EP0276188A2 - Elektrohydraulisches Servoventil für die Servosteuerung eines hydraulischen Verbrauchers, insbesondere für Servoregler bei Flugzeugsteuerungen - Google Patents

Elektrohydraulisches Servoventil für die Servosteuerung eines hydraulischen Verbrauchers, insbesondere für Servoregler bei Flugzeugsteuerungen Download PDF

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Publication number
EP0276188A2
EP0276188A2 EP88400129A EP88400129A EP0276188A2 EP 0276188 A2 EP0276188 A2 EP 0276188A2 EP 88400129 A EP88400129 A EP 88400129A EP 88400129 A EP88400129 A EP 88400129A EP 0276188 A2 EP0276188 A2 EP 0276188A2
Authority
EP
European Patent Office
Prior art keywords
jacket
shaft
distributor
hydraulic
servovalve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88400129A
Other languages
English (en)
French (fr)
Other versions
EP0276188B1 (de
EP0276188A3 (en
Inventor
Gérard Devaud
Arnaud Libault De La Chevasnerie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe dApplications des Machines Motrices SAMM SA
Original Assignee
Societe dApplications des Machines Motrices SAMM SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe dApplications des Machines Motrices SAMM SA filed Critical Societe dApplications des Machines Motrices SAMM SA
Publication of EP0276188A2 publication Critical patent/EP0276188A2/de
Publication of EP0276188A3 publication Critical patent/EP0276188A3/fr
Application granted granted Critical
Publication of EP0276188B1 publication Critical patent/EP0276188B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • F15B13/0442—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors with proportional solenoid allowing stable intermediate positions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401—Valve members; Fluid interconnections therefor
    • F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401—Valve members; Fluid interconnections therefor
    • F15B13/0406—Valve members; Fluid interconnections therefor for rotary valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • F15B2013/0448—Actuation by solenoid and permanent magnet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86638—Rotary valve
    • Y10T137/86646—Plug type

