EP0055316B1

EP0055316B1 - A plating apparatus

Info

Publication number: EP0055316B1
Application number: EP80304774A
Authority: EP
Inventors: Kouichi Shimamura
Original assignee: Sonix Co Ltd
Current assignee: Sonix Co Ltd
Priority date: 1980-12-31
Filing date: 1980-12-31
Publication date: 1985-04-10
Also published as: EP0055316A1; DE3070493D1

Description

This invention relates to electroplating apparatus wherein an accurate plating can be carried out on a partitive work surface.
Today, various kinds of localized plating means are being practiced in industrial circles. Conventional plating means and processes are disclosed in, for example, U.S. Patent Nos. 4,083,755 (hereinafter called "A"), 4,090,928 (hereinafter called "B"), 2,958,636 (hereinafter called "C"), 3,039,514 (hereinafter called "D") and 3,075,902 (hereinafter called "E"). In the first two Patents A and B, there is disclosed no special technique for discharging a plating solution jetted from a nozzle. When increasing velocity of the jetting solution, the inconvenience is that the jetting solution is collided with the already jetted solution.
As a result, the velocity is reduced and a certain deposit of the plating solution is produced on a work surface. Thus, a high current density is not obtained. Further, there is easily caused a certain blur of the plating solution between a mask and the working surface, so that a profile of the plated . part becomes unclear and the thickness of the plated part is not formed uniformly.
Any one of the above three Patents C, D and E has no mask. According to the plating method of the above three Patents, jetting of the plating solution is such as to be accumulated locally on a work surface by means of a suction air flow, velocity of the plating solution itself and its condensation respectively. Therefore, a high speed jetting of the solution is basically impossible. And a larger current density is not obtained. Since either one of the above three Patents has no special means (e.g. a mask) for forming a clear profile of the plated part, a certain blur of the plating solution is produced and the thickness of the plated part is not formed uniformly.
Apart from the above known references, there are Japanese Un-examined Patent Publications Nos. 52-74536, 53-126631, 52-107232, etc, each of which has the same defects as mentioned above.
The disadvantages of the conventional art will be summarized as follows.

(1) Soon after the plating solution is collided with a work surface, it is difficult to control its flow, whereby a wet area of the plating solution is spread into the inside of an outer case of the plating apparatus. Accordingly, an accurate plating for a localized working surface cannot be attained.
(2) It is therefore impossible to make a uniform distribution of the current density, whereby no accurate definition of the plated part is obtained and its plating thickness becomes irregular.
(3) Accordingly, the smaller the work surface becomes, the worse the plating finish becomes. Namely, a localized plating is not attained.
(4) A distance between a jetting nozzle of the plating solution and a work surface, i.e. respective two electrodes is not considered. Thus, when employing a plurality of nozzles, it is particularly required to control accurately the jetting velocity of the plating solution, quantity of suctioned air and discharge of the used plating solution. Nevertheless, such a technique is not accomplished yet.
(5) According to the conventional technique, a sufficient supply of ion metal is not obtained, and the level of the electric current density is about 20 to 30 A/dm² at maximum. If it is attained, it will be regarded as the best technique. However, the disadvantage is that the plating time is prolonged and the plating apparatus becomes larger.

This invention as claimed is intended to remove the above disadvantages. This invention provides an electroplating apparatus wherein an accurate plating can be carried out on a localized work surface. The plating apparatus comprises a mask having an opening at its center, a nozzle for jetting a plating solution which is mounted so as to be directed to the opening of the mask, and a casing for covering a closed space enclosed by the mask and the nozzle, characterized in that the mask is closely contacted with a work surface so that the opening of the mask is identical with a profile of a partitive spot on the work surface, the case is provided with fluid discharge means to maintain a negative air pressure within the closed space and the mask is provided with outer air induction means to introduce the outer air into the closed space, and the solution is prevented by the introduced air flow from permeating between the work surface and the mask surface respectively.
Further, the electroplating apparatus of this invention is to save greatly an increasing consumption of the plating solution by reproducing the used plating solution by a recycling system.
A principle of this invention will now be described. Generally, a flow Ni of metal ion in a plating solution i is the sum of the ion movement by electric field, diffusion due to variation of the metal ion concentration in the proximity of an electrode and the ion convection in proportion to the flow velocity of the plating solution. The variation of the metal ion concentration in the proximity of metal ion restrains a reaction speed makes worse the current efficiency. A task of this invention is to eliminate the inconvenience of diffusion of the plating solution and to treat a smaller work surface with an immediate plating. According to a remarkable aspect of this invention, the plating solution is high-speedily collided with a work surface, but the used plating solution is immediately discharged together with a suctioned air. Thus, an accurate plating can be carried out on a partitive work surface by contacting closely the mask therewith. Then, a profile of a plated part becomes very clear. This plating process may make it possible to carry out a stripping operation due to inversion of voltage applied to an electrode.
According to one aspect of this invention, it is possible to remove nearly variation of the ion concentration in the plating solution in the proximity of negative electrode i.e. a work surface. Thus, a theoretically optimum current rate is nearly obtained which will be decided by the ion concentration, temperature, salt content, etc of the plating solution. According to an experiment conducted in connection with this invention, the current density of several thousand Ampers/dm² has been obtained by using a plating solution of a few Ampers/dm² whereby the quality of the plated part was satisfactory.
The invention will be further described, by way of preferred examples, with reference to the accompanying drawings, in which:

