EP0054069A1 - Conditionnement de circuit integre a dissipateur thermique - Google Patents

Conditionnement de circuit integre a dissipateur thermique

Info

Publication number
EP0054069A1
EP0054069A1 EP19810901965 EP81901965A EP0054069A1 EP 0054069 A1 EP0054069 A1 EP 0054069A1 EP 19810901965 EP19810901965 EP 19810901965 EP 81901965 A EP81901965 A EP 81901965A EP 0054069 A1 EP0054069 A1 EP 0054069A1
Authority
EP
European Patent Office
Prior art keywords
heat
electronic component
electronic components
heat pin
thermally conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19810901965
Other languages
German (de)
English (en)
Inventor
Kenneth H. Olsen
Robert J. Hannemann
James B. Mcelroy
Bruce H. Weaver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Digital Equipment Corp
Original Assignee
Digital Equipment Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Digital Equipment Corp filed Critical Digital Equipment Corp
Publication of EP0054069A1 publication Critical patent/EP0054069A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203—Cooling of mounted components
    • H05K1/0204—Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
    • H01L2023/4037—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink
    • H01L2023/405—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink heatsink to package
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/10409—Screws
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/10416—Metallic blocks or heatsinks completely inserted in a PCB
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0058—Laminating printed circuit boards onto other substrates, e.g. metallic substrates
    • H05K3/0061—Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a metallic substrate, e.g. a heat sink
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor

