EP0237698B1 - Positionneur pour têtes de test électroniques - Google Patents

Positionneur pour têtes de test électroniques Download PDF

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Publication number
EP0237698B1
EP0237698B1 EP87100160A EP87100160A EP0237698B1 EP 0237698 B1 EP0237698 B1 EP 0237698B1 EP 87100160 A EP87100160 A EP 87100160A EP 87100160 A EP87100160 A EP 87100160A EP 0237698 B1 EP0237698 B1 EP 0237698B1
Authority
EP
European Patent Office
Prior art keywords
test head
assembly
arm unit
vertical
vertical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP87100160A
Other languages
German (de)
English (en)
Other versions
EP0237698A2 (fr
EP0237698A3 (en
Inventor
Nathan R. Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InTest Corp
Original Assignee
InTest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/411,311 external-priority patent/US4527942A/en
Application filed by InTest Corp filed Critical InTest Corp
Priority to EP87100160A priority Critical patent/EP0237698B1/fr
Priority to AT87100160T priority patent/ATE75341T1/de
Publication of EP0237698A2 publication Critical patent/EP0237698A2/fr
Publication of EP0237698A3 publication Critical patent/EP0237698A3/en
Application granted granted Critical
Publication of EP0237698B1 publication Critical patent/EP0237698B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B23Q11/0017—Arrangements compensating weight or flexion on parts of the machine compensating the weight of vertically moving elements, e.g. by balancing liftable machine parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
    • B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
    • B23Q1/5468—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only a single rotating pair followed parallelly by a single rotating pair
    • B23Q1/5475—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only a single rotating pair followed parallelly by a single rotating pair followed perpendicularly by a single rotating pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/025—Arms extensible telescopic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008—Balancing devices
    • B25J19/0012—Balancing devices using fluidic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008—Balancing devices
    • B25J19/002—Balancing devices using counterweights
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
    • F16M11/10—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting around a horizontal axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/20—Undercarriages with or without wheels
    • F16M11/2007—Undercarriages with or without wheels comprising means allowing pivoting adjustment
    • F16M11/2035—Undercarriages with or without wheels comprising means allowing pivoting adjustment in more than one direction
    • F16M11/2071—Undercarriages with or without wheels comprising means allowing pivoting adjustment in more than one direction for panning and rolling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/20—Undercarriages with or without wheels
    • F16M11/24—Undercarriages with or without wheels changeable in height or length of legs, also for transport only, e.g. by means of tubes screwed into each other
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M2200/00—Details of stands or supports
    • F16M2200/04—Balancing means
    • F16M2200/048—Balancing means for balancing translational movement of the undercarriage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Definitions

