EP0137908A1 - Système de distribution sans contamination pour un liquide de grande pureté - Google Patents

Système de distribution sans contamination pour un liquide de grande pureté Download PDF

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Publication number
EP0137908A1
EP0137908A1 EP84106644A EP84106644A EP0137908A1 EP 0137908 A1 EP0137908 A1 EP 0137908A1 EP 84106644 A EP84106644 A EP 84106644A EP 84106644 A EP84106644 A EP 84106644A EP 0137908 A1 EP0137908 A1 EP 0137908A1
Authority
EP
European Patent Office
Prior art keywords
liquid
container
reservoir
dispenser
high purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84106644A
Other languages
German (de)
English (en)
Inventor
William Russell Schevey
John Joseph Williams
Laurence Dewald Bobbin
Peter Edward Baxter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Allied Corp
Original Assignee
Allied Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Allied Corp filed Critical Allied Corp
Publication of EP0137908A1 publication Critical patent/EP0137908A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B67OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67BAPPLYING CLOSURE MEMBERS TO BOTTLES JARS, OR SIMILAR CONTAINERS; OPENING CLOSED CONTAINERS
    • B67B7/00Hand- or power-operated devices for opening closed containers
    • B67B7/24Hole-piercing devices
    • B67B7/26Hole-piercing devices combined with spouts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B3/00Packaging plastic material, semiliquids, liquids or mixed solids and liquids, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B3/04Methods of, or means for, filling the material into the containers or receptacles