Definitions

  • This invention relates generally to packaging assemblies and more specifically to packaging apparatus for dissipating heat from integrated circuit chips and other electronic components.
  • Cooling an electronic component which is packaged as part of an assembly of other such components can be described in terms of a thermal resistance problem.
  • the heat generated must be able to flow through the packaging and into some cooling apparatus if the proper temperature of the device is to be maintained.
  • the thermal resistance or conductance of the packaging assembly greatly affects heat dissipation into the cooling medium.
  • a typical integrated circuit device is composed of one or more silicon chips mounted in ceramic or some other suitable material as a carrier,. There is a modest thermal resistance to heat flow through the chip itself and the chip carrier.
  • the integrated circuit chip carrier has been permanently brazed or joined to a heat conducting metal heat sink to reduce thermal resistance.
  • This package as a unit is in turn connected to a printed circuit board.
  • heat generated by the integrated circuit flows through the brazed material into the metallic heat sink which is then cooled by the ambient air or by a forced air cooling system.
  • This type of assembly often requires special manufacturing of the .integrated circuit chip carrier.
  • Another form of heat dissipation for electronic components includes permanently brazing or affixing the electronic component to individual heat sinks immersed in a liquid cooling system.
  • a significant thermal resistance can be encountered at the interface between a chip carrier and a heat dissipating device, which can be lowered by such permanent eutectic bonds, but for a number of reasons it is advantageous not to have a permanent bond between the chip carrier and the heat pin.
  • a permanent bond may require special manufacture of the chip and chip carrier.
  • a permanent bond between the chip carrier and the heat pin makes the assembly, servicing, and replacing of chips difficult.
  • a permanent bond between the chip carrier and the heat dissipating device limits the flexibility of the packaging assembly as part of a larger scale assembly.
  • permanent bonding and special manufacturing may, in some cases, substantially lower the number of chips which can be mounted on one printed circuit board.
  • packaging assemblies for heat dissipation and cooling are designed to work most effectively with one particular type of electronic component.
  • packaging schemes that would work well with small scale integrated circuitry, where a relatively low amount of excess heat is generated by the components, would not work as efficiently with a mixture of small and medium, or small, medium and large scale integrated circuitry in one assembly. This is especially true in those packaging assemblies which require special design of the integrated circuit chip carrier in order for the chip to be attached to a particular heat pin design. Since most assemblies for heat dissipation are designed around one particular type of component there is very little flexibility in assembling a family of such packaging schemes.
  • an object of this invention to provide a heat dissipation packaging assembly for electronic components which permits components of varying heat intensity to be mixed in one sub-assembly with consistently effective cooling. It is another object of this invention to provide an assembly for packaging components to dissipate heat with high efficiency into any of a number of cooling means. It is a further object of this invention to maintain a controlled junction temperature for the integrated circuit components. Another object of this invention is to package electronic component devices in a detachable manner, so that needs for special manufacture of chip carriers and for special bonding techniques are eliminated.
  • This invention comprises an assembly for packaging heat generating electronic components in such a way that the excess heat generated by the components can be dissipated into any one of a plurality of cooling apparatus.
  • the invention comprises: a means for mounting electronic components in an electrical circuit, such as a printed circuit board having a number of cavities extending thorugh it; at least one thermally conductive heat pin shaped to fit through the cavity in the printed circuit board; a thermally conductive planar frame which has a number of holes or positions for capturing heat pins and which has one surface exposed to whichever cooling means is chosen; and a means for detachably coupling integrated circuit chips or other electronic components to the printed circuit board and to the heat pins so that each component is attached to a heat pin which protrudes thorugh the circuit board and is held in contact with the thermally conductive planar frame.
  • the heat generated by the electronic component flows through the heat pin and is dispersed into the common thermal ground of the planar frame for cooling by the selected coolant.
  • a preferred means for detachably coupling the component to the planar member comprises a molded socket which has a recessed floor and a number of side walls.
  • a spring means is attached to the side walls, so that an integrated circuit chip can be inserted into the socket after a heat pin has been connected to the floor of the socket.
  • the spring means provides pressure to hold the electronic component in electrical contact with the connecting wires to the printed circuit board and in thermal contact with the head of the heat pin.
  • the heat pin in turn is thermally connected to a common thermal ground which is a planar frame having a plurality of positions suitable for capturing heat pins.
  • a threaded heat pin permits easy assembly and disassembly as the heat pin head holds the molded socket against the printed circuit board and the shank of the heat pin can be threaded or screwed into the opening in the thermal planar frame.
  • a number of various methods of attaching the heat pin to the thermal planar frame may also be used without deviating from the objects of this invention.
  • FIG. 1 is a cross-sectional view of one embodiment of the packaging assembly of this invention showing a heat pin threaded into a planar frame.
  • FIG. 2 is a cross-sectional view of another embodiment of the heat pin packaging assembly showing a heat pin protruding through a planar frame.
  • FIG. 3 is a perspective view of the elements of this invention as used in one embodiment.
  • FIG. 4 is a cross-sectional view of another embodiment of this invention showing another form of spring means.
  • FIG. 5 is a cross-sectional view of still another embodiment of this invention showing a heat pin formed as part of a molded socket.
  • FIG. 6 is a cross-sectional view of another implementation of the invention in which heat pins protrude from a thermal planar frame.
  • FIG. 7 is a detailed cross-sectional view taken along the same lines as FIG. 1, showing portions of the invention.
  • FIG. 8 is a top view of a printed circuit board used in conjunction with this invention.
  • FIG. 9 is a perspective view of a number of electronic components packaged with the assembly of this invention.
  • FIG. 10 is a different perspective view of the arrangement shown in FIG. 9.
  • FIGS. 11, 12 and 13 are additional perspective views of alternative packaging schemes made possible using this invention.
  • a typical electronic component 1 which consists of an integrated circuit mounted in a chip carrier with the die cavity facing upward.
  • the electronic component 1 is inserted into a molded socket 110, which has a recessed floor 120, and upwardly extending side walls 140.
  • the molded socket 110 has an aperture 130 located in the recessed floor 120.
  • a metal heat pin 50 is inserted through the aperture 130 in the floor of the molded socket 110.
  • the heat pin is comprised of a shank portion 51 and a head portion 52.
  • a thermal gasket 100 is affixed to the heat pin 50. This gasket provides a lowered thermal resistance and a smoother interface between the electronic component 1 and the metal heat pin 50.
  • thermal gasket 100 on the heat pin 50 several materials can be used for the thermal gasket 100 on the heat pin 50.
  • a thin impregnated silicone pad can be used, treatment of the interface with a thermally conductive paste can be used, or a metallic gasket material such as an indium alloy can be used.
  • the thermal resistance of these gaskets can be derived from published materials.
  • the shank portion 51 of the heat pin 50 protrudes downwardly through a component mounting assembly in an electrical circuit, shown here as printed circuit board 10 which has an upper surface 20 and a lower surface 30.
  • printed circuit board 10 which has an upper surface 20 and a lower surface 30.
  • the printed circuit board 10 has at least one hole or cavity 40 of a size to permit the insertion of the heat pin.
  • a dielectric layer is on the lower side 30 of the printed circuit board 10, serving to insulate the wiring from the thermal planar means such as frame 60.
  • Thermal planar frame 60 has an upper surface or first surface 70 which faces outwardly towards the dielectric layer 30 of the printed circuit board and a second surface 80 which faces towards the selected cooling means.
