EP0231531A2 - Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters - Google Patents

Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters Download PDF

Info

Publication number
EP0231531A2
EP0231531A2 EP86118180A EP86118180A EP0231531A2 EP 0231531 A2 EP0231531 A2 EP 0231531A2 EP 86118180 A EP86118180 A EP 86118180A EP 86118180 A EP86118180 A EP 86118180A EP 0231531 A2 EP0231531 A2 EP 0231531A2
Authority
EP
European Patent Office
Prior art keywords
window
tuning
chamber
segments
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP86118180A
Other languages
English (en)
French (fr)
Other versions
EP0231531A3 (de
Inventor
Eugene W. Fournier
Erik J. Bjornard
Annette G. Johncock
Joachim Doehler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Energy Conversion Devices Inc
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Publication of EP0231531A2 publication Critical patent/EP0231531A2/de
Publication of EP0231531A3 publication Critical patent/EP0231531A3/de
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/08—Dielectric windows

Definitions

  • This invention relates to a method and apparatus for tuning microwave transmission windows and more particularly for maximizing the power transmitted through the windows.
  • the invention has application with any microwave power transmission into a plasma, but has particular applicability for plasma-type systems, such as those incorporating amorphous semiconductor alloys.
  • the invention includes to a method and apparatus for making such devices by plasma deposition from reaction gases wherein the plasmas are excited by microwave energy.
  • the invention has one of its most important applications in making commercial electrophotographic devices having a cyclindrical or drum configuration with the amorphous semiconductor alloys coated or deposited on the outer surfaces thereof.
  • the present invention enhances the commercial mass production of electrophotographic drums incorporating amorphous semiconductor alloys.
  • Silicon is the basis of the huge crystalline semiconductor industry and is the material which has produced expensive high efficiency (18 percent) crystalline solar cells for space applications.
  • crystalline semiconductor technology reached a commercial state, it became the foundation of the present huge semiconductor device manufacturing industry. This was due to the ability of the scientists to grow substantially defect-free germanium and particularly silicon crystals, and then turn them into extrinsic materials with p-type and n-type conductivity regions therein. This was accomplished by diffusing into such crystalline material parts per million of donor (n) or acceptor (p) dopant materials introduced as substitutional impurities into the substantially pure crystalline materials, to increase their electrical conductivity and to control their being either of a p or n conduction type.
  • crystal silicon devices have fixed parameters which are not variable as desired, require large amounts of material, are only producible in relatively small areas and are expensive and time consuming to produce.
  • Devices based upon amorphous silicon can eliminate these crystal silicon disadvantages.
  • Amorphous silicon has an optical absorption edge having properties similar to a direct gap semiconductor and only a material thickness of one micron or less is necessary to absorb the same amount of sunlight as the 50 micron thick crystalline silicon. Further, amorphous silicon can be made faster, easier and in larger areas than can crystalline silicon.
  • Amorphous silicon or germanium (Group IV) films are normally four-fold coordinated and were found to have microvoids and dangling bonds and other defects which produce a high density of localized states in the energy gap thereof.
  • the reduction of the localized states was accomplished by glow discharge deposition of amorphous silicon films wherein a gas of silane (SiH4) was passed through a reaction tube where the gas was decomposed by a radio frequency (RF) glow discharge and deposited on a substrate at a substrate temperature of about 500-600°K (227-327°).
  • RF radio frequency
  • the material so deposited on the substrate was an intrinsic amorphous material consisting of silicon and hydrogen.
  • a gas of phosphine (PH3) for n-type conduction or a gas of diborane (B2H6) for p-type conduction was premixed with the silane gas and passed through the glow discharge reaction tube under the same operating conditions.
  • the gaseous concentration of the dopants used was between about 5 x 10 ⁇ 6 and 10 ⁇ 2 parts per volume.
  • the material so deposited included supposedly substitutional phosphorous or boron dopant and was shown to be extrinsic and of n or p conduction type.
  • the hydrogen in the silane combines at an optimum temperature with many of the dangling bonds of the silicon during the glow discharge deposition, to substantially reduce the density of the localized states in the energy gap toward the end of making the electronic properties of the amorphous material approximate more nearly those of the corresponding crystalline material.
  • p and n dopant gases also were introduced in the sputtering process to produce p and n doped materials. These materials had a lower doping efficiency than the materials produced in the glow discharge process. Neither process produced efficient p-doped materials with sufficiently higher acceptor concentrations for producing commercial p-n or p-i-n junctions devices. The n-doping efficiency was below desirable acceptable commercial levels and the p-doping was particularly undesirable since it reduced the width of the band gap and increased the number of localized states in the band gap.
