EP0205381A1 - Elektrofluidischer Düsen-/Prallplattenwandler und Servoventil, versehen mit einem derartigen Wandler - Google Patents

Elektrofluidischer Düsen-/Prallplattenwandler und Servoventil, versehen mit einem derartigen Wandler Download PDF

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Publication number
EP0205381A1
EP0205381A1 EP86401193A EP86401193A EP0205381A1 EP 0205381 A1 EP0205381 A1 EP 0205381A1 EP 86401193 A EP86401193 A EP 86401193A EP 86401193 A EP86401193 A EP 86401193A EP 0205381 A1 EP0205381 A1 EP 0205381A1
Authority
EP
European Patent Office
Prior art keywords
bimetallic strip
support members
transducer
pallet
faces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86401193A
Other languages
English (en)
French (fr)
Other versions
EP0205381B1 (de
Inventor
Jean-Pierre Lecerf
Charles Favey
Pierre Meurice
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Technique des Industries Mecaniques CETIM
Original Assignee
Centre Technique des Industries Mecaniques CETIM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Centre Technique des Industries Mecaniques CETIM filed Critical Centre Technique des Industries Mecaniques CETIM
Publication of EP0205381A1 publication Critical patent/EP0205381A1/de
Application granted granted Critical
Publication of EP0205381B1 publication Critical patent/EP0205381B1/de
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
    • F15B13/043—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves
    • F15B13/0438—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves the pilot valves being of the nozzle-flapper type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2278—Pressure modulating relays or followers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86582—Pilot-actuated
    • Y10T137/8659—Variable orifice-type modulator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86582—Pilot-actuated
    • Y10T137/8659—Variable orifice-type modulator
    • Y10T137/86598—Opposed orifices; interposed modulator

