EP0270144A1 - Process and apparatus for continuously cleaning elongated substrates, and objects thus cleaned - Google Patents

Process and apparatus for continuously cleaning elongated substrates, and objects thus cleaned Download PDF

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Publication number
EP0270144A1
EP0270144A1 EP87201987A EP87201987A EP0270144A1 EP 0270144 A1 EP0270144 A1 EP 0270144A1 EP 87201987 A EP87201987 A EP 87201987A EP 87201987 A EP87201987 A EP 87201987A EP 0270144 A1 EP0270144 A1 EP 0270144A1
Authority
EP
European Patent Office
Prior art keywords
substrate
anode
cleaned
elongated
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP87201987A
Other languages
German (de)
English (en)
French (fr)
Inventor
Wilfried Coppens
Hugo Lievens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bekaert NV SA
Original Assignee
Bekaert NV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert NV SA filed Critical Bekaert NV SA
Publication of EP0270144A1 publication Critical patent/EP0270144A1/en
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like

Definitions

  • the invention related in the first place to a process for the continuous cleaning of an elongated substrate such as a wire, a strip, a cord, etc.
  • Elongated metal objects such as steel wires
  • This reduction in cross section is generally carried out in appropriate equipment using suitable lubricants. Residues of these lubricants must generally be removed from the fabricated objects, if these objects are subsequently to be used successfully. This may also be the case for non-metallic, elongated objects, such as man-made fibres, on the surface of which residues of other materials may be left after the manufacturing process.
  • the continuous cleaning of elongated substrates is particularly important if these substrates have to be coated subsequently of if these substrates have to be subsequently embedded as a reinforcement, because the adhesion between substrate and coating or between substrate and material to be reinforced is substantially improved when the substrate has been adequately cleaned.
  • the invention proposes that the elongated substrate to be cleaned is guided through a high vacuum chamber and that an inert sputtering gas, such as argon, is introduced into this chamber and that a sufficiently high voltage difference and current is maintained between the cathodic substrate and an anode provided in this chamber, so that an electrical discharge is generated between these two electrodes and a plasma results, whereby the substrate is cleaned by the impact of inert gas ions from the plasma while passing through the vacuum chamber.
  • an inert sputtering gas such as argon
  • the anode is formed by an elongated casing, such as a circular cylindrical surface, whereby the substrate is guided longitudinally through the anode while the elongated substrate is kept at ground potential.
  • an elongated casing such as a circular cylindrical surface
  • the inert sputtering gas and the substrate to be cleaned through the anode, for example a copper tube, in opposite directions.
  • the substrate to be cleaned is pre-cleaned by induction heating under vacuum prior to the plasma cleaning in the high vacuum chamber.
  • the invention also related to an apparatus for the continuous cleaning of an elongated substrate, such as a wire, a cord, a strip, etc. in which this apparatus is at least provided with a chamber with means to evacuate this chamber to a high vacuum, with an anode in this high vacuum chamber, and with means to introduce an inert sputtering gas, such as argon, into this high vacuum chamber.
  • the apparatus according to the present invention is characterized in that the apparatus is also provided with means for the continuous guiding of the elongated substrate through the high vacuum chamber and with means for maintaining a sufficiently high potential difference and current between the cathodic substrate and the anode present in the chamber, so that a glow discharge is established between these two electrodes and a plasma is formed.
  • the anode is an elongated casing, such as a circular, cylindrical surface.
  • the invention also related to elongated substrates that are cleaned according to the process and in the apparatus according to the invention.
  • the vacuum chambers 2 and 2 ⁇ are connected to a Roots vacuum booster 7 known per se, whereas chambers 3 and 3 ⁇ are connected to a rotary vacuum pump 8.
  • the high vacuum chamber 5 is connected to a turbomolecular pump 9.
  • suitable means of passage 10 and 10 ⁇ are provided between the atmosphere (unwinding and rewinding stations 1 and 6) and the chambers 2 and 2 ⁇ respectively.
  • suitable means of passage 10 and 10 ⁇ are provided between the chambers 3 and 5 and between the chambers 3 ⁇ and 5 vacuum tight valves (4 and 4 ⁇ respectively) are present.
  • the line operates as follows. With the Roots vacuum booster 7, with for instance a capacity of 500 m3 per hour, a vacuum of 10 ⁇ 1 to 10 ⁇ 2 Torr is achieved in chambers 2 and 2 ⁇ .
  • the chambers 3 and 3 ⁇ are evacuated still further with pump 8, with for instance a capacity of 10 m3 per hour, to a final pressure of for example 10 ⁇ 2 Torr or lower.
  • the high vacuum chamber 5 is evacuated using the turbomolecular vacuum pump 9 to a high vacuum, for instance 10 ⁇ 4 to 10 ⁇ 7 Torr. During the evacuation of the chamber 5, the valves 4 and 4 ⁇ are completely closed. After this situation has been reached, the line is ready to start the process for cleaning the elongated substrate 11, whereupon valves 4 and 4 ⁇ are opened.