Fig. 1 is a section view of an example of a plating apparatus according to this invention wherein is plated a partitive spot on a work surface;
Figs. 2a and 2b are respective section views of other examples of a plating apparatus according to this invention;
Fig. 3 is a section view of another example of this invention;
Fig. 4 is a section view of another example of this invention;
Figs. 5a and 5b are respective front views of outer air induction means in the example of Fig. 4;
Fig. 6 is an enlarged detail of an example of a plating apparatus according to this invention;
Fig. 7 is a schematic view of an example of a plating apparatus according to this invention;
Fig. 8 is a schematic view of an example of a plating apparatus according to this invention;
Figs. 9a, 9b, 9c and 9d are respective graphs in which a jetting timing of the plating solution is shown by a relationship between a jetting time of the plating solution and a plating current;
Fig. 10 is a graph showing a relationship between a jetting velocity of the plating solution and a current density;
Fig. 11 is a graph showing a relationship between a plating velocity and a current density;
Fig. 12 is a perspective view of a plating apparatus according to this invention in which a plurality of mask-nozzle means are formed integrally;
Fig. 13 is a perspective view of a work surface for which a plurality of mask-nozzle means are applied.
Fig. 14 is a circuit diagram for setting and controlling the plate thickness in a plurality of mask-nozzle means;
Fig. 15 is a view of a plating apparatus according to this invention in which a rotary index table is used;
Fig. 16 is a schematic view of a plating process of this invention which is carried out . continuously;
Figs. 17a and 18a are respective perspective views of different examples of a plating apparatus according to this invention;
Fig. 18 is a view of a principle of a plating current monitoring means to be applied for a plating apparatus according to this invention;
Fig. 19 is a circuit diagram of the monitoring means in Fig. 18;
Figs. 20a, 20b, 20c and 20d are respective section views showing a process for double plating to be carried out in connection with this invention;
Referring first to Fig. 1, there is shown a section view of a plating apparatus according to this invention.