Definitions

  • contaminants may be introduced when the liquid in the bulk container, for which great care has been expended to avoid impurities, is withdrawn using dip tubes which may be exposed to contaminants through repeated use; or when contact is made with contaminated dispensing equipment that comes into contact with the opening of the container, or its liquid is being dispensed from the opening, of the shipping container; or when the container is recapped to preserve the balance of unused contents for later use.
  • the contaminant comes from sources that are oftentimes difficult to trace or it may even come from contaminated air which displaces the liquid withdrawn from the container.
  • a quantity of liquid is allowed to remain in the bulk (shipping) container when the change to a fresh container is made. This precludes the possibility of introducing unwanted air into the system as well as impurities with the air which would contaminate the liquid.
  • such residual amounts of liquid which is left in the container and discarded, in the aggregate constitute a considerable economic waste.
  • U.S. Patent 3,941,270 discloses a bulk liquid container with a seal which may be perforated by a hollow spike perforator when the liquid from the container is to be dispensed.
  • the top of the bulk container is inverted on the perforating device to remove the liquid impervious seal and allow the liquid to flow.
  • considerable risk of contamination is present at the contact between the container opening, which is relatively loose fitting and which sometimes results in premature perforation of the seal.
  • the invention comprises a container devised for secure shipment and dispensing of a high purity liquid, a dispenser having a liquid reservoir for dispensing the liquid and a valving means to prevent entry of air into the line through which the liquid is withdrawn from the dispenser.
  • the dispenser is closed against contamination and is provided with a float or other means to stop flow of the liquid when the liquid therein is near depletion.
  • the dispenser is provided with a puncturing device to perforate the seal of a bulk (shipping) container from which the liquid is introduced into the dispenser.
  • the dispenser and bulk container are provided with mating mechanical interlocking means, such as mating threads, so that as the container is positioned on the dispenser, perforation of the seal on the bulk container occurs when the container is inserted on the opening of the dispenser and then locked to prevent contamination.
  • mating mechanical interlocking means such as mating threads
  • the dispenser of the invention comprises a container preferably with a slanted or interior concave bottom having a suitable capacity such as about 3 liters or more.
  • a flow control means is used such as a float valve which leads to a feed tube attached outside the container.
  • the feed tube leads to a pump which delivers high purity liquid, such as a photoresist to a coating or other dispensing equipment used for example in semi-conductor manufacturing.
  • the float valve closes when the liquid level becomes low, thus shutting off flow and eliminating the possibility of air entering the feed tube.
  • the top of the dispensing container is removable and contains in its center a fitting which has a depressed center with drain holes that permit liquid material to flow into the container.
  • a hollow perforating or puncturing device which is hollow and contains openings to permit liquid to flow into the container through the drain holes in the fitting.
  • the bulk shipping container or bottle of high purity liquid, such as photoresist, used in the system of the invention utilizes a cap with a round hole in the center which exposes a perforatable flexible plastic cap liner which seals the container.
  • a second larger set of threads match threads on the interior of the center fitting and enable the bottle of photoresist to be rigidly held in place once it is seated.
  • an outer protective cap is removed from the bulk container or bottle, exposing the bottle cap with the perforatable plastic cap liner.
  • the shipping bottle is inverted and the puncturing device is pushed into the center hole of the cap and into the bottle.
  • the flexible cap liner is pushed aside or perforated and the liquid flows into the dispenser reservoir.
  • the float valve which controls flow from the reservoir then rises, permitting flow of the liquid into the feed tube of the pump.
  • the bottle Once the bottle is empty, it can be removed and replaced by a full bottle.
  • the capacity of the dispenser reservoir permits continuous operation of the dispensing equipment, even if an empty bottle is not immediately replaced by a full bottle of the high purity liquid.
  • the dispenser may employ a sight glass or other gauge to signal the level of the high purity liquid in the dispenser reservoir.
  • the system comprises a dispenser unit shown generally at 20 which is adapted to receive a bulk container shown generally at 10 in which the high purity liquid is shipped.
  • the system is devised to receive the mouth or nozzle 16 of the shipping container or bottle 10 while it is still in a sealed condition into a receiving adaptor 22 of the dispenser 20.
  • the seal 34 on the bottle opening is perforated when the bottle opening is positioned on the puncture mechanism 48 and interlocked by rotating it as will be described hereafter in greater detail. This interlocking precludes contamination during the transfer from the bulk container to the dispenser 20.
  • the dispenser 20 comprises a container which may generally be cylindrical in cross-section having a reservoir 21 of suitable capacity, for example 3 liters or more.
  • the reservoir 21 is preferably formed so that it has a domed bottom 21a to better utilize the liquid remaining in the reservoir as the liquid nears depletion.
  • the reservoir may also be formed to have a slanted bottom as shown at 21b in FIG. 6.
  • a float valve shown in phantom at 26, which leads to a feed tube 28 attached outside the dispenser container 20.
  • the feed tube 28 may lead to a pump (not shown) which delivers photoresist to the coating or other equipment.
  • the float valve 26 shown in greater detail in FIG. 5 closes when the liquid level becomes low, thus shutting off flow and eliminating the possibility of air entering the feed tube 28.