  • This invention relates to the field of art of electronic test head positioners.
  • test head In the automatic testing of integrated circuits (IC) and other electronic devices, special device handlers have been used which place the device to be tested in position.
  • the electronic testing itself is provided by a large and expensive automatic testing system which includes a test head which has been required to connect to and dock with the device handler.
  • the test head In such testing systems, the test head has been usually very heavy in the order of 34 to 136 kilograms.
  • the reason for this heaviness is that the test head uses high speed electronic timing signals so that the electronic circuits must be located as close as possible to the device under test. Accordingly, the test head has been densely packaged with electronic circuits in order to achieve the high speed testing of the sophisticated devices.
  • the prior art has left much to be desired in providing a manipulator or positioner to easily move the heavy test head accurately into position with respect to the device handler mechanism.
  • the test head has been positioned by means of lead screws and rotating and sliding mechanisms each movable one at a time.
  • These prior systems left much to be desired in that they did not provide all of the degrees of freedom necessary for easy and accurate docking with the handler.
  • the user has had to move the heavy device handler or the heavy positioner itself in order to provide alignment.
  • Other prior art manipulating systems have used motors to drive the lead screws in the up-down direction, i.e., such as that system shown in Wang et al. U.S. Patent No. 4,132,218.
  • Such a motor driven lead screw or even a hand driven one provides the possibility of damaging either the test head socket connections or the connections which are on the device handler due to overstressing.
  • One prior art system that shown in Pugh et al GB-A-2074337, is an adjustable support for optical or other instruments. Because this system allows for relative vertical movement between a clamping device and the main support axis, it could present hazards when it is used for heavy equipment.
  • an object of the present invention is an electronic test head positioner that has six degrees of freedom and provides a substantially weightless condition to the test head which may be manipulated by hand for easy and accurate docking and undocking of the test head with the device handler.
  • Another object of the invention is an electronic test head positioner formed by a column rising vertically from a base which takes little room on the floor with respect to the test system.
  • positioner system 10 carries a test head 11 for a test system for docking with a mechanism plate 17 of an integrated circuit handler 15. It will be understood that other electronic devices may be handled by device handler such as transistors, chips or dies, etc.
  • positioner system 10 is moved manually in a substantially weightless condition to manipulate the heavy test head 11 accurately and precisely and dock it into the mechanism plate 17.
  • location pins 11b are inserted into corresponding openings in plate 17 and test connector 11a enters and mates with a connector for a device 15a to be tested.
  • test head 11 may be accurately manipulated in a substantially weightless condition to another position with six degrees of freedom substantially extensible in the horizontal plane to dock with other mechanism plates in any position.
  • mechanism plates for probers or handlers may be anywhere from a horizontal plane to a vertical plane.
  • FIGs. 1-3 The details of system 10 are shown in Figs. 1-3 in which an H-shaped beam forms a vertical column 12.
  • Column 12 has opposing walls 12a,b with a flange 12c connecting the two walls together.
  • Column 12 is supported at its bottom by a base assembly 20 having a base plate 22 and outwardly extending legs 24a-e.
  • Column 12 is secured to plate 22 by bolts 22a for example.
  • the rear of column 12 is closed by a U-shaped door 14 hinged to wall 12b by way of hinges 16.
  • Test head 11 is supported and manipulated in its docking by a positioner arm assembly 30 which moves vertically on a main shaft 50.
  • Assembly 30 comprises a main arm assembly 32, a forearm assembly 34, a wrist joint assembly 36, a cradle assembly 38 and test head adapter plates 40a, b.
  • Main shaft 50 is secured by opposing pillow blocks 52,53.
  • Positioner arm assembly 30 is counterbalanced to ride vertically on main shaft 50 by a counter weight assembly 60 having a weight carriage 62 which moves vertically in either direction within the rear section of column 12.
  • Carriage 62 has vertically extending carriage shafts 65a,b secured thereto and carries removable weights 62a-c. Weights 62a-c exactly counterbalance the weight of assembly 30 and test head 11 so that they are substantially weightless.
  • shafts 65a,b threadedly receive members 67a,b swaged to respective ends of cables 68a,b received within grooves of pulleys 72a,b of assembly 70.
  • Shaft 74 permits the rotation of pulleys 72a,b and the shaft is received at an upper end section of column 12.
  • Cables 68a,b extend downwardly along the inner surface of walls 12a,b through openings in a plate 230 and are securely fastened by way of swaged members to a lift block 80 positioned under main arm assembly 32.
  • Block 80 has an opening for receiving shaft 50 and the block slides along web 12c and is this prevented from rotating around shaft 50.
  • main arm assembly 32 includes an upper bearing block 86 and a lower bearing block 87 carried by block 80.
  • a main shaft thrust bearing 80a is provided between blocks 80, 87.
  • Blocks 86, 87 have respective lower extending and upper extending sections 86a, 87a and as shown engage an I beam 90.
  • a front wall 90a of I beam 90 is secured to front faces of blocks 86, 87 while a rear section 90b of I beam 90 is secured to sections 86a, 87a.
  • the vertical and rotational movements of assembly 32 may be temporarily locked in any position by means of a lock 55 formed in a block 91 as later described in detail.
  • a fluid cylinder 220 has one end fixed to pillow block 52 and the other end to plate 230 secured to the outer surface of sleeve 226. Cylinder 220 prevents rapid vertical movement of arm assembly 30 as a safety feature for operating personnel and to prevent damage to the handler and test head.
  • Forearm assembly 34 Secured to front face 90a are a pair of pillow blocks 95, 96 of forearm assembly 34.
  • a vertical shaft 98 extends through pillow blocks 95, 96.
  • Forearm assembly 34 further includes a forearm 100 having a rear section 101 which is bolted to forearm 100 by means of bolts.
  • Shaft 98 extends through vertical opening 107 in section 101 with needle bearings at either end and a thrust bearing between section 101 and pillow block 96.
  • Forearm assembly 34 may be temporarily fixed in its rotational position about a vertical axis by means of a forearm lock assembly 106.
  • forearm assembly 34 may be effectively turned 180° while maintaining all the other elements in their original positions. In this manner, rear section 101 extends to the left as compared to the right as shown in Fig. 3.
  • Forearm 100 has a front "C" shaped section which rotatively receives an attachment member 120 of wrist joint assembly 36.
  • Member 120 rotates with respect to forearm 100 by way of vertical upper and lower pivot pins 122. Needle bearings are provided for the rotation of pins 122 in forearm 100 and a thrust bearing 128 is provided between member 120 and forearm 100.
  • Member 120 may be temporarily prevented from rotation with respect to assembly 34 by means of a wrist joint lock assembly 110 which is formed within a block 112 secured to the upper surface of forearm 100.
  • Member 120 has a longitudinal opening for receiving a horizontally extending shaft 300 which is rotated within needle bearings 302 and 304 secured to member 120.
