EP0057466A2 - Überschallzerstäuber - Google Patents

Überschallzerstäuber Download PDF

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Publication number
EP0057466A2
EP0057466A2 EP82100738A EP82100738A EP0057466A2 EP 0057466 A2 EP0057466 A2 EP 0057466A2 EP 82100738 A EP82100738 A EP 82100738A EP 82100738 A EP82100738 A EP 82100738A EP 0057466 A2 EP0057466 A2 EP 0057466A2
Authority
EP
European Patent Office
Prior art keywords
passage
nozzle
fluid flow
nozzle body
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP82100738A
Other languages
English (en)
French (fr)
Other versions
EP0057466A3 (de
Inventor
Daniel Clarence Stahly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eaton Corp
Original Assignee
Eaton Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eaton Corp filed Critical Eaton Corp
Publication of EP0057466A2 publication Critical patent/EP0057466A2/de
Publication of EP0057466A3 publication Critical patent/EP0057466A3/de
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
    • B05B17/063—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn having an internal channel for supplying the liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00—Fuel-injection apparatus characterised by being operated electrically
    • F02M51/005—Arrangement of electrical wires and connections, e.g. wire harness, sockets, plugs; Arrangement of electronic control circuits in or on fuel injection apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/14—Arrangements of injectors with respect to engines; Mounting of injectors
    • F02M61/145—Arrangements of injectors with respect to engines; Mounting of injectors the injection nozzle opening into the air intake conduit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M69/00—Low-pressure fuel-injection apparatus ; Apparatus with both continuous and intermittent injection; Apparatus injecting different types of fuel
    • F02M69/04—Injectors peculiar thereto
    • F02M69/041—Injectors peculiar thereto having vibrating means for atomizing the fuel, e.g. with sonic or ultrasonic vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D11/00—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space
    • F23D11/34—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space by ultrasonic means or other kinds of vibrations
    • F23D11/345—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space by ultrasonic means or other kinds of vibrations with vibrating atomiser surfaces

