EP0110534A2 - Combinaison monolithe avec plaque d'orifices à jet d'encre et résistance - Google Patents

Combinaison monolithe avec plaque d'orifices à jet d'encre et résistance Download PDF

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Publication number
EP0110534A2
EP0110534A2 EP83306269A EP83306269A EP0110534A2 EP 0110534 A2 EP0110534 A2 EP 0110534A2 EP 83306269 A EP83306269 A EP 83306269A EP 83306269 A EP83306269 A EP 83306269A EP 0110534 A2 EP0110534 A2 EP 0110534A2
Authority
EP
European Patent Office
Prior art keywords
orifice plate
ink
orifice
resistor
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP83306269A
Other languages
German (de)
English (en)
Other versions
EP0110534A3 (en
EP0110534B1 (fr
Inventor
Frank L. Cloutier
Robert N. Low
Paul H. Mcclelland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of EP0110534A2 publication Critical patent/EP0110534A2/fr
Publication of EP0110534A3 publication Critical patent/EP0110534A3/en
Application granted granted Critical
Publication of EP0110534B1 publication Critical patent/EP0110534B1/fr
Expired legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter

Definitions

  • This invention relates to a new type of orifice plate/ resistor combination for use in bubble-driven ink jet print heads and a method of manufacture.
  • the ink heating mechanism is quickly heated, transferring a significant amount of energy to the ink, thereby vaporizing a small portion of the ink and producing a bubble in the capillary. This in turn creates a pressure wave which propels an ink droplet or droplets from the orifice onto a closeby writing surface.
  • the bubble quickly collapses before any ink vapor can escape from the orifice.
  • the construction of the devices is typically of multiple part structures.
  • a substrate is provided on which resistors and conductors are deposited. Then, a separate orifice plate is attached to the substrate, with meticulous attention being paid to ensure accurate alignment of the various parts.
  • the present invention provides a method of making a bubble-driven thermal ink jet print head, comprising selecting a sheet of material for an orifice plate, forming an orifice in said sheet for ejecting droplets of ink, and characterized by the steps of forming a resistor on said orifice plate in close proximity to said orifice, and forming electrical conductors on said orifice plate for supplying power to said resistor.
  • a plurality of said thin film resistors is formed on said orifice plate, each resistor corresponding to a respective orifice.
  • the orifice plate is attached to the substrate in spaced apart manner to permit the flow of ink to the or each resistor and orifice.
  • a passivation layer is formed on said orifice plate prior to formation of the or each resistor thereon, the resistors and electrical conductors being formed on said passivation layer.
  • the present invention further provides an orifice plate for a bubble driven ink jet printer comprising a sheet of material, an opening in said material for permitting the ejection of ink, and characterized by passivation means on said sheet for providing electrical insulation, and heating means located on said passivation layer for creating bubbles in said ink.
  • said heating means comprises a plurality of heating sources.
  • An orifice as set forth in either one of the last two immediately preceding paragraphs may further comprise separator means for distributing said ink to said heating means.
  • said separator means comprises a plurality of ink barriers for introducing hydraulic impedance between said heating sources.
  • a monolithic orifice plate/resistor combination for which the active elements can be easily aligned using standard mask aligning equipment.
  • an orifice plate is formed, typically a flat sheet with orifices therein.
  • a passivation layer is then grown on the sheet, and the resistors and conductors to supply them are deposited onto the passivation layer using standard IC techniques.
  • a spacer is then attached to the passivation layer to define capillary channels for ink flow and to provide increased hydraulic impedance between resistors, thus completing the structure for the monolithic orifice plate/ resistor combination.
  • a completed print head is then made by attaching a sheet of material to the spacer to supply a back to the device and to form the closure for the capillary channels defined by the spacers.