Definitions

  • the present invention relates to an electrohydraulic servovalve intended for the control of a hydraulic device, either rotary for example a hydraulic motor, or linear for example a jack.
  • the invention therefore aims to provide a servovalve of the above type, in which the above disadvantages are eliminated.
  • the orifices and hydraulic conduits formed respectively in the body and in the jacket pass through the same common radial plane.
  • This arrangement provides the distributor with a better compactness than if these orifices and conduits were distributed axially, therefore reduces the bulk and increases the rigidity of the distributor.
  • the rotary movement is the same for all the moving parts, these being arranged coaxially with one another: motor magnets- torque, distributor shaft, moving element of the detector, for example the cursor of an electric potentiometer or a ferrite core in the case of an inductive position detector.
  • the magnets are preferably made of rare earths, and the core of the torque motor thus produced is welded to the distributor shaft, preferably by electron bombardment or by laser.
  • two diametrically opposite radial bores formed in the body, open into two corresponding openings in the jacket located in the same radial plane as said bores, and communicate with pipes for supplying hydraulic fluid.
  • under pressure and in the inner wall of the body facing the jacket are formed two longitudinal recesses passing through the same radial plane as the aforementioned lights and bores, connected by an annular recess and one of which opens into a terminal bore the end of the jacket connected to a first connecting pipe with the hydraulic device.
  • the electrohydraulic servovalve is intended to ensure the controlled control of a hydraulic actuator, rotary such as a hydraulic motor, or linear such as a hydraulic cylinder.
  • This actuator can itself drive an element which is mechanically integral with it, such as an aircraft control surface.
  • the output voltage of the detector 3 is connected to the input of the adder 4. This voltage is of opposite sign to that of the control voltage E.
  • the summator 4 and the amplifier 5 are well known means and which do not require any particular description. These two elements can be integrated into the servo-valve as shown, by means of hybrid electronic circuits, or else separated from the servo-valve itself.
  • the torque motor 1, also of known type, is schematically represented by windings 6 and a magnet 7. It is the same for the rotary detector 3, which can be inductive. In this case ( Figure 1), an external excitation voltage is applied to a primary winding 8a and an output voltage is obtained on the secondary winding 8b by coupling with a ferrite core 9 integral in rotation with the shaft 10 .
  • the detector 3b can also be a potentiometer: in this case, it is provided with a resistant track 8c and with a cursor 3a integral in rotation with the shaft 10.
  • the hydraulic fluid under pressure P enters the distributor 2 as indicated by the arrow P, leaves it as indicated by the arrow R towards the tank, after having supplied the hydraulic actuator by input U1 and output U2, or vice-versa, depending on the direction of control of distributor 2.
  • Amplifier 5 is either integrated into the assembly or separate, but in both cases connected to its output with the various windings 6 of the torque motor 1 on the one hand, and at its input to the position detector 3 via the adder 4.
  • the system thus produced constitutes an electro-hydraulic servo-distribution set called "direct-acting servovalve”.
  • the equilibrium position of this servovalve is defined by an angle of rotation of the different rotating parts of the motor 1, of the distributor 2 and of the detector 3, an angle whose amplitude is proportional to the voltage E applied to the input. of the summator 4.
  • the polarity of the command signal to the summator 4 triggers the simultaneous rotation of the magnets 7, of the shaft 10 and of the magnet 9, coaxial and integral in rotation, the sign of this angle of rotation depending on said polarity.
  • the system When the voltage returned by the detector 3 to the adder 4 is equal and opposite to the voltage E, the system remains controlled in equilibrium in the angular position of the shaft 10 and of the rotor 9.
  • the detector is an electric potentiometer 3b ( Figure 2), the central shaft 10 is integral with the cursor 3a of this potentiometer, which makes it possible to detect the angular position reached after application to the servovalve of a determined voltage E.
  • the hydraulic fluid arriving at P towards U1 or U2 and arriving at the outlet R via U2 or U1 the flow rate of the fluid supplied by the distributor 2 to the actuator, to which its orifices U1, U2 are connected, is directly proportional to the tension E applied.
  • This servovalve comprises a hollow body 11, of general axis XX, inside which are housed the torque motor 1, the rotary distributor 2, and at one end of which is fixed the position detector, for example the potentiometer 3b provided of the cursor 3a, fixed to the body 11 by screws 12.
  • the body 11 preferably cylindrical, has an approximately cylindrical end portion 13, of smaller diameter than the rest 14 of the body 11, and which is an integral part of the rotary distributor 2 described in detail below.
  • Annular ribs 20, 30 project from part 13 and serve to delimit grooves for insulating annular seals as well as the supply and return grooves P R.
  • the windings 6 of the torque motor 1 are arranged in part 14 of larger diameter of the body 11, coaxial to the axis XX around magnets 7 fixed to the shaft 10 of the distributor 2. Beyond the magnets 7, the shaft 10 is extended by an end portion 16 inside a cylindrical jacket 17 housed in the terminal part 13.
  • the end 16 of the shaft 10 has a portion 18 with a square profile whose vertices 18a-18d are rounded ( Figures 3 and 4) and which can rotate inside the shirt 17 with these four rounded tops sliding in leaktight fashion on the inner wall thereof.
  • the hydraulic fluid enters the distributor 2 at the supply pressure P by a first radial bore 19, is conveyed to the actuator (not shown) by end orifices 21, 22 (uses U1, U2), and returns to pressure tank R by a hole 23 in part 13.
  • these four openings 19, 21, 22, 23 have been shown in the same plane only for reasons of convenience of description and do not correspond to an industrial embodiment, because as can be seen in Figures 4 to 8, the orifices 19, 21, 22, 57 are actually distributed in four different axial planes.
  • Figure 3 shows in the same axial plane the dispenser as shown in Figures 6 and 8, the uses U1, U2 being brought back in the plane of Figure 12 for the convenience of interpretation.
  • the end portion 13 has two diametrically opposite radial holes 19, respectively served by the hydraulic fluid at the supply pressure P by pipes 24, 25.
  • the holes 19 open into two corresponding holes 26 in the jacket 17, diametrically opposite.
  • two other holes 27 are arranged in the part 13 opening into two corresponding radial slots 28 in the jacket 17, and which communicate with respective pipes 29 for the return of the fluid, to the pressure R towards the tank (not shown).