Numeral 1 is a work surface and numeral 2 is a nozzle for jetting a plating solution. Numeral 3 is a mask having an opening at its center. The mask 3 contacts closely the work surface 1 and is positioned between the work surface 1 and the nozzle 2. The nozzle 2 is mounted so as to be directed to the opening of the mask 3. The nozzle 2 and the mask 3 are covered by a casing 4. Thus, a closed space 5 is formed by the work surface 1, the nozzle 2, the mask 3 and the casing 4 respectively. The casing 4 is provided, at one end thereof, with fluid discharge means 6 for discharging an outer air and a used plating solution by driving means (not illustrated in Fig. 1).
By suctioning the outer air and plating solution from the discharge opening 6, a negative pressure is formed within the closed space 5. An outer air is supplied into the closed spaced 5 by way of outer air induction means 7 communicated with outer air. The outer air induction means 7 forms an air passage which is mounted in the mask 3. Thus, the outer air flows toward the discharge opening 6. Owing to the air flow, a used plating solution is speedily discharged from the discharge opening 6. In other words, the air flow prevents the plating solution flowing high-speedily from the nozzle 2 permeating into the mask 3 surface and the work surface 1. Thus, the plated part always keeps a clear profile.
The mask 3 is made of a rigid material having a mechanical strength, a wear resistance and an insulation property. So that the localized plating may be carried out due to a close contact of the mask 3 with the work surface, a profile of the mask 3 must be worked accurately. Preferably, the mask is made of a ceramic material, a glass or the like. The mask which is disclosed in other examples of this invention is also made of such a material.
When the opening area of the nozzle 2 is defined as "D" and an opening area in the midst of the mask 3 is defined as "d", the following expression is given.
In general, the maximum rate of the flow velocity in the nozzle 2 is on its center axis whereas the minimum rate thereof is on a wall of the nozzle tube. Thus, the flow velocity distribution forms a parabola.
As mentioned above, the flow velocity is dependent upon the electric current density of plating. So as to satisfy the rate of
it is possible to set the flow velocity distribution within a predictable given rate. That is to say, the distribution of the electric current is to be set within a given rate. The nozzle 2 may be of a positive electrode. Then, the Ohm loss of the flow becomes minimum along the wall of the nozzle 2 tube, while it becomes maximum on a center axis of the nozzle 2. Forthis reason, the current density is distributed uniformly. Thus, the function of the mask 3 brings about a uniform plating thickness. Further, owing to the function of the outer air induction means 7 of the mask 3, the plating solution is prevented from permeating into the works surface 1 and the mask 3 surface, thereby a clear profile of the plated part being obtained.
Since an example of Fig. 1 is based on a jetting type plating, a diffusion layer arising between a solid phase and a liquid phase becomes extremely thin. However, as soon as the plating solution collides with the work surface 1, the used plating solution is discharged from the discharge opening 6 and it is considered that the boundary between the solid phase and the liquid phase is of a fresh liquid phase. For this reason, the diffusion layer of the plating solution is almost all suctioned and the ion density becomes uniform.
Accordingly, it may be considered that an electrolytic column is formed, so that a constant current value is obtained due to the Ohms's Law. This causes to stabilize the metal deposition rate and brings about a high-quality plating.
In a practical industrial application of this plating apparatus, productivity of a single nozzle is rather low, so that it is much more advantageous to mount a plurality of nozzles. A layout technique of a plurality of nozzles will be described in detail hereinafter.
Now, an adjustment of a distance between the work surface 1 and the nozzle 2, i.e. two electrodes will be discussed.
Needless to say, the plating quality, plating time, current density, plate thickness, etc are seriously affected because of any flow unbalance of the plating solution, any defect of the plating solution and air discharge, or any unbalance between the two electrodes. It is necessary to adjust a distance between the two electrodes.
In Fig. 1 the nozzle 2 is fixed with the casing 4 by a screw 8 and two fixing members 9, 10. The casing 4 is provided with threads 11 so as to engage with the screw 8.
In Fig. 1, a distance A is from a front end of the nozzle 2 to a back end of the screw 8 and a distance B is from the work surface 1 to a back end of the casing 4, a distance I is between the nozzle 2 end and the work surface 1, i.e. the two electrodes.
Thus, the following equation is obtained.
The distance C becomes an adjusting value by adjusting the screw 8. The value C is readable by calipers. By adjusting the screw 8 in this way, the distance I between the two electrodes is given as follows.
A back end of the nozzle 2 in Fig. 1 is connected with a plating solution tank (not illustrated in Fig. 1
Further, in order that the mask 3 can be easily disengaged from the casing 4, both the mask 3 and the casing 4 are treated with thread cutting. Thus, it is easy to replace the mask 3 with a new one. Therefore, a preferred shape of mask can be selected at one's option so as to comply with respective profiles.
Further, when replacing the mask 3, it may be necessary to adjust the distance I between the two electrodes. In this case, the adjustment of the screw 8 mounted on the nozzle 2 becomes very important.
Referring to Figs. 2a, 2b, a work surface 20 is curved.
A curved work surface 20 shows for example a surface of an electric contact member. Numeral 21 is a first mask. In Fig. 2a, the outer air induction means forms a gap 22 between the first mask 21 side and a member 20 to be plated, and the member 20 is inserted into the mask 21 opening. Numeral 23 is a second mask of which opening area is nearly equivalent to the opening area of a nozzle 24.
