DK104576A - Frefmgangsmade til fremstilling af doterede silicim enkeltkrystaller ved neutronaktivering - Google Patents

Frefmgangsmade til fremstilling af doterede silicim enkeltkrystaller ved neutronaktivering

Info

Publication number
DK104576A
DK104576A DK104576A DK104576A DK104576A DK 104576 A DK104576 A DK 104576A DK 104576 A DK104576 A DK 104576A DK 104576 A DK104576 A DK 104576A DK 104576 A DK104576 A DK 104576A
Authority
DK
Denmark
Prior art keywords
silicim
doted
procedure
preparation
single crystals
Prior art date
Application number
DK104576A
Other languages
Danish (da)
English (en)
Inventor
J Burtscher
A Muehlbauer
K Platzoeder
K Reuschel
M Schnoeller
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19752516514 external-priority patent/DE2516514C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of DK104576A publication Critical patent/DK104576A/da

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/261Bombardment with radiation to produce a nuclear reaction transmuting chemical elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DK104576A 1975-04-15 1976-03-10 Frefmgangsmade til fremstilling af doterede silicim enkeltkrystaller ved neutronaktivering DK104576A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752516514 DE2516514C3 (de) 1975-04-15 Verfahren zum Herstellen von durch Neutronenaktivierung dotierten SiIiciumeinkristallen

Publications (1)

Publication Number Publication Date
DK104576A true DK104576A (da) 1976-10-16

Family

ID=5944002

Family Applications (1)

Application Number Title Priority Date Filing Date
DK104576A DK104576A (da) 1975-04-15 1976-03-10 Frefmgangsmade til fremstilling af doterede silicim enkeltkrystaller ved neutronaktivering

Country Status (4)

Country Link
JP (1) JPS51124376A (enrdf_load_stackoverflow)
BE (1) BE837370A (enrdf_load_stackoverflow)
DK (1) DK104576A (enrdf_load_stackoverflow)
IT (1) IT1059075B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62148312U (enrdf_load_stackoverflow) * 1986-03-13 1987-09-19
JP5879806B2 (ja) * 2011-08-09 2016-03-08 富士電機株式会社 Ntd半導体基板へのレーザー印字方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438056B2 (enrdf_load_stackoverflow) * 1971-09-28 1979-11-19
NL7304259A (enrdf_load_stackoverflow) * 1972-03-28 1973-10-02

Also Published As

Publication number Publication date
IT1059075B (it) 1982-05-31
DE2516514A1 (de) 1976-10-21
BE837370A (fr) 1976-05-03
JPS51124376A (en) 1976-10-29
JPS5549764B2 (enrdf_load_stackoverflow) 1980-12-13
DE2516514B2 (de) 1977-05-05

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Legal Events

Date Code Title Description
AHB Application shelved due to non-payment