JPH0661962U - Device for holding and transporting plate-shaped substrates - Google Patents

Abstract

(57) [Summary] [Objective] Defects such as deformation due to temperature action, extremely troublesome cleaning after coating process, and arc generation are avoided, and a reliable, stable and economical process process is guaranteed. , To provide a substrate support device. A device for holding and transporting a plate-shaped substrate in a vacuum processing facility, for example a vacuum coating facility and an etching facility and via this facility, preferably in a vertical position, is substantially multi-part. A frame member, a girder member for receiving the substrate is inserted in the frame member, and a holding member for fixing the substrate is provided on the girder member. The material is formed from an open sheet metal molding with a low heat capacity and a high heat resistance and without sharp-edged corners, in which all frame components and beams are releasably connected to one another.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a device for holding and transporting plate-shaped substrates in vacuum processing equipment, such as vacuum coating equipment and etching equipment, and via this equipment, preferably in a vertical position.

[0002]

[Prior art]

 An apparatus of the type described above makes it possible to process a large number of substrates in one working process. It is extremely important to construct such a substrate support device in consideration of the productivity of the equipment based on the high substrate and processing capacity required in the equipment market.

Substrate support devices are already known which allow for differently shaped substrates and different types of equipment. Therefore, there is known a facility in which a plate-shaped substrate moves through in a horizontal position or a vertical position.

For coating in a vertical position, the substrate is likewise inserted into a substrate support device, for example a skeleton, which moves through the processing facility in a vertical position. The substrate support consists of a rigid rectangular frame, usually made of steel tubing, in which a girder is immovably mounted to receive the substrate.

This girder is disadvantageously subjected to the same process conditions as the substrate itself in the treatment section of the equipment. This causes the spar material to become significantly worn on the one hand by the high ambient temperature (substrate temperature is approximately 420 ° C.) and on the other hand by the deposits in the coating process.

The spar material must, on the one hand, not be deformed by temperature effects in order not to adversely affect the correct positioning of the substrate, and on the other hand the residual layer on the spar material is All coating residues must be cleaned easily, quickly and completely in order to adversely affect the layer quality in the coating process.

Furthermore, in the case of high-frequency (HF) -excitation treatment processes, uncontrolled arcing occurs between the beam and the chamber wall, which likewise has an adverse effect on the coating results. .

[0008]

[Problems to be solved by the device]

 The object of the present invention is to avoid the above-mentioned drawbacks such as deformation due to temperature effects, extremely troublesome cleaning after the coating process, and arc generation, and to ensure a reliable and stable economic process. An object is to provide a substrate support device.

[0009]

[Means for Solving the Problems]

 According to the present invention, according to the present invention, the holding and transporting device is composed of a multi-part frame, and a girder member for receiving the substrate is inserted in the frame and the girder is inserted. The material is provided with a holding member for fixing the substrate, and the frame and girder materials have a small heat capacity and high heat resistance, and from an opened thin plate molded body without a sharp edge corner. Formed and all frame components and spar members were releasably connected to each other.

[0010]

[Effect of device]

 Advantageously, the substrate support device according to the invention has a very simple mechanical structure, which is adjustable on the basis of the segment structure in view of the desired substrate size and allows individual segment exchange. There is.

Cleaning can be carried out without problems by using exclusively open moldings, ie no residue is left on the girder during, for example, sandblasting and subsequent wet cleaning. .

The temperature problem is solved by using a high temperature resistant material. The substrate retaining clamp is thus made, for example, from Duratherm and is thereby also elastic, preferably at approximately 600 ° C.

By chamfering the support component in a manner suitable for use at high frequencies, arcing is advantageously prevented.

Further, the substrate supporting device according to the present invention can be selectively changed from manual attachment / detachment to robot operation based on the segment structure.

Advantageous configurations of the invention are described in the other claims.

[0016]

【Example】

 Between the two vertically spaced support members 1 and 2 (see FIG. 1) there are two horizontal plate-shaped connecting lamellas 3 and 4, which in this case The thin plates are fixed to the lower ends or the upper ends of the support members 1 and 2, respectively. The support members 1, 2 and the connecting lamellas 3, 4 form a rectangular frame 7.

In this frame 7, horizontal girder members 5, 5 ′, ... Arranged at constant intervals are provided. In the remaining intermediate spaces between the individual beams, square substrates 6, 6 ', ... to be treated are fitted. The drawing shows the front side of the substrate to be coated.

The support member 1 (see FIG. 2) is made of a U-shaped molding and is arranged such that the open rear surface 12 of the molding does not face the frame 7. Holes 8, 8 ′, ... Arranged as a row of holes in the longitudinal direction of the support member 1 are provided in the central web of the shaped body.

The horizontal beam 5 is embodied as a substantially U-shaped molding which has an open rear surface 13 and two further outer webs 14, 15. A flat holding thin plate 10 having holes is welded to the end face of the beam 5, and the hole intervals of these holes correspond to the hole intervals of the holes 8, 8 ', ... In the support member 1. There is. The beam member 5 and the supporting member 1 are detachably connected to each other via screws 9, 9 ', ....