  • Activated fluorine especially readily diffuses into and bonds to the amorphous silicon in the amorphous body to substantially decrease the density of localized defect states therein, because the small size of the fluorine atoms enables them to be readily introduced into the amorphous body.
  • Fluorine is considered to be a more efficient compensating or altering element than hydrogen when employed alone or with hydrogen because of its exceedingly small size, high reactivity, specificity in chemical bonding, and highest electronegativity. Hence, fluorine is qualitatively different from other halogens and so is considered a super-halogen.
  • compensation may be achieved with fluorine alone or in combination with hydrogen with the addition of these elements(s) in very small quantities (e.g., fractions of one atomic percent).
  • the amounts of fluorine and hydrogen most desirably used are much greater than such small percentages so as to form a silicon-hydrogen-fluorine alloy.
  • Such alloying amounts of fluorine and hydrogen may, for example, be in the range of 1 to 5 percent or greater. It is believed that the new alloy so formed has a lower density of defect states in the energy gap than that achieved by the mere neutralization of dangling bonds and similar defect states.
  • fluorine in particular, is believed to participate substantially in a new structural configuration of an amorphous silicon-containing material and facilitates the addition of other alloying materials, such as germanium.
  • Fluorine in addition to its other characteristics mentioned herein, is believed to be an organizer of local structure inthe silicon-containing alloy through inductive and ionic effects. It is believed that fluorine also influences the bondign of hydrogen by acting in a beneficial way to decrease the density of defect states which hydrogen contributes while acting as a density of states reducing element.
  • the ionic role that fluorine plays in such an alloy is believed to be an important factor in terms of the nearest neighbor relationships.
  • silicon based amorphous semiconductor alloys were investigated for possible applications in electrophotographic processes. These materials were considered likely to be useful because of the hardness of amorphous silicon alloys, because of their nontoxic nature, and because of their improved photoresponse to infrarred light. Also, as previously mentioned, these materials could be made with a density of states reduced to a point where charging of the materials to the potentials required for electrophotographic replication was considered possible. Thus, amorphous semiconductor alloys made by the processes hereinabove described have demonstrated photoresponsive and structural characteristics which are suited for electrophotographic applications. These prior art processes, however, have suffered from relatively slow deposition rates and low conversion efficiency of the reaction gas feed stock which are important considerations from the standpoint of using amorphous semiconductor materials on a commercial basis.
  • a new and improved process for making electrophotographic devices incorporating amorphous semiconductor alloys is disclosed in U.S. application Serial No. 580,081, filed February 14, 1984 for "An Improved Method Of Making A Photoconductive Member And Improved Photoconductive Members Thereby", filed in the names of Annette G. Johncock and Stephen J. Hudgens, which is incorporated herein by reference.
  • the process described therein is a microwave glow discharge deposition process which provides substantially increased deposition rates and reaction gas feed stock utilization.
  • high deposition rates and reaction gas feed stock conversion efficiency and utilization are most essential for the commercial viability of electrophotographic devices utilizing such materials.
  • amorphous semiconductor alloys can be deposited at sufficient rates and have desired photoresponsive characteristics to enable the commercial utilization of such materials in electrophotographic devices.
  • the electrophotographic devices used in commercial practice usually take the form of cylindrical or dum members.
  • An apparatus and method which facilitates the deposition of amorphous semiconductor alloys uniformly over the entire outer surface of such drums to form electrophotographic devices thereon is disclosed in U.S. Application Serial No. 580,086, also filed February 14, 1984, for "Method and Apparatus For Making Electrophotographic Devices", filed in the names of the current inventors, Eugene W. Fournier, Erik J. Bjornard, Annette G. Johncock and Joachim Doehler, which is incorporated herein by reference.
  • all of the advantages of microwave glow discharge processes including high reaction gas feed stock utilization can be realized.
  • the present invention provides a method and apparatus to maximize and stabilize the power transmitted through the microwave window into the deposition chamber to enhance the microwave glow discharge process which can be utilized in making the above electrophotographic devices.
  • the invention provides a method and apparatus for turning a microwave transmission window to maximize and stabilize the power transmitted through the window into a microwave plasma.
  • the window is tuned to transmit the power required to achieve the plasma conditions desired.
  • the power transmission through the window is tuned by adding a pair of tuning structures to the window.