  • FIG. 2 shows the longitudinal section of a typical vacuum chamber 5.
  • This chamber 5 consists of two sections 12 and 13, interconnected by the openings 14.
  • the actual piece of equipment 15 for the cleaning of the elongated substrate 11 is contained in section 13.
  • the section 12 is provided with connectors 16 for the turbomolecular pump 9 and with connectors 17 for the supply of an inert gas, such as argon, nitrogen, etc.
  • the piece of equipment 15 comprises a circular cylindrical anode 18 with cable connectors 19 to provide the electrical potential.
  • This anode may for instance be a copper tube.
  • This anode 18 is supported by a tube 20, made for instance fom stainless steel, and subsequently by a tube 21 made from insulating material, for instance aluminium oxide.
  • the both ends of the tubes 20 and 21 are incorporated in the insulating supports 22 and 23.
  • the tubes 20 and 21 can in theory be replaced by a single tube made from insulating material, in which case the wall thickness of this single tube is about equal to the sum of the wall thicknesses of the tubes 20 and 21.
  • the ends of the anode 18 are incorporated into the insulating supports 24 and 25.
  • a spring 26 has been provided between the end of the anode 18 and the insulating support 24, a spring 26 has been provided.
  • the supports 24 and 25 fit into clamping devices 27 and 28.
  • the clamping device 27 has been fixed to the wall between sections 12 and 13, whereas the clamping device 28 cen be screwed onto the end of the section 12.
  • the spring 26 can be slackened by loosening the clamping device 28, as a result of which the anode 18 is expelled and can thus easily exchanged for another tube 18.
  • the vacuum chamber 5 is also provided with a flange connection 29, which permits the removal of the anode 18 without loosening the clamping devices 27 and 28.
  • the lid 30 of the section 12 also has a flange connection.
  • the diameter of the tube 18 is for example about 20 mm, whereas its length is for instance about 500 mm.
  • the process for cleaning an alongated substrate 11, such as a wire, a strip, etc, is as follows.
  • the substrate 11 to be cleaned is fed through the piece of equipment 15 as indicated by the arrow 31.
  • the pump 9 is switched off and an inert sputtering gas, such as argon, is fed into the vacuum chamber 5 or into sections 12 and 13 in a continuous manner until a pressure between 0.01 and 10 Torr has been reached.
  • a sufficiently high voltage difference is maintained between the anode 18 and the substrate 11 (the cathode), so that a glow discharge is established and a plasma is formed. This may occur at a voltage difference of 100 to 1.000 V and a current between 50 and 200 mA.
  • the substrate 11 is then cleaned by the impact of the inert argon ions from the plasma between the substrate 11 (the cathode) and the cylindrical tube 18 (the anode).
  • the substrate 11 will be preferably kept at ground potential. It is also possible to apply an alternating potential between the anode 18 and the substrate 11 (the cathode) in order to attain the so-called RF-state. Triode sputtering is also possible with the apparatus according to the invention.
  • the inert sputtering gas such as argon is led through the anode 18 in the direction of the arrow 32.
  • the substrate 11 and the sputtering gas move in opposite directions within the evacuated section 12 and in particular within the anode 18. This can for example be achieved by ensuring a lower pressure in the chamber 3 than in the chamber 3 ⁇ , or by making sure that the resistance between the chambers 3 and 5 is smaller than the resistance between the chambers 3 ⁇ and 5.
  • the process according to the invention is particularly suitable for metal substrates, such as steel wires, steel cords, etc. which have been coated with zinc, brass, etc.
  • metal substrates such as steel wires, steel cords, etc. which have been coated with zinc, brass, etc.
  • These elongated steel products, whether coated or uncoated, generally carry residues of lubricants which are difficult to remove. It has been found that elongated substrates are efficiently cleaned when fed at high speeds(20 m per minute or more) when using the process according to the invention.
  • the process according to the invention is further characterized in that the substrate 11 to be cleaned is pre-cleaned by induction heating under vacuum, prior to cleaning in the high vacuum chamber or prior to the plasma cleaning.
  • This pre-cleaning can be carried out for example in the chamber 2 at temperatures up to about 300°C.
  • a coil can be fitted around the anode 18 in the section 13, so as to generate a magnetic field between the anode 18 and the substrate 11, which further improves the quality of the cleaning of the substrate.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Physical Vapour Deposition (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
EP87201987A 1986-10-31 1987-10-16 Process and apparatus for continuously cleaning elongated substrates, and objects thus cleaned Withdrawn EP0270144A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8602760A NL8602760A (nl) 1986-10-31 1986-10-31 Werkwijze en inrichting voor het reinigen van een langwerpig substraat, zoals een draad, een band, een koord, enz., alsmede volgens die werkwijze gereinigde voorwerpen.
NL8602760 1986-10-31