  • planar frame 60 has a number of outwardly extending protrusions or fins 160 to provide further heat dissipation.
  • planar frame 60 has an aperture 90 also sized to permit the insertion of a heat pin 50.
  • shank of the heat pin 50 has a threaded portion which permits the heat pin to be threaded into the corresponding threaded aperture portion 90 of planar frame 60.
  • Thermal resistance of the heat .pin 50 is a function of heat pin size and composition.
  • a preferred embodiment uses an aluminum alloy material for the heat pin.
  • Planar frame 60 is comprised of any metallic substance having good thermal conductivity and, correspondingly, low thermal resistance. In one embodiment, extruded aluminum is used. In FIG. 5 it can be seen that the heat pin 50, protruding from the floor of the molded socket 110, holds the socket 110 in thermal contact with the thermal planar frame 60, and contacts 180 provide electrical contact between the electronic component 1 and printed circuit board 10.
  • the spring means 150 of the molded socket 110 holds the electronic component 1 pressed firmly against the thermal gasket 100 located on top of the heat pin 50 and against the electrical contacts 180. This assembly permits the heat generated in the electronic component 1 to flow through the thermal gasket 100 into the heat conducting heat pin 50 and downwardly through its shank 51 where it is dispersed into the metal planar frame 60.
  • FIG. 7 it can be seen that since the second surface 80 of thermal planar frame 60 is exposed to the cooling means, the heat from the electronic component is effectively dispersed in a uniform manner through planar means 60 into whatever cooling medium is chosen.
  • the conduction/convection resistance in transferring heat from the heat sink or heat pin to the coolant is an important thermal impedance. It depends on the geometry, heat transfer coefficient, and thermal properties of the planar frame 60.
  • Optimal surface configurations for the planar frame's 60 second surface 80 can be derived from published materials. When these optimum geometrical configurations for the second surface 80 are used in conjunction with the preferred embodiment of the invention and the total thermal resistances are calculated, improved package resistances on the order of five degrees centigrade per Watt (5° C/W) may be obtained using the present invention; an improvement over conventional thermal resistance values of other heat sink methods of twelve degrees to fifteen degrees centigrade per Watt (12° to 15° C/W).
  • thermal gasket 100 is affixed to the heat pin 50. But, as is seen in FIG. 7 heat pin 50 itself can be separate and detachable from the molded socket 110 and the electronic component 1.
  • FIG. 8 a mounting means such as a printed circuit board 10 suitable for use with the invention is shown.
  • Printed circuit board 10 contains a number of cavities or holes 40 arranged in a rectilinear pattern.
  • the heat pin 50 shown in FIG. 1 can be inserted through one of the holes 40 shown in FIG. 8 of the printed circuit board 10.
  • FIG. 9 a perspective view of an assembly using the invention is shown.
  • the molded sockets 110 shown in FIG. 9 contain electronic components and heat pins (not visible). Each socket is held by a heat pin against the outer surface 20 of printed circuit board 10 and thermal contact between the electronic component and the thermally conductive planar frame 60 is made by the heat pin. As can be seen in FIG.
  • planar frame 60 has a first surface 70 abutting printed circuit board 10 and a second surface 80 extending away from printed circuit board 10. Additionally, in FIG. 9 it can be seen that the second surface 80 of planar member 60 has a number of cooling fins 160 extending away from the electronic circuitry . These cooling fins assist in further dissipating heat.
  • FIG. 10 shows the assembly depicted in FIG. 9 from a back perspective view. In FIG. 10, it can be seen that heat pins 50 are captured against planar frame 60 by nuts 54.
  • FIG. 11 Another embodiment of the planar packaging assembly is shown in FIG. 11.
  • molded socket 110 containing an electronic component is held against printed circuit board 10 and against the outer wall 70 of planar frame 60.
  • planar frame 60 is now made in a chambered shape such that on its opposing side there is a similar outer surface 70a on which additional printed circuit boards 10 can be mounted with. electronic components and the inner surface 80a faces towards the inside of the chambered construction.
  • the cooling medium can be forced through the interior of planar frame 60 in the direction of the arrow.
  • This assembly can be adapted for use with forced, air cooling, or various combinations of liquid cooling, with the appropriate addition of inlet and outlet chambers for the cooling medium. This also permits a totally enclosed flow path for the cooling medium.
  • FIG. 12 Yet another configuration made possible by the invention is shown in FIG. 12 in which a multiple number of printed circuit boards 10 containing a multiple number of molded sockets 110 are affixed to the planar frame 60 which is of a similar type of chambered construction.
  • FIG. 13 is a perspective drawing of a cruciform chambered shape which also can be used in conjunction with the invention.
  • the size, shape and strength of planar means 60 can be designed to maximize the density of electronic components that can be packaged together in a particular assembly and permit the designer to select the most appropriate cooling medium.
  • the invention also permits a variety of electrical interconnection means to be used between modules of printed circuit boards. For example, in the embodiment shown in FIG.
  • a conventional printed circuit board 10 having gold finger interconnects 11 can be used.
  • cable or other interconnects 11 can be used.
  • the embodiments shown in FIGS. 11, 12, and 13 can also be enclosed such that a cooling medium, such as a liquid, can be used and the components affixed to the outer surfaces can be replaced or repaired without disrupting the cooling medium flow.
  • FIG. 2 an alternative embodiment of the invention shows the heat pin 50 extending completely through planar frame 60 and having a threaded portion 53 at the lower end of the shank which is held in place against planar frame 60 by nut 54.
  • FIG. 4 shows another embodiment of the invention in which the spring means 150 used to maintain contact between the electronic component 1 and the heat pin 50 is supported by protrusions 110a which extend upwardly from the printed circuit board 10.
  • protrusions 110a which extend upwardly from the printed circuit board 10.
  • FIG. 5 another embodiment of the invention is shown for use with a single planar frame 60 is shown.
  • the heat pin 50 is formed as part of the molded socket 110.
  • molded socket 110 is one element, having a heat pin 50 with a threaded shank portion 53 protruding therefrom. This still permits the heat pin to be inserted through a cavity 40 (not shown) in the printed circuit board 10, and through an aperture 90 in thermal planar frame 60. Since the heat pin 50 extends through the planar frame 60, it can be held in place by means of a nut 54. Forming the heat pin 50 as part of the molded socket 110 reduces the manufacturing cost of the assembly and simplifies test and repair while still permitting the electronic component 1 to be detachably coupled.
  • FIG. 6 A further variation of this invention is depicted in FIG. 6.
  • the heat pin 50 is formed as a protruding portion of planar frame 60. Heat pin 50 extends upwardly to form a.threaded head section 52 which screws into a correspondingly threaded aperture 53 in molded socket 110.
  • Use of the packaging assembly of the present invention permits approximately twice the normal density of integrated circuit chip electronic modules to be mounted on a conventional printed circuit board. This, in turn, significantly reduces the cost and size of the overall packaging modules and in computer packaging systems, for example, it also permits improved reliability and speed of the devices so interconnected. Reliability is improved as a result of the lowered junction temperatures attained with this invention.
  • the higher density of chip modules reduces the length of module interconnections, and this, in turn, reduces signal delays, thereby improving the speed of the overall subsystem of modules.
  • the packaging assemblies shown can be used with a number of cooling mechanisms important for electronic equipment, such as natural convection with air, forced air cooling, liquid cooling, and multi-phase and heat pipe heat transfer. At relatively low dissipation densities of approximately .04 watts per square centimeter, heat pin packaging can be used with natural convection to achieve highly reliable cooling.
  • the present invention comprises a heat pin integrated circuit packaging apparatus that fully satisfies the objects, aim, and advantages set forth above. While the invention has been described in conjunction with specific embodiments thereof, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art in light of the foregoing description. Accordingly, it is intended to embrace all such alternatives, modifications and variations as come within the spirit and broad scope of the appended claims.

