DK3370250T3 - Filmform og prægningsfremgangsmåde - Google Patents

Filmform og prægningsfremgangsmåde Download PDF

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Publication number
DK3370250T3
DK3370250T3 DK16859600.5T DK16859600T DK3370250T3 DK 3370250 T3 DK3370250 T3 DK 3370250T3 DK 16859600 T DK16859600 T DK 16859600T DK 3370250 T3 DK3370250 T3 DK 3370250T3
Authority
DK
Denmark
Prior art keywords
film form
improvement procedure
improvement
procedure
film
Prior art date
Application number
DK16859600.5T
Other languages
English (en)
Inventor
Yasuhiro Okawa
Hidenori Yoshioka
Original Assignee
Dainippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Printing Co Ltd filed Critical Dainippon Printing Co Ltd
Application granted granted Critical
Publication of DK3370250T3 publication Critical patent/DK3370250T3/da

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10064Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising at least two glass sheets, only one of which being an outer layer
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2709/00Use of inorganic materials not provided for in groups B29K2703/00 - B29K2707/00, for preformed parts, e.g. for inserts
    • B29K2709/08Glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DK16859600.5T 2015-10-26 2016-10-14 Filmform og prægningsfremgangsmåde DK3370250T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015209940A JP6578883B2 (ja) 2015-10-26 2015-10-26 フィルムモールド及びインプリント方法
PCT/JP2016/080540 WO2017073370A1 (ja) 2015-10-26 2016-10-14 フィルムモールド及びインプリント方法

Publications (1)

Publication Number Publication Date
DK3370250T3 true DK3370250T3 (da) 2022-06-13

Family

ID=58631421

Family Applications (1)

Application Number Title Priority Date Filing Date
DK16859600.5T DK3370250T3 (da) 2015-10-26 2016-10-14 Filmform og prægningsfremgangsmåde

Country Status (6)

Country Link
US (1) US11123960B2 (da)
EP (1) EP3370250B1 (da)
JP (1) JP6578883B2 (da)
CN (1) CN108352301B (da)
DK (1) DK3370250T3 (da)
WO (1) WO2017073370A1 (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020074709A1 (en) 2018-10-12 2020-04-16 Morphotonics B.V. Flexible stamp with tunable high dimensional stability
JP6694101B1 (ja) * 2019-08-09 2020-05-13 Aiメカテック株式会社 微細構造転写装置及び微細構造転写方法
US20230347672A1 (en) 2020-07-31 2023-11-02 Morphotonics Holding B.V. High dimensional flexible stamp with tiled strengthened area

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4906703A (en) * 1984-08-17 1990-03-06 Artistic Glass Products Company Ionomer resin films and laminates thereof
JP2005281101A (ja) * 2004-03-30 2005-10-13 Central Glass Co Ltd ディスプレイ装置用基板ガラス
JP5002422B2 (ja) 2007-11-14 2012-08-15 株式会社日立ハイテクノロジーズ ナノプリント用樹脂スタンパ
JP5215833B2 (ja) 2008-12-11 2013-06-19 株式会社日立ハイテクノロジーズ 微細パターン転写用スタンパ及びその製造方法
JP2011240643A (ja) * 2010-05-20 2011-12-01 Bridgestone Corp 樹脂製フィルムを用いた凹凸パターンの形成方法、その方法に使用する装置
WO2011155582A1 (ja) * 2010-06-11 2011-12-15 株式会社日立ハイテクノロジーズ 微細構造転写用スタンパ及び微細構造転写装置
WO2012018045A1 (ja) * 2010-08-06 2012-02-09 綜研化学株式会社 樹脂製モールド、その製造方法およびその使用方法
WO2013147105A1 (ja) * 2012-03-30 2013-10-03 コニカミノルタ株式会社 ロール状モールド、並びに、ロール状モールド及び素子の製造方法
JP2013237157A (ja) * 2012-05-11 2013-11-28 Kuraray Co Ltd 樹脂成形体の製造方法、樹脂成形体、およびモールド
WO2014080857A1 (ja) * 2012-11-22 2014-05-30 綜研化学株式会社 インプリント用モールドの製造方法、インプリント用モールド、インプリント用モールド製造キット
JP6326916B2 (ja) * 2013-04-23 2018-05-23 大日本印刷株式会社 インプリント用モールドおよびインプリント方法
WO2015012161A1 (ja) * 2013-07-23 2015-01-29 旭硝子株式会社 第1モールドの凹凸パターンを転写した第2モールド、第2モールドの製造方法、第2モールドを用いた物品の製造方法、光学パネルの製造方法、および光学素子の製造方法

Also Published As

Publication number Publication date
US20180307136A1 (en) 2018-10-25
CN108352301A (zh) 2018-07-31
EP3370250A4 (en) 2019-07-10
JP2017084900A (ja) 2017-05-18
JP6578883B2 (ja) 2019-09-25
CN108352301B (zh) 2023-03-24
EP3370250B1 (en) 2022-05-18
US11123960B2 (en) 2021-09-21
WO2017073370A1 (ja) 2017-05-04
EP3370250A1 (en) 2018-09-05

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