Publications (1)

Publication Number Publication Date
EP0270144A1 true EP0270144A1 (en) 1988-06-08

Family

ID=19848763

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87201987A Withdrawn EP0270144A1 (en) 1986-10-31 1987-10-16 Process and apparatus for continuously cleaning elongated substrates, and objects thus cleaned

Country Status (3)

Country Link
EP (1) EP0270144A1 (nl)
JP (1) JPS63186861A (nl)
NL (1) NL8602760A (nl)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2646173A1 (fr) * 1989-04-03 1990-10-26 Toyo Kohan Co Ltd Procede et appareil pour revetir l'un de divers metaux avec un autre metal different
EP0535568A1 (en) * 1991-09-30 1993-04-07 Chugai Ro Co., Ltd. Metal strip surface cleaning apparatus
FR2774400A1 (fr) * 1998-02-04 1999-08-06 Physiques Et Chimiques Dispositif electrique pour degraissage, decapage ou passivation plasmachimique de metaux
US6110540A (en) * 1996-07-12 2000-08-29 The Boc Group, Inc. Plasma apparatus and method
WO2000050667A1 (de) * 1999-02-24 2000-08-31 Mag Maschinen- Und Apparatebau Ag Vorrichtung und verfahren zur behandlung von elektrisch leitfähigem endlosmaterial
EP1178134A1 (fr) * 2000-08-04 2002-02-06 Cold Plasma Applications C.P.A. Procédé et dispositif pour traiter des substrats métalliques au défilé par plasma
WO2006107519A1 (en) * 2005-03-31 2006-10-12 Kulicke And Soffa Industries, Inc. Bonding wire cleaning unit with a chamber and an energy source and method of wire bonding using such cleaning unit
WO2008049140A1 (de) * 2006-10-25 2008-05-02 Primoz Eiselt Verfahren und vorrichtung zur entfettung von gegenständen oder materialien mittels oxidativer radikale
US7626135B2 (en) 2006-05-10 2009-12-01 Sub-One Technology, Inc. Electrode systems and methods of using electrodes
WO2011076746A1 (en) 2009-12-23 2011-06-30 Nv Bekaert Sa A brass coated wire with a zinc gradient in the coating and its method manufacturing
WO2014020188A1 (es) * 2012-07-31 2014-02-06 Automat Industrial S.L. Procedimiento de limpieza de alambre en continuo y maquina de procesado de alambre en continuo que comprende dicho procedimiento

