EP0110534B1 - Combinaison monolithe avec plaque d'orifices à jet d'encre et résistance - Google Patents

Combinaison monolithe avec plaque d'orifices à jet d'encre et résistance Download PDF

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Publication number
EP0110534B1
EP0110534B1 EP19830306269 EP83306269A EP0110534B1 EP 0110534 B1 EP0110534 B1 EP 0110534B1 EP 19830306269 EP19830306269 EP 19830306269 EP 83306269 A EP83306269 A EP 83306269A EP 0110534 B1 EP0110534 B1 EP 0110534B1
Authority
EP
European Patent Office
Prior art keywords
orifice plate
orifice
resistor
ink
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP19830306269
Other languages
German (de)
English (en)
Other versions
EP0110534A3 (en
EP0110534A2 (fr
Inventor
Frank L. Cloutier
Robert N. Low
Paul H. Mcclelland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of EP0110534A2 publication Critical patent/EP0110534A2/fr
Publication of EP0110534A3 publication Critical patent/EP0110534A3/en
Application granted granted Critical
Publication of EP0110534B1 publication Critical patent/EP0110534B1/fr
Expired legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter

Definitions

  • This invention relates to a new type of orifice plate/resistor combination for use in bubble-driven ink jet print heads and a method of manufacture.
  • the background with regard to bubble-driven ink jet printing comprises U.K. patent application serial No. 8217720 and U.S. patent nos. 4,243,994; 4,296,421; 4,251,824; 4,313,124; 4,325,735; 4,330,787; 4,334,234; 4,335,389; 4,336,548; 4,338,611; 4,339,762; and 4,345,262.
  • the basic concept there disclosed is a device having an ink-containing capillary, an orifice plate with an orifice for ejecting ink, and an ink heating mechanism, generally a resistor, in close proximity to the orifice.
  • the ink heating mechanism is quickly heated, transferring a significant amount of energy to the ink, thereby vaporizing a small portion of the ink and producing a bubble in the capillary. This in turn creates a pressure wave which propels an ink droplet or droplets from the orifice onto a closeby writing surface.
  • the bubble quickly collapses before any ink vapor can escape from the orifice.
  • the construction of the devices is typically of multiple part structures.
  • a substance is provided on which resistors and conductors are deposited. Then, a separate orifice plate is attached to the substrate, with meticulous attention being paid to ensure accurate alignment of the various parts.
  • the orifices extend within the thickness of the orifice plate in direction parallel to the surface thereof.
  • the orifices open to a side edge of the orifice plate.
  • the critical distance between the resistor and the opening is established by cutting the tip end part of the orifice plate, which will create debris at the cutting area. This may result in misfunction of the orifice.
  • a problem underlying the invention is to provide a method of making a bubble-driven thermal ink jet print head in which the method steps and their sequence are chosen such that the making of the print heads is simplified in particular with respect to the critical alignment of the distance between the orifice openings and the resistors. This problem is accomplished by the features of claim 1.
  • a monolithic orifice plate/resistor combination for which the active elements can be easily aligned using standard mask aligning equipment.
  • an orifice plate is formed, typically a flat sheet with orifices therein.
  • a passivation layer is then grown on the sheet, and the resistors and conductors to supply them are deposited onto the passivation layer using standard IC techniques.
  • a spacer may then be attached to the passivation layer to define capillary channels for ink flow and to provide increased hydraulic impedance between resistors, thus completing the structure for the monolithic orifice plate/ resistor combination.
  • a completed print head is then made by attaching a sheet of material to the spacer to supply a back to the device and to form the closure for the capillary channels defined by the spacers.
  • FIG. 1 shown in Figure 1 is an orifice/ resistor combination having monolithic resistors 13 and 15, conductors 17, 19, and 21 and orifice 23 and 25 for use in constructing a bubble-driven ink jet printer.