  • the top of the dispensing container 20 is removable and contains in its center a fitting 22 which has a depressed center with drain holes 42 that permit liquid material to flow into the container reservoir 21.
  • a round pointed puncturing device 40 which will be described by reference to FIGS. 4 and 5.
  • the puncturing device 40 is also perforated at 41 to permit liquid flow into the container through the interior of the puncturing device 40.
  • the bottles of high purity liquid used with this invention utilize a cap 17 with a round hole in the center 17a which exposes a perforatable plastic cap liner held on a first set of threads 18.
  • a second larger set of threads 14 match threads on the interior of the center fitting and enable the bottle of photoresist to be rigidly held in place once it is seated on the dispenser.
  • an outer protective over cap 11 is removed from the shipping container or bottle 10, exposing the bottle cap 17 with the plastic cap liner or seal 30.
  • the bottle 10 is inverted and the puncturing device 40 penetrates the seal 30 which comprises an inner seal 34 and an outer seal member 32, the latter preferably is provided with a central perforation as described in greater detail in U.S. Patent 3,941,270.
  • the puncturing device 40 penetrates the seal 30 which comprises an inner seal 34 and an outer seal member 32, the latter preferably is provided with a central perforation as described in greater detail in U.S. Patent 3,941,270.
  • the puncture mechanism penetrating the cap 17 and pushing aside the seal 30, it is rotated locking threads 14 and 24.
  • the liquid flows into the container reservoir 21 from the opening thus provided.
  • the float valve 26 rises, permitting flow into the feed tube 28 to the pump (not shown).
  • the bottle Once the bottle is empty, it can be removed and replaced by a full bottle.
  • the capacity of the dispenser reservoir permits continuous operation of the equipment even if an empty bottle is not immediately replced by a full bottle of photoresist.
  • the float valve shown in FIG. 5 is typical and comprises a body 50 containing therein a float 51 formed with precision mating surfaces to effect a tight seal between the surfaces 50a and 51a when the float is in the down position.
  • the float 51 is in the elevated position resting against the retainer rod 52 which keeps the float 51 in place.
  • Liquid enters the annular space 53 from the top at 54 and/or from openings 55 in the sides of the body 5U.
  • the float sits on the mating body (base) surface 50a and shuts off flow to tubing 28 (FIG. 1).
  • the function of the float valve as will be apparent to one skilled in the art, and may be performed by other flow control means such as a level control operating a solenoid valve 63 (shown in FIG. 6).
  • the bottle or bulk container 10 is appropriately sealed to maintain high purity of the liquid during shipment.
  • the flexible liquid impervious sealing member 30 comprises first and second adjacent flexible discs 32 and 34 respectively.
  • the first disc 32 may be provided with a centrally located circular perforation as shown by reference to U.S. Patent 3,941,270 and the second disc is imperforate and covers the circular perforation in the first disc.
  • the circular perforation in the first disc is provided so that the tip of the puncture mechanism 40 will engage the pertoration and carry the first disc 32 and adjacent second disc 34 away from the top wall of the screw closure cap 17 so that after the discs are removed, they will not interfere with flow ot liquid from the container through the perforate portion 17a of the top wall 17b.
  • a single flexible sealing disc may be used. However, a pair of discs is preferred. When more than one disc is used, the first disc 32 provides support for the second disc 34 and therefore may be less flexible than the second disc.
  • the second disc 34 may be gas permeable so that if the liquid in the container produces gas upon exposure to heat or light, the gas will pass through.
  • the sealing disc combination 30 may include additional elements. For example, when the second disc is a thin gas permeable disc it may be disposed between third and fourth discs which are provided for structural support of the second disc with the third and fourth discs provided with centrally located slits, the third disc being in contact with the first end of the cylindrical member and the fourth disc being disposed between the first and second discs.
  • the thickness, properties and character, e.g. gas permeability, of the seal elements are selected to provide the necessary protection under ambient conditions.
  • the sealing member 3U may be removed from the open end of the bulk container 10 by applying pressure upon the sealing member 30.
  • pressure is applied by the perforator 40, the sealing member disengages or is perforated thus permitting communication through the perforate portion through the perforator 40 to the dispenser reservoir 21 from the bottle 10.
  • the pressure may be applied through the perforate portion by a hollow spike perforator 40 which is provided with openings 41 to permit entry of liquid from the hollow portion into the hollow spike 40 for carrying the liquid through the hollow spike to the dispenser reservoir 21.
  • the hollow spike 40 is conveniently attached to a supporting surface 22 by suitable means.
  • the supporting fixture 22 is secured on the reservoir cover 23.
  • the solenoid operated level control 60 comprises a sensor 61 which is partially submerged and senses the liquid level 62. When the level falls below the predetermined level 62a, the level sensor 60 causes solenoid valve 63 to close until the liquid level is again raised, thus preventing air from entering piping 28.
  • FIG. 7 illustrates a cone shaped reservoir 65 provided with a valve 26a and discharge tube 28a which correspond in function to valve 26 and line 28 respectively described by reference to FIG. 1.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Devices For Dispensing Beverages (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
EP84106644A 1983-08-18 1984-06-09 Système de distribution sans contamination pour un liquide de grande pureté Withdrawn EP0137908A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52426383A 1983-08-18 1983-08-18
US524263 1983-08-18

