DK3370250T3 - Filmform og prægningsfremgangsmåde - Google Patents
Filmform og prægningsfremgangsmåde Download PDFInfo
- Publication number
- DK3370250T3 DK3370250T3 DK16859600.5T DK16859600T DK3370250T3 DK 3370250 T3 DK3370250 T3 DK 3370250T3 DK 16859600 T DK16859600 T DK 16859600T DK 3370250 T3 DK3370250 T3 DK 3370250T3
- Authority
- DK
- Denmark
- Prior art keywords
- film form
- improvement procedure
- improvement
- procedure
- film
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10064—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising at least two glass sheets, only one of which being an outer layer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2709/00—Use of inorganic materials not provided for in groups B29K2703/00 - B29K2707/00, for preformed parts, e.g. for inserts
- B29K2709/08—Glass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015209940A JP6578883B2 (ja) | 2015-10-26 | 2015-10-26 | フィルムモールド及びインプリント方法 |
PCT/JP2016/080540 WO2017073370A1 (ja) | 2015-10-26 | 2016-10-14 | フィルムモールド及びインプリント方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DK3370250T3 true DK3370250T3 (da) | 2022-06-13 |
Family
ID=58631421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK16859600.5T DK3370250T3 (da) | 2015-10-26 | 2016-10-14 | Filmform og prægningsfremgangsmåde |
Country Status (6)
Country | Link |
---|---|
US (1) | US11123960B2 (da) |
EP (1) | EP3370250B1 (da) |
JP (1) | JP6578883B2 (da) |
CN (1) | CN108352301B (da) |
DK (1) | DK3370250T3 (da) |
WO (1) | WO2017073370A1 (da) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020074709A1 (en) | 2018-10-12 | 2020-04-16 | Morphotonics B.V. | Flexible stamp with tunable high dimensional stability |
JP6694101B1 (ja) * | 2019-08-09 | 2020-05-13 | Aiメカテック株式会社 | 微細構造転写装置及び微細構造転写方法 |
US20230347672A1 (en) | 2020-07-31 | 2023-11-02 | Morphotonics Holding B.V. | High dimensional flexible stamp with tiled strengthened area |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4906703A (en) * | 1984-08-17 | 1990-03-06 | Artistic Glass Products Company | Ionomer resin films and laminates thereof |
JP2005281101A (ja) * | 2004-03-30 | 2005-10-13 | Central Glass Co Ltd | ディスプレイ装置用基板ガラス |
JP5002422B2 (ja) | 2007-11-14 | 2012-08-15 | 株式会社日立ハイテクノロジーズ | ナノプリント用樹脂スタンパ |
JP5215833B2 (ja) | 2008-12-11 | 2013-06-19 | 株式会社日立ハイテクノロジーズ | 微細パターン転写用スタンパ及びその製造方法 |
JP2011240643A (ja) * | 2010-05-20 | 2011-12-01 | Bridgestone Corp | 樹脂製フィルムを用いた凹凸パターンの形成方法、その方法に使用する装置 |
WO2011155582A1 (ja) * | 2010-06-11 | 2011-12-15 | 株式会社日立ハイテクノロジーズ | 微細構造転写用スタンパ及び微細構造転写装置 |
WO2012018045A1 (ja) * | 2010-08-06 | 2012-02-09 | 綜研化学株式会社 | 樹脂製モールド、その製造方法およびその使用方法 |
WO2013147105A1 (ja) * | 2012-03-30 | 2013-10-03 | コニカミノルタ株式会社 | ロール状モールド、並びに、ロール状モールド及び素子の製造方法 |
JP2013237157A (ja) * | 2012-05-11 | 2013-11-28 | Kuraray Co Ltd | 樹脂成形体の製造方法、樹脂成形体、およびモールド |
WO2014080857A1 (ja) * | 2012-11-22 | 2014-05-30 | 綜研化学株式会社 | インプリント用モールドの製造方法、インプリント用モールド、インプリント用モールド製造キット |
JP6326916B2 (ja) * | 2013-04-23 | 2018-05-23 | 大日本印刷株式会社 | インプリント用モールドおよびインプリント方法 |
WO2015012161A1 (ja) * | 2013-07-23 | 2015-01-29 | 旭硝子株式会社 | 第1モールドの凹凸パターンを転写した第2モールド、第2モールドの製造方法、第2モールドを用いた物品の製造方法、光学パネルの製造方法、および光学素子の製造方法 |
-
2015
- 2015-10-26 JP JP2015209940A patent/JP6578883B2/ja active Active
-
2016
- 2016-10-14 US US15/771,332 patent/US11123960B2/en active Active
- 2016-10-14 CN CN201680062226.1A patent/CN108352301B/zh active Active
- 2016-10-14 WO PCT/JP2016/080540 patent/WO2017073370A1/ja active Application Filing
- 2016-10-14 EP EP16859600.5A patent/EP3370250B1/en active Active
- 2016-10-14 DK DK16859600.5T patent/DK3370250T3/da active
Also Published As
Publication number | Publication date |
---|---|
US20180307136A1 (en) | 2018-10-25 |
CN108352301A (zh) | 2018-07-31 |
EP3370250A4 (en) | 2019-07-10 |
JP2017084900A (ja) | 2017-05-18 |
JP6578883B2 (ja) | 2019-09-25 |
CN108352301B (zh) | 2023-03-24 |
EP3370250B1 (en) | 2022-05-18 |
US11123960B2 (en) | 2021-09-21 |
WO2017073370A1 (ja) | 2017-05-04 |
EP3370250A1 (en) | 2018-09-05 |
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