A front end of the nozzle 24 has such a curved shape as to be similar to the curved work surface 20, whereby any distance between the two electrodes is to be approximately equal in any direction. The plating solution jetted from the nozzle 24 collides with the member 20. After collision, the plating solution is discharged immediately from a discharge opening (not illustrated) just as shown in the example of Fig. 1. A certain outer air is introduced from the gap 22 into the mask inside. Thus, a certain air flow is formed, whereby the plating solution is prevented from permeating into the mask surface as well as into the outer air. Thus, the aim of this invention is accomplished.
Figs. 3 and 4 show other examples of the mask. In Fig. 3, the mask 30 has a first air channel 31 and a second air channel 34. Between the two channels 31 and 34 is formed an air retaining recess 33 into which a highly pressurized air or inert gas may be supplied and retained. The first air channel 31 is, at its inlet, provided with a pipe (not illustrated) to feed such inert gas into the mask side. Further, it comprises an air cleaner and a turbo charger, both of which are illustrated in Fig. 3. Thus, the mask 30 may float upon the work' surface 35 due to the introduced inert gas or the like. And the mask and the nozzle as well may move freely on the work surface 35. Therefore, for example, a continuous band-type plating (a so- called stripe plating) or a plating for describing writing letters can be achieved.
It should be noted that the inert gas is very effective in case the plating solution acutely reacts to carbonic acid gas or oxygen contained in the air.
Referring to Fig. 4, an annular recess 42 is formed in the vicinity of a mask 40 opening and associated with an air passage 41 mounted in the mask 40. A closed space inside the mask 40 is maintained with a negative pressure as shown in Fig. 1. The air quantity to be supplied is determined by a diameter of the passage 41 and the negative pressure. And, the flow velocity of the plating solution to be jetted from the nozzle 44 is stabilized more. Further, when mounting an 0- ring or the like on the outer side of the annular recess 42, the contact of the recess 42 with the work surface 43 is becoming closer.
Figs. 5a and 5b are plan views of the example of Fig. 4 wherein there are shown a plurality of channels for introducing the outer air. In Fig. 5a there is shown a hole 50 provided at a center of the mask 40, wherein a plurality of channels 51 are formed radially. Fig. 5b is another example, wherein a plurality of channels 53 are formed along a circumference of the hole 52. In this example, the outer air flows easily into the hole 52 along its circumference. The turbulent effect of the plating solution collided with the work surface is more effective than that in the example of Fig. 5a.
Fig. 6 shows an example of a plating apparatus - having a single system of one nozzle and one mask, although a plurality of nozzles and masks can be arranged. Mask-nozzle means 61 is linked with a plating solution tank 62 by way of a pipe 62'. The pipe 62' comprises an electromagnetic valve 63 for ON/OFF jetting of the plating solution, an adjusting valve 64 for adjusting flow of the plating solution, a purifying water tank 65 and a switching valve 66 to be switched to the plating solution tank 62. A suction means 67 is linked with air-liquid separating means 68 which is connected to the mask-nozzle means 61 by way of a pipe 68'. The pipe 68' comprises an adjusting valve 69 for adjusting a negative pressure of the mask-nozzle means 61 and a release valve 70 for releasing a negative pressure of the mask-nozzle means 61. The air-liquid separating means 68 is connected to a tank 71 for storing a plating solution. Further, between the air-liquid separating means 68 and the plating solution tank 71 are mounted a valve 72 interlocked with the release valve 70, a waste water tank 73 and a switching valve 74 to be switched to the plating solution tank 71. The plating solution recovered by the tank 71 is returned to the upper tank 62 by actuating a feeding pump 75. Numeral 77 is an air compressor, numeral 78 a tank for reserving a highly pressurized air and numeral 79 a valve for adjusting pressure. The highly pressurized air is introduced to the plating solution tank 62. Numeral 80 is a pressure adjusting valve of the plating solution tank 62. Thus, the plating solution tank 62 is kept under a high pressure. When the plating solution is consumed, and reaches less than the level set in a leveling device 81, the switching valve 76 is released and the plating solution is supplied to the tank 62. When the valve 76 is closed, the plating solution is such that it is returned to the tank 71.
Numeral 82 is a heater for keeping the plating solution at a desired temperature. Numeral 83 is a power source circuit for supplying electric power of a mutually opposing polarity to a partitive spot upon the work surface and to the nozzle. Numeral 84 is a timer for controlling the plating time. Numeral 85 is a control section of the electromagnetic valve 63 or the like.
The operation of the plating apparatus as shown in Fig. 6 will now be described hereinafter.
When the work surface 60 is mounted on the mask-nozzle means 61, the valves 70, 72 are closed and due to the function of a suction means 67 there arises a negative pressure within the mask-nozzle means 61. The work surface 60 is thus closely contacted with the mask-nozzle means 61.
When the valve 63 is opened, the plating solution is jetted high-speedily because the plating solution tank 62 is kept under a high pressure by means of the air compressor 77. The plating solution collided with the work surface 60 and the outer air introduced into the mask-nozzle means 61 are separated from each other by means of the air-liquid separating means 68. The plating solution remains somewhat in a form of mists in the air suctioned by the suction means 67, so that the air discharged from the suction means 67 is discharged to the plating solution tank 71, thereby the whole of the plating solution being returned thereto.
