EP0231531A3 - Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters - Google Patents

Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters

Info

Publication number
EP0231531A3
EP0231531A3 EP86118180A EP86118180A EP0231531A3 EP 0231531 A3 EP0231531 A3 EP 0231531A3 EP 86118180 A EP86118180 A EP 86118180A EP 86118180 A EP86118180 A EP 86118180A EP 0231531 A3 EP0231531 A3 EP 0231531A3
Authority
EP
European Patent Office
Prior art keywords
tuning
window
microwave transmission
transmission windows
tuned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP86118180A
Other languages
English (en)
French (fr)
Other versions
EP0231531A2 (de
Inventor
Eugene W. Fournier
Erik J. Bjornard
Annette G. Johncock
Joachim Doehler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Energy Conversion Devices Inc
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Publication of EP0231531A2 publication Critical patent/EP0231531A2/de
Publication of EP0231531A3 publication Critical patent/EP0231531A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/08—Dielectric windows

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Waveguide Connection Structure (AREA)
  • Drying Of Semiconductors (AREA)
EP86118180A 1986-02-03 1986-12-31 Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters Withdrawn EP0231531A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US82547186A 1986-02-03 1986-02-03
US825471 1986-02-03

Publications (2)

Publication Number Publication Date
EP0231531A2 EP0231531A2 (de) 1987-08-12
EP0231531A3 true EP0231531A3 (de) 1988-10-05

Family

ID=25244073

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86118180A Withdrawn EP0231531A3 (de) 1986-02-03 1986-12-31 Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters

Country Status (2)

Country Link
EP (1) EP0231531A3 (de)
JP (1) JPS62219524A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5038712A (en) * 1986-09-09 1991-08-13 Canon Kabushiki Kaisha Apparatus with layered microwave window used in microwave plasma chemical vapor deposition process
JP3748473B2 (ja) 1996-12-12 2006-02-22 キヤノン株式会社 堆積膜形成装置
CN115966863A (zh) * 2022-12-30 2023-04-14 浙江工业大学 一种大功率微波窗组件

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU171885A1 (de) *
US2706275A (en) * 1946-01-21 1955-04-12 Jr Melville Clark Transmission line windows having high voltage breakdown characteristic
US3728650A (en) * 1971-07-23 1973-04-17 Raytheon Co Ghost-mode shifted dielectric window
EP0151754A2 (de) * 1984-02-14 1985-08-21 Energy Conversion Devices, Inc. Verfahren zur Herstellung eines fotoleitfähigen Elementes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0154160B2 (de) * 1984-02-14 1992-10-21 Energy Conversion Devices, Inc. Verfahren und Vorrichtung zur Herstellung elektrophotographischer Geräte

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU171885A1 (de) *
US2706275A (en) * 1946-01-21 1955-04-12 Jr Melville Clark Transmission line windows having high voltage breakdown characteristic
US3728650A (en) * 1971-07-23 1973-04-17 Raytheon Co Ghost-mode shifted dielectric window
EP0151754A2 (de) * 1984-02-14 1985-08-21 Energy Conversion Devices, Inc. Verfahren zur Herstellung eines fotoleitfähigen Elementes

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, vol. MTT-14, no. 3, March 1966, pages 162-164; D.B. MILLER: "An expertimental X-band electron-cyclotron-resonance plasma accelerator" *
MICRONOTES, vol. 5, no. 3, September/October 1967, Microwave Associates, Inc., Burlington, Massachesetts, US; "Design of High Power Microwave Windows" *
SOVIET INVENTIONS ILLUSTRATED, group C, April 1966, page 6, no. 171885, Derwent Publications Ltd, London, GB; & SU-A-17 1885 (SVIRIDOV), 29-07-1965 *

Also Published As

Publication number Publication date
JPS62219524A (ja) 1987-09-26
EP0231531A2 (de) 1987-08-12

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Legal Events

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Effective date: 19890406

RIN1 Information on inventor provided before grant (corrected)

Inventor name: BJORNARD, ERIK J.

Inventor name: JOHNCOCK, ANNETTE G.

Inventor name: FOURNIER, EUGENE W.

Inventor name: DOEHLER, JOACHIM