DE9110349U1 - - Google Patents

Info

Publication number
DE9110349U1
DE9110349U1 DE9110349U DE9110349U DE9110349U1 DE 9110349 U1 DE9110349 U1 DE 9110349U1 DE 9110349 U DE9110349 U DE 9110349U DE 9110349 U DE9110349 U DE 9110349U DE 9110349 U1 DE9110349 U1 DE 9110349U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9110349U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE9110349U priority Critical patent/DE9110349U1/de
Priority claimed from DE19914106617 external-priority patent/DE4106617C2/en
Publication of DE9110349U1 publication Critical patent/DE9110349U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J21/00—Chambers provided with manipulation devices
    • B25J21/005—Clean rooms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages
    • B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
    • B25J5/04—Manipulators mounted on wheels or on carriages travelling along a guideway wherein the guideway is also moved, e.g. travelling crane bridge type
DE9110349U 1991-03-01 1991-03-01 Expired - Lifetime DE9110349U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9110349U DE9110349U1 (en) 1991-03-01 1991-03-01

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19914106617 DE4106617C2 (en) 1991-03-01 1991-03-01 Clean room handling system
DE9110349U DE9110349U1 (en) 1991-03-01 1991-03-01

Publications (1)

Publication Number Publication Date
DE9110349U1 true DE9110349U1 (en) 1992-01-09

Family

ID=25901522

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9110349U Expired - Lifetime DE9110349U1 (en) 1991-03-01 1991-03-01

Country Status (1)

Country Link
DE (1) DE9110349U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19737548A1 (en) * 1997-08-28 1999-03-04 Inst Oberflaechenmodifizierung Tiltable, rotatable and tempering substrate holder for ion irradiation etching

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19737548A1 (en) * 1997-08-28 1999-03-04 Inst Oberflaechenmodifizierung Tiltable, rotatable and tempering substrate holder for ion irradiation etching

Similar Documents

Publication Publication Date Title
DE9107488U1 (en)
DE9100291U1 (en)
DE9102438U1 (en)
DE9102635U1 (en)
DE9105905U1 (en)
DE9101241U1 (en)
DE9103135U1 (en)
DE9101921U1 (en)
DE9100798U1 (en)
DE9106589U1 (en)
DE9105837U1 (en)
DE9106447U1 (en)
DE9105424U1 (en)
DE9100315U1 (en)
DE9107320U1 (en)
DE9100659U1 (en)
DE9107823U1 (en)
DE9107983U1 (en)
DE9102715U1 (en)
DE9102898U1 (en)
DE9100212U1 (en)
DE9100156U1 (en)
DE9102916U1 (en)
DE9101720U1 (en)
DE9103301U1 (en)