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Application filed by Tartu Tehnoloogiad OÜfiledCriticalTartu Tehnoloogiad OÜ
Priority to EEP200500009ApriorityCriticalpatent/EE05546B1/et
Priority to US11/628,153prioritypatent/US7803345B2/en
Priority to PCT/EE2005/000007prioritypatent/WO2005118471A1/en
Priority to EP05747278Aprioritypatent/EP1751056A1/en
Publication of EE200500009ApublicationCriticalpatent/EE200500009A/et
Publication of EE05546B1publicationCriticalpatent/EE05546B1/et
Precursor composition for porous membrane and process for preparation thereof, porous membrane and process for production thereof, and semiconductor device