Publications (1)

Publication Number Publication Date
EP0137908A1 true EP0137908A1 (fr) 1985-04-24

Family

ID=24088470

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84106644A Withdrawn EP0137908A1 (fr) 1983-08-18 1984-06-09 Système de distribution sans contamination pour un liquide de grande pureté

Country Status (3)

Country Link
EP (1) EP0137908A1 (fr)
JP (1) JPS6058393A (fr)
CA (1) CA1205784A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0440477A1 (fr) * 1990-01-31 1991-08-07 George Ray Dispositif de remplissage pour récipient aérosol
GB2268168A (en) * 1992-06-23 1994-01-05 Orbital Engine Refilling oil reservoirs
EP2930564A1 (fr) * 2014-04-11 2015-10-14 Suss MicroTec Lithography GmbH Système d'alimentation de bouteille et dispositif d'ouverture de bouchon de bouteille
FR3108325A1 (fr) * 2020-03-20 2021-09-24 Le Mans Process Agro Dispositif d’extraction d’un contenu fluide à partir de récipient réalisé en au moins un matériau apte à être perforé

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01254597A (ja) * 1988-04-05 1989-10-11 Sanden Corp 後混合炭酸飲料分配装置の調合弁装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1346898A (en) * 1916-02-07 1920-07-20 Kingsbury John Mclean Fluid-flow-control mechanism
DE1081682B (de) * 1955-05-14 1960-05-12 Siemens Ag Fluessigkeitsstandregler mit Vorhalt
US3929157A (en) * 1974-06-17 1975-12-30 Juan R Serur Fluid flow regulator
US3941270A (en) * 1974-01-25 1976-03-02 Allied Chemical Corporation Removable seal for liquid containers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1346898A (en) * 1916-02-07 1920-07-20 Kingsbury John Mclean Fluid-flow-control mechanism
DE1081682B (de) * 1955-05-14 1960-05-12 Siemens Ag Fluessigkeitsstandregler mit Vorhalt
US3941270A (en) * 1974-01-25 1976-03-02 Allied Chemical Corporation Removable seal for liquid containers
US3929157A (en) * 1974-06-17 1975-12-30 Juan R Serur Fluid flow regulator

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0440477A1 (fr) * 1990-01-31 1991-08-07 George Ray Dispositif de remplissage pour récipient aérosol
US5377724A (en) * 1990-01-31 1995-01-03 Ray; George F. Aerosol can filler
GB2268168A (en) * 1992-06-23 1994-01-05 Orbital Engine Refilling oil reservoirs
US5392828A (en) * 1992-06-23 1995-02-28 Orbital Engine Company Pty. Limited Refillable liquid reservoir
EP2930564A1 (fr) * 2014-04-11 2015-10-14 Suss MicroTec Lithography GmbH Système d'alimentation de bouteille et dispositif d'ouverture de bouchon de bouteille
US9458002B2 (en) 2014-04-11 2016-10-04 Suss Microtec Lithography Gmbh Bottle supply system and bottle cap adapter
FR3108325A1 (fr) * 2020-03-20 2021-09-24 Le Mans Process Agro Dispositif d’extraction d’un contenu fluide à partir de récipient réalisé en au moins un matériau apte à être perforé

Also Published As

Publication number Publication date
CA1205784A (fr) 1986-06-10
JPS6058393A (ja) 1985-04-04

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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17P Request for examination filed

Effective date: 19851016

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 19870101

RIN1 Information on inventor provided before grant (corrected)

Inventor name: SCHEVEY, WILLIAM RUSSELL

Inventor name: WILLIAMS, JOHN JOSEPH

Inventor name: BOBBIN, LAURENCE DEWALD

Inventor name: BAXTER, PETER EDWARD