Definitions

  • the present invention relates to an electro-fluidic transducer of the nozzle / pallet type, in particular for the control of a hydraulic servo-valve from electrical signals.
  • the invention relates more particularly to a transducer in which the movable pallet is constituted by a piezoelectric bimetallic strip at least one of the faces of which cooperates directly with at least one nozzle for controlling, as a function of the deformations of said bimetallic strip caused by said electrical signals , the leak rate of said one or more nozzles.
  • the variation in the leakage rate of the nozzle (s) can be used, in known manner, to control the movements of the slide of a servo-valve.
  • a piezoelectric bimetal strip is composed of two layers of materials separated by a common electrode. In one of the layers, the crystals contract while in the other they expand, which produces a camber of the blade.
  • the bimetallic strip is rigidly embedded, at its two ends or else at only one of them (like a cantilever beam), in a casing containing the nozzles, so as to fix the rest position of the bimetallic strip relative to the nozzles.
  • fixing by embedding can be made over the entire peripheral edge of the bimetallic strip.
  • Servo-valves fitted with such transducers are appreciated for their reliability, due to the small number of parts of the transducer, for their small volumes and weight, and for their very low electrical consumption in static conditions.
  • the object of the present invention is to remedy this drawback and to improve precision and repeatability, thanks to an improved transducer.
  • the Applicant has studied the deformation of the piezoelectric bimetallic strips and has observed that the material cannot be held firmly, by embedding, without counteracting the free expansion or contraction of the crystals and thereby influencing the "deformation" of the bimetallic strip.
  • the microcrystals undergo permanent compression and, at the edge of the embedding, the material undergoes a shearing force through the end edge of the embedding surface.
  • the arrow or the camber of an embedded bimetallic strip is less than the deflection or natural camber that this bimetallic strip could freely take and that, moreover, the deformations are not identical during a complete cycle of variation of the electrical control voltage.
  • the subject of the invention is a transducer of the nozzle / vane type, with piezoelectric bimetallic strip, cooperating directly with the nozzle (s), in which the piezoelectric bimetallic strip is held only in position, facing the nozzle (s), by substantially punctual or linear support members, acting on the two opposite faces of the bimetallic strip, located in the vicinity of the edges of said bimetallic strip, playing the role of pivots and authorizing the free natural deformation of said bimetallic strip over its entire surface under the effect of said signals electric.
  • the invention also relates to hydraulic servo-valves controlled by a transducer / piezo-hydraulic as defined above.
  • Figure 1 is a sectional view of a hydraulic servo valve controlled by a following transducer the invention.
  • the hydraulic servo-valve shown in FIG. 1 essentially comprises an electro-fluidic transducer 2, constituting a pilot stage for a distributor 4. Such a servo-valve can be used to control a receiving device, for example a double-acting hydraulic cylinder 6.
  • the transducer 2 comprises two nozzles or nozzles 8, 8 ', fixed in a casing 10, which open directly opposite the two faces of a pallet or bimetallic strip piezoelectric 12 receiving the electrical control signal by a conductor 14.
  • the deformation of the pallet 12 modifies the leakage ratio between the two nozzles 8, 8 '.
  • the distributor 4 can be of any known type. It comprises for example a switching slide 16 closing or uncovering the high pressure and low pressure lines 18, 20 as well as the use lines 22, 24 going to the jack 6.
  • the slide 16 is centered by springs 26, 26 'and delimits, at its two ends, pressure chambers 28, 28 'which are in communication, by conduits 30, 32, 30', 32 'with the nozzles 8, 8'.
  • the pallet 12 is mounted "floating" in a chamber 33 limited by the walls of the casing 10, that is to say without any embedding of a part of the pallet in a rigid support, for example in the walls of the casing 10.
  • the pallet 12 is held only in position, facing the nozzles 8, 8 ', by substantially punctual or linear support members forming a suspension of the ball type.
  • the first supports 'on one of the faces of the pallet, are constituted by two supports, in the form of an edge , 34, 34 'integral with a first wall of the casing 10.
  • Second supports on the opposite face of the pallet, are constituted by elastic pressers 36, 36 ', applied against the pallet by springs 38, and whose heads are spherical, or cylindrical, to minimize friction and allow a "rolling" of the pallet on the pressers.
  • the elastic pressers 36, 36 ' are supported by the second wall of the casing 10.
  • the first members 34 form substantially linear supports
  • the second members 36 form substantially punctual supports
  • the first and second support members being located opposite one another, on the two opposite faces of the pallet, in the vicinity of the edges from the palette.
  • Adjustment stops or shims 40, 40 ′ can be provided in the casing 10 to ensure the longitudinal centering of the pallet 12 in the casing.
  • FIG. 2 there is shown diagrammatically, in FIG. 2, on an enlarged scale, the floating mounting system, on only one of the edges of the pallet 12, the pallet being represented in solid lines in its flat position of rest and in broken lines in its curved position (considerably exaggerated) under the effect of an electric voltage. It can be seen that, when it deforms, the pallet pivots without friction around the edge of the fixed support 34 and pushes the movable elastic pusher 36, without, practically, the free deformation of the pallet being hampered, as happened with the paddles embedded in the housing.
  • the fixed support 42 no longer has a sharp edge, but a cylindrical support surface (or spherical in the case of a point support) so that there is a rolling of the surface of the pallet against the surface of the support member.
  • the support members may be formed (on one or both sides of the pallet 12) by balls 44 of elastic material or, in the case of the use of a pallet of circular shape, by circular joints in elastic material.
