EP0267416A2 - Kontaktlose Transportvorrichtung - Google Patents

Kontaktlose Transportvorrichtung Download PDF

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Publication number
EP0267416A2
EP0267416A2 EP87114430A EP87114430A EP0267416A2 EP 0267416 A2 EP0267416 A2 EP 0267416A2 EP 87114430 A EP87114430 A EP 87114430A EP 87114430 A EP87114430 A EP 87114430A EP 0267416 A2 EP0267416 A2 EP 0267416A2
Authority
EP
European Patent Office
Prior art keywords
armature
stator
translating
rail
transport device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP87114430A
Other languages
English (en)
French (fr)
Other versions
EP0267416A3 (de
Inventor
Timothy Robert Feldsine
Norbert Freisitzer
Rolf Gerd Meinert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of EP0267416A2 publication Critical patent/EP0267416A2/de
Publication of EP0267416A3 publication Critical patent/EP0267416A3/de
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic

Definitions

  • the present invention relates generally to transport and/or positioning systems, and more particularly to transport and positioning systems for use in clean rooms.
  • the present invention is directed to removing a source which generates a substantial amount of the particulate matter in the clean room atmosphere.
  • contact between moving and stationary members of the transport and positioning equipment in the clean room generates a substantial amount of particulate matter.
  • Typical linear actuators require guiding mechanical ways with rollers or balls, as well as a mechanism, such as a lead screw or an air cylinder, for permitting the motor to move the assembly along the guiding ways.
  • This type of structure thus includes a substantial amount of particle-generating rolling or sliding friction.
  • typical robot ball joints and cylindrical joints have a substantial amount of particle-generating friction.
  • the claimed invention is intended to remedy the above-described problems caused by particulate matter generated by rolling and sliding friction in transport and positioning systems located in a clean room and/or within wafer processing tool chambers.
  • the advantage offered by the present invention is that all friction-contact between stationary and moving parts in transport and positioning systems is eliminated. Accordingly, the transport and/or positioning systems of the present invention may be used in Class 10 or better clean rooms, and within the wafer processing tools themselves. Additionally, particle-flight-path and down-wind positioning constraints on equipment positioning within the clean room are no longer a problem.
  • the present invention is a transport device, comprising a support member with a surface; a translating member with at least one surface thereof disposed adjacent to the support member surface for translating relative to the support member surface; means for forming an air bearing between the support member surface and the at least one translating member surface; a brushless magnetically coupled motor including a stationary stator and an armature which moves relative to the stator when the motor is operating; and means for causing the air bearing to physically support the armature so that the stator and the armature are in adjacency but do not make physical contact.
  • the support causing means comprises a frame member for connecting the armature to the translating member so that the translating member moves with the armature.
  • the magnetically coupled motor is a brushless D.C. linear motor.
  • the armature is disposed within a portion of the stator.
  • the support member includes a rail
  • the translating member includes a platform, with the at least one surface of the translating member operable to translate along a length of the rail.
  • this translating means may comprise a slide which wraps substantially around the rail, with the air bearing being formed between the rail the inner surfaces of the slide.
  • the support member surface may include a portion of a sphere.
  • the support member may comprise a housing; and the translating member may comprise a cylinder joint disposed within the housing, with the air bearing formed between the cylinder joint and the housing.
  • the stator may be in the shape of at least a portion of a hollow second cylinder; and the armature may be in the shape of a third cylinder disposed concentrically within the stator hollow cylinder.
  • the motor armature may comprise a cylindrical rotor, with the motor stator comprising a housing for enclosing the rotor.
  • the stator acts as the support member
  • the rotor acts as the translating member
  • the support causing means comprises means for forming an air bearing between the cylindrical rotor and its stator.
  • the present invention is a transport and/or positioning assembly which accomplishes its function without contact between stationary and moving members of the assembly.
  • This design is based on the unique concept of utilizing a brushless magnetically coupled motor in conjunction with an air bearing guide, wherein the air bearing also has the function of physically supporting the armature for the magnetically coupled motor so that there is no physical contact between the armature and the stator of the motor.
  • the present invention has applicability to a wide variety of manufacturing applications where transport and/or positioning of an item must take place in an atmosphere maintained essentially particle-free.
  • the particular form in which the present invention may be embodied will depend on the particular application which is being performed.
  • the first example demonstrates the application of this invention to a linear or curvilinear transport system.
  • the second and third embodiments of the present invention illustrate its application for cylindrical and ball joints, of the type that might be utilized to implement a robot.
  • Fig. 1 shows one embodiment for performing a totally contactless linear or curvilinear transport function.
  • Fig. 2 is a sectioned side-view of the basic concept of Fig. 1. Note that Fig. 2 is not to scale, and is provided for illustrative purposes only.
