EE05164B1 - Calibration method for surface thickness standards - Google Patents
Calibration method for surface thickness standardsInfo
- Publication number
- EE05164B1 EE05164B1 EEP200600042A EEP200600042A EE05164B1 EE 05164 B1 EE05164 B1 EE 05164B1 EE P200600042 A EEP200600042 A EE P200600042A EE P200600042 A EEP200600042 A EE P200600042A EE 05164 B1 EE05164 B1 EE 05164B1
- Authority
- EE
- Estonia
- Prior art keywords
- calibration method
- surface thickness
- thickness standards
- standards
- calibration
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EEP200600042A EE05164B1 (en) | 2006-12-22 | 2006-12-22 | Calibration method for surface thickness standards |
DE102007062966A DE102007062966A1 (en) | 2006-12-22 | 2007-12-21 | Method for calibrating normal coating thickness, involves measuring topography of part of substrate without coating and coated part of surface of normal coating thickness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EEP200600042A EE05164B1 (en) | 2006-12-22 | 2006-12-22 | Calibration method for surface thickness standards |
Publications (2)
Publication Number | Publication Date |
---|---|
EE200600042A EE200600042A (en) | 2008-08-15 |
EE05164B1 true EE05164B1 (en) | 2009-04-15 |
Family
ID=39432117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EEP200600042A EE05164B1 (en) | 2006-12-22 | 2006-12-22 | Calibration method for surface thickness standards |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102007062966A1 (en) |
EE (1) | EE05164B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010020116A1 (en) * | 2010-05-10 | 2011-11-10 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Method and device for measuring the thickness of thin layers on large-area measuring surfaces |
-
2006
- 2006-12-22 EE EEP200600042A patent/EE05164B1/en not_active IP Right Cessation
-
2007
- 2007-12-21 DE DE102007062966A patent/DE102007062966A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EE200600042A (en) | 2008-08-15 |
DE102007062966A1 (en) | 2008-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
KB4A | Valid patent at the end of a year |
Effective date: 20101231 |
|
MM4A | Lapsed by not paying the annual fees |
Effective date: 20131222 |