DK0488972T3 - Arrangement til at generere en ON-OFF moduleret elektronstråle - Google Patents

Arrangement til at generere en ON-OFF moduleret elektronstråle

Info

Publication number
DK0488972T3
DK0488972T3 DK91830524.4T DK91830524T DK0488972T3 DK 0488972 T3 DK0488972 T3 DK 0488972T3 DK 91830524 T DK91830524 T DK 91830524T DK 0488972 T3 DK0488972 T3 DK 0488972T3
Authority
DK
Denmark
Prior art keywords
cathode
accelerating
electron beam
generate
arrangement
Prior art date
Application number
DK91830524.4T
Other languages
English (en)
Inventor
Gianfranco Cirri
Original Assignee
Proel Tecnologie Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Proel Tecnologie Spa filed Critical Proel Tecnologie Spa
Application granted granted Critical
Publication of DK0488972T3 publication Critical patent/DK0488972T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0432—High speed and short duration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Recrystallisation Techniques (AREA)
  • Particle Accelerators (AREA)
  • Semiconductor Lasers (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Electron Beam Exposure (AREA)
  • Surgical Instruments (AREA)
  • Optical Head (AREA)
DK91830524.4T 1990-11-30 1991-11-29 Arrangement til at generere en ON-OFF moduleret elektronstråle DK0488972T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT9535A IT1241837B (it) 1990-11-30 1990-11-30 Dispositivo per la generazione di un fascio elettronico modulato on-off

Publications (1)

Publication Number Publication Date
DK0488972T3 true DK0488972T3 (da) 1995-05-22

Family

ID=11131804

Family Applications (1)

Application Number Title Priority Date Filing Date
DK91830524.4T DK0488972T3 (da) 1990-11-30 1991-11-29 Arrangement til at generere en ON-OFF moduleret elektronstråle

Country Status (9)

Country Link
US (1) US5175468A (da)
EP (1) EP0488972B1 (da)
JP (1) JPH05211038A (da)
AT (1) ATE119316T1 (da)
DE (1) DE69107804T2 (da)
DK (1) DK0488972T3 (da)
ES (1) ES2069267T3 (da)
GR (1) GR3015259T3 (da)
IT (1) IT1241837B (da)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1052220A (da) * 1962-12-31
GB1199571A (en) * 1966-08-08 1970-07-22 Atomic Energy Authority Uk Improvements in or relating to Irradiation Machines.
JPS60211753A (ja) * 1984-04-04 1985-10-24 Hitachi Ltd 電子線照射装置
DE3852851D1 (de) * 1987-07-29 1995-03-09 Siemens Ag Vorrichtung zur Modulation der Intensität eines Korpuskularstrahls.

Also Published As

Publication number Publication date
ES2069267T3 (es) 1995-05-01
IT1241837B (it) 1994-02-01
JPH05211038A (ja) 1993-08-20
GR3015259T3 (en) 1995-06-30
IT9009535A0 (it) 1990-11-30
DE69107804T2 (de) 1995-11-09
IT9009535A1 (it) 1992-06-01
EP0488972A2 (en) 1992-06-03
EP0488972A3 (en) 1992-07-01
ATE119316T1 (de) 1995-03-15
EP0488972B1 (en) 1995-03-01
DE69107804D1 (de) 1995-04-06
US5175468A (en) 1992-12-29

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