  • the tuning structures can be formed by stacking a plurality of small disks or other shaped pieces of dielectric material, such as alumina, adjacent the outer edge of the window.
  • the width or diameter and the height of the tuning structures are adjusted to achieve both a high transmission coefficient as well as a consistent plasma excitation to provide stability in the plasma, for example, in a glow discharge deposition process.
  • One particular utilization of the invention is with making electrophotographic devices incorporating amorphous semiconductor alloys as described in the above-referenced, copending applications.
  • Copending application Serial No. 580,086 provides a method and apparatus for depositing a layer of material onto the outer surface of at least a pair of cylindrical members.
  • the method includes the steps of forming an inner chamber including the pair of cylindrical members by aligning the members with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of the members closely spaced apart to form the inner chamber and a narrow passage communicating with the inner chamber between the members.
  • the method further includes the steps of introducing at least one reaction gas into the inner chamber through the narrow passage, wherein, the at least one reaction gas includes at least one element to be deposited, and forming a plasma from the at least one reaction gas within the inner chamber to deposit the layer of material containing the at least one element onto the outer surface of the cylindrical members.
  • the inner chamber can be formed by forming a substantially closed loop of a plurality of the cylindrical members by aligning the members with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of adjacent members closely spaced apart to form the inner chamber substantially closed and a narrow passage between adjacent members communicating with the inner chamber.
  • the at least one reaction gas is then introduced into the inner chamber through at least one of the narrow passages.
  • the reaction gases can include silane (SiH4), silicon tetrafluoride (SiF4), germane (GeH4), germanium tetrafluoride (GeF4), diborane (B2H6), boron trifluoride (BF3), phosphine (PH3), phosphorus pentafluoride (PF3), ammonia (NH3), nitrogen (N2), oxygen (O2) and methane (CH4) or combinations thereof.
  • the plasma within the inner chamber can be formed by coupling microwave energy or radio frequency energy into the inner chamber through a microwave transmission window.
  • Serial No. 580,086 provides an apparatus for depositing a layer of material onto the outer surfaces of at least a pair of cylindrical members.
  • the apparatus includes a substantially closed deposition chamber, means for aligning the members with the longitudinal axes thereof disposed substantially parallel with the outer surfaces of the members closely spaced apart to form a substantially closed inner chamber within the deposition chamber and a narrow passage communicating with the inner chamber between the members.
  • the apparatus further includes means for introducing at least one reaction gas into the inner chamber through the narrow passage wherein the at least one reaction gas includes at least one element to be deposited onto the outer surfaces of the members.
  • the apparatus further includes means for forming a plasma from the at least one reaction gas within the inner chamber to deposit the layer of material containing the at least one element onto the outer surface of the cylindrical members.
  • the apparatus can include means for aligning a plurality of the cylindrical members in a substantially closed loop with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of adjacent members closely spaced apart to form the substantially closed inner chamber and a narrow passage between each pair of members communicating with the inner chamber.
  • the reaction gas introducing means are arranged to introduce the reaction gas into the inner chamber through at least one of the narrow passages.
  • the plasma-forming means includes means for coupling microwave energy into the inner chamber through a microwave transmission window.
  • the apparatus can further include means for rotating the cylindrical members about their own longitudinal axes and means for rotating the microwave energy polarity.
  • the reaction gas introducing means preferably include means for introducing the reaction gas into the inner chamber through at least one of the narrow passages and means for pumping unused reaction gases from the inner chamber through at least one narrow passage other than the narrow passage through which the reaction gas is introduced into the inner chamber.
  • Figs. 1 through 4 describe the method and apparatus claimed in copending application, U.S. Serial No. 580,086 with one radio frequency embodiment, Fig. 5 deleted.
  • the applicability of Serial No. 580,086 to the present invention is described with respect to Figs. 1 through 4 and the additional new disclosure and structures of the present invention are more particularly described with respec to Fig. 5 and the figures and specification thereafter.
  • Fig. 1 it illustrates, in partial cross-sectional side view, an electrophotographic device 10 of the type which can be formed utilizing the present inventin by depositing various materials onto the outer surface of a cylindrical member 12.
  • the cyclindrical member 12 forms the substrate of the electrophotographic device 10.
