EA202190605A1 - Комплект для монтажа камеры для обработки поверхности - Google Patents

Комплект для монтажа камеры для обработки поверхности

Info

Publication number
EA202190605A1
EA202190605A1 EA202190605A EA202190605A EA202190605A1 EA 202190605 A1 EA202190605 A1 EA 202190605A1 EA 202190605 A EA202190605 A EA 202190605A EA 202190605 A EA202190605 A EA 202190605A EA 202190605 A1 EA202190605 A1 EA 202190605A1
Authority
EA
Eurasian Patent Office
Prior art keywords
movable cover
handle
camera
surface treatment
camera mounting
Prior art date
Application number
EA202190605A
Other languages
English (en)
Inventor
Филипп Белле
Жан-Филипп Биар
Адриен ОРЛЕАН
Карин Оливье
Original Assignee
Агк Гласс Юроп
Агк Инк.
Агк Флэт Гласс Норс Америка, Инк.
Агк Видрос До Бразил Лтда
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Агк Гласс Юроп, Агк Инк., Агк Флэт Гласс Норс Америка, Инк., Агк Видрос До Бразил Лтда filed Critical Агк Гласс Юроп
Publication of EA202190605A1 publication Critical patent/EA202190605A1/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Accessories Of Cameras (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Настоящее изобретение относится к комплекту частей для монтажа камеры для устройства для обработки поверхности, содержащему неподвижную основную часть (1) и подвижную крышку (2), при этом указанная подвижная крышка (2) содержит рукоятку (3), при этом указанная рукоятка (3) соединена с указанной подвижной крышкой (2) таким образом, что указанная рукоятка (3) может поворачиваться относительно первой поперечной оси Y1 по отношению к указанной подвижной крышке (2), и указанная подвижная крышка (2) содержит по меньшей мере один элемент (4) зацепления для механического соединения с по меньшей мере одной частью (5) для соединения указанной неподвижной основной части (1). Настоящее изобретение дополнительно относится к камере для устройства для обработки поверхности, содержащей указанный комплект частей, и способу монтажа указанной камеры для обработки поверхности.
EA202190605A 2018-09-03 2019-08-28 Комплект для монтажа камеры для обработки поверхности EA202190605A1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP18192288 2018-09-03
PCT/EP2019/072972 WO2020048846A1 (en) 2018-09-03 2019-08-28 Kit for mounting a surface treatment chamber

Publications (1)

Publication Number Publication Date
EA202190605A1 true EA202190605A1 (ru) 2021-06-09

Family

ID=63490348

Family Applications (1)

Application Number Title Priority Date Filing Date
EA202190605A EA202190605A1 (ru) 2018-09-03 2019-08-28 Комплект для монтажа камеры для обработки поверхности

Country Status (5)

Country Link
EA (1) EA202190605A1 (ru)
PH (1) PH12021550326A1 (ru)
TW (1) TW202104648A (ru)
WO (1) WO2020048846A1 (ru)
ZA (1) ZA202102198B (ru)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11101345A (ja) * 1997-09-30 1999-04-13 Tokyo Electron Ltd 真空処理装置の開閉蓋ヒンジ機構
US7001468B1 (en) * 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
KR100512740B1 (ko) * 2003-06-19 2005-09-07 삼성전자주식회사 반응장치
US20060071384A1 (en) * 2004-10-06 2006-04-06 Advanced Display Process Engineering Co. Ltd. Apparatus for manufacturing flat-panel display
EP1713110B1 (de) 2005-04-08 2016-03-09 Applied Materials GmbH & Co. KG Anlage zum Beschichten eines Substrats und Modul
EP2387063B1 (en) 2010-05-11 2014-04-30 Applied Materials, Inc. Chamber for physical vapor deposition

Also Published As

Publication number Publication date
TW202104648A (zh) 2021-02-01
PH12021550326A1 (en) 2021-10-04
ZA202102198B (en) 2022-09-28
WO2020048846A1 (en) 2020-03-12

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