  • Shaft 300 at its outer end is welded to a connecting hub 310 for threadedly receiving cap screws 312 to rigidly secure back plate 130 of cradle assembly 38.
  • Cradle assembly 38 is formed by three walls 130-132 welded together to form a U-shaped holder for the test head.
  • Shaft 300 is effective to allow the rotation of assembly 38 about a horizontal axis and assembly 38 may be secured in position by tightening of cradle lock assembly 306 which is similar to assembly 55.
  • Walls 131, 132 receive test head adapter plates 40a,b and allow these plates to rotate with respect to the walls and then to be rigidly fixed in position. Since the structure of both plates 40 a,b are the same only one of them need be described .
  • Arm 131 has within an end section a circular groove 135 and an opening 136 for receiving a shoulder screw 137.
  • a lock knob 140 is threaded into plate 40a and moves about circular groove 135 in conventional manner. In this way, by tightening lock knob 140, plate 40a is rigidly secured with respect to wall 131.
  • test head positioner system 10 simultaneously positions in six degrees of freedom, X, Y, Z, ⁇ X , ⁇ Y , ⁇ Z .
  • the test connector 11a have that six degrees of freedom so that it can accurately and effortlessly be positioned with respect to the device to be tested, 15a for example.
  • the Y direction were considered to be the vertical or up/down direction then the movement of assembly 32 vertically with respect to shaft 50 provides the Y direction of freedom.
  • ⁇ Y freedom which is the rotation about the Y axis is then provided by simultaneous rotation of all of the joints about vertical axes 50, 98 and 122.
  • pivots 50, 98 and 122 are provided by pivots 50, 98 and 122 in the same manner as ⁇ y.
  • the ⁇ x freedom is provided by shoulder screw pivot 137.
  • Z movement which may be considered to be the in and out movement, such freedom is provided by pivot shafts 50, 98 and 122 in the same way as ⁇ y.
  • ⁇ z is then provided by the pivoting of shaft 300.
  • a main arm assembly lock 55 which comprises a conventional wedge lock system.
  • two wedges 150 and 152 are provided on either side of shaft 50 and are threadedly engaged by threads 154 of a lock handle 153.
  • lock handle 153 By turning lock handle 153 clockwise, wedge members 150, 152 are brought together and apply pressure onto shaft 50 and this way prevent rotation of block 91 about shaft 50 and also prevent a vertical movement of block 91 and the entire assembly 30.
  • Similar lock assemblies are provided for forearm lock assembly 106, wrist joint lock assembly 110 and cradle lock assembly 306 which have turning arms 106a, 110a, 306a respectively.
  • FIG. 7 Still another embodiment of the invention is shown in Fig. 7 in which system 250 replaces the weights and cable assembly 60, 68a,b of system 10 with a pressurized cylinder 251 having a piston 252.
  • Cylinder 251 effectively provides the same function as counterbalance assembly 60 in that it produces a constant force on arm assembly 30a (including test head 11) counter to gravity regardless of the actual position of the assembly.
  • the balancing of different weights of assembly 30a may be accomplished by maintaining a constant pressure within the cylinder 251 by means of a regulator 258 supplied by pump 257 and described in detail with respect to Figs. 9,10.
  • Cylinder 251 is rigidly secured to central web 12c' of column 12 of Fig. 1.
  • Piston 252 extends upwardly and is fixedly connected to a horizontal arm 254 which extends through a slot 256 formed in web 12c'.
  • arm 254 is fixedly welded to sleeve 226, Figs. 1,8.
  • system 250 is substantially similar to system 10.
  • Figs. 9 & 10 there is shown the embodiment claimed in which vertical column 12 of system 10 is in system 400 replaced by a vertically displaced cylindrical support tube 403.
  • a first arm unit 402 is coupled to the support tube 403 for allowing vertical movement with respect to the support tube 403
  • Tube 403 forms a cylinder for first arm unit 402 ( a piston and telescoping rod) with seals 414a,b.
  • support tube 403 is supported at its bottom by a base assembly 20b having extending legs 24a-e.
  • Tube 403 and first arm unit 402 operate the same as tube 251 and piston 252.
  • a second arm unit 405 is coupled to the first arm unit 402.
  • the second arm unit includes a test head receiving unit 38a.
  • the second arm unit 405 including test head. receiving unit. 38a are similar to assembly 30 but are designed for further simplicity.
  • rotation and vertical movement of first arm unit 402 may be locked by a lock assembly 416, as shown.
  • the upper section of first arm unit 402 is rigidly secured to mount block 426 to which is secured bearing mount plates 428, 430.
  • Plate 428 has secured to its outer face bearing blocks 428a,b and similarly plate 430 has blocks 430a,b. These blocks have linear bearings for receiving horizontal shafts 432,434 respectively.
  • Locking block 437 secured to plate 428 is effective to receive shaft 432 and prevent movement thereof when locked.
  • Shafts 432, 434 are rigidly connected at their left end to a rotational means mounting plate 440 which fixedly carries a rotational means bearing block 442 having a lock assembly 443 similar to assembly 110.
  • Block 442 has secured to an inner section thereof a rotational means assembly 36a carrying a test head receiving unit 38a which are similar to assemblies 36 , 38 of system 10.
  • rotational means assembly 36a allows the test head to be rotated about a vertical axis.
  • test head receiving unit 38a is coupled to rotational means assembly 36a to allow rotation about a horizontal axis.
  • a fluid cavity 412 is formed between the first arm unit (or the piston) and the cylinder. Fluid under pressure flows into and out of the cavity from a fluid source coupled by way of a line 407 through a regulator 404, and pressure gauge 406 to cavity 412.
  • regulator 404 has an opening to atmosphere 404a which allows pressure from cavity 412 to be released when it is in excess of the regulator setting 404b.
  • the fluid is air under a pressure of 172 to 688 kilonewtons per sguare meter. This would accommodate a total weight of the first arm unit, the second arm unit and the test head receiving unit including a test head where the test head weights from 34 to 136 kilograms.
  • the test head may have .38 to .51 meters of vertical travel.
  • damper 220a having a damper rod 222a which is similar to that shown in Fig. 1.
  • the top end of damper 220a is journaled in a bearing 418 connected to an upper plate 424 of arm assembly 405. In this manner, damper 220a is effective to damp the movement of assembly 405 while the rotation of the assembly does not adversely twist rod 222a.
  • second arm unit 405 may turn about cylinder 403 as well as horizontally by way of shafts 432, 434 and then to other positions determined by assemblies 442, 36a and 38a. It will be understood that shafts 432, 434 by providing horizontal movement, eliminate the need for forearm shaft 98 while still providing the above described six degrees of freedom.
  • Positioner system 450 is suitable for relatively lightweight test heads since it is a simplified construction having a single shaft 432a horizontally journaled in blocks 429a,b and 452. Blocks 429a,b and 452 are carried by and secured to a mount block 426a which is supported by piston 402. The horizontal and rotational movement of the shaft 432a is locked by previously described wedge lock system 55a within block 452. Further, the end of shaft 432a is rigidly secured to a wrist bearing block 440a.
  • Block 440a supports a simplified wrist joint assembly 460 which carries cradle assembly 38b. Suitable locks are provided in blocks 440a, 460 and assembly 38b in the manner previously described.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Claims (2)