When the power source 83 is turned to "OFF" by a timer, the valve 63 is closed, subsequently the valves 70, 72 being opened and communicated to the outer air. In this case, a negative pressure within the mask-nozzle means 61 will diminish and the pressure therewithin is identical with the outer air pressure. Accordingly, a close contact of the work surface 60 with the mask-nozzle means 61 is lost whereby it becomes possible to remove easily the work surface 60 from the mask-nozzle means 61. All of the plating solution separated in the air-liquid separating means 68 are returned to the plating solution tank 71 by way of the one-way valve 74.
In order to store a necessary quantity of highly-pressurized plating solution in the tank 62, the highly-pressurized plating solution to be fed from the feeding pump 75 is supplied to the plating solution tank 62. '
In case a plurality of mask-nozzle means 61 exist, the flow velocity of each mask-nozzle means 61 is not uniform. In order to overcome this disadvantage, the jetting quantity from the nozzle is to be adjusted by adjusting the valve 64 and the flow velocity of the plating solution from each nozzle is to be adjusted by adjusting a negative pressure of the mask-nozzle means by means of the valve 69.
As described above, to maintain constantly a high velocity of the plating solution, the pressure and flow control is carried out at section of the piping. Further, the flow velocity of the mask-nozzle means 61 can be controlled by a baffer plate (not illustrated) which is located between the mask-nozzle means 61 and the air-liquid separating means 68.
Any unbalanced flow velocity of the plating solution varies the current density. For example, it is advantageous to set the plating time within a certain range by adjusting the plating voltage independently..
As described above, the plating apparatus as disclosed in the example of Fig. 6 is characterized in that the plating solution is recycled prefectly. Therefore, there exists neither outside leakage of the plating solution nor adhesion thereof to the plating means.
Since an excessive plating solution hardly adheres to the work surface, washing of the plated surface as a next process does not cause any toxicants to be brought outside. Therefore, a water treatment becomes easy and an environmental pollution is greatly removed.
Fig. 7 is an example of a plating solution tank 90 which is positioned, in view of potential energy, above a mask-nozzle means (not illustrated) in lieu of the arrangement of the plating solution tank 62, the air compressor 77 and the highly-pressurized air tank 78.
The plating solution tank 90 is divided into two tanks 91, 92. Like the example of Fig. 6, the tank 91 is connected to the mask-nozzle means and the tank 92 is to store temporarily the plating solution overflowing from the tank 91. The overflowing plating solution is returned to a lower plating solution tank 94 by way of a return pipe 93 connected to the bottom of the tank 92. Numeral 95 is a pump for feeding the plating solution. The above description is different from the example of Fig. 6, and the operation of the device in Fig. 7 is the same as that in Fig. 6. The velocity of the plating solution is decided by adjusting appropriately a distance H of the potential energy.
An example of Fig. 8 has neither the tank 62 nor the tank 90. In this example, the plating solution is supplied directly to the mask-nozzle means 101 by means of the feeding pump 100. During the time when a plating treatment is being carried out, the plating solution is supplied to the mask-nozzle means 101 by way of a flow adjusting valve 103 by operating a switch valve 102. After completion of the plating treatment, the plating solution is returned to the tank 104 by switching the switch valve 102. The flow adjusting valve 103 is provided to adjust a jetting velocity from the nozzle. An excessive quantity of the plating solution is returned to the tank 104 by way of a pipe 105. The other structure is the same as that in Fig. 6.
In case the plating treatment is carried out, there is the possibility that a certain salt or the like may stick to the inside of piping because a thinner pipe in diameter is used in each example. If so, after the water content of the plating solution has been dried, the salt or the like has been crystallized and the plating solution flow will be worsened. To avoid this disadvantage, by switching the switching valve 66 and/or the switching valve 74, the mask-nozzle 61 and/or the gas-liquid separating means 68 are washed cleanly by the water from the water tank 65. (Refer to Fig. 6.)
Now, a power source for plating will now be described. When doing a plating treatment by the mask-nozzle means in Fig. 1, a certain resistance is in series connected to the nozzle 2. And when observing the voltage decrease of both ends of the resistance with a synchroscope or the like, a certain voltage rate for time is observed. For this reason, a timing of ON-OFF switching of the power source is selected at option.
Figs. 9a, 9b, 9c and 9d show relationships of the jetting time of the plating solution with the plating electric current. Either one of the five examples disclosed in Fig. 9 can be selected, so that a design of the control circuit for the power source can be made as one desires.
Figs. 10 and 11 show respective relationship of the flow velocity of the plating solution with the electric current density wherein the plating solution is used in the example of Fig. 1. This plating solution is an ordinary acidic gold plating solution which appears on the market, and its gold density is low, i.e. 8 gl. As shown in Fig. 10, a relationship of the flow velocity of the plating solution with the electric current density is of a completely straight line type, but the inclination of this straight line is varied by a metal concentration and temperature of the plating solution, a voltage rate of the power source, etc. Further, the efficiency of the electric current is perfectly maintained by those values. Therefore, when the current efficiency is worsened, the straight line in Fig. 10 is lost, then a non- straight line area arises and the finished plated surface shows a phenomenon of burning.
