DK3209954T3 - Optisk bord - Google Patents

Optisk bord Download PDF

Info

Publication number
DK3209954T3
DK3209954T3 DK15787460.3T DK15787460T DK3209954T3 DK 3209954 T3 DK3209954 T3 DK 3209954T3 DK 15787460 T DK15787460 T DK 15787460T DK 3209954 T3 DK3209954 T3 DK 3209954T3
Authority
DK
Denmark
Prior art keywords
optical table
optical
Prior art date
Application number
DK15787460.3T
Other languages
English (en)
Inventor
Dirk Haft
Florian Otto
Khaled Karrai
Savio Claudio Dal
Original Assignee
Attocube Systems Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Attocube Systems Ag filed Critical Attocube Systems Ag
Application granted granted Critical
Publication of DK3209954T3 publication Critical patent/DK3209954T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/04—Optical benches therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B19/00—Machines, plants or systems, using evaporation of a refrigerant but without recovery of the vapour
    • F25B19/005—Machines, plants or systems, using evaporation of a refrigerant but without recovery of the vapour the refrigerant being a liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B21/00—Machines, plants or systems, using electric or magnetic effects
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D3/00—Devices using other cold materials; Devices using cold-storage bodies
    • F25D3/10—Devices using other cold materials; Devices using cold-storage bodies using liquefied gases, e.g. liquid air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G01M11/0214—Details of devices holding the object to be tested
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2500/00—Problems to be solved
    • F25B2500/13—Vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Vibration Prevention Devices (AREA)
DK15787460.3T 2014-10-23 2015-10-22 Optisk bord DK3209954T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014015665.6A DE102014015665B4 (de) 2014-10-23 2014-10-23 Optischer Tisch
PCT/EP2015/002092 WO2016062404A1 (de) 2014-10-23 2015-10-22 Optischer tisch

Publications (1)

Publication Number Publication Date
DK3209954T3 true DK3209954T3 (da) 2021-05-17

Family

ID=54364240

Family Applications (1)

Application Number Title Priority Date Filing Date
DK15787460.3T DK3209954T3 (da) 2014-10-23 2015-10-22 Optisk bord

Country Status (7)

Country Link
US (1) US11092512B2 (da)
EP (1) EP3209954B1 (da)
JP (1) JP2018503044A (da)
DE (1) DE102014015665B4 (da)
DK (1) DK3209954T3 (da)
IL (1) IL251187B (da)
WO (1) WO2016062404A1 (da)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014017374B4 (de) * 2014-11-24 2016-09-15 Attocube Systems Ag Tisch
DE102019100226A1 (de) 2019-01-07 2020-07-09 Leibniz-Institut für Atmoshärenphysik e.V. an der Universität Rostock Optisches System sowie Verfahren zur Herstellung eines optischen Systems
DE102019203341A1 (de) 2019-03-12 2020-09-17 Pressure Wave Systems Gmbh Kryostat
AT522172B1 (de) * 2019-04-23 2020-09-15 Univ Linz Vorrichtung zur Lagerung eines Objekthalters
DE102022110585B4 (de) 2022-04-29 2023-11-30 Kiutra Gmbh Tragstruktur für ein kryogenes system und kryogenes system

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4161747A (en) * 1978-02-24 1979-07-17 Nasa Shock isolator for operating a diode laser on a closed-cycle refrigerator
JPH01188738A (ja) * 1988-01-18 1989-07-28 Nec Corp 光学用除振台
FR2634026B1 (da) * 1988-07-08 1990-11-09 Labo Electronique Physique
DE4110250C2 (de) * 1991-03-28 1994-11-03 Spectrospin Ag Schwingungsdämpfende Halterung
US5327733A (en) * 1993-03-08 1994-07-12 University Of Cincinnati Substantially vibration-free shroud and mounting system for sample cooling and low temperature spectroscopy
US6729143B1 (en) * 2002-09-19 2004-05-04 Nortel Networks Limited Thermo-electric cooler for use in an optical assembly
JP2005024184A (ja) * 2003-07-03 2005-01-27 Sumitomo Heavy Ind Ltd 極低温冷却装置
JP4821244B2 (ja) 2005-10-04 2011-11-24 株式会社タンガロイ スローアウェイチップ及びスローアウェイ式エンドミル
JP4803518B2 (ja) * 2006-04-06 2011-10-26 独立行政法人産業技術総合研究所 試料冷却装置
US8307665B2 (en) * 2006-04-06 2012-11-13 National Institute Of Advanced Industrial Science And Technology Sample cooling apparatus
DE102007028865B3 (de) * 2007-06-22 2009-01-29 Vericold Technologies Gmbh Tieftemperaturvorrichtung
US8516834B2 (en) * 2008-08-14 2013-08-27 S2 Corporation Apparatus and methods for improving vibration isolation, thermal dampening, and optical access in cryogenic refrigerators
US8844298B2 (en) * 2008-11-18 2014-09-30 S2 Corporation Vibration reducing sample mount with thermal coupling
US8746008B1 (en) * 2009-03-29 2014-06-10 Montana Instruments Corporation Low vibration cryocooled system for low temperature microscopy and spectroscopy applications
DE102009034563A1 (de) * 2009-07-23 2011-01-27 Uwe Anderssohn Lastplatte und Verfahren zur Lagerung eines medizintechnischen Großgeräts und Herstellungsverfahren für eine Lastplatte
ITMI20100306U1 (it) * 2010-10-08 2012-04-09 Atom Spa Dispositivo per la rilevazione ottica della superficie di materiali lastriformi da recidere
JP5717431B2 (ja) * 2010-12-14 2015-05-13 キヤノン株式会社 ステージ装置、露光装置及びデバイスの製造方法
WO2013069410A1 (ja) * 2011-11-08 2013-05-16 株式会社 日立ハイテクノロジーズ 冷却装置、イオン顕微鏡、観察装置、又は検査装置
JP2013124751A (ja) * 2011-12-16 2013-06-24 Herz Co Ltd 免震機能付防振装置
DE102012019688A1 (de) * 2012-10-01 2014-04-03 Dietrich Roscher Anordnung und Verfahren für die Dämpfung von Schwingungen bei mikroskopischen Untersuchungen
IL231731B (en) * 2014-03-27 2019-12-31 Semi Conductor Devices An Elbit Systems Rafael Partnership Hardened case for an array of sensors in a single case

Also Published As

Publication number Publication date
US20170234766A1 (en) 2017-08-17
EP3209954A1 (de) 2017-08-30
DE102014015665B4 (de) 2016-05-19
JP2018503044A (ja) 2018-02-01
IL251187B (en) 2020-03-31
IL251187A0 (en) 2017-05-29
EP3209954B1 (de) 2021-02-17
WO2016062404A1 (de) 2016-04-28
US11092512B2 (en) 2021-08-17
DE102014015665A1 (de) 2016-05-12

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