  • FIG. 1 shown in Figure 1 is an orifice/resistor combination 11 having monolithic resistors 13 and 15, conductors 17, 19, and 21 and orifice 23 and 25 for use in constructing a bubble-driven ink jet printer.
  • the present invention begins with an orifice plate, and the resistors and conductors are formed thereon.
  • Figure 2 illustrates an early stage in the construction of the orifice/resistor combination 11, the view being the cross-section A-A of Figure 1.
  • the construction typically begins with an orifice plate 27 made of a metal which has the orifices 23 and 25 formed therein.
  • the orifice plate 27 is made by electroforming, although sheet stock can also be used.
  • metals for the orifice plate 27 include nickel, copper, beryllium-copper, titanium, molybdenum, 300 series stainless steel, and alloy 42; the most preferable being nickel.
  • Typical thicknesses for the orifice plate 25 range from about 2 to 4 mils (.051 to .102mm).
  • the orifices 23 and 25 can be formed by etching or laser drilling, but more preferably are formed at the same time that the orifice plate is formed by overplating onto a non-conductive barrier which defines the shape of the orifice.
  • a passivation layer 29 is grown on its surface to provide electrical insulation and to protect the orifice plate from chemical attack from the inks to be used.
  • Typical materials used for the passivation layer 29 include dielectrics such as Si0 2 , SiO x Ny, A120 3 and Ti02, generally having a thickness in the range of 0.5 to 1.5 microns; the preferred thickness being dependent on the thermal conductivity of the chosen material.
  • the resistors 13 and 15, and the electrical conductors 17, 19, and 21 are formed on the passivation layer 29 according to standard thin film techniques.
  • the preferred resistance is about 60 ohms and the preferred surface dimensions of the resistors are about 2.5 X 6 mils (.064 x .152mm).
  • a second passivation layer 30 is applied to the surface over the resistors and conductors to provide electrical insulation and cavitation protection according to standard techniques.
  • a patterned spacer layer 31 having thickness in the range of 1.5 to 5 mils (.038 x .127mm) (preferably about 2 mils (.051mm)), is applied to the passivation layer 27.
  • Typical materials for the patterned spacer layer include resists such as Vacrel or Riston (tradenames of Dupont), solder glass, screened glass bead filled epoxy, polyimides, or even electroplated metals.
  • the purpose of the patterned spacer layer 31 is to provide a capillary channel for directing the flow of ink over the resistors and to provide a measure of hydraulic separation by interposing a system 33 between adjacent orifices to avoid cross-talk during operation.
  • the direction of ink flow is illustrated by the arrows labelled "D" in Figure 1.
  • a suitable back 35 is then attached firmly to the patterned spacer layer 31 to contain the ink and to provide an ink feed port 37.
  • the back 35 includes an ink manifold 39 as illustrated in Figures 4 and 5 for providing a closeby volume of ink.
  • Figure 5 shows a cross-section of the back 35 through the section line A-A.
  • the back 35 is shown as a sheet having a uniform thickness, such a uniform thickness is unnecessary and can vary considerably depending on the desired mechanical characteristics, e.g., if it is to serve as a stiffener or pin body.
  • FIG. 6 A cross-section of a completed print head constructed by the above method is illustrated in Figure 6 as it would appear at the section B-B shown in Figures 1 and 4. Shown therein is the back 35 and the manifold 39, atop the spacer 31 to create an ink capillary 43.
  • the typical distance "L” between the center of the resistor 13 and the closest point of the manifold 39 is about 20 mils (0.51mm), with the typical height "T" of the manifold 39 being in the range of 2-1/2 to 5 mils (.064 to .127mm).
  • the distance "F” approximately 10 to 20 mils (.025 to .051mm), corresponding to the distance between the midpoint of the resistor 13 and the center of the orifice 23.
  • the second passivation layer 30 is also best seen from this perspective.
  • Figure 7 is an illustration of the completed device as it appears from the side where ink is ejected, showing the orifices 23 and 25.