  • the support members are constituted by fingers 46, 46 ', with a spherical or cylindrical head, the fingers 46 forming the fixed supports, while the fingers 46' are pressed elastically against the pallet 12 by springs 38.
  • the support members of the pallet 12 consist of pairs of two metal balls 48, 48 ′ housed in cavities 50, 50 ′ hollowed out in the walls of the housing 10 of the transducer.
  • the balls form, for the pallet, a ball suspension which does not impede the free deformation of the pallet.
  • support members which have been described can be combined together, for example a metal ball (FIG. 6) facing an elastic ball (FIG. 4), or opposite an elastic pusher such as 46 'in Figure 5.
  • the number of pairs of support members may vary depending on the shape of the pallet. For example, for a rectangular pallet, one can use (FIG. 1) two pairs of support members each comprising a linear support (34) and a point support (36), or else three or four pairs of support organs. occasional support ( Figures 4, 5 and 6).
  • transducers comprising a nozzle or nozzle opposite each of the faces of the piezoelectric bimetallic strip, the two nozzles operating differently.
  • the invention also applies, of course, to the case where the transducer comprises only a single nozzle 8 facing one of the faces of the pallet 12, as shown schematically in FIG. 7. Again , the pallet 12 is held in place by a floating assembly comprising ball bearings 34, 34 'and 36, 36', for example similar to those of FIG. 1.
  • FIG. 8 shows an embodiment of a transducer comprising a single nozzle 8 facing the pallet 12, the latter having a circular shape and not a rectangular shape.
  • the casing 10 is formed by two assembled parts 10, 10 '.
  • the part 10 ′ of the casing has a projecting circular lip 52, for example having a rounded profile, which constitutes a continuous line of support points on which bears the lower face of the pallet 12 and against which this lower face can move by rolling during deformation of the pallet.
  • the second supports on the opposite face of the pallet 12, are constituted by a circular joint with round section 54, of elastic material, which is positioned in a circular groove 56 hollowed out in the part 10 of the casing.
  • the circular pallet 12 is thus supported, in a floating manner, without embedding, in the vicinity from its peripheral edge, by two continuous circular support lines facing each other.
  • FIG. 9 A variant of this arrangement, for the same transducer, is partially shown in FIG. 9 where the projecting circular lip 52 ', formed in the part 10' of the casing, has an edge profile.
  • the pallet 12 is then free to pivot around this edge, as has been explained in connection with FIGS. 1 and 2, this edge forming a continuous line of support points.
  • the second support members may be constituted by a plurality (for example 3) of pushers 46 ′, with a spherical head, subjected to the action of springs 38 ′ and similar to what is shown in FIG. 5.
  • FIG. 10 a floating assembly of a pallet 12 is shown schematically in a casing 10 by means of a mechanical support 34 in the form of an edge, on one of the faces of the pallet, and by means of a hydrostatic nozzle. 58, supplied with pressurized liquid through a conduit 60.
  • the suspension is made hydrostatically, by nozzles 58, 58 ′, on the two faces of the pallet 12, the latter being kept centered in the casing 12 by centering shims 40.
  • a plurality of hydrostatic stops for example three equiangularly distributed
  • the nozzles preferably supplying hydrostatic grooves or "pockets" as is usual for fluid bearings.
  • the hydrostatic suspension system above is advantageous, because it gives a sufficiently stiff suspension, without imposing any mechanical friction on the pallet, which leaves it with its entire natural freedom of deformation.
  • the hydraulic fluid under High pressure for example 100 to 400 bar
  • the bimetallic strip operates in the hydraulic fluid (oil) which fills the chamber 33 of the casing, as in the cases where the pallet support system is mechanical or elastic.
  • FIGS. 12A, 12B, 12C it is also possible to use, as shown in FIGS. 12A, 12B, 12C, an ornate pallet 12 having cutouts 62 leaving at least one free strip 64 between them, on which no support member acts.
  • the support members have been shown diagrammatically by arrows 66, 66 ', 66 ", these support members possibly being of any of the types described in the foregoing.
  • each active strip 64 of the bimetallic strip can be associated with a nozzle or with two nozzles, the locations of which have been indicated 68.
  • the support members have been symbolized by arrows 66.
  • Each strip 64 can be electrically decoupled from its neighbors by cutting a part of the electrodes according to grooves 70 or 70 'judiciously arranged so as to decouple the mechanical interaction of the bimetallic strips 12 between them, each active strip receiving its electrical signal by a separate conductor 14, 14 ', 14 ".
  • each active strip 64 can be fixed in a two-support version, the location 68 of the nozzle (or nozzles) being located between two supports. But, as it is represented in FIGS.
  • each strip 64 can be fixed by simple support, in the manner of a cantilever beam, the location 68 of the nozzle then being at the free end of the blade to benefit, vis-à-vis the nozzle, from the total deformation of the bimetallic strip.
  • An attachment similar to a cantilever attachment can also be achieved with a pallet 12 of simple, elongated rectangular shape, as is schematically shown in FIG. 14, where the deformation of the pallet 12 has been considerably exaggerated.
  • two fixed supports 34, 34 ' close together, are provided in the vicinity of one of the edges 72 of the pallet and cooperate with opposite elastic supports 36, 36' while the nozzles 8, 8 'cooperate rent with the pallet 12 in the vicinity of its free edge 74, so as to use all of the deformation of the bimetallic strip over substantially its entire length.
  • the floating mounting system of the bimetallic strip according to the invention without any embedding, makes it possible to obtain a much higher "displacement / control voltage" ratio and to reduce to a very great extent the hysteresis phenomenon.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
  • Special Spraying Apparatus (AREA)
EP86401193A 1985-06-10 1986-06-04 Elektrofluidischer Düsen-/Prallplattenwandler und Servoventil, versehen mit einem derartigen Wandler Expired EP0205381B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8508713 1985-06-10
FR8508713A FR2583115B1 (fr) 1985-06-10 1985-06-10 Transducteur electrofluidique du type buse/palette et servovalve hydraulique equipee d'un tel transducteur

