DE9004842U1 - - Google Patents

Info

Publication number
DE9004842U1
DE9004842U1 DE9004842U DE9004842U DE9004842U1 DE 9004842 U1 DE9004842 U1 DE 9004842U1 DE 9004842 U DE9004842 U DE 9004842U DE 9004842 U DE9004842 U DE 9004842U DE 9004842 U1 DE9004842 U1 DE 9004842U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9004842U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Focus Messtechnik GmbH and Co KG
Original Assignee
Focus Messtechnik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Focus Messtechnik GmbH and Co KG filed Critical Focus Messtechnik GmbH and Co KG
Priority to DE9004842U priority Critical patent/DE9004842U1/de
Publication of DE9004842U1 publication Critical patent/DE9004842U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
DE9004842U 1990-04-28 1990-04-28 Expired - Lifetime DE9004842U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9004842U DE9004842U1 (en) 1990-04-28 1990-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9004842U DE9004842U1 (en) 1990-04-28 1990-04-28

Publications (1)

Publication Number Publication Date
DE9004842U1 true DE9004842U1 (en) 1991-08-22

Family

ID=6853323

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9004842U Expired - Lifetime DE9004842U1 (en) 1990-04-28 1990-04-28

Country Status (1)

Country Link
DE (1) DE9004842U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1010965A2 (en) * 1998-12-16 2000-06-21 Super Silicon Crystal Research Institute Corp. Sensor for measuring degree of flatness

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1010965A2 (en) * 1998-12-16 2000-06-21 Super Silicon Crystal Research Institute Corp. Sensor for measuring degree of flatness
EP1010965A3 (en) * 1998-12-16 2000-10-18 Super Silicon Crystal Research Institute Corp. Sensor for measuring degree of flatness

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