  • the device 10 includes a first blocking layer 14 deposited onto the substrate 12, a photoconductive layer 16 deposited onto the first blocking layer 14, and a second blocking layer 18 deposited onto the photoconductive layer 16.
  • the photoconductive layer 16 preferably is formed from an amorphous semiconductor alloy and more particularly, an amorphous silicon alloy containing silicon and hydrogen and/or fluorine.
  • the photoconductive region 16 can also include small amounts of a dopant such as boron to provide the region 16 with substantially intrinsic properties. Similarly, the photoconductive region 16 can be rendered slightly n-type without any dopant included.
  • the bottom blocking layer 14 is provided to preclude charge injection from the substrate 12 into the photoconductive region 16.
  • the bottom blocking layer 14 can be made insulative when formed from an amorphous alloy including silicon and carbon, silicon and oxygen, or silicon and nitrogen.
  • reaction gas mixtures of silane (SiH4) and/or silicon tetrafluoride (SiF4) with methane (CH4), ammonia (NH3), nitrogen (N2) or oxygen can be used.
  • Such blocking layers are suitable for both positive and negative charging of the electrophotographic device 10.
  • the bottom electron blocking layer 14 can be, for example, a p-type amorphous silicon alloy formed from reaction gas mixtures including silane and/or silicon tetrafluoride with a p-type dopant-containing compound such as diborane (B2H6) or boron trifluoride (BF3).
  • a p-type dopant-containing compound such as diborane (B2H6) or boron trifluoride (BF3).
  • B2H6 diborane
  • BF3 boron trifluoride
  • the bottom hole blocking layer can be, for example, an amorphous silicon alloy which is n-type.
  • reaction gas mixtures of silane and/or silicon tetrafluoride with an n-type dopant-containing compound, such as phosphine (PH3) or phosphorus pentafluoride (PF5) can be used.
  • the photoconductive layer 16 is preferably formed from an amorphous silicon alloy which is slightly n-type.
  • the top blocking layer 18 can be formed from any of the materials mentioned with respect to the bottom blocking layer 14.
  • the top blocking layer can be formed from an insulative material or a p-type or n-type amorphous semiconductor alloy as previously described above.
  • the photoconductive region 16 preferably is thick in dimension, being on the order of 10 to 25 microns thick to facilitate a sufficient surface potential characteristic of the device.
  • Conventional radio frequency glow discharge deposition techniques are not suitable for forming the entire 10 to 25 microns thick photoconductive region 16.
  • microwave energy excited glow discharge plasmas facilitate the deposition of the photoconductive region 16 at deposition rates which render such devices commercially viable.
  • the apparatus and method of the present invention contemplate an improved utilization of microwave energy for forming a plasma from which the materials of the electrophotographic device can be deposited at such commercially viable rates and with gas feed stock utilization no heretofore possible.
  • the photoconductive region 16 can be formed from both microwave and radio frequency glow discharge plasmas or radio frequency energy could be utilized to ignite the plasma. In the case of utilizing radio frequency to deposit a portion of the region 16, the major portion of the photoconductive region 16 can be formed from the microwave energy glow discharge plasma and the remaining or top portion of the photoconductive region 16 can then be formed from the radio frequency glow discharge plasma.
  • the apparatus and method accommodates both modes of operation in order to facilitate the making of electrophotographic copier drums having desired photoresponsive and charge retention characterisitics to render the devices especially useful for electrophotographic copying.
  • FIGs. 2 and 3 they illustrate an apparatus 20, which can embody the present invention adapted for depositing a layer or layers of material, preferably amorphous semiconductor alloys, onto a plurality of drums or cylindrical members 12.
  • the apparatus 20 includes a deposition chamber 22.
  • the chamber 22 includes a pump-out port 24 adapted for suitable connection to a pump for pumping out reaction products from the chamber and to maintain the interior of the chamber at an appropriate pressure to facilitate the deposition process therein.
  • the chamber 22 further includes a plurality of reaction gas input ports 26, 28, and 30 through which reactin gases are introduced into the depositon environment in a manner to be described hereinafter.
  • the chambe 22 includes a pair of upstanding walls 34 and 36 which support thereacross a plurality of stationary shafts 38.
  • Each of the drums 12 is mounted for rotation on a respective one of the shafts 38 by a pair of disc-shaped spacers 40 and 42.
  • the spacers 40 and 42 have an outer dimension corresponding to the inner dimension of the drums 12 to thereby make frictional engagement with the inner surfaces of the drums 12 for accurately positioning the drums with respect to one another.
  • the spacers 40 include a sprocket 44 arranged to engate a drive chain 46.
  • the drive chain 46 makes a continuous loop around the sprockets 44 and a drive sprocket 48 of a motor 50.
  • the drums 12 are illustrated as having the support and drive mechanisms within the chamber 22, this structure can be external to the chamber 22 with appropriate vacuum feedthrough seals where desired.
  • each of the drums 12 is rotated about its onw longitudinal axis. This facilitates a uniform deposition of the material being deposited over the entire outer surface of each of the drums 12.