According to the straight line as disclosed in Fig. 11, a jetted plating solution column has a perfect electric resistance. Fig. 11 shows, on the other hand, a relationship between the electric current density and the metal deposition rate. As shown in Fig. 11, it is understood that the metal deposition of the plating device in Fig. 11 is much faster than a conventional jetting plating. The testing result of the plating process according to this invention shows that it is carried out high-speedily.
Now, a plating means for a substantial industrial use for which the plating process according to this invention is applied will now be described.
As mentioned previously, an electric contactor, a semiconductor lead frame, etc require an accurate partitive plating. Those products are being produced in a mass production system, so that productivity of the plating means according to this invention must be considered fully. When using the mask-nozzle means of Fig. 1, a metal deposition rate as shown in Fig. 11 is obtained. In this case, the plate thickness of 211 is sufficient, so that in view of the metal deposition rate in Fig. 11 the plating time of a 0.5 secs. degree is quite sufficient. If a desirable plating solution for specified use will be selected, a preferred plate thickness can be formed in a shorter time.
Generally speaking, the plating operation is applied for press molding products. Accordingly, as shown in Figs. 12 and 14, a plurality of mask-nozzle means are connected with each other, thereby productivity being enhanced furthermore.
The plurality of mask-nozzle means 120, 121, 122, 123 are very suitable for a continuous partitive plating work. The plurality of openings for respective mask-nozzle means are mounted on the same line in which a pitch between two openings may be equal to a pitch between both work surfaces.
Each of the mask-nozzle means 120, 121, 122, 123 is such that it is easily separable from an exhaust pipe. So as to cope with the requirements of various plate areas as well as various plate shapes, if a certain modulated mask-nozzle means is prepared, a plating treatment can be greatly shortened.
Further, there is a case in which a plate area is not uniform, e.g. spots for a partitive plating are positioned in variety (Fig. 14). In this case, even if adjusting the jetting velocity of the plating solution from the mask-nozzle means, the above requirement cannot be achieved within the same cycle time. As shown in Fig. 14, each of variable resistors 140, 141 ... is connected in series to each electrode of the mask-nozzle means.
In Fig. 14 the mask-nozzle means requires the maximum plate area or maximum plate thickness. While maintaining the plating quality, the power source voltage E 145 is obtained so that the minimum plating time, i.e. the maximum current density of the mask-nozzle means may be obtained. After that, in order that a necessary current density of other mask-nozzle means may be obtained, each variable resistor 140, 141... is adjusted. By doing so, a different plate area, shape or thickness can be formed within the same cycle by using such mask-nozzle means. Further, each mask-nozzle means may be provided with its own power source.
Further, respective mask-nozzle can be mounted in view of its plating purpose, for example, alloy gold plating solution, pure plating solution, etc can be supplied to respective mask-nozzle means, whereby various plating treatments can be carried out at the same cycle time.
Referring to an example of Fig. 13, there is shown a semiconductor wire board. In this example, a plurality of partitive spots are scattered.
Three mask-nozzle means 131, 132 and 133 are arranged in order to plate respective spots which are located upwardly, intermediately and downwardly of the semiconductor wire board. Likewise, it is available to furnish each mask-nozzle means a desired plating solution.
Fig. 15 shows an example of the plating apparatus according to this invention in which is mounted a rotary index table.
In this example there are positioned 56 electric contactors on a work surface wherein the partitive plating is carried out seven times by employing eight units of the mask-nozzle means. Numeral 150 is a rotary index table in which twelve processes are indicated. In the first process (I) an object for plating is mounted on a jig 151. As the second process (II) a degreasing treatment is carried out. A degreasing agent is absorbed to a rotary made of felt or the like which is installed in a tank 52. The work surface is passed on the rotary 153 wherein only a necessary area is degreased. The third process (III) is water washing in which the water is jetted. Numeral 154 is a water jetting nozzle. The fourth process (IV) is pickling. The fifth process (V) is water washing by which any toxicants stuck to the work surface are removed. In view of the control of environmental pollution no particular means for discharging used washing water is mounted in this example. A partitive plating is carried out for 5 mm² area, so that about 1 I pickling agent is required for plating about 2,400,000 units of the electric contactors. The sixth process (VI) is rewashing due to jetting flow. The seventh process (VII) is a gold plating for a smaller area wherein eight units of the mask-nozzle means are used. The eighth process (VIII) is again the water washing wherein a slight amount of the plating solution adhered to the plated surface (7th process) is removed and a precious metal is withdrawn. The ninth process (IX) is hot water washing, the tenth process (X): drying and the eleventh process (XI): a plate thickness measuring process or a spare one. The twelfth process (XII) is a process for removing the work surface from the jig 151.
If no toxicant solution is used in the pickling process (4th process), the water washing in the 5th process becomes unnecessary. Accordingly, it may be possible to divide the gold plating (7th process) into two processes. Further, it is quite acceptable to mount a Ni plating device to the plating apparatus of Fig. 15 prior to the aforementioned processes.
Since the plating apparatus in Fig. 15 employs a rotary index table, the operation efficiency is very advantageous. Further, because of a partitive plating the use oftoxicants is little and the costfor exhausting the waste water is small. Accordingly, the production cost is reduced greatly.