  1. Système pour maintenir une tête de test électronique dans une condition sensiblement d'apesanteur pour arrimer et désarrimer manuellement la tête de test par rapport à un manipulateur à dispositif électronique, caractérisé en ce qu'il comprend :
    un moyen support (403) définissant un premier axe vertical ;
    une première unité de bras (402) couplée au moyen support pour permettre un mouvement vertical par rapport au moyen support ;
    une seconde unité de bras (405) couplée à la première unité de bras, la seconde unité de bras comportant une unité réceptrice de tête de test (38a) montée pour assurer un mouvement de pivotement autour d'un axe horizontal ;
    un moyen de guide à déplacement linéaire horizontal continu (432, 434) pour assurer seulement un mouvement horizontal de la tête de test par rapport au moyen support ; et
    un moyen rotatif (36a) monté de façon à empêcher le mouvement relatif vertical linéaire de la seconde unité de bras pour assurer un mouvement de rotation de la tête de test autour d'un second axe vertical ; le premier axe vertical et le second axe vertical étant toujours orientés verticalement ; et
    la seconde unité de bras (405) étant montée de façon à empêcher le mouvement relatif vertical de la première unité de bras (402) ; et
    des moyens d'équilibrage (60, 220a) couplés à la première unité de bras (402) pour assurer une condition sensiblement d'apesanteur à l'unité réceptrice de tête de test (38a) lorsque la tête de test est montée sur elle, la tête de test étant libre en rotation autour d'au moins l'un du premier axe vertical et du second axe vertical lorsque la tête de test est étendue à la main pour arrimer et désarrimer la tête de test sur le manipulateur à dispositif électronique.
  2. Système selon la revendication 1 dans lequel le moyen de guide à déplacement linéaire horizontal continu est un guide horizontal unique (432a).
EP87100160A 1982-08-25 1983-08-16 Positionneur pour têtes de test électroniques Expired - Lifetime EP0237698B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP87100160A EP0237698B1 (fr) 1982-08-25 1983-08-16 Positionneur pour têtes de test électroniques
AT87100160T ATE75341T1 (de) 1982-08-25 1983-08-16 Einstellvorrichtung fuer elektronische testkoepfe.

