DE9100910U1 - - Google Patents

Info

Publication number
DE9100910U1
DE9100910U1 DE9100910U DE9100910U DE9100910U1 DE 9100910 U1 DE9100910 U1 DE 9100910U1 DE 9100910 U DE9100910 U DE 9100910U DE 9100910 U DE9100910 U DE 9100910U DE 9100910 U1 DE9100910 U1 DE 9100910U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9100910U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAUER ROBERT DR 8000 MUENCHEN DE
Original Assignee
BAUER ROBERT DR 8000 MUENCHEN DE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BAUER ROBERT DR 8000 MUENCHEN DE filed Critical BAUER ROBERT DR 8000 MUENCHEN DE
Priority to DE9100910U priority Critical patent/DE9100910U1/de
Publication of DE9100910U1 publication Critical patent/DE9100910U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
DE9100910U 1991-01-26 1991-01-26 Expired - Lifetime DE9100910U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9100910U DE9100910U1 (en) 1991-01-26 1991-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9100910U DE9100910U1 (en) 1991-01-26 1991-01-26

Publications (1)

Publication Number Publication Date
DE9100910U1 true DE9100910U1 (en) 1991-04-25

Family

ID=6863726

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9100910U Expired - Lifetime DE9100910U1 (en) 1991-01-26 1991-01-26

Country Status (1)

Country Link
DE (1) DE9100910U1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0560742A1 (en) * 1992-03-11 1993-09-15 PROEL TECNOLOGIE S.p.A. Plasma generator and associated ionization method
EP0665306A1 (en) * 1994-01-19 1995-08-02 TOKYO ELECTRON AMERICA Inc. Apparatus and method for igniting plasma in a process module

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0560742A1 (en) * 1992-03-11 1993-09-15 PROEL TECNOLOGIE S.p.A. Plasma generator and associated ionization method
US5352954A (en) * 1992-03-11 1994-10-04 Proel Technologie S.P.A. Plasma generator and associated ionization method
EP0665306A1 (en) * 1994-01-19 1995-08-02 TOKYO ELECTRON AMERICA Inc. Apparatus and method for igniting plasma in a process module
US5565036A (en) * 1994-01-19 1996-10-15 Tel America, Inc. Apparatus and method for igniting plasma in a process module

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