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB948554A (en) * 1961-03-22 1964-02-05 Joseph Edmund Harling And Dona Method and apparatus for cleaning metal by plasma arcs
DE1283645B (de) * 1962-05-24 1968-11-21 Union Carbide Corp Verfahren und Vorrichtung zur Lichtbogenreinigung von Metallkoerpern
US3654108A (en) * 1969-09-23 1972-04-04 Air Reduction Method for glow cleaning

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB948554A (en) * 1961-03-22 1964-02-05 Joseph Edmund Harling And Dona Method and apparatus for cleaning metal by plasma arcs
DE1283645B (de) * 1962-05-24 1968-11-21 Union Carbide Corp Verfahren und Vorrichtung zur Lichtbogenreinigung von Metallkoerpern
US3654108A (en) * 1969-09-23 1972-04-04 Air Reduction Method for glow cleaning

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
CHEMICAL ABSTRACTS, vol. 90, no. 24, June 1979, page 242, abstract no. 190706p, Columbus, Ohio, US; & JP-A-79 01 242 (AGENCY OF INDUSTRIAL SCIENCES AND TECHNOLOGY) 08-01-1979 *
PATENT ABSTRACTS OF JAPAN, vol. 4, no. 173 (C-32)[6551], 29th November 1980; & JP-A-55 110 782 (HITACHI SEISAKUSHO K.K.) 26-08-1980 *
SOVIET INVENTIONS ILLUSTRATED, Section M, week 8650, 28th January 1987, class M, page 19, no. 83-331189/50, Derwent Publications Ltd, London, GB; & SU-A-1 227 280 (MAGN. MINE METAL INS) 30-04-1986 *

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2646173A1 (fr) * 1989-04-03 1990-10-26 Toyo Kohan Co Ltd Procede et appareil pour revetir l'un de divers metaux avec un autre metal different
EP0535568A1 (en) * 1991-09-30 1993-04-07 Chugai Ro Co., Ltd. Metal strip surface cleaning apparatus
US6110540A (en) * 1996-07-12 2000-08-29 The Boc Group, Inc. Plasma apparatus and method
FR2774400A1 (fr) * 1998-02-04 1999-08-06 Physiques Et Chimiques Dispositif electrique pour degraissage, decapage ou passivation plasmachimique de metaux
WO2000050667A1 (de) * 1999-02-24 2000-08-31 Mag Maschinen- Und Apparatebau Ag Vorrichtung und verfahren zur behandlung von elektrisch leitfähigem endlosmaterial
US6471920B2 (en) 1999-02-24 2002-10-29 Mag Maschinen Und Apparatebau Aktiengesellschaft Apparatus and method for treatment of electrically conductive continuous material
WO2002012591A1 (fr) * 2000-08-04 2002-02-14 Cold Plasma Applications Procede et dispositif pour traiter des substrats metalliques au defile par plasma
EP1178134A1 (fr) * 2000-08-04 2002-02-06 Cold Plasma Applications C.P.A. Procédé et dispositif pour traiter des substrats métalliques au défilé par plasma
US6933460B2 (en) 2000-08-04 2005-08-23 Pierre Vanden Brande Method and device for plasma treatment of moving metal substrates
WO2006107519A1 (en) * 2005-03-31 2006-10-12 Kulicke And Soffa Industries, Inc. Bonding wire cleaning unit with a chamber and an energy source and method of wire bonding using such cleaning unit
US7626135B2 (en) 2006-05-10 2009-12-01 Sub-One Technology, Inc. Electrode systems and methods of using electrodes
WO2008049140A1 (de) * 2006-10-25 2008-05-02 Primoz Eiselt Verfahren und vorrichtung zur entfettung von gegenständen oder materialien mittels oxidativer radikale
WO2011076746A1 (en) 2009-12-23 2011-06-30 Nv Bekaert Sa A brass coated wire with a zinc gradient in the coating and its method manufacturing
WO2014020188A1 (es) * 2012-07-31 2014-02-06 Automat Industrial S.L. Procedimiento de limpieza de alambre en continuo y maquina de procesado de alambre en continuo que comprende dicho procedimiento

Also Published As

Publication number Publication date
JPS63186861A (ja) 1988-08-02
NL8602760A (nl) 1988-05-16

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