  • the drums 12 are disposed so that the outer surfaces thereof are closely spaced apart to form the inner chamber 32.
  • the reaction gases from which the deposition plasma is formed are introduced into the inner chamber 32 through at least one of a plurality of narrow passages 52 formed between one pair of adjacent drums 12.
  • the reaction gases are introduced into the inner chamber 32 through every other one of the narrow passages 52.
  • the plasma is confined within the inner chamber 32.
  • the plasma changes in intensity as the surfaces of the drums 12 are rotated into and then out of the chamber 32. This can result in defects being formed in the weaker plasma regions in or adjacent the narrow passages 52.
  • the drums 12 can be rotated a single or several revolutions to achieve a deposited high quality material of the thickness desired. For example, the drums 12 can only be rotated a single revolution to deposit the required material thickness to form the bottom blocking layer 14.
  • each pair of adjacent drums 12 is provided with a gas shroud 54.
  • Each shroud 54 is connected to one of the reaction gas inlets 26, 28, and 30 by a conduit 56.
  • Each shroud 54 defines a reaction gas reservoir 58 adjacent the narrow passage through which the reaction gas is introduced.
  • the shrouds 54 further include lateral extensions 60 which extend from opposite sides of the reservoirs 58 and along the circumference of the drums 12 to form narrow channels 62 between the shroud extensions 60 and the outer surfaces of the drums 12.
  • the shrouds 54 are configured as described above so that the gas reservoirs 58 permit relatively high reaction gas conduction while the narrow channels 62 provide a high resistance or low conduction of the reaction gases.
  • the vertical conductance of the reaction gas reservoirs 58 is much greater than the conductance of the narrow passage 52 between the drums.
  • the conductance of the narrow passages 52 is much greate than the conductance of the narrow channel 62. This assures that a large percentage of the reaction gas will flow into the inner chamber 32 and uniform gas flow along the entire lateral extent of the drums 12.
  • the shrouds 54 further include side portions 64 which overlap end portions of the drums 12 and spacers 42 and 44.
  • the side portions 64 are closely spaced from the end portions of the drums 12 and spacers 42 and 44 to continue the narrow channels 62 across the ends of the drums. The side portions 64 thereby impede reaction gas flow around the ends of the drums. It has been discovered by Applicants that the apparatus 20 can be utilized withoug the shrouds 54.
  • the narrow passages 66 which are not utilized for reaction gas introduction into the inner chamber 32 are utilized for conducting reaction products from the inner chamber 32 and the chamber 22.
  • the pump which is coupled to the pump-out port 24 is energized, the interior of the chamber 22 and the inner chamber 32 is pumped out, with the inner chamber being pumped out through the narrow passages 66. In this manner, reaction products can be extracted from the chamber 22 and the interior of the inner chamber 32 can be maintained at a suitable pressure for deposition.
  • the apparatus 20 further includes a first microwave energy source 70 and a second microwave energy source 72.
  • Each of the microwave energy sources 70 and 72 includes an antenna stub 74 and 76, respectively.
  • the microwave energy sources 70 and 72 can be, for example, microwave frequency magnetrons having an output frequency of, for example, 2.45 GH z .
  • the magnetrons 70 and 72 are mounted to a cylindrical waveguide structure 78 and 80, respectively.
  • the stubs 74 and 76 are spaced from back walls 79 and 81 of the waveguides 78 and 80 by a distance of about one-quarter of the waveguide wavelength.
  • the waveguide structures 78 and 80 are mounted for rotation onto another waveguide 82 and 84, respectively.
  • the waveguides 82 and 84 project into the chamber 22 and terminate in close proximity to the edge portions of the drums 12.
  • the end portions of the waveguides 82 and 84 include a lip portion 86 and 88.
  • a sealing O-ring 90 and 92 each of which, together with the lip portions 86 and 88, supports a respective microwave transmission window 94 and 96.
  • the transmission windows 94 and 96 together with the drums 12 define the substantially closed inner chamber 32.
  • the present invention can be utilized to maximize and stabilize the microwave power transmitted through the windows 94 and 96.
  • the waveguides 78 and 82 form a coupling means for coupling the microwave energy generated by the magnetron 70 into the inner chamber 32.
  • the waveguides 80 and 84 define a coupling means for coupling the microwave energy generated by magnetron 72 into the inner chamber 32.
  • the microwave energy generated by the magnetrons 70 and 72 is radiated by the antenna stubs 74 and 76, which determine the polarization of the radiated microwave energy.
  • the antenna stubs preferably are displaced from each other by an angle. In accordance with this preferred embodiment, the angle between the stubs is about 60°.
  • the angle of displacement between the antenna stubs 74 and 76 will vary. The reason for this is that it is preferred that the antenna stubs be disposed with respect to the drums 12, so that each stub forms an identical and uniform microwave energy field within the inner chamber 32.
