DK3040778T3 - Fremgangsmåde til tilvejebringelse af ensartet lysstyrke fra en lysprojektor på et billedområde - Google Patents

Fremgangsmåde til tilvejebringelse af ensartet lysstyrke fra en lysprojektor på et billedområde Download PDF

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Publication number
DK3040778T3
DK3040778T3 DK14200632.9T DK14200632T DK3040778T3 DK 3040778 T3 DK3040778 T3 DK 3040778T3 DK 14200632 T DK14200632 T DK 14200632T DK 3040778 T3 DK3040778 T3 DK 3040778T3
Authority
DK
Denmark
Prior art keywords
image area
light projector
uniform brightness
providing uniform
providing
Prior art date
Application number
DK14200632.9T
Other languages
English (en)
Inventor
Endre Kirkhorn
John Daae
Trond Jørgensen
Original Assignee
Visitech As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Visitech As filed Critical Visitech As
Application granted granted Critical
Publication of DK3040778T3 publication Critical patent/DK3040778T3/da

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection Apparatus (AREA)
  • Transforming Electric Information Into Light Information (AREA)
DK14200632.9T 2014-12-30 2014-12-30 Fremgangsmåde til tilvejebringelse af ensartet lysstyrke fra en lysprojektor på et billedområde DK3040778T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP14200632.9A EP3040778B1 (en) 2014-12-30 2014-12-30 Method for providing uniform brightness from a light projector on an image area.

Publications (1)

Publication Number Publication Date
DK3040778T3 true DK3040778T3 (da) 2021-01-04

Family

ID=52302076

Family Applications (1)

Application Number Title Priority Date Filing Date
DK14200632.9T DK3040778T3 (da) 2014-12-30 2014-12-30 Fremgangsmåde til tilvejebringelse af ensartet lysstyrke fra en lysprojektor på et billedområde

Country Status (9)

Country Link
EP (1) EP3040778B1 (da)
DK (1) DK3040778T3 (da)
ES (1) ES2838694T3 (da)
PL (1) PL3040778T3 (da)
PT (1) PT3040778T (da)
RS (1) RS61198B1 (da)
SI (1) SI3040778T1 (da)
TW (1) TWI690775B (da)
WO (1) WO2016107800A1 (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI627440B (zh) * 2017-05-17 2018-06-21 力晶科技股份有限公司 影像亮度重配模組及影像亮度重配方法
EP3930987B1 (en) 2019-02-28 2023-01-25 3D Systems, Inc. High resolution three-dimensional printing system
NO20190617A1 (en) * 2019-05-16 2020-11-17 Visitech As System and method for exposing a material with images

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255664A (ja) * 2000-03-14 2001-09-21 Fuji Photo Film Co Ltd 画像露光方法
EP1394732A1 (en) * 2002-08-29 2004-03-03 Dicon A/S Method of illuminating at least two illumination points
EP1756671B1 (en) * 2004-05-05 2012-04-18 Sign-Tronic AG Method for enabling transmission of substantially equal amounts of energy
DE102007051990A1 (de) 2007-10-31 2009-05-07 Miva Technologies Gmbh Fotoplott-Verfahren und Anordnung zur Aufzeichnung eines computergespeicherten Rasterbildes auf einen ebenen lichtempfindlichen Aufzeichnungsträger
JP5697188B2 (ja) * 2009-09-15 2015-04-08 国立大学法人東北大学 露光装置および露光方法
DE102012224005B4 (de) * 2012-12-20 2015-07-23 Heraeus Kulzer Gmbh Verfahren zur Herstellung einer homogenen Lichtverteilung

Also Published As

Publication number Publication date
SI3040778T1 (sl) 2021-03-31
TWI690775B (zh) 2020-04-11
ES2838694T3 (es) 2021-07-02
WO2016107800A1 (en) 2016-07-07
EP3040778B1 (en) 2020-09-30
RS61198B1 (sr) 2021-01-29
PL3040778T3 (pl) 2021-04-06
EP3040778A1 (en) 2016-07-06
TW201629637A (zh) 2016-08-16
PT3040778T (pt) 2020-12-23

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