EP0082627A1 - Strömungsdurchlässiges, poröses, elektrisches Heizelement - Google Patents
Strömungsdurchlässiges, poröses, elektrisches Heizelement Download PDFInfo
- Publication number
- EP0082627A1 EP0082627A1 EP82306494A EP82306494A EP0082627A1 EP 0082627 A1 EP0082627 A1 EP 0082627A1 EP 82306494 A EP82306494 A EP 82306494A EP 82306494 A EP82306494 A EP 82306494A EP 0082627 A1 EP0082627 A1 EP 0082627A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- coating
- precursor
- heating
- heating element
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 27
- 238000005485 electric heating Methods 0.000 title claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 137
- 238000000576 coating method Methods 0.000 claims abstract description 82
- 239000011248 coating agent Substances 0.000 claims abstract description 69
- 239000000463 material Substances 0.000 claims abstract description 37
- 239000002243 precursor Substances 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims description 40
- 239000007789 gas Substances 0.000 claims description 37
- 230000008569 process Effects 0.000 claims description 36
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 230000003647 oxidation Effects 0.000 claims description 14
- 238000007254 oxidation reaction Methods 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 238000003763 carbonization Methods 0.000 claims description 10
- 239000002019 doping agent Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 230000000717 retained effect Effects 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 238000000354 decomposition reaction Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 239000007833 carbon precursor Substances 0.000 description 34
- 239000003921 oil Substances 0.000 description 22
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 15
- 229910010271 silicon carbide Inorganic materials 0.000 description 15
- 239000000203 mixture Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 6
- 238000001816 cooling Methods 0.000 description 6
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 6
- 239000012212 insulator Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000004044 response Effects 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 5
- 229910000077 silane Inorganic materials 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 4
- 239000005977 Ethylene Substances 0.000 description 4
- 239000004952 Polyamide Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229920002647 polyamide Polymers 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000013529 heat transfer fluid Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
- F24H1/102—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply with resistance
- F24H1/103—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply with resistance with bare resistances in direct contact with the fluid
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
Definitions
- the invention in a first aspect provides a process for manufacturing a fluid permeable, fibrous electric heating element, the process comprising forming a permeable fibrous precursor, coating fibres of the precursor with a material so as to form tubular fibres comprising the material, and heating the coated precursor so as to modify the structure of the material to provide a desired electrical resistivity of the tubular fibres.
- porous electric heating elements are described in British Patent Specification Nos 1466240 (United States Patent No 3943330), 1503644, and 1600253 (United States Patent No 4257157), these Specifications and Patents being incorporated by reference herein.
- the system components include a circulating pump, a heating element assembly, valves and pipework with the oil passing in series through the element and the mould, die, extruder, or calender to be heated together with a control system.
- 'Such units have been devised and operated at heating element power ratings in the range 1 - 30 kW for the aforementioned heating element geometry and with a response time of a few seconds.
- Very compact units can be designed and for the high power units, the small size which is attainable by the use of a high heating element power density rating reduces the cost of construction considerably compared with conventional heat transfer systems.
- the permeable element electric heating unit 14 is generally of circular form in transverse section, and comprises a fluid permeable fibrous heating element 30 of hollow cylindrical form, for example 120 mm long, and having gold plated copper electrodes 31 and 32 at the upper and at the lower ends of the heating element 30 respectively.
- the lower electrode 32 is joined to a brass end cap 34 that is joined to a steel tube 33 brazed to a copper rod 35 which is connected by a clamp-type terminal 36 to an electric supply (not shown).
- a shorter heating element 30 may be used in the heating unit 14, to overcome the problem of non-uniform flow which arises with long heating elements 30 as a result of hydrostatic pressure differences along the heating element 30, and to increase the fluid velocity through the heating element 30 so that a high power generation density may be employed.
- An example of such a compact heating element is shown in Figure 4 in which an electric heating unit 14a incorporates a fluid permeable fibrous heating element 80 of hollow cylindrical form and typically about 45 mm outside diameter, 35 mm inside diameter, and 10 mm long.
- Gold plated annular copper electrodes 81 and 82 are disposed at respective ends of the heating element 80, and each electrode 81, 82 is supported on a boss 83, 84 from a respective stainless steel annular backing disc 85 or 86.