  • two other diametrically opposite holes 31 are formed in the part 13, opposite corresponding radial openings 32 of the jacket 17.
  • the holes 31 communicate with respective pipes 33, 34, which lead to a single pipe 35 opening into a chamber 36 of a double-acting hydraulic cylinder 37, the piston 38 integral with two coaxial rods 39 defines two chambers 36, 41.
  • the part 13 has two holes 42 diametrically opposite, opposite which two corresponding openings 43 of the jacket 17 are formed, and which communicate with two respective pipes 44, 45 which join in a single pipe 46 opening into the chamber 41 of the jack 37.
  • the rounded tops 18a, 18b, 18c, 18d of the portion 18 of square section of the shaft 10 close, in the position shown in Figure 3, respectively the slots 26, 28, 26, 28, so that no fluid n e enters or leaves the distributor 2 which is thus at rest.
  • the holes (19, 27, 31, 42) of the part 13 and the associated slots (26, 28, 32, 43) of the liner 17 all pass through the same common radial plane of the distributor 2 which is that of FIG. 3. These holes and lights are also symmetrical two by two.
  • the fluid contained in the chamber 36 is correspondingly discharged from the jack 37 by the pipes 35, 34 and 33 in the holes 31 and the associated lights 32.
  • the fluid penetrates from there into the jacket 17 and exits therefrom the lights 28 and the holes 27, at the discharge pressure R, through the pipes 29.
  • the inner wall of the end portion 13 has two longitudinal recesses 48, 49 ( Figures 8 and 9) connected by an annular recess 51, and one of which, at namely the recess 48, opens into the terminal bore 21 of the end 17a of the jacket 17.
  • the bore 21 therefore communicates on the one hand with one end of the recess 48, and on the other hand with one of the lines 35 and 46, namely in the example described and taking into account the partial correspondence between Figures 3 and 4 to 11, the pipe 46 (use U1).
  • the arrows shown in Figure 8 therefore indicate the direction of circulation of the fluid from the holes 19 and the lights 26 to the pipe 46, through the lights 32 and the recesses 48, 49 when the shaft 10 has rotated by a sufficient angle in counterclockwise A.
  • the inner wall of the end portion 13 also has two other longitudinal recesses 52, 53 parallel to the axis XX and connected by an annular recess 54 ( Figures 6 and 9 to 11), which communicates respectively with the radial slots 43.
  • the recess 53 opens at its opposite end into the second terminal bore 22 of the end 17a of the jacket 17, similar to the first bore 21.
  • the bore 22 is connected to a supply or return pipe for the hydraulic actuator 37, namely in the example described the pipe 35, taking into account the partial correspondence between Figures 3 and 4 to 12.
  • two diametrically opposite longitudinal recesses 55, 56 which communicate at one of their ends, with the two radial slots 28 and, at their opposite ends, with two radial openings 57 of the part 13 of the body 11, also diametrically opposite, and connected to the return line 29 at the pressure R.
  • the recess 55 is formed between the recesses 52 and 48, while the recess 56 is formed between the recesses 49 and 53 ( Figure 9).
  • the recess 55 may alternatively be extended by an extension 55a ( Figures 7 and 9).
  • the arrows shown in Figure 7 indicate the direction of flow of the fluid through the lights 28 and the recesses 55, 56 to the tank.
  • the orifices and hydraulic conduits formed in the jacket 17 and in the body 13 pass through the same common radial plane, which is that of Figure 4 (plane 4-4 of Figure 8), except the holes 21, 22 and 57. These are therefore the holes 19, the recesses 53, 56, 49 and the lights 26, 43, 28, 32.
  • roller bearings 65 are interposed between the jacket 17 and the shaft 10, on either side of the slots 26 and a single annular seal 66 is placed between the shaft 10 and the jacket 17, near the 'end of the latter next to the magnet 7, provides sealing.
  • the terminal part 10a of the shaft 10 contiguous to the detector 3b is mounted on a pair 67, 68 of respective ball bearings 69, 71.
  • the balls of each bearing 67, 68 are supported on bearing surfaces 69a, 69b, 71a, 71b diametrically opposite of the corresponding bearings. These bearing surfaces are offset axially so that, in each axial plane, such as that of FIG.
  • the bearings 67, 68 are housed in bottom parts 72, 73 assembled together by screws 74 and to the body by screws 12.
  • the servovalve according to the invention has the following: - the symmetry of the hydraulic conduits balances the static hydraulic forces on the distributor 2, and eliminates the risks of sticking, commonly encountered on linear and rotary drawers which do not have this arrangement; - The presence of the rollers 65 prevents any metal-metal friction contact between the movable part 18 and the fixed part (jacket 17).
  • the arrangement of the bearings with their X-shaped bearing allows the axial forces to be taken up in both directions. These forces can result, in the direction of the distributor 2 towards the bearings 67, 68, from the summation of the hydraulic forces exerted on the distributor 2, and from accelerations external to the servovalve. In the direction of bearings to distributor, these forces result from accelerations in opposite directions exerted on the servovalve.
  • the resumption of the above-mentioned hydraulic axial forces also makes it possible to remove a seal on one of the surfaces of the distributor 2, a single seal 66 then being necessary.
  • the control angles of the distributor 2 (rotation angles of the shaft 10) are compatible with the angles of optimum characteristics (10 to 15 degrees) of a torque motor such as 1; - the torque motor 1 is directly coupled to the distributor 2, without a mechanical conversion interface.
  • the second embodiment of the servovalve shown in Figure 13 comprises several synchronized torque motors 58, namely four in this example, each associated with a position detector 59 and a single central shaft 61.
  • the two opposite ends of the latter each order a rotary hydraulic distributor 62 for supplying two corresponding receiving hydraulic devices not shown, for example the two chambers of a double hydraulic cylinder such as the cylinder 37.
  • the distributors 62 are known per se (for example by American patent n o 4 335 745) and therefore do not require a particular description.
  • the number of torque motors 58 and associated amplifiers 59 can be arbitrary, such a system making it possible to satisfy the redundancy conditions required in aircraft flight control servomechanisms for safety reasons.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Servomotors (AREA)
EP88400129A 1987-01-22 1988-01-21 Elektrohydraulisches Servoventil für die Servosteuerung eines hydraulischen Verbrauchers, insbesondere für Servoregler bei Flugzeugsteuerungen Expired - Lifetime EP0276188B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8700740A FR2610072B1 (fr) 1987-01-22 1987-01-22 Servovalve electrohydraulique pour la commande asservie d'un actionneur hydraulique, notamment dans les servomecanismes de commande de vol des aeronefs
FR8700740 1987-01-22