  • the windows 94 and 96 in addition to enclosing the inner chamber 32, protect the magnetrons 70 and 72 from the reaction gases. They further serve to preclude the formation of a plasma at the magnetron probes 74 and 76 and they also provide a low loss coupling of the microwave energy into the inner chamber 32.
  • the windows 94 and 96 can be formed from a material such as alumina, and have a thickness which provides low reflected power into the waveguides 82 and 84.
  • each magnetron can be energized sequentially. For example, if alternating current is being utilized to energize the magnetrons, the magnetrons can be energized during alternate half cycles of the alternating current. In this manner, the interaction between the magnetrons can be further diminished.
  • the waveguides 78 and 80 are mounted for rotation on their respective waveguides 82 and 84.
  • each of the magnetron sources 70 and 72 can be rotated about the longitudinal axis of the waveguides 82 and 84 to rotate the polarity of the microwave energy to even out the microwave field.
  • Such rotation assures that the time average density of depositing species is radially uniform.
  • the polarization could also be circular to even out the field.
  • the drums 12 are first mounted as illustrated and as described above. Thereafter, reaction gases are introduced through the inlet ports 26, 28, and 30 while the chamber 22 is pumped out by the pump coupled to the outlet 24. With the reaction gases introduced into the inner chamber 32, the magnetrons 70 and 72 are then energized to couple microwave frequency energy into the inner chamber 32 to form a glow discharge plasma therein. The microwave energy is readily coupled into the inner chamber 32, because the inner chamber itself defines a waveguide structure at microwave frequencies.
  • the motor 50 is then energized to cause the drums 12 to be rotated about their own longitudinal axes.
  • the magnetrons 70 and 72 can then also be rotated about the waveguides 82 and 84 as previously described. As a result of the foregoing, a uniform deposition of material will ensue upon the entire outer surfaces of the drums 12.
  • the apparatus 20 further includes a plurality of heating elements 100 which are mounted to the stationary shafts 38 by spacers 102. Since the shafts 38 are stationary, the heating elements 100 will also be stationary within the drums 12.
  • the heaters 100 can take the form of resistance heating elements or incandescent lamps.
  • the drums are preferably heated to a temperature between 20°C and 400°C, and preferably, about 300°C. It can also be desirable to preheat the reaction gases prior to introduction thereof into the inner chamber 32. This can be accomplished, for example, by heating the shrouds 54 to about 300°C by slug heaters incorporated therein or lamps disposed adjacent the shrouds 54 external to the deposition region.
  • the first blocking layer 14 can be formed from an insulative material, a p-type amorphous silicon alloy, or an n-type amorphous silicon alloy.
  • the blocking layer 14 is formed from an insulative material such as silicon nitride, silicon carbide, or silicon dioxide
  • the reaction gases introduced into the inner chamber during the deposition process can be silane (SiH4) and /or silicon tetrafluoride (SiF4) with methane, nitrogen, ammonia, or oxygen.
  • SiH4 silane
  • SiF4 silicon tetrafluoride
  • Such a blocking layer can be utilized for both positive and negative charging of the electrophotographic drum.
  • the reaction gases introduced into the inner chamber 32 can be silane and/or silicon tetrafluoride with diborane or boron trifluoride.
  • a blocking layer is suitable for an electrophotographic drum to be positively charged.
  • the reaction gases introduced into the iner chamber can be silane and/or silicon tetrafluoride and phosphine or phosphorus pentafluoride gas.
  • a blocking layer is suitable for an electrophotographic device to be negatively charged.
  • the photoconductive region 16 can be an amorphous silicon alloy incorporating silicon, hydrogen, and/or fluorine. Such a material can be deposited from reaction gases of silane, and/or silicon tetrafluoride, and hydrogen. If the photoconductive region is to be rendered substantially intrinsic, boron trifluoride or diborane gas can also be utilized. If it is to be slightly n-type, no dopant is utilized.
  • a layer of material in the photoconductive region 16 towards the top thereof which has a more narrow band gap than the bulk of the photoconductive region may also be desirable to incorporate a layer of material in the photoconductive region 16 towards the top thereof which has a more narrow band gap than the bulk of the photoconductive region.
  • germane (GeH4) or germanium tetrafluoride (GeF4) gas can also be introduced into the inner chamber 32.
  • the germane or garmanium tetrafluoride together with the silane and/or silicon tetrafluoride will form an amorphous silicon germanium alloy having a reduced band gap for infrared photoresponsive applications.
  • a top blocking enhancement layer can be deposited before the top blocking layer 18 by RF deposition.
  • any of the materials and gas mixtures previously referred to form the bottom blocking layer 14 can be utilized.
  • a plasma-sustaining gas such as argon.
  • the pressure within the inner chamber should be about .05 Torr or less.
  • FIG. 4 it illustrates another apparatus 110 which can embody the present invention.
  • the apparatus 110 in the major respects thereof is essentially identical to the apparatus 20 of Fig. 2. Therefore, the apparatus 110 will be described only to the extent of the difference between the apparatus 110 and the apparatus 20 of Fig. 2.