- Each electrode assembly 146, 147 provides a pressure tight, electric feedthrough from respective electric supply cables 150, 151 to respective copper braid electrical connections 152, 153 each terminating at a respective copper terminal member 155, 156 secured as shown in Figure 4a to a shoulder 157 of the respective electrode 81 or 82.
- Suitable such electrode assemblies 146, 147 may be obtained for example from VG Electronics Limited, Hastings, London, England, or Ferranti Limited, Hollinwood, Lancashire, England, or Friedrichsfeld GmbH, Mannheim, West Germany, (United Kingdom Agents: Bush Beach Engineering Limited, Cheadle, Cheshire, England).
- the porous electric heating element may be made from a precursor in the form of a permeable fibrous carbon electric heating element comprising carbon fibres, made for example as described in the aforementioned patent Specifications, and coated with material conveniently applied by a plasma assisted deposition process (hereinafter referred to as P A VD).
- P A VD plasma assisted deposition process
- the electrical properties of this deposited material, which may be modified after deposition by appropriate heat treatments may largely determine the electrical operating characteristics of the porous electric heating element.
- the permeable fibrous carbon precursor on which the material is deposited by the PAVD process may be retained, or may be removed from beneath the deposited material by means of an oxidation process.
- a plasma is used as a medium for chemical reaction, and deposition of a coating on a substrate is achieved through the decomposition of a gas in an electrically-induced plasma.
- An example of the plasma assisted deposition process is described in British Patent Specification No 2056829A, and related techniques are disclosed in the paper "Codeposition of Glassy Silica and Germania inside a Tube by Plasma Activated CVD" by D. Kuppers et al, Journal of the Electrochemical Society Vol 123 No 7 pages 1079-1082 July 1976.
- FIG. 6 One form of apparatus for performing the PAVD coating process is shown in Figure 6 to which reference is now made.
- a fibrous carbon permeable heating element 200 is supported horizontally by an alumina tube 201 inside the central region along the bore of a cylindrical silica tube 202 having enlarged ends 204, 205, the alumina tube 201 extending axially inside the silica tube 202 from an end cap 203 which closes the enlarged end 204.
- An outlet pipe 206 from the enlarged end 204 is connected through a vacuum-type valve 208 to a vacuum pump 209.
- the original fibrous carbon precursor 200 on which the coating has been deposited may either be retained, or removed by a heat treatment comprising oxidation in air at a temperature above 300°C so that a structure of tubular fibres of the deposited material remains.
- a suitable heat treatment may be used to adjust the electrical conductivity and temperature coefficient of resistance of the deposited material to desired values.
- this heat treatment must be carried out in an inert environment since it would normally take place above the carbon oxidation threshold temperature of about 300°C.
- this heat treatment may be effected before or after the carbon precursor is removed, or simultaneously with removal.
- the fibrous carbon precursor is placed in the tube 202 of Figure 6, and the tube 202 subsequently evacuated down to a vacuum pressure of about 10- 2 Torr.
- Argon is admitted through the gas supply line 220 to a vacuum pressure inside the tube 202 of about 1.0 Torr.
- the high frequency generator 238 is subsequently energised, and after about one hour, the silane/ethylene mixture to deposit the silicon and carbon is introduced into tube 202 through the gas supply line 222, and a mixture of phosphine/argon is introduced into the tube 202 through the gas supply line 224, the vacuum pressure inside the tube 202 being maintained at about 0.9 Torr.
- a suitable time interval e.g.
- An oxidation process to remove the fibrous carbon precursor may be carried out at any convenient temperature above about 300°C, but the time taken to oxidise the carbon can be reduced by increasing the oxidation temperature. Too high an oxidation temperature may however have an effect on the electrical properties of the coating which is not desired, and this possibility arises as a result of the nature of the material deposited during the PAVD coating process.
