EE05164B1 - Pindepaksusetalonide kalibreerimise meetod - Google Patents

Pindepaksusetalonide kalibreerimise meetod

Info

Publication number
EE05164B1
EE05164B1 EEP200600042A EEP200600042A EE05164B1 EE 05164 B1 EE05164 B1 EE 05164B1 EE P200600042 A EEP200600042 A EE P200600042A EE P200600042 A EEP200600042 A EE P200600042A EE 05164 B1 EE05164 B1 EE 05164B1
Authority
EE
Estonia
Prior art keywords
calibration method
surface thickness
thickness standards
standards
calibration
Prior art date
Application number
EEP200600042A
Other languages
English (en)
Inventor
Laaneots Rein
Abiline Indrek
Nanits Mats-Maidu
Riim Jürgen
Original Assignee
Tallinna Tehnikaülikool
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tallinna Tehnikaülikool filed Critical Tallinna Tehnikaülikool
Priority to EEP200600042A priority Critical patent/EE05164B1/et
Priority to DE102007062966A priority patent/DE102007062966A1/de
Publication of EE200600042A publication Critical patent/EE200600042A/et
Publication of EE05164B1 publication Critical patent/EE05164B1/et

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
EEP200600042A 2006-12-22 2006-12-22 Pindepaksusetalonide kalibreerimise meetod EE05164B1 (et)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EEP200600042A EE05164B1 (et) 2006-12-22 2006-12-22 Pindepaksusetalonide kalibreerimise meetod
DE102007062966A DE102007062966A1 (de) 2006-12-22 2007-12-21 Methode zur Kalibrierung von Schichtdickennormalen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EEP200600042A EE05164B1 (et) 2006-12-22 2006-12-22 Pindepaksusetalonide kalibreerimise meetod

Publications (2)

Publication Number Publication Date
EE200600042A EE200600042A (et) 2008-08-15
EE05164B1 true EE05164B1 (et) 2009-04-15

Family

ID=39432117

Family Applications (1)

Application Number Title Priority Date Filing Date
EEP200600042A EE05164B1 (et) 2006-12-22 2006-12-22 Pindepaksusetalonide kalibreerimise meetod

Country Status (2)

Country Link
DE (1) DE102007062966A1 (et)
EE (1) EE05164B1 (et)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010020116A1 (de) * 2010-05-10 2011-11-10 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten an großflächigen Messoberflächen

Also Published As

Publication number Publication date
DE102007062966A1 (de) 2008-06-26
EE200600042A (et) 2008-08-15

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Legal Events

Date Code Title Description
KB4A Valid patent at the end of a year

Effective date: 20101231

MM4A Lapsed by not paying the annual fees

Effective date: 20131222