An elastic clamping spring 11 is produced from strip-shaped spring steel even at temperatures of approximately 600 ° C., in which case this clamping spring has a double Z-shape that is substantially lateral when viewed from the side. ing. The clamping spring 11 is clamped on the web 14 of the beam 5 at one end, whereas the substrate 6 is mounted on the free other end of the clamping spring.

The substrate 6 is held at its upper edge by another clamping spring 11 'which is fitted over the web 15' of the adjacent beam 5 '(see FIG. 3).

The connecting thin plate 4 (see FIG. 4) for connecting the upper ends of the supporting members to each other is formed flat with the slope of the upper edge 17 and the stepwise bending of the lower edge 18. . Another L-shaped thin plate 16 extending parallel to the lower edge portion 18 is fixed to the back surface of the connecting thin plate 4. At the end face of the connecting thin plate 4, there is provided a flat holding thin plate 10 'having holes, which is fixed to the supporting member 1 via screws 9, 9', ....

[Brief description of drawings]

FIG. 1 is a side view of a substrate support device according to the present invention with a substrate inserted therein.

FIG. 2 is an enlarged perspective view of a corner connecting portion shown in FIG. 1X.

FIG. 3 is a perspective view of two girder members fitted with a substrate.

FIG. 4 is an enlarged perspective view of an upper corner connecting portion shown in FIG. 1Y.

[Explanation of symbols]

 1, 2 Support members 3, 4 Coupling members 5, 5 ', ... Girder materials 6, 6', ... Substrate 7 Frame 8, 8 ', ... Holes 9, 9', ... Screws 10 Holding thin plate 11, 11 'Tightening spring 12, 13 Rear surface 14, 15, 15' Web 16 L-shaped thin plate 17 Upper edge part 18 Lower edge part

Claims (19)

[Scope of utility model registration request] 1. A substrate (6, 6) in the form of a plate in a vacuum processing facility, for example a vacuum coating facility and an etching facility, and via this facility, preferably in a vertical position.
6 ', ...) for holding and transporting
Said device consists of a frame (7) consisting of substantially multi-parts, in which frame members (5, 5 ', 6', ...) for receiving substrates (6, 6 ', ...).
5 ', ...) is inserted and this girder material (5,
5 ', ...) is provided with a holding member for fixing the substrates (6, 6', ...), and the frame (7)
And the girders (5, 5 ', ...) are formed from an open sheet metal molding having a small heat capacity and high heat resistance and no sharp corners, and all frame components and Device for holding and transporting plate-like substrates, characterized in that the beams (5, 5 ', ...) Are detachably connected to one another. 2. A frame (7) is formed from vertically spaced apart support members (1, 2),
Device according to claim 1, characterized in that the support members (1, 2) are connected by horizontal members (3, 4). 3. Device according to claim 2, wherein the frame (7) is held and guided vertically in a vacuum installation. 4. The vertical support member (1, 2) is a beam (5, 5).
Device according to any one of claims 1 to 3, having holes (8,8 ', ...) for receiving 5', ...). 5. Device according to claim 1, wherein the beam members (5, 5 ', ...) Are arranged horizontally and parallel to each other. 6. Device according to claim 5, characterized in that the spacing between the beams (5, 5 ', ...) Is variable. 7. A frame segment (1, 2, 3, 4,
5, 5 ', ...) are screwed together.
The device according to any one of claims 1 to 6. 8. The girder material (5, 5 ', ...) is a frame (7).
Device according to any one of the preceding claims, which is screwed to the. 9. A frame (7) and a girder (5,
9. The device according to claim 1, wherein 5 ', ...) Has no hollow chamber. 10. A frame (7) and a girder (5,
10. Device according to claim 9, wherein the open side (12, 13) of the molded body of 5 ', ...) does not face the substrate (6,6', ...). 11. A frame (7) and a girder (5,
Device according to any one of claims 1 to 10, wherein 5 ', ...) are made from special steel. 12. The holding member is a substrate (6,
Clamping springs (11, 1) to lock 6 ', ...)
Device according to any one of claims 1 to 11, formed as 1 ', ...). 13. Device according to claim 12, wherein the clamping springs (11, 11 ', ...) Are made in one piece from sheet metal or wire. 14. Tightening springs (11, 11 ', ...)
14. The device according to claim 13, which is made of a material which is still elastic even at operating temperatures above 00 ° C. 15. The method according to claim 1, wherein the tightening springs (11, 11 ′, ...) Can be fitted over the girders (5, 5 ′, ...). apparatus. 16. Substrate (6,6 ', ...) Contacting a clamping spring (11,11', ...) only at the end faces thereof. The described device. 17. All components of the device (1, 2, 3, 3)
4,5,5 ', ..., 9,9', ..., 11,11 ', ...)
A device according to any one of claims 1 to 16, wherein the devices are individually releasably and exchangeably coupled to one another. 18. The two frames (7) are arranged back to back on a common leg member.
The apparatus according to claim 1. 19. The device as claimed in claim 18, wherein an intermediate space, which opens upwards, is formed between the two frames.