Fig. 16 is another example of the plating apparatus, in which a partitive plating for plating a hoop-type product is carried out continuously. In this example the hoop-type product 170 is supplied from a right-hand side, and next to this the pretreatments such as degreasing, pickling, etc are carried out continuously in the pretreating process 17. After the hoop-type product 170 has been dried by a dryer 172, the partitive plating is carried out at a position 173.
In this example, seven units of mask-nozzle means are shown. Numeral 174 is a dryer, numeral 175 an indexing means for feeding intermittently a plated product, numeral 176 a post- washing treating device and numeral 177 a dryer. Further, numerals 178 and 179 are buffers for absorbing a process gap between a continuous feeding and an intermittent feeding.
By making use of the plating apparatus of Fig. 16, it becomes possible to plate _continuously a longer product in diameter.
Figs. 17a and 17b are respective plating means each of which has a single mask-nozzle means. This plating means is for example applicable for a gold plating bump for bonding a Large-scale Integrated Circuit (LSI) chip on a ceramic base plate of a hybrid LSI.
This device makes use of a X-Y table. Numeral 180 is a X-Y table, numeral 181 a mask-nozzle means, numeral 182 a cartridge-type plating solution tank, numeral 183 a suction pump, numeral 184 a compressor for feeding a plating solution under an application of pressure and numeral 185 a control device. The basic operation of this plating means is the same as the operation of the plating means in Fig. 1. The X-Y table 180 is controlled by a numerically-controlled device (not illustrated). Two or more X-Y tables are also mountable if necessary, thus productivity being improved furthermore. Since the plating solution tank is of a cartridge type, it is very easy to replace with a new cartridge. As mentioned previously, the circulation of the plating solution is recycled perfectly.
In practical use, two or more mask-nozzle means are mounted simultaneously in the plating apparatus. Unless the mask-nozzle means gains a fixed negative electrode current stably during the plating operation, the plate thickness becomes unbalanced. The unbalance of the plating current is caused by variations of the resistance rate of the plating solution column. Mainly, the flow velocity and its sectional area are varied. The variations are derived of a close contact of the work surface with the mask. The probability is that such a phenomenon arises. It is advantageous to monitor such phenomenon by a certain means during the time when the plating apparatus is being driven automatically, or to stop the operation or to give an alarm in case it will arise.
Now, the principle of a monitoring method of the plating apparatus according to this invention will be described in connection with Fig. 18.
In Fig. 18, numeral 190 is a power source for plating, numeral 191, 192 low resistances R,, R₂ respectively, numeral 193 a potentiometer VR, numeral 194 an electric resistance r having a jetting plate solution column and numeral 195 a voltmeter.
In Fig. 18, R" R₂, VR and r respectively form a resistance bridge. And there is given the resistance r indicating a plating solution column jetted from the mask-nozzle means for obtaining a given plate thickness. When having set vibration of the voltmeter 195 to zero by adjusting the potentiometer 193, the standard resistance rate of the plate solution column is memorized by the potentiometer 193. Thus, it is easy to monitor variations of the plate current of the mask-nozzle means. Further, since the decline of ion concentration due to fatigue of the plating solution causes deformation of a bridge balance, it can be monitored as mentioned above. Still further, such arrangement is very inexpensive. The example of Fig. 18 is also applicable for the testing device of the plating solution.
Fig. 19 is a circuit diagram of an example of a plating current monitoring device in the plating apparatus according to this invention in which a plurality of mask-nozzle means are mounted.
In Fig. 19, numeral 200 is a power source for plating, numeral 201 an ampere-hour meter, numeral 202 a mask-nozzle means, numeral 203 a timer for adjusting the plating hour, numerals 204, 205 respectively a low resistance, numeral 206 a potentiometer, numeral 207 a differential amplifier, numeral 208 a threshold rate detector which is a circuit such as a Schmidt trigger circuit, numeral 209 an amplifier, numeral 210 a NAND circuit and numeral 211 a flip-flip circuit. As mentioned above, in case a certain error of the plating current arises in the mask-nozzle means 202, the output rate of the differential amplifier 207 triggers the threshold rate detector 208, is amplified by the amplifier 209 and then input to the NAND circuit or a gate circuit 20. If a voltage of + Vcc is input during the plating time into the gate circuit 210, in case there arises a certain error of the plating current due to inversion of the flip-flop circuit 211 any abnormal conditions of the plating operation are alarmed or the operation of the plating means is stopped by an output of the flip-flop circuit 211. This monitoring device enables to operate the plating apparatus automatically.
Referring to Fig. 20a, an insulating coating material of anti-plating-solution properties such as lacquer is coated on a work surface 220 and formed as a coated layer 211. By utilizing the mask-nozzle means of Fig. 1, an organic solvent such as a thinner in lieu of the plating solution is jetted. Then, a part of the coated layer 211 is removed as shown in Fig. 20b. The mask-nozzle means has been used as means for removing a coated layer. Fig. 20c shows a Ni plating treatment 223 which is carried out by a normal operation of the mask-nozzle means. Likewise, an Au plating treatment 224 is added to the Ni plating treatment 223 as shown in Fig. 20d. Again, it will be possible to remove part of the plated layer as necessary.
In accordance with the preferred examples of this invention, a very accurate plating can be carried out speedily upon a partitive work surface.