  • a support member 10 with a surface; a translating member 12 with at least one surface thereof disposed adjacent to the support member 10 for translating relative to the support member surface; means for forming an air bearing between the support member surface and the at least one translating member surface; a brushless magnetically coupled motor 14 including a stationary stator 16 and an armature 18 which moves relative to the stator 16 when the motor 14 is operating; and means 20 for causing the air bearing to physically support the armature 18 so that the stator 16 and the armature 18 are in adjacency, but do not make physical contact.
  • the support member 10 may comprise a rail
  • the translating means 12 may comprise a slide which wraps substantially around the rail 10.
  • this rail-slide configuration with the air bearing may be implemented by part number 600S manufactured by Dover Instruments Corporation, Westboro, Massachusetts.
  • This part utilizes compressed air or nitrogen to form the air bearing.
  • the compressed air or nitrogen is uniformly distributed to the interface between the slide 12 and the slide rail 10 on all four sides thereof by means of a network of passages in the slide assembly.
  • a very small and precise air gap between the slide 12 and the slide rail 10 holds the air pressure which thus produces a film of air that supports the slide 12 on the slide rail 10.
  • This film of air or air bearing allows the slide 12 to move along the slide rail 10 completely supported on this air bearing with no physical contact with the slide rail 10.
  • the magnetically coupled motor may be a brushless D.C. linear motor, with the armature thereof disposed within a portion of the stator.
  • a brushless D.C. linear motor By way of example, one such motor that may be utilized is part number L-1-B-46 manufactured by Anorad Corporation, Hauppauge, New York.
  • This brushless motor has no rolling or sliding parts which are subject to possible bounce, arc, or wear.
  • This motor is a direct-drive, linear, D.C. servo-actuator which provides smooth, straight-line motion. It utilizes a three-phase, full-wave, motor control system.
  • This motor comes in two configurations, a moving coil configuration and a moving magnet configuration.
  • the moving coil configuration has the electromagnetic coils in the moving member, and the permanent magnets in the fixed base.
  • This configuration comprises a long, U-shaped magnetic assembly which houses a series of rare earth magnets.
  • the magnetic assembly is the stationary component of the design, and is configured with the upper and lower level magnets identically spaced, but opposite in polarity.
  • This is the configuration shown in Figs. 1 and 2, wherein the upper and lower parts of the stator 16 comprise the U-shaped magnet assembly.
  • the upper level magnets in this stator provide a magnetic flux field for improved force generating capacity during operation.
  • the coil assembly in this Anorad device comprises a series of overlapped and insulated copper coils, which are precision wound and pinched for a 120° conduction cycle.
  • This coil assembly is housed in an aluminum housing and comprises the armature 18 of the present invention.
  • a set of three Hall-effect sensors are mounted on the coil assembly frame for the purpose of commutating the coils of the armature 18. These Hall-effect sensors are positioned to respond to the established pitch of the coils and the magnets. Note that this moving coil configuration of the Anorad motor requires that motor power and commutator cabling be attached to the moving armature member 18. This means that provision must be made to accommodate cables that are equal in length to the nominal travel of the motor armature 18.
  • the Anorad motor is also designed to have a moving magnet configuration comprising precision wound coil/lamination sets formed in the stator 16, and a moving short magnet assembly as the armature 18. As the magnet structure of the armature 18 moves, only those coils in the stator 16 which are under the magnet are actuated by the non-contact Hall-effect sensors to control the coil set.
  • the above described brushless D.C. linear motor provides smooth ripple-free translation, and high speed motion when required.
  • the armature 18 of the motor 14 is coupled to the air bearing slide 12 by means of an interface bracket 20 and rubber shock/misalignment bushings 22.
  • the bushings 22 provide resilience between the linear motor armature 18 and the air bearing slide 12 to compensate for any minor misalignment and to provide mechanical damping between these two components.
  • the above described components are disposed on a mechanical base casting 24 by means of a three-point mounting system.
  • the three-point mounting system mounts the slide rail 10 by means of 3 spherical alignment washers 26, as shown in the Figure, to thereby prevent torsional distortion of the slide rail 10, when mounted.
  • the preferred embodiment may further comprise a position indicator disposed in adjacency to a path on the support member surface over which the translating member 12 translates; and a position reader disposed on the translating member 12 for reading the position indicator and controlling the operation of the motor 14 in accordance with this reading.
  • an encoder grating 30 is utilized to provide position feedback for a servo system connected to the slide 12.
  • An encoder reader 32 is disposed on the slide 12 for reading this encoder grating 30. It can be seen that there is no physical contact between the encoder reader 32 and the encoder grating 30.
  • the encoder reader and attendant electronics may be implemented by encoder part number EE9-50 manufactured by Anorad Corporation.
  • the above described encoder grating 30 and encoder reader 32 operate as follows.
  • the encoder reader has a grating thereon with a similar pitch and in the same direction as the grating formed in the encoder grating 30. It is known that the relative position of two gratings of similar pitch causes the formation of Moire fringe patterns.
  • the encoder grating 30 is disposed on top of a rubber mounted on encoder glass member 34, and is held in place by a clamp plate 36.
