des pressions comprises entre 1 mb et 10⁻¹⁰ mb, tournent à des vitesses très élevées et les paliers supports du rotor, ainsi que l'entrefer du moteur électrique d'entraînement et le joint dynamique séparant la partie active de la pompe, de la partie contenant le moteur et les paliers peuvent ainsi être affectés par l'aspiration de particules physiques de très faibles dimensions qui peuvent à la longue détériorer ces organes.Such pumps, for example molecular or turbomolecular pumps which maintain pressures between 1 mb and 10⁻¹⁰ mb, rotate at very high speeds and the rotor support bearings, as well as the air gap of the electric drive motor and the dynamic seal separating the active part of the pump, the part containing the motor and the bearings can thus be affected by the suction of physical particles of very small dimensions which can in the long run deteriorate these organs.

Pour éviter d'aspirer de telles particules, il est connu de doter l'aspiration de la pompe d'un ou de plusieurs filtres constitués de tissus métalliques à mailles très fines de l'ordre de 10 à 20 microns maximum.To avoid sucking such particles, it is known to provide the pump suction with one or more filters made of metallic fabrics with very fine mesh of the order of 10 to 20 microns maximum.

Ces filtres permettent bien d'arrêter ces particules mais leur conductance est très basse. En effet, dans cette gamme de pression, le régime d'écoulement est moléculaire ou visqueux, ainsi, la conductance moléculaire d'un pore du filtre est minime car elle est proportionnelle au cube du diamètre et inversement proportionnelle à sa longeueur.These filters make it possible to stop these particles but their conductance is very low. Indeed, in this pressure range, the flow regime is molecular or viscous, thus, the molecular conductance of a pore of the filter is minimal because it is proportional to the cube of the diameter and inversely proportional to its length.

Cette mauvaise conductance du filtre diminue d'une proportion im­portante la vitesse de pompage de la pompe. Outre la mauvaise conductance du filtre, les filtres actuels se colmatent rapidement ce qui entraîne une diminution rapide de la vitesse de pompage.This poor conductance of the filter significantly decreases the pumping speed of the pump. In addition to the poor conductance of the filter, current filters quickly clog, which results in a rapid decrease in pumping speed.

La présente invention a pour but de pallier ces inconvénients et a pour objet une pompe à vide, par exemple moléculaire ou turbomoléculaire telle que définie ci-dessus, caractérisée en ce que le rotor porte, côté aspiration, au moins une roue munie d'ailettes inclinées de façon à projeter radialement d'éventuelles particules solides aspirées vers un réservoir collecteur statorique annulaire comportant une ouverture circulaire débouchant dans la cavité du stator et située dans le plan de projection desdites particules par lesdites ailettes.The present invention aims to overcome these drawbacks and relates to a vacuum pump, for example molecular or turbomolecular as defined above, characterized in that the rotor carries, suction side, at least one wheel provided with fins inclined so as to project radially any solid particles aspirated towards an annular stator collecting tank having a circular opening opening into the cavity of the stator and located in the plane of projection of said particles by said fins.

On va maintenant donner la description d'un exemple particulier non limitatif de mise en oeuvre de l'invention en se référant au dessin annexé comportant une figure unique représentant schématiquement en coupe une pompe turbomoléculaire selon l'invention.We will now give the description of a particular non-limiting example of implementation of the invention with reference to the drawing annexed comprising a single figure schematically showing in section a turbomolecular pump according to the invention.

Dans le cas de l'exemple décrit, il s'agit d'une pompe à ailettes mais l'invention s'applique aussi dans le cas d'une pompe du type à canal de Gaëde, genre pompe de Holweck.In the case of the example described, it is a vane pump, but the invention also applies in the case of a pump of the Gaëde channel type, such as the Holweck pump.

La pompe turbomoléculaire représentée comporte un stator 1 et un rotor 2 monté dans le stator et supporté en rotation par des paliers 3 et 4. Il est entraîné en rotation par un moteur électrique 5.The turbomolecular pump shown comprises a stator 1 and a rotor 2 mounted in the stator and supported in rotation by bearings 3 and 4. It is driven in rotation by an electric motor 5.

Le stator 1 est divisé en deux parties dont la première comporte une cavité statorique 6 munie d'une pluralité d'étages d'ailettes fixes 7 et dont la deuxième partie comporte un évidement 8 dans lequel sont situés les paliers 3, 4 et le moteur 5.The stator 1 is divided into two parts, the first part of which comprises a stator cavity 6 provided with a plurality of stages of fixed fins 7 and the second part of which comprises a recess 8 in which the bearings 3, 4 and the motor are located. 5.

Un manchon 9, formant éventuellement joint dynamique, notamment dans le cas où l'évidement 8 communique avec l'extérieur, sépare la cavité statorique 6 de l'évidement 8.A sleeve 9, possibly forming a dynamic seal, in particular in the case where the recess 8 communicates with the outside, separates the stator cavity 6 from the recess 8.