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US411311 1982-08-25
US06/411,311 US4527942A (en) 1982-08-25 1982-08-25 Electronic test head positioner for test systems
US522635 1983-08-11
US06522635 US4589815B1 (en) 1982-08-25 1983-08-11 Electronic test head positioner for test systems
EP87100160A EP0237698B1 (fr) 1982-08-25 1983-08-16 Positionneur pour têtes de test électroniques

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP83304739.2 Division 1983-08-16

Publications (3)

Publication Number Publication Date
EP0237698A2 EP0237698A2 (fr) 1987-09-23
EP0237698A3 EP0237698A3 (en) 1988-03-23
EP0237698B1 true EP0237698B1 (fr) 1992-04-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP87100160A Expired - Lifetime EP0237698B1 (fr) 1982-08-25 1983-08-16 Positionneur pour têtes de test électroniques

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EP (1) EP0237698B1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3813477C1 (en) * 1988-04-21 1989-11-23 Ekkehard 8201 Raubling De Ueberreiter Apparatus for holding an object
US4936655A (en) * 1988-07-07 1990-06-26 Grumman Aerospace Corporation Alignment fixture for an optical instrument
US4993809A (en) * 1988-10-07 1991-02-19 Grumman Aerospace Corporation Mounting fixture for an optical instrument
FR2661249A1 (fr) * 1990-04-23 1991-10-25 Leobon Henri Procede et installation pour le controle radioelectrique de la paroi d'un radome d'aeronef.
FR2674017B1 (fr) * 1991-03-12 1995-01-13 Romer Srl Dispositif de mesure de forme ou de position d'un objet.
US5765273A (en) * 1995-09-22 1998-06-16 Black & Decker Inc. Drill press having pivotable table
DE19841364C1 (de) * 1998-09-10 2000-03-30 Andreas Otto Multifunktionales Korpus-Handlingsystem
DE10132489B4 (de) * 2001-07-05 2004-12-09 Heigl, Cornelia Handhabungsvorrichtung, insbesondere zum Positionieren eines Testkopfs an einer Prüfeinrichtung
WO2003005045A1 (fr) 2001-07-05 2003-01-16 Heigl, Cornelia Dispositif de manipulation notamment destine au positionnement d'une tete de test sur un systeme de controle
DE20214629U1 (de) 2002-09-20 2002-11-21 Esmo Ag Verschiebbare Befestigungsplatte
DE102005048237B3 (de) * 2005-10-07 2007-03-15 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
DE102006005531B4 (de) * 2006-02-07 2013-01-17 Vega Grieshaber Kg 1 mFeldgerät mit einer Montageklammer zur Befestigung an einer Befestigungsfläche
US8833187B2 (en) * 2011-02-23 2014-09-16 Ut-Battelle, Llc Stack sampling apparatus
CN115451097B (zh) * 2022-11-11 2023-01-06 上海捷策创电子科技有限公司 一种用于芯片测试的大推力高精度的顶升和下拉装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2074337B (en) * 1980-04-15 1983-11-16 Univ Technology Adjustable support for an optical or other instrument
DE3048045C2 (de) * 1980-12-19 1984-12-06 Mora Fabrik für Meßgeräte Helmut Freund GmbH, 8750 Aschaffenburg Höhenmeß- und Anreißgerät mit einer von einem Gerätefuß aufragenden Gerätesäule

Also Published As

Publication number Publication date
EP0237698A2 (fr) 1987-09-23
EP0237698A3 (en) 1988-03-23

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