DK142586B - Apparat til zonesmeltning af en halvlederstav. - Google Patents

Apparat til zonesmeltning af en halvlederstav. Download PDF

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Publication number
DK142586B
DK142586B DK306377AA DK306377A DK142586B DK 142586 B DK142586 B DK 142586B DK 306377A A DK306377A A DK 306377AA DK 306377 A DK306377 A DK 306377A DK 142586 B DK142586 B DK 142586B
Authority
DK
Denmark
Prior art keywords
temperature
resistance
melting
zone melting
semiconductor rod
Prior art date
Application number
DK306377AA
Other languages
Danish (da)
English (en)
Other versions
DK306377A (zh
DK142586C (zh
Inventor
Noel De Leon
Original Assignee
Topsil As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topsil As filed Critical Topsil As
Priority to DK306377AA priority Critical patent/DK142586B/da
Priority to JP53081412A priority patent/JPS6054917B2/ja
Priority to DE19782829772 priority patent/DE2829772A1/de
Publication of DK306377A publication Critical patent/DK306377A/da
Priority to US06/128,997 priority patent/US4292487A/en
Publication of DK142586B publication Critical patent/DK142586B/da
Application granted granted Critical
Publication of DK142586C publication Critical patent/DK142586C/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
DK306377AA 1977-07-07 1977-07-07 Apparat til zonesmeltning af en halvlederstav. DK142586B (da)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DK306377AA DK142586B (da) 1977-07-07 1977-07-07 Apparat til zonesmeltning af en halvlederstav.
JP53081412A JPS6054917B2 (ja) 1977-07-07 1978-07-04 半導体の浮遊帯域溶融を開始する方法
DE19782829772 DE2829772A1 (de) 1977-07-07 1978-07-06 Verfahren und vorrichtung zur durchfuehrung eines schmelzvorganges in einer fliessenden zone bei halbleitermaterialien
US06/128,997 US4292487A (en) 1977-07-07 1980-03-10 Method for initiating the float zone melting of semiconductors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DK306377AA DK142586B (da) 1977-07-07 1977-07-07 Apparat til zonesmeltning af en halvlederstav.
DK306377 1977-07-07

Publications (3)

Publication Number Publication Date
DK306377A DK306377A (zh) 1979-01-08
DK142586B true DK142586B (da) 1980-11-24
DK142586C DK142586C (zh) 1981-07-27

Family

ID=8118662

Family Applications (1)

Application Number Title Priority Date Filing Date
DK306377AA DK142586B (da) 1977-07-07 1977-07-07 Apparat til zonesmeltning af en halvlederstav.

Country Status (4)

Country Link
US (1) US4292487A (zh)
JP (1) JPS6054917B2 (zh)
DE (1) DE2829772A1 (zh)
DK (1) DK142586B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8600672A (nl) * 1986-03-17 1987-10-16 Philips Nv Generator voor hoogfrequent verhitten met een impedantie-orgaan parallel aan het stuurelement in de kathodeketen van de elektronenbuis van het oscillatorcircuit.
JPH0696478B2 (ja) * 1989-01-26 1994-11-30 科学技術庁無機材質研究所長 単結晶自動育成法
US6943330B2 (en) * 2003-09-25 2005-09-13 3M Innovative Properties Company Induction heating system with resonance detection
US7696458B2 (en) * 2005-06-03 2010-04-13 Illinois Tool Works Inc. Induction heating system and method of output power control
US7572334B2 (en) 2006-01-03 2009-08-11 Applied Materials, Inc. Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2916593A (en) * 1958-07-25 1959-12-08 Gen Electric Induction heating apparatus and its use in silicon production
US3064109A (en) * 1959-01-15 1962-11-13 Ohio Crankshaft Co Automatic control of induction heating circuits having a magnetic load
NL135666C (zh) * 1959-08-17
GB904100A (en) * 1959-09-11 1962-08-22 Siemens Ag A process for zone-by-zone melting of a rod of semi-conductor material using an induction coil as the heating means and an automatic arrangement for controlling the current through the coil
NL133150C (zh) * 1959-12-23
DE1209551B (de) * 1961-12-07 1966-01-27 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines stabfoermigen Halbleiterkoerpers miteiner Steuerung seines Durchmessers- bzw. Querschnittsverlaufs und Vorrichtung zur Durchfuehrung dieses Verfahrens
NL6508506A (zh) * 1965-07-02 1967-01-03
US3567895A (en) * 1969-08-11 1971-03-02 Ibm Temperature control system
DE2220519C3 (de) * 1972-04-26 1982-03-11 Siemens AG, 1000 Berlin und 8000 München Verfahren zum tiegelfreien Zonenschmelzen von Halbleiterstäben
US4032740A (en) * 1975-04-07 1977-06-28 Illinois Tool Works Inc. Two-level temperature control for induction heating
US4093839A (en) * 1976-04-02 1978-06-06 Ajax Magnethermic Corporation Apparatus and method for inductively heating metallic tubing having an upset portion
US4078168A (en) * 1976-09-17 1978-03-07 Flinn & Dreffein Engineering Company Power control circuit

Also Published As

Publication number Publication date
JPS6054917B2 (ja) 1985-12-02
US4292487A (en) 1981-09-29
DK306377A (zh) 1979-01-08
DK142586C (zh) 1981-07-27
DE2829772A1 (de) 1979-01-25
JPS5418477A (en) 1979-02-10

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