A l'intérieur de la cavité statorique 6, le rotor 2 porte une série de disques ailetés rotoriques 10 alternés avec les étages d'ailettes statoriques fixes 7.Inside the stator cavity 6, the rotor 2 carries a series of rotor finned discs 10 alternating with the stages of fixed stator fins 7.

Le stator 1 comporte en outre une entrée d'aspiration 11 et un orifice de sortie de refoulement 12.The stator 1 further comprises a suction inlet 11 and a discharge outlet orifice 12.

Conformément à l'invention, afin d'éviter d'aspirer des particules matérielles solides, le rotor 1 est muni, côté aspiration en amont des disques ailetés 10, d'une roue 13 munie d'ailettes inclinées 14. Grâce à ces ailettes 14, les particules sont projetées radialement par la force centrifuge et sont recueillies dans un réservoir collecteur annulaire 15 du stator 1 comportant une ouverture circulaire 16 qui débouche dans la cavité statorique 6 au niveau du plan de projection des particules par les ailettes.According to the invention, in order to avoid sucking solid material particles, the rotor 1 is provided, on the suction side upstream of the finned discs 10, with a wheel 13 provided with inclined fins 14. Thanks to these fins 14 , the particles are projected radially by centrifugal force and are collected in an annular collecting tank 15 of the stator 1 comprising a circular opening 16 which opens into the stator cavity 6 at the plane of projection of the particles by the fins.

Dans l'exemple décrit, on a disposé une roue 13, il pourrait éven­tuellement y en avoir plusieurs superposées. Les ailettes 14 peuvent être inclinées d'un angle baucoup plus grand que les ailettes des étages d'aspiration 10. Selon la nature, la masse et le volume des particules à filtrer, la roue 13 à ailettes 14 peut être fixée à une distance variable du premier étage de compression.In the example described, a wheel 13 has been placed, there could possibly be several superimposed. The fins 14 can be inclined at a much greater angle than the fins of the suction stages 10. Depending on the nature, mass and volume of the particles to be filtered, the wheel 13 with fins 14 can be fixed at a variable distance of the first compression stage.

L'inclinaison des ailettes 14 dépend également de ces paramètres. Le volume du réservoir collecteur 15 peut-être tel qu'il n'y ait au maximum à le vider qu'une fois l'an.The inclination of the fins 14 also depends on these parameters. The volume of the collecting tank 15 may be such that there is at most to empty it only once a year.

Un voyant 17 permet d'apprécier le niveau de remplissage du collecteur 15.An indicator 17 makes it possible to assess the filling level of the collector 15.

Il est clair que l'invention peut s'appliquer quel que soit le type de montage du rotor dans le stator : avec un rotor du type cloche ou bien tel que celui représenté sur la figure, et quel que soient les aménagements secondaires de lubrification des paliers, de refroidissement du moteur etc...It is clear that the invention can be applied regardless of the type of mounting of the rotor in the stator: with a rotor of the bell type or else such as that shown in the figure, and whatever the secondary arrangements for lubricating the bearings, engine cooling etc ...

En outre, la figure n'est qu'un schéma montrant la disposition générale de l'ensemble et il est clair que le montage des étages 7, et des disques 10 se fait de la manière classique habituelle bien connue de l'homme de l'art et qu'il en est de même pour la roue 13.In addition, the figure is only a diagram showing the general arrangement of the assembly and it is clear that the mounting of the stages 7 and the disks 10 is done in the usual conventional manner well known to those skilled in the art. art and it is the same for wheel 13.

Claims (1)

Pompe à vide, rotative comprenant un stator (1) et un rotor (2), le rotor étant entraîné en rotation à l'intérieur du stator et le stator comportant une entrée d'aspiration (11) et un orifice de sortie de re­foulement (12), caractérisée en ce que le rotor porte, côté aspiration, au moins une roue (13) munie d'ailettes inclinées (14) de façon à projeter radialement d'éventuelles particules solides aspirées vers un réservoir collecteur statorique annulaire (15) comportant une ouverture circulaire (16) débouchant dans la cavité (6) du stator et située dans le plan de projection desdites particules par lesdites ailettes (14).Rotary vacuum pump comprising a stator (1) and a rotor (2), the rotor being rotated inside the stator and the stator having a suction inlet (11) and a discharge outlet ( 12), characterized in that the rotor carries, on the suction side, at least one wheel (13) provided with inclined fins (14) so as to project radially any solid particles aspirated towards an annular stator collecting tank (15) comprising a circular opening (16) opening into the cavity (6) of the stator and located in the plane of projection of said particles by said fins (14).
EP88102560A 1987-02-25 1988-02-22 Rotary vacuum pump Expired - Lifetime EP0280984B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT88102560T ATE62531T1 (en) 1987-02-25 1988-02-22 ROTARY VACUUM PUMP.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8702490 1987-02-25
FR8702490A FR2611819B1 (en) 1987-02-25 1987-02-25 VACUUM PUMP, ROTARY

Publications (2)

Publication Number Publication Date
EP0280984A1 true EP0280984A1 (en) 1988-09-07
EP0280984B1 EP0280984B1 (en) 1991-04-10