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP19830306269 1982-11-23 1983-10-14 Combinaison monolithe avec plaque d'orifices à jet d'encre et résistance Expired EP0110534B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44397282A 1982-11-23 1982-11-23
US443972 1982-11-23

Publications (3)

Publication Number Publication Date
EP0110534A2 true EP0110534A2 (fr) 1984-06-13
EP0110534A3 EP0110534A3 (en) 1985-01-09
EP0110534B1 EP0110534B1 (fr) 1987-08-19

Family

ID=23762944

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19830306269 Expired EP0110534B1 (fr) 1982-11-23 1983-10-14 Combinaison monolithe avec plaque d'orifices à jet d'encre et résistance

Country Status (3)

Country Link
EP (1) EP0110534B1 (fr)
JP (1) JPS5995157A (fr)
DE (1) DE3373069D1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0471157A1 (fr) * 1990-08-16 1992-02-19 Hewlett-Packard Company Composants obtenus par photo-ablation pour tête d'impression à jet d'encre
EP1407884A1 (fr) * 2002-10-12 2004-04-14 Samsung Electronics Co., Ltd. Tête d'impression par jet d'encre monolithe à plaque à orifices métallique et son procédé de fabrication
US7121646B2 (en) * 2003-12-30 2006-10-17 Dimatix, Inc. Drop ejection assembly
WO2005065331A3 (fr) * 2003-12-30 2006-12-28 Dimatix Inc Dispositif d'ejection de gouttes
EP2030791A1 (fr) * 2007-08-30 2009-03-04 Canon Kabushiki Kaisha Tête d'éjection de liquide, appareil d'impression à jet d'encre et procédé d'éjection de liquide

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5451251A (en) * 1993-02-26 1995-09-19 Canon Kabushiki Kaisha Ink, and ink-jet recording method and instrument using the same
US6435659B1 (en) 2000-06-05 2002-08-20 Hewlett-Packard Company Inkjet inks which improve drop-velocity stability and prolong resistor life in inkjet pens

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2088286A (en) * 1980-10-23 1982-06-09 Canon Kk Liquid jet recording device
US4336548A (en) * 1979-07-04 1982-06-22 Canon Kabushiki Kaisha Droplets forming device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590376A (en) * 1978-12-28 1980-07-08 Canon Inc Multicolor liquid jet device
JPS55121080A (en) * 1979-03-14 1980-09-17 Canon Inc Recording head
JPS57102366A (en) * 1980-12-18 1982-06-25 Canon Inc Ink jet head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4336548A (en) * 1979-07-04 1982-06-22 Canon Kabushiki Kaisha Droplets forming device
GB2088286A (en) * 1980-10-23 1982-06-09 Canon Kk Liquid jet recording device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0471157A1 (fr) * 1990-08-16 1992-02-19 Hewlett-Packard Company Composants obtenus par photo-ablation pour tête d'impression à jet d'encre
EP1407884A1 (fr) * 2002-10-12 2004-04-14 Samsung Electronics Co., Ltd. Tête d'impression par jet d'encre monolithe à plaque à orifices métallique et son procédé de fabrication
US7073891B2 (en) 2002-10-12 2006-07-11 Samsung Electronics Co., Ltd. Monolithic ink-jet printhead having a metal nozzle plate and manufacturing method thereof
US7121646B2 (en) * 2003-12-30 2006-10-17 Dimatix, Inc. Drop ejection assembly
WO2005065331A3 (fr) * 2003-12-30 2006-12-28 Dimatix Inc Dispositif d'ejection de gouttes
EP2030791A1 (fr) * 2007-08-30 2009-03-04 Canon Kabushiki Kaisha Tête d'éjection de liquide, appareil d'impression à jet d'encre et procédé d'éjection de liquide
US7938511B2 (en) 2007-08-30 2011-05-10 Canon Kabushiki Kaisha Liquid ejection head, inkjet printing apparatus and liquid ejecting method
CN102173205A (zh) * 2007-08-30 2011-09-07 佳能株式会社 液体喷出头、喷墨打印设备及液体喷出方法
CN102173205B (zh) * 2007-08-30 2014-10-29 佳能株式会社 液体喷出头、喷墨打印设备及液体喷出方法

Also Published As

Publication number Publication date
EP0110534A3 (en) 1985-01-09
EP0110534B1 (fr) 1987-08-19
JPS5995157A (ja) 1984-06-01
DE3373069D1 (en) 1987-09-24

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