DK372976A - Fremgangsmade til fremstilling af siliciumhullegemer - Google Patents

Fremgangsmade til fremstilling af siliciumhullegemer

Info

Publication number
DK372976A
DK372976A DK372976A DK372976A DK372976A DK 372976 A DK372976 A DK 372976A DK 372976 A DK372976 A DK 372976A DK 372976 A DK372976 A DK 372976A DK 372976 A DK372976 A DK 372976A
Authority
DK
Denmark
Prior art keywords
silicium
procedure
manufacture
hole bodies
bodies
Prior art date
Application number
DK372976A
Other languages
English (en)
Inventor
R Griesshammer
F Koppl
A Goppinger
J Thalmeier
H Hamster
Original Assignee
Wacker Chemitronic Ges Fyr El
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemitronic Ges Fyr El filed Critical Wacker Chemitronic Ges Fyr El
Publication of DK372976A publication Critical patent/DK372976A/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
DK372976A 1975-09-16 1976-08-18 Fremgangsmade til fremstilling af siliciumhullegemer DK372976A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2541215A DE2541215C3 (de) 1975-09-16 1975-09-16 Verfahren zur Herstellung von Siliciumhohlkörpern

Publications (1)

Publication Number Publication Date
DK372976A true DK372976A (da) 1977-03-17

Family

ID=5956586

Family Applications (1)

Application Number Title Priority Date Filing Date
DK372976A DK372976A (da) 1975-09-16 1976-08-18 Fremgangsmade til fremstilling af siliciumhullegemer

Country Status (7)

Country Link
US (1) US4062714A (da)
JP (1) JPS5237523A (da)
BE (1) BE846213A (da)
DE (1) DE2541215C3 (da)
DK (1) DK372976A (da)
IT (1) IT1078737B (da)
NL (1) NL7608328A (da)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2065724A1 (en) * 1991-05-01 1992-11-02 Thomas R. Anthony Method of producing articles by chemical vapor deposition and the support mandrels used therein
US9683286B2 (en) * 2006-04-28 2017-06-20 Gtat Corporation Increased polysilicon deposition in a CVD reactor
RU2499081C2 (ru) * 2008-03-26 2013-11-20 ДжиТиЭйТи Корпорейшн Системы и способы распределения газа в реакторе для химического осаждения из паровой фазы
CN102047751B (zh) 2008-04-14 2014-01-29 赫姆洛克半导体公司 用于沉积材料的制造设备和其中使用的电极
RU2388690C2 (ru) * 2008-05-22 2010-05-10 Общество с ограниченной ответственностью "Группа СТР" Способ получения поликристаллического кремния
CN102084028B (zh) * 2008-06-23 2014-04-16 Gt太阳能公司 在化学气相沉积反应器中用于管丝的夹头及电桥的连接点
US8840723B2 (en) * 2009-03-10 2014-09-23 Mitsubishi Materials Corporation Manufacturing apparatus of polycrystalline silicon
CN103160926A (zh) * 2011-12-09 2013-06-19 洛阳金诺机械工程有限公司 一种采用空心硅芯生长多晶硅的方法
US10450649B2 (en) * 2014-01-29 2019-10-22 Gtat Corporation Reactor filament assembly with enhanced misalignment tolerance
CN105502407A (zh) * 2016-02-04 2016-04-20 洛阳金诺机械工程有限公司 一种多晶硅生产中使用的硅芯及其硅芯组件
WO2019136261A1 (en) * 2018-01-04 2019-07-11 Ih Ip Holdings Limited Gas phase co-deposition of hydrogen/deuterium loaded metallic structures

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2409958A (en) * 1943-04-16 1946-10-22 Polaroid Corp Method of molding prisms
US3030189A (en) * 1958-05-19 1962-04-17 Siemens Ag Methods of producing substances of highest purity, particularly electric semiconductors
NL256017A (da) * 1959-09-23 1900-01-01
DE1137807B (de) * 1961-06-09 1962-10-11 Siemens Ag Verfahren zur Herstellung von Halbleiteranordnungen durch einkristalline Abscheidung von Halbleitermaterial aus der Gasphase
US3966885A (en) * 1968-08-29 1976-06-29 National Research Development Corporation Methods and materials for joining silicon powder structures
US3950479A (en) * 1969-04-02 1976-04-13 Siemens Aktiengesellschaft Method of producing hollow semiconductor bodies
DE1917016B2 (de) * 1969-04-02 1972-01-05 Siemens AG, 1000 Berlin u. 8000 München Verfahren zur herstellung von hohlkoerpern aus halbleiter material
DE1943359A1 (de) * 1969-08-26 1971-03-04 Siemens Ag Verfahren zum Herstellen eines mindestens einseitig offenen Hohlkoerpers aus Halbleitermaterial

Also Published As

Publication number Publication date
DE2541215A1 (de) 1977-03-17
DE2541215B2 (de) 1977-12-08
NL7608328A (nl) 1977-03-18
IT1078737B (it) 1985-05-08
JPS5237523A (en) 1977-03-23
US4062714A (en) 1977-12-13
BE846213A (fr) 1977-03-15
DE2541215C3 (de) 1978-08-03

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