  • the present invention begins with an orifice plate, and the resistors and conductors are formed thereon.
  • Figure 2 illustrates an early stage in the construction of the orifice/ resistor combination 11, the view being the cross-section A-A of Figure 1.
  • the construction typically begins with an orifice plate 27 made of a metal which has the orifices 23 and 25 formed therein.
  • the orifice plate 27 is made by electroforming, although sheet stock can also be used.
  • metals for the orifice plate 27 include nickel, copper, beryllium-copper, titanium, molybdenum, 300 series stainless steel, and alloy 42; the most preferable being nickel.
  • Typical thicknesses for the orifice plate 25 range from about 2 to 4 mils (.051 to .102 mm).
  • the orifices 23 and 25 can be formed by etching or laser drilling, but more preferably are formed at the same time that the orifice plate is formed by overplating onto a non-conductive barrier which defines the shape of the orifice. (See co-pending patent application EP-A-0110532).
  • a passivation layer 29 is grown on its surface to provide electrical insulation and to protect the orifice plate from chemical attack from the inks to be used.
  • Typical materials used for the passivation layer 29 include dielectrics such as Si0 2 , SiO x Ny, A1 2 0 3 and Ti0 2 , generally having a thickness in the range of 0.5 to 1.5 microns; the preferred thickness being dependent on the thermal conductivity of the chosen material.
  • the resistors 13 and 15, and the electrical conductors 17, 19, and 21 are formed on the passivation layer 29 according to standard thin film techniques.
  • the preferred resistance is about 60 ohms and the preferred surface dimensions of the resistors are about 2.5 x 6 mils (.064 x .152 mm).
  • a second passivation layer 30 is applied to the surface over the resistors and conductors to provide electrical insulation and cavitation protection according to standard techniques.
  • a patterned spacer layer 31 having thickness in the range of 1.5 to 5 mils (.038 x .127 mm) (preferably about 2 mils (.051)), is applied to the passivation layer 29.
  • Typical materials for the patterned spacer layer include resists such as Vacrel or Riston (tradenames of Dupont), solder glass, screened glass bead filled epoxy, polyimides, or even electroplated metals.
  • the purpose of the patterned spacer layer 31 is to provide a capillary channel for directing the flow of ink over the resistors and to provide a measure of hydraulic separation by interposing a system 33 between adjacent orifices to avoid cross-talk during operation.
  • the direction of ink flow is illustrated by the arrows labelled "D" in Figure 1.
  • a suitable back 35 as shown in Figure 4, is then attached firmly to the patterned spacer layer 31 to contain the ink and to provide an ink feed port 37.
  • the back 35 includes an ink manifold 39 as illustrated in Figures 4 and 5 for providing a closeby volume of ink.
  • Figure 5 shows a cross-section of the back 35 through the section line A-A.
  • the back 35 is shown as a sheet having a uniform thickness, such a uniform thickness is unnecessary and can vary considerably depending on the desired mechanical characteristics, e.g., if it is to serve as a stiffener or pin body.
  • FIG. 6 A cross-section of a completed print head constructed by the above method is illustrated in Figure 6 as it would appear at the section B-B shown in Figures 1 and 4. Shown therein is the back 35 and the manifold 39, atop the spacer 31 to create an ink capillary 43.
  • the typical distance "L” between the center of the resistor 13 and the closest point of the manifold 39 is about 20 mils (0.51 mm), with the typical height "T” of the manifold 39 being in the range of 2-: to 5 mils (.064 to .127 mm).
  • the distance "F” approximately 10 to 20 mils (.025 to .051 mm), corresponding to the distance between the midpoint of the resistor 13 and the center of the orifice 23.
  • the second passivation layer 30 is also best seen from this perspective.
  • Figure 7 is an illustration of the completed device as it appears from the side where ink is ejected, showing the orifices 23 and 25.

