EA201190202A1 - Структура, включающая по меньшей мере одну отражающую тонкую пленку на поверхности макроскопического объекта, способ изготовления структуры и применения этой структуры - Google Patents
Структура, включающая по меньшей мере одну отражающую тонкую пленку на поверхности макроскопического объекта, способ изготовления структуры и применения этой структурыInfo
- Publication number
- EA201190202A1 EA201190202A1 EA201190202A EA201190202A EA201190202A1 EA 201190202 A1 EA201190202 A1 EA 201190202A1 EA 201190202 A EA201190202 A EA 201190202A EA 201190202 A EA201190202 A EA 201190202A EA 201190202 A1 EA201190202 A1 EA 201190202A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- thin film
- macroscopic object
- macroscopic
- lesser
- visible light
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
- G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45529—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations specially adapted for making a layer stack of alternating different compositions or gradient compositions
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Optical Filters (AREA)
- Laminated Bodies (AREA)
Abstract
Описана структура, включающая по меньшей мере одну отражающую тонкую пленку на поверхности макроскопического объекта. Поверхность макроскопического объекта без по меньшей мере одной тонкой пленки отражает менее 50% падающего света в видимом диапазоне длин волн и является непрозрачной, а отражение видимого света от поверхности макроскопического объекта по меньшей мере с одной тонкой пленкой на поверхности макроскопического объекта является, по существу, спектрально однородным и равномерным на доступных углах зрения. По меньшей мере одна тонкая пленка является диэлектрической и, по существу, прозрачной для видимого света и по меньшей мере одну тонкую пленку изготавливают путем воздействия на поверхность макроскопического объекта поочередно повторяющихся, по существу, самоограничивающихся поверхностных реакций двух или более предшественников для увеличения отражательной способности для зеркально отраженного от поверхности видимого света в видимом диапазоне длин волн.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20095382A FI20095382A0 (fi) | 2009-04-08 | 2009-04-08 | Heijastava kalvorakenne, menetelmä heijastavan kalvorakenteen valmistamiseksi, ja käytöt kalvorakenteelle ja menetelmälle |
PCT/FI2010/050269 WO2010116034A1 (en) | 2009-04-08 | 2010-04-07 | Structure comprising at least one reflecting thin film on a surface of a macroscopic object, method for fabricating a structure, and uses for the same |
Publications (1)
Publication Number | Publication Date |
---|---|
EA201190202A1 true EA201190202A1 (ru) | 2012-04-30 |
Family
ID=40590264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EA201190202A EA201190202A1 (ru) | 2009-04-08 | 2010-04-07 | Структура, включающая по меньшей мере одну отражающую тонкую пленку на поверхности макроскопического объекта, способ изготовления структуры и применения этой структуры |
Country Status (7)
Country | Link |
---|---|
US (1) | US20120120514A1 (ru) |
EP (1) | EP2417480A4 (ru) |
CN (1) | CN102369464A (ru) |
EA (1) | EA201190202A1 (ru) |
FI (1) | FI20095382A0 (ru) |
TW (1) | TW201044026A (ru) |
WO (1) | WO2010116034A1 (ru) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103773083B (zh) * | 2012-10-18 | 2015-04-22 | 上海纳米技术及应用国家工程研究中心有限公司 | 一种光学干涉变色颜料及其制备方法和应用 |
KR20160047538A (ko) * | 2013-10-16 | 2016-05-02 | 미쯔이 죠센 가부시키가이샤 | 성막 장치 및 성막 방법 |
CN110422345B (zh) * | 2019-07-26 | 2022-07-19 | 中国电子科技集团公司第三十三研究所 | 一种基于光子晶体的osr热控涂层 |
CN112526663A (zh) * | 2020-11-04 | 2021-03-19 | 浙江大学 | 一种基于原子层沉积的吸收膜及其制作方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6374005A (ja) * | 1986-09-18 | 1988-04-04 | Hoya Corp | 多層膜裏面反射鏡 |
JP2509922B2 (ja) * | 1986-12-27 | 1996-06-26 | ホーヤ 株式会社 | 多層膜表面反射鏡 |
JP2003318094A (ja) * | 2002-04-24 | 2003-11-07 | Shin Etsu Handotai Co Ltd | 露光装置用反射鏡および露光装置ならびに、それらを用いて製造される半導体デバイス |
JP2003328094A (ja) * | 2002-05-17 | 2003-11-19 | Sky Alum Co Ltd | 平版印刷版支持体用アルミニウム合金圧延板の製造方法 |
US7294360B2 (en) * | 2003-03-31 | 2007-11-13 | Planar Systems, Inc. | Conformal coatings for micro-optical elements, and method for making the same |
US20090225427A1 (en) * | 2008-03-10 | 2009-09-10 | Masco Corporation | Optically modified three-dimensional object |
-
2009
- 2009-04-08 FI FI20095382A patent/FI20095382A0/fi unknown
-
2010
- 2010-04-02 TW TW099110263A patent/TW201044026A/zh unknown
- 2010-04-07 WO PCT/FI2010/050269 patent/WO2010116034A1/en active Application Filing
- 2010-04-07 EP EP10761231A patent/EP2417480A4/en not_active Withdrawn
- 2010-04-07 CN CN2010800147735A patent/CN102369464A/zh active Pending
- 2010-04-07 EA EA201190202A patent/EA201190202A1/ru unknown
- 2010-04-07 US US13/258,181 patent/US20120120514A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP2417480A4 (en) | 2012-12-12 |
WO2010116034A1 (en) | 2010-10-14 |
FI20095382A0 (fi) | 2009-04-08 |
TW201044026A (en) | 2010-12-16 |
CN102369464A (zh) | 2012-03-07 |
US20120120514A1 (en) | 2012-05-17 |
EP2417480A1 (en) | 2012-02-15 |
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