Publications (3)

Publication Number Publication Date
EP0276188A2 true EP0276188A2 (de) 1988-07-27
EP0276188A3 EP0276188A3 (en) 1989-09-27
EP0276188B1 EP0276188B1 (de) 1992-04-22

Family

ID=9347171

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88400129A Expired - Lifetime EP0276188B1 (de) 1987-01-22 1988-01-21 Elektrohydraulisches Servoventil für die Servosteuerung eines hydraulischen Verbrauchers, insbesondere für Servoregler bei Flugzeugsteuerungen

Country Status (4)

Country Link
US (1) US4858650A (de)
EP (1) EP0276188B1 (de)
DE (1) DE3870261D1 (de)
FR (1) FR2610072B1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0387533A2 (de) * 1989-03-13 1990-09-19 Hitachi, Ltd. Direkt angetriebenes Servoventil, Druckmittel-Servoeinrichtung und Steuerungsverfahren für das direktangetriebene Servoventil
FR2756022A1 (fr) * 1996-11-15 1998-05-22 Samm Societe D Applic Des Mach Servovalve electrohydraulique pour la commande d'un verin ou d'un moteur
EP2753834B1 (de) * 2011-09-09 2017-12-20 Woodward, Inc. Elektrohydraulischer stellantrieb mit hohem durchfluss