Abstract

Dispositif de conditionnement de circuit integre a dissipateur thermique servant a dissiper dans un moyen de refroidissement la chaleur produite par les composants electroniques. Le dispositif comprend: un element de montage, tel qu'une plaque (10) de circuit imprime, possedant au moins une cavite (40), permettant le montage des composants electroniques (1) dans un circuit electrique; un dissipateur thermique (50), servant a conduire la chaleur loin du composant electronique (1); un cadre thermique plat (60) possedant au moins une ouverture ou position (90) permettant d'accrocher le dissipateur thermique (50), le cadre thermique plat possedant une surface (80) dirigee vers l'interieur exposee au dispositif de refroidissement; un moyen pour coupler de maniere detachable le composant electronique (1) au dissipateur thermique (50) de maniere telle que le composant electronique (1) soit couple electriquement a la plaque (10) de circuit imprime et thermiquement au dissipateur thermique (50). La chaleur produite par le composant electronique (1) s'ecoule ainsi dans le dissipateur thermique (50) et est dissipee dans le cadre thermique plat (60) qui peut etre refroidi par une variete de dispositifs de refroidissement.
EP19810901965 1980-06-19 1981-06-19 Conditionnement de circuit integre a dissipateur thermique Withdrawn EP0054069A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16123480A 1980-06-19 1980-06-19
US161234 1980-06-19

Publications (1)

Publication Number Publication Date
EP0054069A1 true EP0054069A1 (fr) 1982-06-23

Family

ID=22580389

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19810901965 Withdrawn EP0054069A1 (fr) 1980-06-19 1981-06-19 Conditionnement de circuit integre a dissipateur thermique

Country Status (2)

Country Link
EP (1) EP0054069A1 (fr)
WO (1) WO1981003734A1 (fr)

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Also Published As

Publication number Publication date
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