  • the apparatus 110 includes a single source of microwave energy, magnetron 70.
  • the other magnetron has been removed and a plate 112 is substituted therefor.
  • the plate 112 makes contact with a cylindrical tube 114 which supports the window 96 at its end opposite the plate 112 and a wall 116 intermediate its ends.
  • a single magnetron 70 can be utilized for coupling microwave energy into the inner chamber 31. Again, during the deposition, the magnetron 70 can be rotated about the waveguide 82 to rotate the polarization of the microwave field.
  • the apparatus 110 includes a cylindrical waveguide structure 120 formed from a wire mesh or screen.
  • the waveguide structure 120 is disposed within the inner chamber 32 and preferably is closely spaced with respect to the drums 12.
  • the waveguide structure 120 can be utilized to provide a more uniform and continuous waveguide structure and thereby provide more efficient propogation of the microwave energy within the inner chamber 32.
  • the waveguide structure 120 will decrease the gas utilization efficiency of the system by a small amount inasmuch as deposition will take place on the waveguide structure 120.
  • the peaks 150 and 152 are mode shifts in the transmission window. Because of the high dielectric constant of the window material, such a alumina, the optical size of the window (in this example, four inches in diameter) is large enough to sustain four propagation modes.
  • the magnetron operating frequency is, in the examples illustrated, 2.45 GHz. Other frequencies can be utilized in accordance with the invention.
  • the cut-off frequency of the fifth propagation mode was determined to be substantially at the operating frequency.
  • the deposition or other plasma system can be operated satisfactorily with whatever number of modes are propagated through the window, however, it appears that the system does not operate properly if the microwave propagation energy switches randomly from one mode to another. This can cause an unstable plasma condition which can vary the deposition parameters and can result in the plasma going into the off condition.
  • a further operating condition which must be taken into account is illustrated in the graph of Fig. 7.
  • the plasma intensity (1) is related to the reflected power (R) by an operating curve 154.
  • a point of minimum R 156 would appear to be the optimum operating condition, since the point 156 is the lowest lost R point.
  • a compromise operating region 158 is chosen in which to operate the system, which is a slightly higher R loss region, but which is a stable plasma operating region.
  • a microwave transmission window 160 is mounted in one end of a microwave transmission system 162.
  • a plasma (not shown) will exist on the free side of the window 160.
  • a pair of tuning structures 164 and 166 embody the present invention. As illustrated, each of the structures 164 and 166 are formed from a plurality of separate segments 168, which preferably are formed from the same dielectric material as the window 160 to provide the required low loss tuning structures.
  • the segments can be disks 168 or can be any other shape such as a rectangle 168 ⁇ .
  • the size of the segments 168 and the heights of the tuning structures 164 and 166 are adjusted to achieve both high transmission through the window and a stable plasma mode excitation.
  • the structures 164 and 166 then are fixed such as by tape or other adhesive and the window 160 is then tuned for the desired system operation.
  • the segments 168 and tape or adhesive are selected to have minimum microwave absorption properties and can be formed from the same materials as the window 160 or from other suitable dielectric material.
  • the system is tuned for a compromise between the plasma off and on conditions, but at a level which will still allow for the plasma to be ignited, although a separate RF or other signal could be utilized to ignite the plasma.
  • the tuning structures 164 and 166 provide substantially the lowest possible power loss, because the structures are placed onto the surface of the window 160 itself. Any tuning structure, such as the conventional stub which is placed close to, but separate from the window 160, will result in power being reflected between the stub and the window resulting in heating of the system and hence a power loss. Referring to Figs.
  • the widths of the segments 168 are chosen to move the magnetron operating frequency to a midpoint between the peaks 150 and 152 to provide a stable operating region between the peaks. Further, the height of the tuning structures 164 and 166 is selected to move the operating R point towards a minimum amount (Figs. 5A and 5B).
  • alumina is a preferably window material when depositing silicon
  • other types of plasma which do not contain silicon such as a plasma etching system could use other dielectric materials, such as quartz.
  • quartz is not a preferable material when utilizing silicon, since the window 160 must be cooled to prevent the silicon deposited on the window surface from crystallizing, which can cause thermal runaway and hence require a shut down of the system operation.
  • Alumina or another dielectric material with high thermal conductivity is thus preferred for utilization with a silicon depositing plasma.
EP86118180A 1986-02-03 1986-12-31 Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters Withdrawn EP0231531A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US82547186A 1986-02-03 1986-02-03
US825471 1986-02-03

