DK0982766T3 - Fremgangsmåde til kemisk-mekanisk polering af et kobberbaseret materialelag - Google Patents

Fremgangsmåde til kemisk-mekanisk polering af et kobberbaseret materialelag

Info

Publication number
DK0982766T3
DK0982766T3 DK99114392T DK99114392T DK0982766T3 DK 0982766 T3 DK0982766 T3 DK 0982766T3 DK 99114392 T DK99114392 T DK 99114392T DK 99114392 T DK99114392 T DK 99114392T DK 0982766 T3 DK0982766 T3 DK 0982766T3
Authority
DK
Denmark
Prior art keywords
copper
based material
chemical
material layer
mechanical polishing
Prior art date
Application number
DK99114392T
Other languages
English (en)
Inventor
Eric Jacquinot
Pascal Letourneau
Maurice Rivoire
Original Assignee
Az Electronic Materials Usa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Az Electronic Materials Usa filed Critical Az Electronic Materials Usa
Application granted granted Critical
Publication of DK0982766T3 publication Critical patent/DK0982766T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/7684—Smoothing; Planarisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
DK99114392T 1998-07-31 1999-07-22 Fremgangsmåde til kemisk-mekanisk polering af et kobberbaseret materialelag DK0982766T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9809873A FR2781922B1 (fr) 1998-07-31 1998-07-31 Procede de polissage mecano-chimique d'une couche en un materiau a base de cuivre

Publications (1)

Publication Number Publication Date
DK0982766T3 true DK0982766T3 (da) 2008-11-17

Family

ID=9529285

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99114392T DK0982766T3 (da) 1998-07-31 1999-07-22 Fremgangsmåde til kemisk-mekanisk polering af et kobberbaseret materialelag

Country Status (13)

Country Link
US (1) US6302765B1 (da)
EP (1) EP0982766B1 (da)
JP (1) JP2000114213A (da)
KR (1) KR100596644B1 (da)
CN (1) CN1129960C (da)
AT (1) ATE408897T1 (da)
DE (1) DE69939569D1 (da)
DK (1) DK0982766T3 (da)
ES (1) ES2313763T3 (da)
FR (1) FR2781922B1 (da)
MY (1) MY118930A (da)
SG (1) SG78371A1 (da)
TW (1) TW431947B (da)

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FR2781922B1 (fr) * 1998-07-31 2001-11-23 Clariant France Sa Procede de polissage mecano-chimique d'une couche en un materiau a base de cuivre
MY118582A (en) * 2000-05-12 2004-12-31 Kao Corp Polishing composition
JP2001347450A (ja) * 2000-06-08 2001-12-18 Promos Technologies Inc 化学機械研磨装置
US6737728B1 (en) * 2000-10-12 2004-05-18 Intel Corporation On-chip decoupling capacitor and method of making same
EP1236765A1 (de) 2001-02-28 2002-09-04 hanse chemie GmbH Siliciumdioxiddispersion
KR100444307B1 (ko) * 2001-12-28 2004-08-16 주식회사 하이닉스반도체 반도체소자의 금속배선 콘택플러그 형성방법
DE10208166B4 (de) * 2002-02-26 2006-12-14 Advanced Micro Devices, Inc., Sunnyvale Verfahren zur Herstellung von Metallleitungen mit verbesserter Gleichförmigkeit auf einem Substrat
KR100672940B1 (ko) * 2004-08-03 2007-01-24 삼성전자주식회사 금속막을 위한 화학적기계적 연마 슬러리 및 이를 이용한금속막의 화학적기계적 연마 방법
KR100641348B1 (ko) 2005-06-03 2006-11-03 주식회사 케이씨텍 Ｃｍｐ용 슬러리와 이의 제조 방법 및 기판의 연마 방법
US20080148652A1 (en) * 2006-12-21 2008-06-26 Junaid Ahmed Siddiqui Compositions for chemical mechanical planarization of copper
JP5403922B2 (ja) 2008-02-26 2014-01-29 富士フイルム株式会社 研磨液および研磨方法
CN101638557A (zh) * 2008-08-01 2010-02-03 安集微电子（上海）有限公司 一种化学机械抛光液
JP4629154B1 (ja) * 2010-03-23 2011-02-09 Ｊｘ日鉱日石金属株式会社 電子材料用銅合金及びその製造方法
US8836128B1 (en) * 2013-03-15 2014-09-16 Microchip Technology Incorporated Forming fence conductors in an integrated circuit

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US3972712A (en) * 1974-05-29 1976-08-03 Brush Wellman, Inc. Copper base alloys
FR2558827B1 (fr) 1984-01-27 1986-06-27 Azote & Prod Chim Procede de fabrication de nitromethane et installation
US5226930A (en) * 1988-06-03 1993-07-13 Monsanto Japan, Ltd. Method for preventing agglomeration of colloidal silica and silicon wafer polishing composition using the same
US5352277A (en) * 1988-12-12 1994-10-04 E. I. Du Pont De Nemours & Company Final polishing composition
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FR2689876B1 (fr) * 1992-04-08 1994-09-02 Hoechst France Dispersions silico-acryliques, leur procédé d'obtention, leur application en stéréophotolithographie et procédé de préparation d'objets en résine.
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JP3098661B2 (ja) * 1993-07-28 2000-10-16 キヤノン株式会社 研磨剤組成物及びそれを用いる研磨方法
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FR2781922B1 (fr) * 1998-07-31 2001-11-23 Clariant France Sa Procede de polissage mecano-chimique d'une couche en un materiau a base de cuivre

Also Published As

Publication number Publication date
EP0982766A1 (en) 2000-03-01
US6302765B1 (en) 2001-10-16
SG78371A1 (en) 2001-02-20
FR2781922B1 (fr) 2001-11-23
EP0982766B1 (en) 2008-09-17
TW431947B (en) 2001-05-01
CN1129960C (zh) 2003-12-03
ES2313763T3 (es) 2009-03-01
KR20000012088A (ko) 2000-02-25
MY118930A (en) 2005-02-28
DE69939569D1 (de) 2008-10-30
FR2781922A1 (fr) 2000-02-04
CN1244033A (zh) 2000-02-09
KR100596644B1 (ko) 2006-07-06
JP2000114213A (ja) 2000-04-21
ATE408897T1 (de) 2008-10-15

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