Definitions

  • the present invention relates to an atomizer for controlling a flow of fluid, such as, for example, liquid fuel injected into an internal combustion engine or other applications where a precisely controlled flow of fluid in response to a control signal is required.
  • a flow of fluid such as, for example, liquid fuel injected into an internal combustion engine or other applications where a precisely controlled flow of fluid in response to a control signal is required.
  • the present invention relates to an atomizer which is excited by ultrasonic vibration to cause controlled opening and closing of a fluid.valve located in a discharge nozzle.
  • the invention relates in particular to ultrasonic fuel injection atomizers of the type wherein the vibratory excitations are generated by supplying an electrical control signal to a piezoelectric crystal attached to the nozzle forming member which contains the control valve.
  • the vibrating nozzle member In the design of ultrasonic vibratory atomizers it is known to mount the vibrating nozzle member to a stationary housing by providing a resilient mount located in the region of the vibratory node, or region of near zero vibratory amplitude as, for example, according to the technique described in U.K. patent application GB 2029270 A published 19 March 1980.
  • the nozzle member In the aforesaid '270 British patent publication, the nozzle member has an exponential horn configuration which at its largest diameter has an annular flange against which a resilient 0-ring is retained and a second resilient 0-ring is provided in contact with the exponential curved portion of the nozzle horn, where the longitudinal vibratory node is located.
  • the ultrasonic nozzle member of the aforesaid known device is thus mounted between two seal rings of substantially differing diameter and which therefore are exposed to differing amplitudes of radial component of vibrations.
  • the present invention provides an ultrasonic vibratory atomizer in which the vibrating nozzle body member is resiliently mounted at its nodal region such that the resilient mounting is subjected to a minimum of longitudinal and radial vibratory amplitude.
  • the atomizer of the present invention employs a nozzle body member having a generally exponentially curved horn portion containing at the free end thereof the fluid flow control valve.
  • the horn has the opposite, larger diameter end, terminating in a cylindrical portion to which the vibratory generator is attached.
  • the nozzle body member of the present ultrasonic atomizer has an annular flange formed about the larger end of the horn and the horn is configured such that the vibratory nodes are located in the region.of the annular flange.
  • the nozzle body horn of the present atomizer is resiliently mounted in its nodal region to a housing by a pair of resilient annular seal rings disposed on axially opposite sides of the annular flange in the larger diameter portion of the nozzle body member.
  • the resilient annular. seal rings engage the housing in fluid pressure sealing contact to provide an annular fluid pressure chamber about the outer periphery of the flange.
  • Fluid passages are provided in the nozzle body member through the periphery of the flange for communication with the valve provided in the free end of the nozzle horn.
  • the resilient annular mounting seal and mounting rings of the present invention are of the substantially same diameter and contact the nozzle body member along the cylindrical periphery of the larger diameter portion thereof, thus avoiding reliance upon sealing contact with the exponentially curved portions of the nozzle body horn.
  • the present invention thus provides the vibratory node of the nozzle body horn in the region of the largest diameter comprising an annular mounting flange which permits the fluid flow passage through the nozzle body member to be located in the periphery of the flange and thus in the region of lowest vibratory amplutide.
  • The-resilient annular mounting seals located immediately adjacent opposite sides of the annular mounting flange of the nozzle body member thus provide the dual function of resiliently mounting the nozzle body member to the housing in the nodal region and simultaneously contact the housing in fluid pressure sealing contact for providing an annular collecting chamber about the nozzle body member for providing communication of pressurized fluid to the passage in the nozzle body member thereby eliminating the need to connect a conduit or tubing to the vibrating nozzle body member for fluid flow thereto.
  • the present invention thus provides a unique and novel construction for the resilient mounting of the vibrating nozzle body member of an ultrasonic fluid atomizer to the housing portion thereof.
  • the invention provides a construction which minimizes the effects of the ultrasonic vibration of the nozzle body on the resilient mounting and which provides for convenient and improved porting of the pressurized fluid supply to the nozzle member.
  • the ultrasonic atomizer- assembly is indicated generally at 10 and comprises a nozzle body indicated at 12 and a housing means 14 into which the nozzle body is received and mounted thereon for vibratory isolation.
  • the nozzle body 12 is formed of a suitable corrosion resistant metal to permit handling of motor fuels and other liquids having corrosive properties.
  • the nozzle body 12 includes a nozzle horn portion 16 configured generally in an exponentially or other suitable curved taper as shown in the lower portion in Figure 1, which extends downwardly from the housing means 14.
  • the nozzle body 12 has the upper portion thereof as shown in Figure 1 formed in a cylindrical larger diameter portion 18 which is received in the housing 14.
  • the upper portion 18 of the nozzle body has an annular mounting flange 24 formed thereon which flange has a generally cylindrical outer surface and upper and lower radial faces 26, 28.
  • the upper surface 22 of the large diameter portion 18 of nozzle body 12 has an ultrasonic generator 20 attached thereto for vibratory stimulation.
  • the generator 20 comprises a piezoelectric crystal bonded or mechanically clamped to the upper surface 22 of the cylindrical portion 18 of the nozzle body.
  • piezoelectric vibratory generator 20 (Fig. 1) imparts vibrations to the nozzle body 12 at frequencies in the ultrasonic range or frequencies greater than 25 kilohertz.
  • the nozzle body 12 is received in the housing means 14 in a bore 30 provided therein which bore has a diameter suitable to clear the outer periphery of the upper portion 18 of the nozzle body.
  • Bore 30 has a counterbore 32 which is formed to provide clearance for the outer periphery of the nozzle body flange 24.
  • the horn portion 16 of the nozzle body is configured so as to locate the longitudinal node of induced vibratory motion in the region of the annular flange 24 by techniques known to those skilled in the art.
  • a pair of resilient seal rings 34, 36 are received over the larger diameter 18 of the nozzle body and each contact respectively one of the upper and lower faces 26, 28 of the annular flange 24.
  • the upper seal ring 36 is radially compressed between the larger diameter 18 of the nozzle-body and the counterbore 32 to provide fluid sealing contact therebetween and vibratory isolation between the nozzle body and the housing 14.
  • the lower seal ring 34 is retained in radial compression between diameter 18 of, the nozzle body by a counterbore 38 provided in a retaining ring 40 attached to the housing means 14.
  • the retaining ring 40 is sealed about its outer periphery by a seal ring 42 received in a counterbore 44 provided in the lower portion of the housing means 14.