- TCR temperature coefficient of electrical resistance
- Example I Element carbonised at 650°C Density 150 kg/m 3
- the permeable electric heating elements may be of alternative shapes or sizes to those aforedescribed, and it will be understood that the heat transfer system in the aforedescribed aspects may be used in alternative applications, for example where the heat transfer fluid comprises a gas. Furthermore, the aforedescribed permeable electric heating elements may be used in alternative applications to heat a fluid.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Resistance Heating (AREA)
- Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8137673 | 1981-12-14 | ||
GB8137673 | 1981-12-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0082627A1 true EP0082627A1 (de) | 1983-06-29 |
EP0082627B1 EP0082627B1 (de) | 1988-01-27 |
Family
ID=10526598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP82306494A Expired EP0082627B1 (de) | 1981-12-14 | 1982-12-06 | Strömungsdurchlässiges, poröses, elektrisches Heizelement |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0082627B1 (de) |
JP (1) | JPS58112296A (de) |
DE (2) | DE3278066D1 (de) |
GB (1) | GB2111809B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2911720A4 (de) * | 2012-10-29 | 2015-09-02 | Forever Young Int Inc | Temperaturveränderliche intrakorporale flüssigkeitsabgabevorrichtungen |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2264617A (en) * | 1991-10-08 | 1993-09-01 | Atomic Energy Authority Uk | Porous heating element |
DE102019203227A1 (de) * | 2019-03-11 | 2020-09-17 | Audi Ag | Formwerkzeug zum Urformen oder Umformen eines Werkstücks mit einer Temperiereinrichtung |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2408802A1 (de) * | 1973-02-26 | 1974-08-29 | Atomic Energy Authority Uk | Heizvorrichtung zum erwaermen von stroemungsmitteln |
GB1503644A (en) * | 1975-04-21 | 1978-03-15 | Fogarty & Co Ltd E | Method and apparatus for forming fibrous cylindrical element |
DE2822536A1 (de) * | 1977-05-23 | 1979-01-25 | Atomic Energy Authority Uk | Verfahren zum herstellen eines fluidpermeablen, elektrischen widerstands- heizelements |
DE3022259A1 (de) * | 1979-06-14 | 1980-12-18 | Atomic Energy Authority Uk | Waermeuebertragungs- und heizvorrichtung |
DE3040693A1 (de) * | 1979-11-08 | 1981-05-27 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Verfahren zur metallisierung von halbleiterbauelementen |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3742192A (en) * | 1972-02-02 | 1973-06-26 | J Brzuszek | Electrical heating device and method |
JPS5117040A (ja) * | 1974-08-02 | 1976-02-10 | Tokyo Shibaura Electric Co | Kaabonhatsunetsutai |
-
1982
- 1982-12-06 EP EP82306494A patent/EP0082627B1/de not_active Expired
- 1982-12-06 DE DE8282306494T patent/DE3278066D1/de not_active Expired
- 1982-12-06 GB GB08234714A patent/GB2111809B/en not_active Expired
- 1982-12-06 DE DE1982306494 patent/DE82627T1/de active Pending
- 1982-12-14 JP JP21912382A patent/JPS58112296A/ja active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2408802A1 (de) * | 1973-02-26 | 1974-08-29 | Atomic Energy Authority Uk | Heizvorrichtung zum erwaermen von stroemungsmitteln |
GB1503644A (en) * | 1975-04-21 | 1978-03-15 | Fogarty & Co Ltd E | Method and apparatus for forming fibrous cylindrical element |
DE2822536A1 (de) * | 1977-05-23 | 1979-01-25 | Atomic Energy Authority Uk | Verfahren zum herstellen eines fluidpermeablen, elektrischen widerstands- heizelements |
DE3022259A1 (de) * | 1979-06-14 | 1980-12-18 | Atomic Energy Authority Uk | Waermeuebertragungs- und heizvorrichtung |
DE3040693A1 (de) * | 1979-11-08 | 1981-05-27 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Verfahren zur metallisierung von halbleiterbauelementen |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2911720A4 (de) * | 2012-10-29 | 2015-09-02 | Forever Young Int Inc | Temperaturveränderliche intrakorporale flüssigkeitsabgabevorrichtungen |
Also Published As
Publication number | Publication date |
---|---|
GB2111809B (en) | 1985-08-21 |
DE3278066D1 (en) | 1988-03-03 |
EP0082627B1 (de) | 1988-01-27 |
GB2111809A (en) | 1983-07-06 |
JPS58112296A (ja) | 1983-07-04 |
DE82627T1 (de) | 1984-02-16 |
JPH0416914B2 (de) | 1992-03-25 |
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