Family

ID=9348301

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88102560A Expired - Lifetime EP0280984B1 (en) 1987-02-25 1988-02-22 Rotary vacuum pump

Country Status (8)

Country Link
US (1) US4808067A (en)
EP (1) EP0280984B1 (en)
JP (1) JPH081190B2 (en)
AT (1) ATE62531T1 (en)
DE (1) DE3862319D1 (en)
ES (1) ES2021770B3 (en)
FR (1) FR2611819B1 (en)
GR (1) GR3002083T3 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0775829A1 (en) * 1992-04-29 1997-05-28 Varian Associates, Inc. Turbomolecular vacuum pumps
WO1998027342A1 (en) * 1996-12-19 1998-06-25 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptibility to particulate buildup
WO2000046508A1 (en) * 1999-02-02 2000-08-10 Varian, Inc. Dual inlet vacuum pumps
EP1811176A1 (en) * 2004-06-03 2007-07-25 BOC Edwards Japan Limited Vacuum exhaust device

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3814721A1 (en) * 1988-04-30 1989-11-09 Asea Brown Boveri RADIAL FAN WITH INTEGRATED DIRT SEPARATOR
US5217357A (en) * 1992-09-10 1993-06-08 Welch Robert E Rotary vane pump with removable particulate collection chamber
JPH0886298A (en) * 1994-09-19 1996-04-02 Hitachi Ltd Dry turbo vacuum pump
FR2736103B1 (en) * 1995-06-30 1997-08-08 Cit Alcatel TURBOMOLECULAR PUMP
GB0013491D0 (en) 2000-06-02 2000-07-26 Boc Group Plc Improved vacuum pump
US6821099B2 (en) * 2002-07-02 2004-11-23 Tilia International, Inc. Rotary pump
JP4679119B2 (en) * 2004-11-10 2011-04-27 株式会社大阪真空機器製作所 Shaft sealed dust-proof structure of turbo molecular pump
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
JP4760424B2 (en) * 2006-02-09 2011-08-31 株式会社島津製作所 Turbo molecular pump
US20180038389A1 (en) * 2015-03-20 2018-02-08 Mitsubishi Heavy Industries, Ltd. Compressor system, and attachment structure for centrifugal separator
DE102020209612A1 (en) 2020-07-30 2022-02-03 Robert Bosch Gesellschaft mit beschränkter Haftung liquid pump

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CH132105A (en) * 1927-12-17 1929-03-31 Kuendig B A Centrifugal fan system.
US1958145A (en) * 1932-05-23 1934-05-08 Jones William Anthony Fan
US3827482A (en) * 1972-12-21 1974-08-06 R Pope Radiator fan for earth movers
FR2310481A1 (en) * 1975-05-06 1976-12-03 Rava Edoardo Ultrahigh speed turbomolecular pump with electric motor - having cover with projecting cone circumferential ribs and blades acting as stators

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JPS52147309A (en) * 1976-06-02 1977-12-07 Hitachi Zosen Corp Inlet casing of turbo machine
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JPS618240Y2 (en) * 1979-08-09 1986-03-13
FR2521650A1 (en) * 1982-02-16 1983-08-19 Cit Alcatel ROTARY PUMP WITH HIGH VACUUM
JPS62107292A (en) * 1985-11-01 1987-05-18 Hitachi Ltd Vacuum pump with mechanism for removing fine particle
JPS6321394A (en) * 1986-07-15 1988-01-28 Hitachi Ltd Multistage type oil-free vacuum pump

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH132105A (en) * 1927-12-17 1929-03-31 Kuendig B A Centrifugal fan system.
US1958145A (en) * 1932-05-23 1934-05-08 Jones William Anthony Fan
US3827482A (en) * 1972-12-21 1974-08-06 R Pope Radiator fan for earth movers
FR2310481A1 (en) * 1975-05-06 1976-12-03 Rava Edoardo Ultrahigh speed turbomolecular pump with electric motor - having cover with projecting cone circumferential ribs and blades acting as stators

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0775829A1 (en) * 1992-04-29 1997-05-28 Varian Associates, Inc. Turbomolecular vacuum pumps
WO1998027342A1 (en) * 1996-12-19 1998-06-25 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptibility to particulate buildup
WO2000046508A1 (en) * 1999-02-02 2000-08-10 Varian, Inc. Dual inlet vacuum pumps
US6193461B1 (en) 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
EP1811176A1 (en) * 2004-06-03 2007-07-25 BOC Edwards Japan Limited Vacuum exhaust device
EP1811176A4 (en) * 2004-06-03 2008-11-19 Edwards Japan Ltd Vacuum exhaust device

Also Published As

Publication number Publication date
EP0280984B1 (en) 1991-04-10
DE3862319D1 (en) 1991-05-16
FR2611819A1 (en) 1988-09-09
US4808067A (en) 1989-02-28
JPS63227990A (en) 1988-09-22
GR3002083T3 (en) 1992-12-30
ATE62531T1 (en) 1991-04-15
FR2611819B1 (en) 1989-05-05
ES2021770B3 (en) 1991-11-16
JPH081190B2 (en) 1996-01-10

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