  • a platform 36 is shown attached to the slide 12. This platform 36 may simply be a wafer chuck.
  • linear brushless D.C. motor shown in Fig. 1 could be replaced by a linear stepper motor operating in an open loop configuration. Such a motor does not have precision velocity and position capabilities, however.
  • a cylindrical rotor 50 is disposed on a shaft 52.
  • a stator housing 54 encloses the rotor 50.
  • the rotor 50 includes a set of permanent magnets disposed on its periphery in the well known manner.
  • the stator 54 includes a set of stator windings 56 (two such windings are shown in the Figure) to form a magnetically-coupled D.C. motor configuration.
  • the stator windings 56 are commutated by an electronic commutator 58, comprising a disc 60 disposed on the shaft 52, and a standard optical sensor device 62 for sensing rotational position on the disc 60.
  • Means are also provided to form an air bearing between the stator 54 and the rotor 50.
  • this means comprises a set of air plenums 64 disposed within the stator 54 above and below the rotor cylinder 50. These air plenums 64 communicate with the space between the rotor 50 and the stator 54 by means of a set of openings 66 through the section of the stator separating the air plenums from this space. The air emanating from these holes 66 forms an air bearing which supports the rotor 50 within the stator 54.
  • Standard means may be utilized to harness this rotary motion to perform work.
  • a platform could be disposed for rotation at the end of the shaft 52.
  • a shaft member could be connected to some point on the shaft 52 to rotate therewith and perform a desired function.
  • the stator comprises the support member for the device, and the rotor comprises the translating member.
  • the support member comprises a housing 90
  • the translating member for translating relative to the support member 90 comprises a cylinder joint 92 disposed within the housing, with an air bearing formed in a space 94 between the cylinder joint 92 and the housing 90.
  • the motor comprises a stator 96 in the shape of at least a portion of a hollow second cylinder, with appropriate electrical windings disposed therein, and an armature 98 98 in the shape of a third cylinder with appropriate permanent magnets disposed therein, with the armature disposed concentrically within the stator hollow cylinder 96.
  • the support-causing means comprises a member 100 connecting from the axis of the armature cylinder 98 to the translating member cylinder joint 92.
  • the air bearing formed in the space 94 operates to support both the cylinder joint 92 and the armature 98, so that there is no frictional contact between moving and stationary parts in the assembly.
  • a member 102 may be connected either to the rotational joint 92 or to the connecting member 100. This member 02 may operate as a rotating platform, or may perform some other desirable function.
  • the support member surface may include a portion of the shell of a sphere.
  • a translating member is disposed adjacent to this support member sphere for translating relative to this support member surface.
  • An air bearing is formed in the space between the support member and the translating member.
  • the magnetically coupled motor includes a stator which is in the shape of a portion of the outer shell of a sphere, with a triaxial winding disposed therein.
  • the motor further includes an armature in the shape of at least a portion of a sphere disposed concentrically within the outer shell of the stator.
  • the armature includes appropriately disposed poles in order to effect the magnetically coupled motor configuration.
  • the configuration further includes a connecting member as the support causing means for connecting the armature sphere 78 to the translating member 72. It can be seen that the air bearing operates to support both the translating member and the armature ball so that there is no frictional contact between moving and stationary members in the assembly.
  • a second support member surface may be disposed above the translating member, and an air bearing formed in the space between the top surface of the translating member and this second support member. It should be noted that if the lower support member is utilized, then one or more slots must be formed therein in order for the support member to be able to rotate in various desired directions.
  • the top surface of the translating member may be utilized as a platform to perform some type of work.
  • this embodiment may be configured to form the air bearing between the armature sphere and the stator. Accordingly, the stator acts as the support member, and the outer spherical support members may be eliminated.
  • the present invention comprises a design for a transport and/or positioning system with no contact between stationary and moving members of the assembly.
  • This design eliminates all sources for particle generation associated with sliding or rolling mechanisms.
  • the design has wide application, and is especially suitable for class 10 and better clean room applications for transporting and positioning a semiconductor wafer.
  • air bearings have been used primarily to provide a smoother track for system movement, and to obviate problems with non-linear slide rails.
  • the present invention utilizes an air bearing to provide a smooth track, but also uniquely interrelates the air bearing with a magnetically coupled drive motor so that the air bearing now supports the armature of this magnetically coupled motor. This unique configuration thus permits accurate and controllable motion without particulate generation.
  • the slide and the slide rail may be hard coated to prevent particulate erosion.
  • all air bearing slide orifices may be jeweled to prevent particulate erosion.
  • the air supply utilized to form the air bearing may be either highly filtered air or nitrogen.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Control Of Position Or Direction (AREA)
  • Non-Mechanical Conveyors (AREA)
EP87114430A 1986-11-13 1987-10-02 Kontaktlose Transportvorrichtung Ceased EP0267416A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US93020286A 1986-11-13 1986-11-13
US930202 1986-11-13