Publications (2)

Publication Number Publication Date
EP0205381A1 true EP0205381A1 (de) 1986-12-17
EP0205381B1 EP0205381B1 (de) 1989-05-24

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ID=9320039

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86401193A Expired EP0205381B1 (de) 1985-06-10 1986-06-04 Elektrofluidischer Düsen-/Prallplattenwandler und Servoventil, versehen mit einem derartigen Wandler

Country Status (4)

Country Link
US (1) US4705059A (de)
EP (1) EP0205381B1 (de)
DE (1) DE3663569D1 (de)
FR (1) FR2583115B1 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0504465A1 (de) * 1991-03-21 1992-09-23 MOOG GmbH Fluidischer Wandler mit Piezo-Antrieb
FR2690623A1 (fr) * 1992-04-29 1993-11-05 Chronotec Techsonic Dispositif de contrôle de débit pour systèmes de perfusion.
CN101328913B (zh) * 2007-06-21 2010-09-08 北京航空航天大学 一种新型智能压电型高速开关阀
CN110805583A (zh) * 2019-10-15 2020-02-18 南京航空航天大学 带主阀芯液动力补偿的压电片驱动喷嘴挡盘压力伺服阀

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DE3738630C2 (de) * 1987-11-13 1995-06-08 Rexroth Mannesmann Gmbh Elektrohydraulische Druckwandlervorrichtung
CH675752A5 (de) * 1988-10-25 1990-10-31 Sulzer Ag
US4903732A (en) * 1989-01-19 1990-02-27 A. K. Allen Company Piezoelectric valve
DE4105062C2 (de) * 1990-09-19 1997-01-23 Helmut Prof Dipl Ing Hoenicke Elektropneumatischer Stellungsregler mit Pulsbreitenansteuerung
US5203537A (en) * 1992-03-09 1993-04-20 Teledyne Industries, Inc. Piezoceramic valve actuator sandwich assembly and valve incorporating such an assembly
US5593134A (en) * 1995-02-21 1997-01-14 Applied Power Inc. Magnetically assisted piezo-electric valve actuator
US5630440A (en) * 1995-02-21 1997-05-20 Applied Power Inc. Piezo composite sheet actuated valve
US8048386B2 (en) 2002-02-25 2011-11-01 Cepheid Fluid processing and control
KR100453993B1 (ko) * 2001-10-09 2004-10-20 경원훼라이트공업 주식회사 압전밸브
GB0211508D0 (en) * 2002-05-20 2002-06-26 New Transducers Ltd Transducer
JP2006502361A (ja) * 2002-10-04 2006-01-19 ピービーティー（アイピー）リミテッド 比例出力を伴うガスバルブ
US6959921B2 (en) * 2003-01-13 2005-11-01 Arvinmeritor Technology, Llc Temperature responsive valve assembly for a pneumatic spring
DE502005002235D1 (de) * 2005-08-23 2008-01-24 Festo Ag & Co Fluidbetätigter Stellungsregler
JP5232714B2 (ja) * 2008-08-08 2013-07-10 三菱重工業株式会社 サーボ弁
TR201810253T4 (tr) 2011-03-15 2018-08-27 Moog Controls Ltd Servo valf aktüasyonundaki gelişmeler.
GB201313804D0 (en) * 2013-08-01 2013-09-18 Moog Controls Ltd Improvements in hydraulic servovalves
US9739393B2 (en) 2014-02-05 2017-08-22 Pentair Flow Control Ag Valve controller with flapper nozzle pilot valve
JP6286307B2 (ja) * 2014-07-24 2018-02-28 Ｋｙｂ株式会社 方向制御弁
WO2016081191A1 (en) * 2014-11-19 2016-05-26 Vistadel Tek, Llc Valve stroke amplification mechanism assembly
US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
WO2018226596A1 (en) 2017-06-05 2018-12-13 Vistadeltek, Llc Control plate for a high conductance valve
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
EP3502486B1 (de) * 2017-12-22 2020-10-28 Hamilton Sundstrand Corporation Servoventil
EP3587831A1 (de) * 2018-06-25 2020-01-01 Microtecnica S.r.l. Hydraulische stufe
US11608840B2 (en) * 2018-08-21 2023-03-21 Michael Yuan Piezoelectric ring bender servo valve assembly for aircraft flight control actuation and fuel control systems

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EP0046431A1 (de) * 1980-08-19 1982-02-24 Societe D'optique, Precision Electronique Et Mecanique - Sopelem Elektrohydraulisches Servoventil

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0504465A1 (de) * 1991-03-21 1992-09-23 MOOG GmbH Fluidischer Wandler mit Piezo-Antrieb
FR2690623A1 (fr) * 1992-04-29 1993-11-05 Chronotec Techsonic Dispositif de contrôle de débit pour systèmes de perfusion.
WO1993021977A1 (fr) * 1992-04-29 1993-11-11 Chronotec S.A.R.L. Dispositif de controle de debit pour systemes de perfusion
US5582590A (en) * 1992-04-29 1996-12-10 Hauser; Jean-Lue Flow control device for infusion systems
CN101328913B (zh) * 2007-06-21 2010-09-08 北京航空航天大学 一种新型智能压电型高速开关阀
CN110805583A (zh) * 2019-10-15 2020-02-18 南京航空航天大学 带主阀芯液动力补偿的压电片驱动喷嘴挡盘压力伺服阀
CN110805583B (zh) * 2019-10-15 2021-07-09 南京航空航天大学 带主阀芯液动力补偿的压电片驱动喷嘴挡盘压力伺服阀

Also Published As

Publication number Publication date
US4705059A (en) 1987-11-10
FR2583115B1 (fr) 1989-03-10
EP0205381B1 (de) 1989-05-24
FR2583115A1 (fr) 1986-12-12
DE3663569D1 (en) 1989-06-29

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