DE9102748U1 - Drucksensor für niedere Drücke - Google Patents
Drucksensor für niedere DrückeInfo
- Publication number
- DE9102748U1 DE9102748U1 DE9102748U DE9102748U DE9102748U1 DE 9102748 U1 DE9102748 U1 DE 9102748U1 DE 9102748 U DE9102748 U DE 9102748U DE 9102748 U DE9102748 U DE 9102748U DE 9102748 U1 DE9102748 U1 DE 9102748U1
- Authority
- DE
- Germany
- Prior art keywords
- sensor
- membrane
- pressure sensor
- pressure
- bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012528 membrane Substances 0.000 claims description 75
- 239000000463 material Substances 0.000 claims description 24
- 238000001514 detection method Methods 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000004020 conductor Substances 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000011161 development Methods 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE9102748U DE9102748U1 (de) | 1991-01-14 | 1991-03-07 | Drucksensor für niedere Drücke |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE9100388 | 1991-01-14 | ||
| DE9102748U DE9102748U1 (de) | 1991-01-14 | 1991-03-07 | Drucksensor für niedere Drücke |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE9102748U1 true DE9102748U1 (de) | 1991-07-04 |
Family
ID=25957769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE9102748U Expired - Lifetime DE9102748U1 (de) | 1991-01-14 | 1991-03-07 | Drucksensor für niedere Drücke |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE9102748U1 (US06624291-20030923-C00046.png) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0569899A1 (en) * | 1992-05-12 | 1993-11-18 | The Foxboro Company | An overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same |
| FR2700003A1 (fr) * | 1992-12-28 | 1994-07-01 | Commissariat Energie Atomique | Procédé de fabrication d'un capteur de pression utilisant la technologie silicium sur isolant et capteur obtenu. |
| EP0610806A1 (fr) * | 1993-02-12 | 1994-08-17 | CSEM, Centre Suisse d'Electronique et de Microtechnique S.A. | Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs |
| WO1996013705A1 (de) * | 1994-10-29 | 1996-05-09 | Joshua Lanter | Verfahren zum herstellen von durchführungen elektrischer leitungen durch gasdichte verbindungen zwischen glas und silizium o.dgl. und von gasdichten durchführungen durch solche verbindungen und von drucksensoren mit solchen durchführungen |
| WO2000002028A1 (en) * | 1998-07-07 | 2000-01-13 | The Goodyear Tire & Rubber Company | Method of fabricating silicon capacitive sensor |
| EP1016135A1 (en) * | 1997-07-18 | 2000-07-05 | Kavlico Corporation | Fusion-bond electrical feed-through |
| DE102004006199B4 (de) * | 2004-02-09 | 2015-09-03 | Robert Bosch Gmbh | Mikromechanischer Drucksensor für hohe Drücke |
-
1991
- 1991-03-07 DE DE9102748U patent/DE9102748U1/de not_active Expired - Lifetime
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5344523A (en) * | 1992-05-12 | 1994-09-06 | The Foxboro Comany | Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same |
| US5323656A (en) * | 1992-05-12 | 1994-06-28 | The Foxboro Company | Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same |
| EP0569899A1 (en) * | 1992-05-12 | 1993-11-18 | The Foxboro Company | An overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same |
| FR2700003A1 (fr) * | 1992-12-28 | 1994-07-01 | Commissariat Energie Atomique | Procédé de fabrication d'un capteur de pression utilisant la technologie silicium sur isolant et capteur obtenu. |
| US5510276A (en) * | 1992-12-28 | 1996-04-23 | Commissariat A L'energie Atomique | Process for producing a pressure transducer using silicon-on-insulator technology |
| US5488869A (en) * | 1993-02-12 | 1996-02-06 | Csem Centre Suisse D'electronique Et De Microtechnique Sa | Capacitive absolute pressure measurement sensor and method of manufacturing a plurality of such sensors |
| FR2701564A1 (fr) * | 1993-02-12 | 1994-08-19 | Suisse Electronique Microtech | Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs. |
| EP0610806A1 (fr) * | 1993-02-12 | 1994-08-17 | CSEM, Centre Suisse d'Electronique et de Microtechnique S.A. | Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs |
| WO1996013705A1 (de) * | 1994-10-29 | 1996-05-09 | Joshua Lanter | Verfahren zum herstellen von durchführungen elektrischer leitungen durch gasdichte verbindungen zwischen glas und silizium o.dgl. und von gasdichten durchführungen durch solche verbindungen und von drucksensoren mit solchen durchführungen |
| EP1016135A1 (en) * | 1997-07-18 | 2000-07-05 | Kavlico Corporation | Fusion-bond electrical feed-through |
| EP1016135A4 (en) * | 1997-07-18 | 2006-06-21 | Kavlico Corp | FUSION-LINKED ELECTRICAL CROSS STRUCTURE |
| WO2000002028A1 (en) * | 1998-07-07 | 2000-01-13 | The Goodyear Tire & Rubber Company | Method of fabricating silicon capacitive sensor |
| US6452427B1 (en) | 1998-07-07 | 2002-09-17 | Wen H. Ko | Dual output capacitance interface circuit |
| DE102004006199B4 (de) * | 2004-02-09 | 2015-09-03 | Robert Bosch Gmbh | Mikromechanischer Drucksensor für hohe Drücke |
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