DK2180951T3 - Gennemstrømningssensor og fremstillingsfremgangsmåde dertil - Google Patents

Gennemstrømningssensor og fremstillingsfremgangsmåde dertil Download PDF

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Publication number
DK2180951T3
DK2180951T3 DK08787351T DK08787351T DK2180951T3 DK 2180951 T3 DK2180951 T3 DK 2180951T3 DK 08787351 T DK08787351 T DK 08787351T DK 08787351 T DK08787351 T DK 08787351T DK 2180951 T3 DK2180951 T3 DK 2180951T3
Authority
DK
Denmark
Prior art keywords
flow sensor
preparation procedure
procedure
preparation
sensor
Prior art date
Application number
DK08787351T
Other languages
English (en)
Inventor
Philip Holoch
Karin Megnet
Curdin Stäheli
Original Assignee
Belimo Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Belimo Holding Ag filed Critical Belimo Holding Ag
Application granted granted Critical
Publication of DK2180951T3 publication Critical patent/DK2180951T3/da

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/18—Supports or connecting means for meters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DK08787351T 2007-08-21 2008-08-20 Gennemstrømningssensor og fremstillingsfremgangsmåde dertil DK2180951T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07405244 2007-08-21
PCT/EP2008/060903 WO2009024589A1 (de) 2007-08-21 2008-08-20 Durchflusssensor und herstellungsverfahren dafür

Publications (1)

Publication Number Publication Date
DK2180951T3 true DK2180951T3 (da) 2019-12-02

Family

ID=38980940

Family Applications (1)

Application Number Title Priority Date Filing Date
DK08787351T DK2180951T3 (da) 2007-08-21 2008-08-20 Gennemstrømningssensor og fremstillingsfremgangsmåde dertil

Country Status (6)

Country Link
US (1) US8256285B2 (da)
EP (1) EP2180951B1 (da)
CN (1) CN101784343B (da)
CA (1) CA2695486A1 (da)
DK (1) DK2180951T3 (da)
WO (1) WO2009024589A1 (da)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012049742A1 (ja) * 2010-10-13 2012-04-19 日立オートモティブシステムズ株式会社 流量センサおよびその製造方法並びに流量センサモジュールおよびその製造方法
DE102011089608A1 (de) * 2011-12-22 2013-06-27 Horst Siedle Gmbh & Co. Kg Gehäuseteil für einen elektrischen Sensorsowie Verfahren zur Herstellung des Gehäuseteils
JP5710538B2 (ja) * 2012-04-06 2015-04-30 日立オートモティブシステムズ株式会社 流量センサ
WO2015058110A2 (en) * 2013-10-17 2015-04-23 Weatherford/Lamb, Inc. Apparatus and method of monitoring a fluid
JP6734939B2 (ja) * 2017-01-26 2020-08-05 日立オートモティブシステムズ株式会社 熱式流量計
AT520605B1 (de) * 2017-11-10 2020-03-15 Erba Tech Austria Gmbh Sensorkassette
CN107715932B (zh) * 2017-11-23 2023-06-16 昌微系统科技(上海)有限公司 一种微流体器件
DE102020116704A1 (de) * 2019-07-15 2021-01-21 Endress+Hauser Conducta Gmbh+Co. Kg Fluidführungsmodul und Fluidführungssystem mit mindestens zwei Fluidführungsmodulen
CN113075419A (zh) * 2021-03-31 2021-07-06 苏州容启传感器科技有限公司 一种风速风向检测装置
CN113413936B (zh) * 2021-08-24 2021-11-30 北京寻因生物科技有限公司 一种流量调节结构及微流体芯片
CN114608666B (zh) * 2022-05-09 2022-08-26 苏州敏芯微电子技术股份有限公司 流量传感器封装结构及封装方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5385046A (en) * 1992-04-10 1995-01-31 Honda Giken Kogyo Kabushiki Kaisha Gas flow type angular velocity sensor
US7258003B2 (en) * 1998-12-07 2007-08-21 Honeywell International Inc. Flow sensor with self-aligned flow channel
US6615856B2 (en) 2000-08-04 2003-09-09 Biomicro Systems, Inc. Remote valving for microfluidic flow control
EP1182432B1 (de) 2000-08-23 2014-03-19 Sensirion Holding AG Flusssensor mit Gehäuse
US6952962B2 (en) 2000-10-24 2005-10-11 Sandia National Laboratories Mobile monolithic polymer elements for flow control in microfluidic devices
SG169225A1 (en) * 2001-07-25 2011-03-30 Univ Princeton Nanochannel arrays and their preparation and use for high throughput macromolecular analysis
ATE543100T1 (de) 2002-04-30 2012-02-15 Arkray Inc Analyseinstrument
DE10239597B4 (de) * 2002-08-28 2005-03-17 Fresenius Medical Care Deutschland Gmbh Einwegkassette
US6782745B1 (en) * 2003-02-21 2004-08-31 Visteon Global Technologies, Inc. Slosh supressor and heat sink
WO2004089546A2 (en) 2003-04-04 2004-10-21 Tecan Trading Ag Elastomeric tools for fabricating of polymeric devices and uses thereof
US7419639B2 (en) 2004-05-12 2008-09-02 The Board Of Trustees Of The Leland Stanford Junior University Multilayer microfluidic device
EP1710016A3 (en) 2005-03-30 2011-03-30 Roche Diagnostics GmbH Device having a self sealing fluid port
JP5052275B2 (ja) * 2007-09-20 2012-10-17 アズビル株式会社 フローセンサの取付構造

Also Published As

Publication number Publication date
EP2180951A1 (de) 2010-05-05
CN101784343B (zh) 2013-01-23
US20110036162A1 (en) 2011-02-17
US8256285B2 (en) 2012-09-04
WO2009024589A1 (de) 2009-02-26
CN101784343A (zh) 2010-07-21
CA2695486A1 (en) 2009-02-26
EP2180951B1 (de) 2019-09-18

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