DEN0010905MA - - Google Patents

Info

Publication number

DEN0010905MA

DEN0010905MA DEN0010905MA DE N0010905M A DEN0010905M A DE N0010905MA DE N0010905M A DEN0010905M A DE N0010905MA

Authority

DE

Germany

Prior art keywords

electron

measuring surface

screen

angle

measurement

Prior art date

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

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• 230000010355 oscillation Effects 0.000 claims description 32
• 238000005259 measurement Methods 0.000 claims description 18
• 238000000034 method Methods 0.000 claims description 18
• 201000009310 astigmatism Diseases 0.000 claims description 16
• 230000003287 optical effect Effects 0.000 claims description 15
• 230000000737 periodic effect Effects 0.000 claims description 6
• 229910052782 aluminium Inorganic materials 0.000 claims description 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
• 230000003321 amplification Effects 0.000 claims description 2
• 238000003199 nucleic acid amplification method Methods 0.000 claims description 2
• 230000005855 radiation Effects 0.000 claims description 2
• 238000004020 luminiscence type Methods 0.000 claims 2
• 239000013598 vector Substances 0.000 description 6
• 230000001419 dependent effect Effects 0.000 description 3
• 238000006073 displacement reaction Methods 0.000 description 3
• 239000003795 chemical substances by application Substances 0.000 description 2
• 238000005520 cutting process Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 238000010894 electron beam technology Methods 0.000 description 2
• 238000003384 imaging method Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 241000237942 Conidae Species 0.000 description 1
• 230000002411 adverse Effects 0.000 description 1
• 238000013459 approach Methods 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 238000002360 preparation method Methods 0.000 description 1
• 230000002787 reinforcement Effects 0.000 description 1
• 230000000007 visual effect Effects 0.000 description 1