  • the retaining ring 40 has an inwardly extending annular flange 46 which retains the lower seal ring 34, and consequently the nozzle body 12, in a fluid pressure sealing yet resilient vibrationally isolated mounting in the housing 14.
  • the seal rings 34, 36 are in only radial compression, thus requiring only control of the dimensions of part diameters 18, 32 and 38 for ease of manufacture and assembly.
  • the nozzle body 12 has a central bore 46 formed in the horn 16, which bore extends vertically upward in Figure 1 along the central axis of the horn 16.
  • a tubular member 48 preferably formed of corrosion resistant metal is received in the bore 46 with the upper end of the tube 48 having its outer periphery sealed against the bore 46 by any convenient means as, for example, an interference press fit.
  • the bore 46 in the horn has a counterbore 50 provided therein which counterbore has the diameter thereof sufficiently large so as to provide an annular clearance about the outer periphery of the tube 48.
  • a fluid inlet passage 52 is provided in the outer periphery of the annular nozzle body flange 24 and the passage 52 extends generally radially inwardly through the nozzle body to communicate with the counterbore 50.
  • a bypass passage 54 is formed in the nozzle body circumferentially spaced from the passage 52 and extends generally radially outwardly having its inner end communicating with nozzle body bore 46 and its outer end ported to the outer periphery of the-body flange 24.
  • the lower portion of the horn 16 is. shown in enlarged view wherein the tube 48 has a sleeve member 56 preferably of corrosion resistant metal received in the inner periphery of the lower end of tube 48 with the sleeve 56 retained therein in fluid tight connection between the outer periphery of sleeve 56 and the inner periphery of tube 48.
  • a sleeve member 56 preferably of corrosion resistant metal received in the inner periphery of the lower end of tube 48 with the sleeve 56 retained therein in fluid tight connection between the outer periphery of sleeve 56 and the inner periphery of tube 48.
  • a nozzle member 58 preferably formed of corrosion resistant metal having a fluid atomizing discharge port 60 provided in the lower surface thereof is provided.
  • Member 58 is received in counterbore formed in counterbore 50 in the horn 16 .
  • Discharge port 60 communicates with a valve seat 62 which forms a valve chamber 63 in member 58 in - cooperation with the lower end of tubular member 56.
  • the nozzle member 58 is received over the lower portion of sleeve 56 and attached thereto in fluid pressure sealing arrangement to form the valve seat chamber and retain the nozzle member 58 onto the sleeve.56.
  • the outer diameter of the nozzle member 58 is retained in the horn 16 by a suitable fluid pressure sealing.engagement such as an interference press fit in the counterbore 51.
  • a check ball valve member 64 is received in the valve chamber and is movable between a position sealing against valve seat 62 in which position fluid flow is prevented through discharge orifice 60 as shown in solid outline in Figure 2, . and an upwardly displaced position contacting the lower surface of tube 56 in which position fluid flow is permitted through orifice 60.
  • a feed passage 66 is provided through the nozzle member 58 which passage communicates the annular space between counterbore 50 and the outer periphery tube 48 with the valve seat chamber.
  • liquid or fuel flows from the annular space surrounding tube 48 through passage 66 and upwardly around the check ball 64 through the space between the upper surface of the ball and the . lower portion of sleeve 56 and through the inner periphery of the sleeve into the inner periphery of tube 48 and upwardly therethrough to passage 54 (see Fig.1) for return to the source.
  • the check ball 64 is shown in the open position as spaced from the valve seat 62 under the influence of the vibratory motion of the horn 16 and is restrained in its upward travel by the lower end of the sleeve 56. With the ball in the upward or valve-opened position, pressurized fluid flows from the annular space surrounding tube 48 through cross port 66, around the lower portion of valve 64 over valve seat 62 and exits through the discharge port 60.
  • the check ball 64 is moved relative to seat 62 alternately from the position in Figure 2 wherein fluid flow through cross port 66 and upwardly around the ball to return through the center of tube 48 to the discharge passage 54 (Fig. 1) to the position shown in Figure 5 with the ball in upward position wherein fluid flows through cross port 66 and downwardly through the discharge nozzle 60.
  • the housing 14 has an inlet port 68 to a source of pressurized fluid which port 68 communicates with an inlet passage 70 which extends through the lower portion of the housing to communicate with the counterbore-32 surrounding the nozzle body flange 24.
  • the counterbore 32 thus provides an annular collector chamber which communicates with the nozzle body inlet passage 52 for permitting fluid flow therethrough.
  • the housing 14 has a bypass chamber 72 formed in communication with the counterbore 32 which chamber 72 is disposed circumferentially spaced from the inlet passage 70 such that chamber 72 receives fluid flow from bypass passage 54.
  • Chamber 72 communicates with an upwardly extending passage 74 which has its upper end adapted to receive a fluid conduit connection thereto for return flow to the source (not shown) of pressurized fluid.
  • the housing means 14 has an electrical connector assembly ind.icated generally at 76 which comprises a connector housing 78 which is attached to the housing 14 by any suitable expedient as, for example, lugs 80 deformed over a base flange portion 82 of the housing 78.
  • the electrical connector housing 78 may be formed of any suitable metal or plastic material.
  • a pair of electrical connector pins 84, 86 are disposed in a hollow region 88 formed in the upright portion 79 of the connector housing and the pins are disposed in spaced parallel upwardly extending arrangement.
  • the electrical connector pins 84, 86 extend through the wall of the housing 78 to the interior region thereof.
  • the pins 84, 86 have respectively flexible leads 90, 92 connected to the lower ends thereof by suitable means as, for example, riveting or soldering, with the opposite ends of flexible leads 90, 92 connected to attachment terminals 94, 96 provided on the ultrasonic generator 20.
  • the upstanding portion 79 of the electrical connector housing is adapted to have received thereover a corresponding mating electrical connector for electrical connection to pins 84, 86 for providing electrical power to the ultrasonic generator.
  • The.flexible leads 90, 92 provide vibratory isolation of the ultrasonic generator 20 from the electrical connector housing 78 and the main housing 14.
  • the present invention thus provides a unique ultrasonic atomizer for use in providing controlled flow of atomized liquid, as for example, fuel injected into an internal combustion engine.
  • the ultrasonic nozzle body and generator of the present invention are vibratorily isolated from the atomizer housing by a pair of equiannular resilient mounting rings disposed on opposite sides of an annular mounting flange located at the vibrational node of the nozzle body.
  • the nozzle body inlet and bypass flow ports are conveniently located between the mounting rings which serve the dual functions of providing vibration isolation and fluid pressure sealing between the nozzle body and the atomizer housing.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Special Spraying Apparatus (AREA)
  • Fuel-Injection Apparatus (AREA)
EP82100738A 1981-02-04 1982-02-02 Überschallzerstäuber Withdrawn EP0057466A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23151281A 1981-02-04 1981-02-04
US231512 1994-04-22

