DK0488972T3 - Arrangement til at generere en ON-OFF moduleret elektronstråle - Google Patents

Arrangement til at generere en ON-OFF moduleret elektronstråle

Info

Publication number
DK0488972T3
DK0488972T3 DK91830524.4T DK91830524T DK0488972T3 DK 0488972 T3 DK0488972 T3 DK 0488972T3 DK 91830524 T DK91830524 T DK 91830524T DK 0488972 T3 DK0488972 T3 DK 0488972T3
Authority
DK
Denmark
Prior art keywords
cathode
accelerating
electron beam
generate
arrangement
Prior art date
Application number
DK91830524.4T
Other languages
English (en)
Inventor
Gianfranco Cirri
Original Assignee
Proel Tecnologie Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Proel Tecnologie Spa filed Critical Proel Tecnologie Spa
Application granted granted Critical
Publication of DK0488972T3 publication Critical patent/DK0488972T3/da

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243Beam current control or regulation circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/027Construction of the gun or parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04Means for controlling the discharge
    • H01J2237/043Beam blanking
    • H01J2237/0432High speed and short duration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Recrystallisation Techniques (AREA)
  • Particle Accelerators (AREA)
  • Semiconductor Lasers (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Electron Beam Exposure (AREA)
  • Surgical Instruments (AREA)
  • Optical Head (AREA)
DK91830524.4T 1990-11-30 1991-11-29 Arrangement til at generere en ON-OFF moduleret elektronstråle DK0488972T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT9535A IT1241837B (it) 1990-11-30 1990-11-30 Dispositivo per la generazione di un fascio elettronico modulato on-off

Publications (1)

Publication Number Publication Date
DK0488972T3 true DK0488972T3 (da) 1995-05-22

Family

ID=11131804

Family Applications (1)

Application Number Title Priority Date Filing Date
DK91830524.4T DK0488972T3 (da) 1990-11-30 1991-11-29 Arrangement til at generere en ON-OFF moduleret elektronstråle

Country Status (9)

Country Link
US (1) US5175468A (da)
EP (1) EP0488972B1 (da)
JP (1) JPH05211038A (da)
AT (1) ATE119316T1 (da)
DE (1) DE69107804T2 (da)
DK (1) DK0488972T3 (da)
ES (1) ES2069267T3 (da)
GR (1) GR3015259T3 (da)
IT (1) IT1241837B (da)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1052220A (da) * 1962-12-31
GB1199571A (en) * 1966-08-08 1970-07-22 Atomic Energy Authority Uk Improvements in or relating to Irradiation Machines.
JPS60211753A (ja) * 1984-04-04 1985-10-24 Hitachi Ltd 電子線照射装置
DE3852851D1 (de) * 1987-07-29 1995-03-09 Siemens Ag Vorrichtung zur Modulation der Intensität eines Korpuskularstrahls.

Also Published As

Publication number Publication date
ES2069267T3 (es) 1995-05-01
IT1241837B (it) 1994-02-01
JPH05211038A (ja) 1993-08-20
GR3015259T3 (en) 1995-06-30
IT9009535A0 (it) 1990-11-30
DE69107804T2 (de) 1995-11-09
IT9009535A1 (it) 1992-06-01
EP0488972A2 (en) 1992-06-03
EP0488972A3 (en) 1992-07-01
ATE119316T1 (de) 1995-03-15
EP0488972B1 (en) 1995-03-01
DE69107804D1 (de) 1995-04-06
US5175468A (en) 1992-12-29

Similar Documents

Publication Publication Date Title
ATE224097T1 (de) Elektronenstrahlgerät und bilderzeugungsgerät
ATE549901T1 (de) Schnelle modulation einer schaltfokus- röntgenröhre
ATE136399T1 (de) Elektronemittierende vorrichtung und elektronenstrahlerzeugungsgerät und diese vorrichtung verwendendes bilderzeugungsgerät
PT935846E (pt) Amplificador de potencia de modulacao de impulso com um processo de controlo de cascata melhorado
DK0488972T3 (da) Arrangement til at generere en ON-OFF moduleret elektronstråle
GB8728481D0 (en) Electron gun
GB1054792A (da)
ES2076047T3 (es) Disposicion de circuito realimentable para vibrador de dos puntos y vibrador de tres puntos asi como procedimiento para la realimentacion de la energia de la disposicion de circuito.
ATE130961T1 (de) Elektronenstrahlröhre mit elektronenstrahlerzeugungssystem.
KR960005689A (ko) 냉 음극 방출 캐소드를 갖는 전자 빔의 전류 변조 회로 및 이를 사용한 디스플레이장치
ATE104098T1 (de) Gittergesteuerte roehre mit besserem wirkungsgrad.
KR950006940A (ko) 전자총 및 그것을 사용한 컬러 음극선관과 화상표시장치
CA2295411A1 (en) Electron beam apparatus and image-forming apparatus
JPS6454650A (en) Electron emission element
KR830002442B1 (ko) 주사전자 현미경
KR950025833A (ko) 음극선관용 전자총
KR960039063A (ko) 필드 에미션 디바이스
JPS57169287A (en) Gas laser oscillating tube device
NL194952B (nl) Elektronenbundel-opweksysteem met hoge-stroom kathode.
JPH08148271A (ja) マイクロ波加熱装置の電源装置
KR920017164A (ko) 장방형 전자 비임 홀을 갖는 포커싱 그리드 전극의 제공된 칼라 음극선관 장치
RU98102522A (ru) Способ возбуждения лазерного электронно-лучевого прибора
KR970071433A (ko) Crt 표시장치
JPS5956992A (ja) レ−ザ装置
JPS5452986A (en) Luminance modulated electron beam exposure device