DK142586B - Apparat til zonesmeltning af en halvlederstav. - Google Patents
Apparat til zonesmeltning af en halvlederstav. Download PDFInfo
- Publication number
- DK142586B DK142586B DK306377AA DK306377A DK142586B DK 142586 B DK142586 B DK 142586B DK 306377A A DK306377A A DK 306377AA DK 306377 A DK306377 A DK 306377A DK 142586 B DK142586 B DK 142586B
- Authority
- DK
- Denmark
- Prior art keywords
- temperature
- resistance
- melting
- zone melting
- semiconductor rod
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- General Induction Heating (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DK306377AA DK142586B (da) | 1977-07-07 | 1977-07-07 | Apparat til zonesmeltning af en halvlederstav. |
JP53081412A JPS6054917B2 (ja) | 1977-07-07 | 1978-07-04 | 半導体の浮遊帯域溶融を開始する方法 |
DE19782829772 DE2829772A1 (de) | 1977-07-07 | 1978-07-06 | Verfahren und vorrichtung zur durchfuehrung eines schmelzvorganges in einer fliessenden zone bei halbleitermaterialien |
US06/128,997 US4292487A (en) | 1977-07-07 | 1980-03-10 | Method for initiating the float zone melting of semiconductors |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DK306377 | 1977-07-07 | ||
DK306377AA DK142586B (da) | 1977-07-07 | 1977-07-07 | Apparat til zonesmeltning af en halvlederstav. |
Publications (3)
Publication Number | Publication Date |
---|---|
DK306377A DK306377A (cs) | 1979-01-08 |
DK142586B true DK142586B (da) | 1980-11-24 |
DK142586C DK142586C (cs) | 1981-07-27 |
Family
ID=8118662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK306377AA DK142586B (da) | 1977-07-07 | 1977-07-07 | Apparat til zonesmeltning af en halvlederstav. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4292487A (cs) |
JP (1) | JPS6054917B2 (cs) |
DE (1) | DE2829772A1 (cs) |
DK (1) | DK142586B (cs) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8600672A (nl) * | 1986-03-17 | 1987-10-16 | Philips Nv | Generator voor hoogfrequent verhitten met een impedantie-orgaan parallel aan het stuurelement in de kathodeketen van de elektronenbuis van het oscillatorcircuit. |
JPH0696478B2 (ja) * | 1989-01-26 | 1994-11-30 | 科学技術庁無機材質研究所長 | 単結晶自動育成法 |
US6943330B2 (en) * | 2003-09-25 | 2005-09-13 | 3M Innovative Properties Company | Induction heating system with resonance detection |
US7696458B2 (en) * | 2005-06-03 | 2010-04-13 | Illinois Tool Works Inc. | Induction heating system and method of output power control |
US7572334B2 (en) | 2006-01-03 | 2009-08-11 | Applied Materials, Inc. | Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2916593A (en) * | 1958-07-25 | 1959-12-08 | Gen Electric | Induction heating apparatus and its use in silicon production |
US3064109A (en) * | 1959-01-15 | 1962-11-13 | Ohio Crankshaft Co | Automatic control of induction heating circuits having a magnetic load |
NL135666C (cs) * | 1959-08-17 | |||
GB904100A (en) * | 1959-09-11 | 1962-08-22 | Siemens Ag | A process for zone-by-zone melting of a rod of semi-conductor material using an induction coil as the heating means and an automatic arrangement for controlling the current through the coil |
NL258961A (cs) * | 1959-12-23 | |||
DE1209551B (de) * | 1961-12-07 | 1966-01-27 | Siemens Ag | Verfahren zum tiegelfreien Zonenschmelzen eines stabfoermigen Halbleiterkoerpers miteiner Steuerung seines Durchmessers- bzw. Querschnittsverlaufs und Vorrichtung zur Durchfuehrung dieses Verfahrens |
NL6508506A (cs) * | 1965-07-02 | 1967-01-03 | ||
US3567895A (en) * | 1969-08-11 | 1971-03-02 | Ibm | Temperature control system |
DE2220519C3 (de) * | 1972-04-26 | 1982-03-11 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum tiegelfreien Zonenschmelzen von Halbleiterstäben |
US4032740A (en) * | 1975-04-07 | 1977-06-28 | Illinois Tool Works Inc. | Two-level temperature control for induction heating |
US4093839A (en) * | 1976-04-02 | 1978-06-06 | Ajax Magnethermic Corporation | Apparatus and method for inductively heating metallic tubing having an upset portion |
US4078168A (en) * | 1976-09-17 | 1978-03-07 | Flinn & Dreffein Engineering Company | Power control circuit |
-
1977
- 1977-07-07 DK DK306377AA patent/DK142586B/da unknown
-
1978
- 1978-07-04 JP JP53081412A patent/JPS6054917B2/ja not_active Expired
- 1978-07-06 DE DE19782829772 patent/DE2829772A1/de not_active Withdrawn
-
1980
- 1980-03-10 US US06/128,997 patent/US4292487A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4292487A (en) | 1981-09-29 |
DE2829772A1 (de) | 1979-01-25 |
DK142586C (cs) | 1981-07-27 |
DK306377A (cs) | 1979-01-08 |
JPS6054917B2 (ja) | 1985-12-02 |
JPS5418477A (en) | 1979-02-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US2324525A (en) | Method of and apparatus fob heat | |
US2147689A (en) | Method and apparatus for heating dielectric materials | |
US2467285A (en) | High-frequency generating system | |
US2293851A (en) | Discontinuing treatment in electrostatic fields | |
DK142586B (da) | Apparat til zonesmeltning af en halvlederstav. | |
US3046379A (en) | Method and apparatus for zone melting of semiconductor material | |
US3332036A (en) | High frequency electrical power source with pulsating control | |
US2459225A (en) | Method of controlling high-frequency heating of dielectric material | |
US2041114A (en) | Electrical discharge tube circuits | |
CA1251254A (en) | Ferromagnetic element with temperature control | |
US1998332A (en) | Heating apparatus and system | |
US3310384A (en) | Method and apparatus for cruciblefree zone melting | |
JPS58152471A (ja) | 高周波解凍機 | |
US2763758A (en) | Arc suppresser for dielectric heating equipment | |
GB899688A (en) | An automatically controlled process for melting a rod of semi-conductor material zone-by-zone | |
US2511026A (en) | Method for controlling heating by an induction-heating circuit | |
US2445063A (en) | Electric glass heating | |
US2638529A (en) | Method and apparatus for dielectric heating | |
US2463876A (en) | Cathode-temperature control system | |
US2441435A (en) | Rematching relay control system | |
US2594420A (en) | High-frequency dielectric heating system | |
US3232716A (en) | Device for pulling monocrystalline semiconductor rods | |
US3441876A (en) | High-frequency oven | |
US3359089A (en) | Method and apparatus for eliminating arcing in gas-electric sealing of tv bulbs | |
US2641705A (en) | Stabilized oscillator |