Publications (2)

Publication Number Publication Date
EP0057466A2 true EP0057466A2 (de) 1982-08-11
EP0057466A3 EP0057466A3 (de) 1982-08-25

Family

ID=22869549

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82100738A Withdrawn EP0057466A3 (de) 1981-02-04 1982-02-02 Überschallzerstäuber

Country Status (6)

Country Link
EP (1) EP0057466A3 (de)
JP (1) JPS57177364A (de)
AR (1) AR227222A1 (de)
AU (1) AU8012482A (de)
BR (1) BR8200632A (de)
ES (1) ES8302203A1 (de)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0187490A1 (de) * 1984-12-11 1986-07-16 Toa Nenryo Kogyo Kabushiki Kaisha Ultraschalleinspritzdüsen
FR2583855A1 (fr) * 1985-06-25 1986-12-26 Eberspaecher J Disposition d'un pulverisateur a ultrasons dans un appareil de chauffage fonctionnant avec du combustible liquide
EP0386446A1 (de) * 1989-03-10 1990-09-12 Robert Bosch Gmbh Kraftstoffverteiler für Kraftstoffeinspritzanlagen von Brennkraftmaschinen
EP0667189A2 (de) * 1994-02-09 1995-08-16 Emerson Electric Co. Befestigungsvorrichtung für ein Vibrationselement
WO2006130195A1 (en) * 2005-05-27 2006-12-07 Kimberly-Clark Worldwide, Inc. Ultrasonically controlled valve
WO2007136427A2 (en) * 2006-01-23 2007-11-29 Kimberly-Clark Worldwide, Inc. Ultrasonic fuel injector
US7424883B2 (en) 2006-01-23 2008-09-16 Kimberly-Clark Worldwide, Inc. Ultrasonic fuel injector
US7533830B1 (en) 2007-12-28 2009-05-19 Kimberly-Clark Worldwide, Inc. Control system and method for operating an ultrasonic liquid delivery device
US7735751B2 (en) 2006-01-23 2010-06-15 Kimberly-Clark Worldwide, Inc. Ultrasonic liquid delivery device
US7744015B2 (en) 2006-01-23 2010-06-29 Kimberly-Clark Worldwide, Inc. Ultrasonic fuel injector
US7810743B2 (en) 2006-01-23 2010-10-12 Kimberly-Clark Worldwide, Inc. Ultrasonic liquid delivery device
US7819335B2 (en) 2006-01-23 2010-10-26 Kimberly-Clark Worldwide, Inc. Control system and method for operating an ultrasonic liquid delivery device
US7963458B2 (en) 2006-01-23 2011-06-21 Kimberly-Clark Worldwide, Inc. Ultrasonic liquid delivery device
US8191732B2 (en) 2006-01-23 2012-06-05 Kimberly-Clark Worldwide, Inc. Ultrasonic waveguide pump and method of pumping liquid
CN116213179A (zh) * 2023-05-10 2023-06-06 通威微电子有限公司 超声波雾化喷胶装置、系统和籽晶粘接方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2949900A (en) * 1958-06-02 1960-08-23 Albert G Bodine Sonic liquid sprayer
US4176634A (en) * 1976-07-14 1979-12-04 Plessey Handel Und Investments Ag Fuel injection system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2949900A (en) * 1958-06-02 1960-08-23 Albert G Bodine Sonic liquid sprayer
US4176634A (en) * 1976-07-14 1979-12-04 Plessey Handel Und Investments Ag Fuel injection system

