DE9100910U1 - Zündhilfe für filamentlose Plasmaquellen - Google Patents
Zündhilfe für filamentlose PlasmaquellenInfo
- Publication number
- DE9100910U1 DE9100910U1 DE9100910U DE9100910U DE9100910U1 DE 9100910 U1 DE9100910 U1 DE 9100910U1 DE 9100910 U DE9100910 U DE 9100910U DE 9100910 U DE9100910 U DE 9100910U DE 9100910 U1 DE9100910 U1 DE 9100910U1
- Authority
- DE
- Germany
- Prior art keywords
- filamentless
- ignition aid
- ignition
- plasma sources
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 3
- 230000002285 radioactive effect Effects 0.000 claims description 3
- 239000012857 radioactive material Substances 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 239000000941 radioactive substance Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052695 Americium Inorganic materials 0.000 description 2
- LXQXZNRPTYVCNG-UHFFFAOYSA-N americium atom Chemical compound [Am] LXQXZNRPTYVCNG-UHFFFAOYSA-N 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 210000004180 plasmocyte Anatomy 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052722 tritium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE9100910U DE9100910U1 (de) | 1991-01-26 | 1991-01-26 | Zündhilfe für filamentlose Plasmaquellen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE9100910U DE9100910U1 (de) | 1991-01-26 | 1991-01-26 | Zündhilfe für filamentlose Plasmaquellen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE9100910U1 true DE9100910U1 (de) | 1991-04-25 |
Family
ID=6863726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE9100910U Expired - Lifetime DE9100910U1 (de) | 1991-01-26 | 1991-01-26 | Zündhilfe für filamentlose Plasmaquellen |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE9100910U1 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0560742A1 (en) * | 1992-03-11 | 1993-09-15 | PROEL TECNOLOGIE S.p.A. | Plasma generator and associated ionization method |
| EP0665306A1 (en) * | 1994-01-19 | 1995-08-02 | TOKYO ELECTRON AMERICA Inc. | Apparatus and method for igniting plasma in a process module |
-
1991
- 1991-01-26 DE DE9100910U patent/DE9100910U1/de not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0560742A1 (en) * | 1992-03-11 | 1993-09-15 | PROEL TECNOLOGIE S.p.A. | Plasma generator and associated ionization method |
| US5352954A (en) * | 1992-03-11 | 1994-10-04 | Proel Technologie S.P.A. | Plasma generator and associated ionization method |
| EP0665306A1 (en) * | 1994-01-19 | 1995-08-02 | TOKYO ELECTRON AMERICA Inc. | Apparatus and method for igniting plasma in a process module |
| US5565036A (en) * | 1994-01-19 | 1996-10-15 | Tel America, Inc. | Apparatus and method for igniting plasma in a process module |
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