Claims

1. An electroplating apparatus comprising a mask (3) having an opening at its center, a nozzle (2) for jetting a plating solution which is mounted so as to be directed to the opening of the mask, and a casing (4) covering a closed space (5) enclosed by the mask and the nozzle, characterized in that the mask (3) is closely contacted with a work surface (1) so that the opening of the mask is identical with a profile of a partitive spot upon the work surface, the case (4) is provided with fluid discharge means (6) to maintain a negative air pressure within the closed space (5) and the mask (3) is provided with outer air induction means (7) to introduce the outer air into the closed space (5), and the solution is prevented by the introduced air flow from permeating between the work surface (1) and the mask (3) surface respectively.

2. An apparatus as claimed in claim 1, in which the mask (3) is removable from the casing (4) and replaceable with another mask having a different size of opening.

3. An apparatus as claimed in claim 1, in which a distance between the work surface (1) and the nozzle (2), that is two electrodes is adjustable by regulating clamping means (8, 9, 10, 11) mounted to the nozzle and the casing.

4. An apparatus as claimed in claim 1, in which the outer air induction means (7) forms an air passage which is mounted in the mask (3) to introduce the outer air in the vicinity of the mask opening.

5. An apparatus as claimed in claim 1, in which the outer air induction means (7) forms a gap (22) between the mask (3) side and a member (20) to be plated, the number (20) being inserted into the mask opening.

6. An apparatus as claimed in claim 4, in which the air passage is provided with a partially cutaway channel (34) upon the mask (30) surface and formed by the partially cutaway channel (34) and the work surface (35).

7. An apparatus as claimed in claim 4, in which the air passage is provided with an annular recess (42) in the vicinity of the mask (40) opening, the annular recess (42) being associated with an air passage (41) mounted in the mask (40).

8. An apparatus as claimed in claim 4, in which the air passage is provided with an outer air retaining recess (33) which is formed between a first air channel (31) communicated to outer air and a second air channel (34), thereby the outer air being retained within the recess (33).

9. An apparatus as claimed in claim 8, in which the first air channel is, at its inlet provided with a pipe for feeding inert gas into the mask (30) inside.

10. An apparatus as claimed in claim 9, in which the first air channel (31) comprises an air cleaner and a turbo charger.

11. An apparatus as claimed in claim 1, comprising a power source circuit (83) for supplying electric power of a mutually opposing polarity to the partitive spot upon the work surface and the nozzle respectively, air-liquid separating means (68) for separating the used plating solution from the air introduced from the outer air induction means, and a plating solution tank (62) associated with the air-liquid separating means (68) and replenished by a reproduced plating solution.

12. An apparatus as claimed in any one of claims 1 to 11, in which'a plurality of mask-nozzle means (120, 121, 122, 123) each having the mask, the nozzle for jetting the plating solution, the outer air induction means and the fluid discharge means are connected with each other, one unit of the air-liquid separating means (68) being applied for the plurality of mask-nozzle means.

13. An apparatus as claimed in claims 11 or 12 in which the air-liquid separating means (68) is associated with the closed space of the mask (61) by way of a pipe (68'), the pipe comprising means (69) for controlling a suction amount of an air-liquid mixture or negative pressure thereof, while another pipe (62') between the mask (61) and the plating solution tank (62) comprising means (64) for controlling velocity of the plating solution to be jetted from the nozzle.

14. An apparatus as claimed in claim 13, in which the pipe (62') between the mask (61) and the plating solution tank (62) comprising means (66) for switching the plating solution of the plating tank (62) and a water of a purifying water tank (65).