DK0488972T3 - Arrangement til at generere en ON-OFF moduleret elektronstråle - Google Patents
Arrangement til at generere en ON-OFF moduleret elektronstråleInfo
- Publication number
- DK0488972T3 DK0488972T3 DK91830524.4T DK91830524T DK0488972T3 DK 0488972 T3 DK0488972 T3 DK 0488972T3 DK 91830524 T DK91830524 T DK 91830524T DK 0488972 T3 DK0488972 T3 DK 0488972T3
- Authority
- DK
- Denmark
- Prior art keywords
- cathode
- accelerating
- electron beam
- generate
- arrangement
- Prior art date
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/027—Construction of the gun or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/043—Beam blanking
- H01J2237/0432—High speed and short duration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Recrystallisation Techniques (AREA)
- Particle Accelerators (AREA)
- Semiconductor Lasers (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Electron Beam Exposure (AREA)
- Surgical Instruments (AREA)
- Optical Head (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT9535A IT1241837B (it) | 1990-11-30 | 1990-11-30 | Dispositivo per la generazione di un fascio elettronico modulato on-off |
Publications (1)
Publication Number | Publication Date |
---|---|
DK0488972T3 true DK0488972T3 (da) | 1995-05-22 |
Family
ID=11131804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK91830524.4T DK0488972T3 (da) | 1990-11-30 | 1991-11-29 | Arrangement til at generere en ON-OFF moduleret elektronstråle |
Country Status (9)
Country | Link |
---|---|
US (1) | US5175468A (da) |
EP (1) | EP0488972B1 (da) |
JP (1) | JPH05211038A (da) |
AT (1) | ATE119316T1 (da) |
DE (1) | DE69107804T2 (da) |
DK (1) | DK0488972T3 (da) |
ES (1) | ES2069267T3 (da) |
GR (1) | GR3015259T3 (da) |
IT (1) | IT1241837B (da) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1052220A (da) * | 1962-12-31 | |||
GB1199571A (en) * | 1966-08-08 | 1970-07-22 | Atomic Energy Authority Uk | Improvements in or relating to Irradiation Machines. |
JPS60211753A (ja) * | 1984-04-04 | 1985-10-24 | Hitachi Ltd | 電子線照射装置 |
DE3852851D1 (de) * | 1987-07-29 | 1995-03-09 | Siemens Ag | Vorrichtung zur Modulation der Intensität eines Korpuskularstrahls. |
-
1990
- 1990-11-30 IT IT9535A patent/IT1241837B/it active IP Right Grant
-
1991
- 1991-11-26 US US07/798,526 patent/US5175468A/en not_active Expired - Fee Related
- 1991-11-27 JP JP3312242A patent/JPH05211038A/ja active Pending
- 1991-11-29 AT AT91830524T patent/ATE119316T1/de not_active IP Right Cessation
- 1991-11-29 DK DK91830524.4T patent/DK0488972T3/da active
- 1991-11-29 ES ES91830524T patent/ES2069267T3/es not_active Expired - Lifetime
- 1991-11-29 EP EP91830524A patent/EP0488972B1/en not_active Expired - Lifetime
- 1991-11-29 DE DE69107804T patent/DE69107804T2/de not_active Expired - Fee Related
-
1995
- 1995-03-02 GR GR950400328T patent/GR3015259T3/el unknown
Also Published As
Publication number | Publication date |
---|---|
ES2069267T3 (es) | 1995-05-01 |
IT1241837B (it) | 1994-02-01 |
JPH05211038A (ja) | 1993-08-20 |
GR3015259T3 (en) | 1995-06-30 |
IT9009535A0 (it) | 1990-11-30 |
DE69107804T2 (de) | 1995-11-09 |
IT9009535A1 (it) | 1992-06-01 |
EP0488972A2 (en) | 1992-06-03 |
EP0488972A3 (en) | 1992-07-01 |
ATE119316T1 (de) | 1995-03-15 |
EP0488972B1 (en) | 1995-03-01 |
DE69107804D1 (de) | 1995-04-06 |
US5175468A (en) | 1992-12-29 |
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