Publications (2)

Publication Number Publication Date
EP0267416A2 true EP0267416A2 (de) 1988-05-18
EP0267416A3 EP0267416A3 (de) 1989-12-20

Family

ID=25459049

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87114430A Ceased EP0267416A3 (de) 1986-11-13 1987-10-02 Kontaktlose Transportvorrichtung

Country Status (2)

Country Link
EP (1) EP0267416A3 (de)
JP (1) JPS63124763A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001069764A1 (de) * 2000-03-17 2001-09-20 Aerolas Gmbh Aerostatische Lager-Lasertechnik Linearantrieb
WO2001070050A1 (fr) * 2000-03-20 2001-09-27 Barriquand Steriflow Installation de sterilisation en continu de produits contenus dans des emballages souples
WO2001082338A1 (de) * 2000-04-20 2001-11-01 Linde Ag Verfahren und vorrichtung zum transport von wafern
WO2010036204A1 (en) * 2008-09-24 2010-04-01 Chai Meng Goh Direct drive pick and place system with reduced moving mass

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114890047B (zh) * 2022-07-13 2022-10-21 江苏友立新材料科技有限公司 一种片状环氧模塑料自动输送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1603890A (de) * 1968-03-15 1971-06-07
EP0054899A1 (de) * 1980-12-19 1982-06-30 International Business Machines Corporation Luftgleitbahn für Halbleiterscheiben
US4581553A (en) * 1984-04-16 1986-04-08 Helmut Moczala Brushless DC motor, especially linear motor, having an increased force-to-velocity ratio

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61224855A (ja) * 1985-03-29 1986-10-06 Hitachi Ltd 直線移動機構の支持装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1603890A (de) * 1968-03-15 1971-06-07
EP0054899A1 (de) * 1980-12-19 1982-06-30 International Business Machines Corporation Luftgleitbahn für Halbleiterscheiben
US4581553A (en) * 1984-04-16 1986-04-08 Helmut Moczala Brushless DC motor, especially linear motor, having an increased force-to-velocity ratio

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOVIET INVENTIONS ILLUSTRA- TED, section El: Electrical, week 22, July 8, 1981 DERWENT PUBLICATIONS LTD., London, SU-W p.7 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001069764A1 (de) * 2000-03-17 2001-09-20 Aerolas Gmbh Aerostatische Lager-Lasertechnik Linearantrieb
WO2001070050A1 (fr) * 2000-03-20 2001-09-27 Barriquand Steriflow Installation de sterilisation en continu de produits contenus dans des emballages souples
US6626087B2 (en) 2000-03-20 2003-09-30 Barriquand Steriflow Installation for continuous sterilization of products contained in flexible packages
WO2001082338A1 (de) * 2000-04-20 2001-11-01 Linde Ag Verfahren und vorrichtung zum transport von wafern
WO2010036204A1 (en) * 2008-09-24 2010-04-01 Chai Meng Goh Direct drive pick and place system with reduced moving mass

Also Published As

Publication number Publication date
EP0267416A3 (de) 1989-12-20
JPS63124763A (ja) 1988-05-28

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