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0187490A1 (de) * 1984-12-11 1986-07-16 Toa Nenryo Kogyo Kabushiki Kaisha Ultraschalleinspritzdüsen
FR2583855A1 (fr) * 1985-06-25 1986-12-26 Eberspaecher J Disposition d'un pulverisateur a ultrasons dans un appareil de chauffage fonctionnant avec du combustible liquide
US4732322A (en) * 1985-06-25 1988-03-22 J. Eberspacher Liquid fuel ultrasonic atomizer construction for a heater
EP0386446A1 (de) * 1989-03-10 1990-09-12 Robert Bosch Gmbh Kraftstoffverteiler für Kraftstoffeinspritzanlagen von Brennkraftmaschinen
EP0667189A2 (de) * 1994-02-09 1995-08-16 Emerson Electric Co. Befestigungsvorrichtung für ein Vibrationselement
EP0667189A3 (de) * 1994-02-09 1997-07-09 Emerson Electric Co Befestigungsvorrichtung für ein Vibrationselement.
WO2006130195A1 (en) * 2005-05-27 2006-12-07 Kimberly-Clark Worldwide, Inc. Ultrasonically controlled valve
US7178554B2 (en) 2005-05-27 2007-02-20 Kimberly-Clark Worldwide, Inc. Ultrasonically controlled valve
US7424883B2 (en) 2006-01-23 2008-09-16 Kimberly-Clark Worldwide, Inc. Ultrasonic fuel injector
US7819335B2 (en) 2006-01-23 2010-10-26 Kimberly-Clark Worldwide, Inc. Control system and method for operating an ultrasonic liquid delivery device
WO2007136427A2 (en) * 2006-01-23 2007-11-29 Kimberly-Clark Worldwide, Inc. Ultrasonic fuel injector
US8191732B2 (en) 2006-01-23 2012-06-05 Kimberly-Clark Worldwide, Inc. Ultrasonic waveguide pump and method of pumping liquid
US7735751B2 (en) 2006-01-23 2010-06-15 Kimberly-Clark Worldwide, Inc. Ultrasonic liquid delivery device
US7744015B2 (en) 2006-01-23 2010-06-29 Kimberly-Clark Worldwide, Inc. Ultrasonic fuel injector
US7810743B2 (en) 2006-01-23 2010-10-12 Kimberly-Clark Worldwide, Inc. Ultrasonic liquid delivery device
WO2007136427A3 (en) * 2006-01-23 2008-04-03 Kimberly Clark Co Ultrasonic fuel injector
US7918211B2 (en) 2006-01-23 2011-04-05 Kimberly-Clark Worldwide, Inc. Ultrasonic fuel injector
US7963458B2 (en) 2006-01-23 2011-06-21 Kimberly-Clark Worldwide, Inc. Ultrasonic liquid delivery device
US8028930B2 (en) 2006-01-23 2011-10-04 Kimberly-Clark Worldwide, Inc. Ultrasonic fuel injector
US7533830B1 (en) 2007-12-28 2009-05-19 Kimberly-Clark Worldwide, Inc. Control system and method for operating an ultrasonic liquid delivery device
CN116213179A (zh) * 2023-05-10 2023-06-06 通威微电子有限公司 超声波雾化喷胶装置、系统和籽晶粘接方法
CN116213179B (zh) * 2023-05-10 2023-07-28 通威微电子有限公司 超声波雾化喷胶装置、系统和籽晶粘接方法

Also Published As

Publication number Publication date
EP0057466A3 (de) 1982-08-25
AU8012482A (en) 1982-08-12
BR8200632A (pt) 1982-12-14
AR227222A1 (es) 1982-09-30
ES510078A0 (es) 1983-01-16
ES8302203A1 (es) 1983-01-16
JPS57177364A (en) 1982-11-01

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Inventor name: STAHLY, DANIEL CLARENCE