Publications (2)

Publication Number Publication Date
EP0231531A2 true EP0231531A2 (de) 1987-08-12
EP0231531A3 EP0231531A3 (de) 1988-10-05

Family

ID=25244073

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86118180A Withdrawn EP0231531A3 (de) 1986-02-03 1986-12-31 Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters

Country Status (2)

Country Link
EP (1) EP0231531A3 (de)
JP (1) JPS62219524A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115966863A (zh) * 2022-12-30 2023-04-14 浙江工业大学 一种大功率微波窗组件

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5038712A (en) * 1986-09-09 1991-08-13 Canon Kabushiki Kaisha Apparatus with layered microwave window used in microwave plasma chemical vapor deposition process
JP3748473B2 (ja) 1996-12-12 2006-02-22 キヤノン株式会社 堆積膜形成装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU171885A1 (de) *
US2706275A (en) * 1946-01-21 1955-04-12 Jr Melville Clark Transmission line windows having high voltage breakdown characteristic
US3728650A (en) * 1971-07-23 1973-04-17 Raytheon Co Ghost-mode shifted dielectric window
EP0151754A2 (de) * 1984-02-14 1985-08-21 Energy Conversion Devices, Inc. Verfahren zur Herstellung eines fotoleitfähigen Elementes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0154160B2 (de) * 1984-02-14 1992-10-21 Energy Conversion Devices, Inc. Verfahren und Vorrichtung zur Herstellung elektrophotographischer Geräte

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU171885A1 (de) *
US2706275A (en) * 1946-01-21 1955-04-12 Jr Melville Clark Transmission line windows having high voltage breakdown characteristic
US3728650A (en) * 1971-07-23 1973-04-17 Raytheon Co Ghost-mode shifted dielectric window
EP0151754A2 (de) * 1984-02-14 1985-08-21 Energy Conversion Devices, Inc. Verfahren zur Herstellung eines fotoleitfähigen Elementes

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, vol. MTT-14, no. 3, March 1966, pages 162-164; D.B. MILLER: "An expertimental X-band electron-cyclotron-resonance plasma accelerator" *
MICRONOTES, vol. 5, no. 3, September/October 1967, Microwave Associates, Inc., Burlington, Massachesetts, US; "Design of High Power Microwave Windows" *
SOVIET INVENTIONS ILLUSTRATED, group C, April 1966, page 6, no. 171885, Derwent Publications Ltd, London, GB; & SU-A-17 1885 (SVIRIDOV), 29-07-1965 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115966863A (zh) * 2022-12-30 2023-04-14 浙江工业大学 一种大功率微波窗组件

Also Published As

Publication number Publication date
JPS62219524A (ja) 1987-09-26
EP0231531A3 (de) 1988-10-05

Similar Documents

Publication Publication Date Title
EP0154160B2 (de) Verfahren und Vorrichtung zur Herstellung elektrophotographischer Geräte
US4729341A (en) Method and apparatus for making electrophotographic devices
US4521447A (en) Method and apparatus for making layered amorphous semiconductor alloys using microwave energy
US6096389A (en) Method and apparatus for forming a deposited film using a microwave CVD process
US4619729A (en) Microwave method of making semiconductor members
EP0334000B1 (de) Verfahren zur Herstellung eines wesentlich aus Silizium und/oder anderen Gruppe IV-Elementen bestehenden Films mittels Mikrowellen-Plasma chemischer Dampfabscheidung
US5629054A (en) Method for continuously forming a functional deposit film of large area by micro-wave plasma CVD method
EP0106698A2 (de) Verfahren und Gerät zur Herstellung von geschichteten amorphen Halbleiterlegierungen unter Benutzung der Mikrowellenenergie
DE69431115T2 (de) Verfahren zur verbesserten mikrowellenbeschichtung dünner filme
EP0230788B1 (de) Verfahren zur Herstellung eines vielschichtigen strukturierten Films
US4719123A (en) Method for fabricating periodically multilayered film
US5567241A (en) Method and apparatus for the improved microwave deposition of thin films
US5976257A (en) Apparatus for continuously forming a large area deposited film by means of microwave plasma CVD process
EP0151754B1 (de) Verfahren zur Herstellung eines fotoleitfähigen Elementes
US20080090022A1 (en) High rate, continuous deposition of high quality amorphous, nanocrystalline, microcrystalline or polycrystalline materials
US4914052A (en) Process for the formation of a functional deposited film containing groups III and V atoms by microwave plasma chemical vapor deposition process
EP0231531A2 (de) Anpassungsverfahren und -vorrichtung eines Mikrowellen durchlassenden Fensters
US5433790A (en) Deposit film forming apparatus with microwave CVD method
US4715927A (en) Improved method of making a photoconductive member
JP2706995B2 (ja) マイクロ波プラズマｃｖｄ法による多結晶半導体膜の形成方法
JPH06216039A (ja) マイクロ波プラズマｃｖｄ装置
JP2962840B2 (ja) マイクロ波プラズマｃｖｄ法により大面積の機能性堆積膜を連続的に形成する方法及び装置
US4745000A (en) Method of fabricating electrostatic drums using microwave energy
JP2554867B2 (ja) マイクロ波プラズマｃｖｄ法による機能性堆積膜形成装置
JPH04187772A (ja) 堆積膜形成方法及び堆積膜形成装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH DE ES FR GB GR IT LI LU NL SE

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH DE ES FR GB GR IT LI LU NL SE

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19890406

RIN1 Information on inventor provided before grant (corrected)

Inventor name: BJORNARD, ERIK J.

Inventor name: JOHNCOCK, ANNETTE G.

Inventor name: FOURNIER, EUGENE W.

Inventor name: DOEHLER, JOACHIM