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4015101A1 (de) * 1990-05-11 1991-11-14 Eckehart Schulze Hydraulische antriebsvorrichtung
US5217037A (en) * 1991-11-26 1993-06-08 Apv Gaulin, Inc. Homogenizing apparatus having magnetostrictive actuator assembly
US5524525A (en) * 1994-05-23 1996-06-11 A.I.L. Inc. Rotary servo valve and guidance system apparatus for controlling the same
US6269838B1 (en) * 1998-12-22 2001-08-07 Raymond Dexter Woodworth Rotary servovalve and control system
WO2003014577A1 (en) * 2001-08-05 2003-02-20 Woodworth Raymond D Rotary servovalve and control system
KR101595193B1 (ko) * 2011-06-23 2016-02-17 가부시기가이샤니레꼬 전기 유압 하이브리드 구동 장치
GB201116679D0 (en) 2011-09-28 2011-11-09 Goodrich Actuation Systems Sas Rotary control valve
US9228596B2 (en) 2013-09-23 2016-01-05 Moog Inc. Direct drive rotary valve
US9435446B1 (en) * 2014-07-24 2016-09-06 Google Inc. Rotary valve with brake mode
US9611946B1 (en) 2015-08-17 2017-04-04 Google Inc. Rotary hydraulic valve
EP3309063A1 (de) 2016-10-14 2018-04-18 Goodrich Actuation Systems SAS Stellantriebkontrolanordnung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1175084A (fr) * 1957-01-02 1959-03-19 Boulton Aircraft Ltd Perfectionnements aux distributeurs hydrauliques
GB962794A (en) * 1959-07-16 1964-07-01 Sperry Gyroscope Company Of Ca Hydraulic valves
FR2099895A5 (de) * 1970-06-25 1972-03-17 Trw Inc
GB2104249A (en) * 1981-08-19 1983-03-02 Moog Inc Servovalves

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522572A (en) * 1978-08-07 1980-02-18 Nissan Motor Co Ltd Rotary valve
FR2460435A1 (fr) * 1979-07-03 1981-01-23 Applic Mach Motrices Distributeur hydraulique, destine notamment a equiper des servo-commandes d'avions et d'helicopteres
DE3126243C2 (de) * 1981-07-03 1984-12-13 M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8500 Nürnberg Nebenantrieb einer Brennkraftmaschine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1175084A (fr) * 1957-01-02 1959-03-19 Boulton Aircraft Ltd Perfectionnements aux distributeurs hydrauliques
GB962794A (en) * 1959-07-16 1964-07-01 Sperry Gyroscope Company Of Ca Hydraulic valves
FR2099895A5 (de) * 1970-06-25 1972-03-17 Trw Inc
GB2104249A (en) * 1981-08-19 1983-03-02 Moog Inc Servovalves

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0387533A2 (de) * 1989-03-13 1990-09-19 Hitachi, Ltd. Direkt angetriebenes Servoventil, Druckmittel-Servoeinrichtung und Steuerungsverfahren für das direktangetriebene Servoventil
EP0387533B1 (de) * 1989-03-13 1995-02-15 Hitachi, Ltd. Direkt angetriebenes Servoventil, Druckmittel-Servoeinrichtung und Steuerungsverfahren für das direktangetriebene Servoventil
FR2756022A1 (fr) * 1996-11-15 1998-05-22 Samm Societe D Applic Des Mach Servovalve electrohydraulique pour la commande d'un verin ou d'un moteur
EP2753834B1 (de) * 2011-09-09 2017-12-20 Woodward, Inc. Elektrohydraulischer stellantrieb mit hohem durchfluss
US10487856B2 (en) 2011-09-09 2019-11-26 Woodward, Inc. High-flow electro-hydraulic actuator

Also Published As

Publication number Publication date
EP0276188B1 (de) 1992-04-22
EP0276188A3 (en) 1989-09-27
DE3870261D1 (de) 1992-05-27
US4858650A (en) 1989-08-22
FR2610072A1 (fr) 1988-07-29
FR2610072B1 (fr) 1989-05-19

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