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Claims (11)

1. Procédé pour fabriquer une tête d'impression thermique à jet d'encre, commandée par des bulles et comportant une plaque perforée (27), dans laquelle se trouve ménagé au moins un orifice (23, 25) servant à éjecter des gouttelettes d'encre, au moins une résistance (13, 15) qui est disposée sur ladite plaque perforée à proximité directe dudit orifice, et des conducteurs électriques (17, 19, 21) qui sont disposés sur ladite plaque perforée (27) de manière à envoyer une énergie à ladite résistance (13, 15), caractérisé en ce que l'on prépare tout d'abord la plaque perforée (27) en ménageant l'orifice (23, 25) dans une direction transversale par rapport à la plaque perforée, et qu'on utilise ensuite la plaque perforée en tant que substrat pour former la résistance (13, 15) dans une position alignée par rapport à l'orifice (23, 25).
2. Procédé selon la revendication 1, caractérisé en ce qu'une pluralité desdits orifices est ménagée dans ladite plaque perforée.
3. Procédé selon la revendication 2, caractérisé en ce qu'une pluralité desdits résistances à couches minces est formée sur ladite plaque perforée, chaque résistance correspondant à un orifice respectif.
4. Procédé selon la revendication 3, caractérisé par l'étape opératoire consistant à former des séparateurs hydrauliques (31) sur ladite plaque perforée, entre des résistances voisines de manière à accroître l'impedance hydraulique entre les résistances et à définir des canaux pour l'encre, permettant d'amener de l'encre jus- qu'auxdites résistances.
5. Procédé selon l'une quelconque des revendications précédentes, caractérisé par l'étape opératoire consistant à fixer ladite plaque perforée sur un substrat de manière à former une tête d'impression à jet d'encre, commandée par des bulles.
6. Procédé selon la revendication 5, caractérisé en ce que la plaque perforée est fixée au substrat en en étant espacée de manière à permettre l'écoulement de l'encre jusqu'à la résistance et à l'orifice ou jusqu'à résistance et chaque orifice.
7. Procédé selon l'une quelconque des revendications précédentes, caractérisé en ce qu'on forme une couche de passivation (29) sur ladite plaque perforée avant de former la ou chaque résistance sur cette plaque, la ou les résistance(s) et les conducteurs électriques étant formés sur ladite couche de passivation.
8. Tête d'impression thermique à jet d'encre, commandée par des bulles, comprenant une plaque perforée (27), dans laquelle se trouve ménagé au moins orifice (23, 25) servant à éjecter de l'encre, au moins une résistance (13, 15) qui est disposée à proximité directe dudit orifice (23, 25), et des conducteurs électriques (17, 19, 21) qui sont disposés sur ladite plaque perforée (27) de manière à envoyer une énergie à ladite résistance, caractérisée en ce que la résistance (13,15) et les conducteurs (17, 19, 21) sont disposés sur une couche de passivation (29) recouvrant la plaque perforée (27) et que la résistance (13, 15) est alignée par rapport à l'orifice (23, 25), qui s'étend transversalement à travers l'épaisseur de ladite plaque perforée (27).
9. Tête d'impression à jet d'encre selon la revendication 8, caractérisée en ce qu'il est prévu une pluralité d'orifices (23, 25) et de résistances (13, 15).
10. Tête d'impression à jet d'encre selon la revendication 9, caractérisée en ce qu'une couche de séparation (31) comportant une pluralité de barrières d'arrêt de l'encre, servant à introduire une impédance hydraulique entre lesdites résistances (13, 15) et à distribuer ladite encre aux résistances (13, 15) est supportée par la plaque perforée (27).
11. Tête d'impression à jet d'encre selon l'une des revendications 8 à 10, caractérisée en ce que la plaque perforée (27) forme,en association avec les résistances (13, 15), un support pour un réservoir d'encre (39) et une plaque de renfort (35).
EP19830306269 1982-11-23 1983-10-14 Combinaison monolithe avec plaque d'orifices à jet d'encre et résistance Expired EP0110534B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44397282A 1982-11-23 1982-11-23
US443972 1982-11-23

Publications (3)

Publication Number Publication Date
EP0110534A2 EP0110534A2 (fr) 1984-06-13
EP0110534A3 EP0110534A3 (en) 1985-01-09
EP0110534B1 true EP0110534B1 (fr) 1987-08-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP19830306269 Expired EP0110534B1 (fr) 1982-11-23 1983-10-14 Combinaison monolithe avec plaque d'orifices à jet d'encre et résistance

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EP (1) EP0110534B1 (fr)
JP (1) JPS5995157A (fr)
DE (1) DE3373069D1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0471157B1 (fr) * 1990-08-16 1995-08-09 Hewlett-Packard Company Composants obtenus par photo-ablation pour tête d'impression à jet d'encre
US5451251A (en) * 1993-02-26 1995-09-19 Canon Kabushiki Kaisha Ink, and ink-jet recording method and instrument using the same
US6435659B1 (en) 2000-06-05 2002-08-20 Hewlett-Packard Company Inkjet inks which improve drop-velocity stability and prolong resistor life in inkjet pens
KR100438842B1 (ko) * 2002-10-12 2004-07-05 삼성전자주식회사 금속 노즐 플레이트를 가진 일체형 잉크젯 프린트헤드 및그 제조방법
KR101220272B1 (ko) * 2003-12-30 2013-01-09 후지필름 디마틱스, 인크. 액적 분사 조립체
US7121646B2 (en) * 2003-12-30 2006-10-17 Dimatix, Inc. Drop ejection assembly
JP5058719B2 (ja) * 2007-08-30 2012-10-24 キヤノン株式会社 液体吐出ヘッド及びインクジェット記録装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590376A (en) * 1978-12-28 1980-07-08 Canon Inc Multicolor liquid jet device
JPS55121080A (en) * 1979-03-14 1980-09-17 Canon Inc Recording head
US4336548A (en) * 1979-07-04 1982-06-22 Canon Kabushiki Kaisha Droplets forming device
US4429321A (en) * 1980-10-23 1984-01-31 Canon Kabushiki Kaisha Liquid jet recording device
JPS57102366A (en) * 1980-12-18 1982-06-25 Canon Inc Ink jet head

Also Published As

Publication number Publication date
EP0110534A3 (en) 1985-01-09
DE3373069D1 (en) 1987-09-24
EP0110534A2 (fr) 1984-06-13
JPS5995157A (ja) 1984-06-01

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