DE9301727U1 - - Google Patents

Info

Publication number
DE9301727U1
DE9301727U1 DE9301727U DE9301727U DE9301727U1 DE 9301727 U1 DE9301727 U1 DE 9301727U1 DE 9301727 U DE9301727 U DE 9301727U DE 9301727 U DE9301727 U DE 9301727U DE 9301727 U1 DE9301727 U1 DE 9301727U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9301727U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE9301727U priority Critical patent/DE9301727U1/de
Publication of DE9301727U1 publication Critical patent/DE9301727U1/de
Priority to JP3714293U priority patent/JP2607524Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
DE9301727U 1993-02-09 1993-02-09 Expired - Lifetime DE9301727U1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE9301727U DE9301727U1 (en) 1993-02-09 1993-02-09
JP3714293U JP2607524Y2 (en) 1993-02-09 1993-07-07 Apparatus for holding and transporting plate-shaped substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9301727U DE9301727U1 (en) 1993-02-09 1993-02-09

Publications (1)

Publication Number Publication Date
DE9301727U1 true DE9301727U1 (en) 1993-03-25

Family

ID=6889114

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9301727U Expired - Lifetime DE9301727U1 (en) 1993-02-09 1993-02-09

Country Status (2)

Country Link
JP (1) JP2607524Y2 (en)
DE (1) DE9301727U1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010060664A1 (en) * 2010-11-18 2012-05-24 Roth & Rau Ag Method for cleaning and conditioning of substrate carrier of substrate coating apparatus, involves supplying airflow to surface area of carrier until preset thickness of coating on carrier is reached, and sucking airflow of surface area
DE102011006833A1 (en) * 2011-04-06 2012-10-11 Roth & Rau Ag substrate carrier
WO2014200927A1 (en) 2013-06-10 2014-12-18 View, Inc. Glass pallet for sputtering systems
WO2017001010A1 (en) * 2015-07-01 2017-01-05 Applied Materials, Inc. Self-locking holder for substrates
CN107879110A (en) * 2016-09-30 2018-04-06 上海宝弥金属制品有限公司 Glass support bar, glass turnover rack and glass treating method
WO2022069171A1 (en) * 2020-09-30 2022-04-07 Oerlikon Surface Solutions Ag, Pfäffikon Spring holder and workpiece carrier
US11688589B2 (en) 2013-06-10 2023-06-27 View, Inc. Carrier with vertical grid for supporting substrates in coater

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU417542A1 (en) * 1972-01-06 1974-02-28
EP0143698B1 (en) * 1983-11-25 1987-05-20 René Dubois Support adaptable to pieces of diversified forms and dimensions
DE3919611A1 (en) * 1989-06-15 1990-12-20 Wacker Chemitronic HOLDING DEVICE FOR RECEIVING DISC-SHAPED OBJECTS, IN PARTICULAR SEMICONDUCTOR DISC, AND METHOD FOR THEIR TREATMENT
DE9116285U1 (en) * 1991-11-05 1992-05-27 Leybold Ag, 6450 Hanau, De

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU417542A1 (en) * 1972-01-06 1974-02-28
EP0143698B1 (en) * 1983-11-25 1987-05-20 René Dubois Support adaptable to pieces of diversified forms and dimensions
DE3919611A1 (en) * 1989-06-15 1990-12-20 Wacker Chemitronic HOLDING DEVICE FOR RECEIVING DISC-SHAPED OBJECTS, IN PARTICULAR SEMICONDUCTOR DISC, AND METHOD FOR THEIR TREATMENT
DE9116285U1 (en) * 1991-11-05 1992-05-27 Leybold Ag, 6450 Hanau, De

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010060664A1 (en) * 2010-11-18 2012-05-24 Roth & Rau Ag Method for cleaning and conditioning of substrate carrier of substrate coating apparatus, involves supplying airflow to surface area of carrier until preset thickness of coating on carrier is reached, and sucking airflow of surface area
DE102011006833A1 (en) * 2011-04-06 2012-10-11 Roth & Rau Ag substrate carrier
WO2014200927A1 (en) 2013-06-10 2014-12-18 View, Inc. Glass pallet for sputtering systems
EP3008224A4 (en) * 2013-06-10 2017-03-01 View, Inc. Glass pallet for sputtering systems
US11133158B2 (en) 2013-06-10 2021-09-28 View, Inc. Glass pallet for sputtering systems
US11424109B2 (en) 2013-06-10 2022-08-23 View, Inc. Carrier with vertical grid for supporting substrates in coater
US11688589B2 (en) 2013-06-10 2023-06-27 View, Inc. Carrier with vertical grid for supporting substrates in coater
WO2017001010A1 (en) * 2015-07-01 2017-01-05 Applied Materials, Inc. Self-locking holder for substrates
CN107879110A (en) * 2016-09-30 2018-04-06 上海宝弥金属制品有限公司 Glass support bar, glass turnover rack and glass treating method
CN107879110B (en) * 2016-09-30 2024-03-26 上海宝弥金属制品有限公司 Glass support bar, glass turnover frame and glass treatment method
WO2022069171A1 (en) * 2020-09-30 2022-04-07 Oerlikon Surface Solutions Ag, Pfäffikon Spring holder and workpiece carrier

Also Published As

Publication number Publication date
JP2607524Y2 (en) 2001-11-12
JPH0661962U (en) 1994-09-02

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