DE8910040U1 - Turbomolekular-Vakuumpumpe - Google Patents

Turbomolekular-Vakuumpumpe

Info

Publication number
DE8910040U1
DE8910040U1 DE8910040U DE8910040U DE8910040U1 DE 8910040 U1 DE8910040 U1 DE 8910040U1 DE 8910040 U DE8910040 U DE 8910040U DE 8910040 U DE8910040 U DE 8910040U DE 8910040 U1 DE8910040 U1 DE 8910040U1
Authority
DE
Germany
Prior art keywords
bearing
ring
housing
support ring
rings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8910040U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of DE8910040U1 publication Critical patent/DE8910040U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • F16C35/07—Fixing them on the shaft or housing with interposition of an element
    • F16C35/077—Fixing them on the shaft or housing with interposition of an element between housing and outer race ring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/52—Bearings with rolling contact, for exclusively rotary movement with devices affected by abnormal or undesired conditions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066—Ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE8910040U 1988-09-03 1989-08-22 Turbomolekular-Vakuumpumpe Expired - Lifetime DE8910040U1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88114412 1988-09-03

Publications (1)

Publication Number Publication Date
DE8910040U1 true DE8910040U1 (de) 1989-12-14

Family

ID=8199269

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8910040U Expired - Lifetime DE8910040U1 (de) 1988-09-03 1989-08-22 Turbomolekular-Vakuumpumpe

Country Status (1)

Country Link
DE (1) DE8910040U1 (zh)

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994025759A1 (de) * 1993-05-03 1994-11-10 Leybold Aktiengesellschaft Reibungsvakuumpumpe mit lagerabstützung
FR2804476A1 (fr) * 2000-01-31 2001-08-03 Cit Alcatel Systeme amortisseur et centreur de roulement pour pompe a vide sur palier magnetique
EP1508700A2 (en) * 2003-08-21 2005-02-23 Ebara Corporation Turbo molecular pump
DE102007037792A1 (de) * 2007-08-10 2009-02-12 Oerlikon Leybold Vacuum Gmbh Pumpen-Lageranordnung
US20110125164A1 (en) * 2004-08-26 2011-05-26 Flowcardia, Inc. Ultrasound catheter devices and methods
DE202010015593U1 (de) * 2010-11-17 2012-03-01 Oerlikon Leybold Vacuum Gmbh Pumpenlagerung
US8496669B2 (en) 2006-11-07 2013-07-30 Flowcardia, Inc. Ultrasound catheter having protective feature against breakage
US8506519B2 (en) 1999-02-16 2013-08-13 Flowcardia, Inc. Pre-shaped therapeutic catheter
WO2013151015A1 (ja) * 2012-04-04 2013-10-10 株式会社島津製作所 真空ポンプ
US8613751B2 (en) 2003-11-24 2013-12-24 Flowcardia, Inc. Steerable ultrasound catheter
US8641630B2 (en) 2003-09-19 2014-02-04 Flowcardia, Inc. Connector for securing ultrasound catheter to transducer
US8647293B2 (en) 2002-08-02 2014-02-11 Flowcardia, Inc. Therapeutic ultrasound system
US8679049B2 (en) 2009-06-12 2014-03-25 Flowcardia, Inc. Device and method for vascular re-entry
US8690819B2 (en) 2002-08-26 2014-04-08 Flowcardia, Inc. Ultrasound catheter for disrupting blood vessel obstructions
US8956375B2 (en) 2002-08-26 2015-02-17 Flowcardia, Inc. Ultrasound catheter devices and methods
US8961423B2 (en) 2003-02-26 2015-02-24 Flowcardia, Inc. Ultrasound catheter apparatus
US9282984B2 (en) 2006-04-05 2016-03-15 Flowcardia, Inc. Therapeutic ultrasound system
US9629643B2 (en) 2006-11-07 2017-04-25 Flowcardia, Inc. Ultrasound catheter having improved distal end
US10357263B2 (en) 2012-01-18 2019-07-23 C. R. Bard, Inc. Vascular re-entry device
US10582983B2 (en) 2017-02-06 2020-03-10 C. R. Bard, Inc. Ultrasonic endovascular catheter with a controllable sheath
US10758256B2 (en) 2016-12-22 2020-09-01 C. R. Bard, Inc. Ultrasonic endovascular catheter
US10835267B2 (en) 2002-08-02 2020-11-17 Flowcardia, Inc. Ultrasound catheter having protective feature against breakage
US11344750B2 (en) 2012-08-02 2022-05-31 Flowcardia, Inc. Ultrasound catheter system
US11510690B2 (en) 2005-01-20 2022-11-29 Flowcardia, Inc. Vibrational catheter devices and methods for making same
US11596726B2 (en) 2016-12-17 2023-03-07 C.R. Bard, Inc. Ultrasound devices for removing clots from catheters and related methods
US11633206B2 (en) 2016-11-23 2023-04-25 C.R. Bard, Inc. Catheter with retractable sheath and methods thereof

Cited By (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994025759A1 (de) * 1993-05-03 1994-11-10 Leybold Aktiengesellschaft Reibungsvakuumpumpe mit lagerabstützung
US5662456A (en) * 1993-05-03 1997-09-02 Leybold Aktiengesellschaft Friction vacuum pump with bearing support
US8506519B2 (en) 1999-02-16 2013-08-13 Flowcardia, Inc. Pre-shaped therapeutic catheter
FR2804476A1 (fr) * 2000-01-31 2001-08-03 Cit Alcatel Systeme amortisseur et centreur de roulement pour pompe a vide sur palier magnetique
EP1122442A1 (fr) * 2000-01-31 2001-08-08 Alcatel Systeme amortisseur et centreur de roulement pour pompe a vide sur palier magnetique
US6483216B2 (en) 2000-01-31 2002-11-19 Alcatel Damper system and bearing centering device for magnetic bearing vacuum pump
US10111680B2 (en) 2002-08-02 2018-10-30 Flowcardia, Inc. Therapeutic ultrasound system
US9265520B2 (en) 2002-08-02 2016-02-23 Flowcardia, Inc. Therapeutic ultrasound system
US10722262B2 (en) 2002-08-02 2020-07-28 Flowcardia, Inc. Therapeutic ultrasound system
US8647293B2 (en) 2002-08-02 2014-02-11 Flowcardia, Inc. Therapeutic ultrasound system
US10835267B2 (en) 2002-08-02 2020-11-17 Flowcardia, Inc. Ultrasound catheter having protective feature against breakage
US9381027B2 (en) 2002-08-26 2016-07-05 Flowcardia, Inc. Steerable ultrasound catheter
US8956375B2 (en) 2002-08-26 2015-02-17 Flowcardia, Inc. Ultrasound catheter devices and methods
US10285727B2 (en) 2002-08-26 2019-05-14 Flowcardia, Inc. Steerable ultrasound catheter
US10376272B2 (en) 2002-08-26 2019-08-13 Flowcardia, Inc. Ultrasound catheter for disrupting blood vessel obstructions
US9421024B2 (en) 2002-08-26 2016-08-23 Flowcardia, Inc. Steerable ultrasound catheter
US8690819B2 (en) 2002-08-26 2014-04-08 Flowcardia, Inc. Ultrasound catheter for disrupting blood vessel obstructions
US10130380B2 (en) 2003-02-26 2018-11-20 Flowcardia, Inc. Ultrasound catheter apparatus
US11103261B2 (en) 2003-02-26 2021-08-31 C.R. Bard, Inc. Ultrasound catheter apparatus
US8961423B2 (en) 2003-02-26 2015-02-24 Flowcardia, Inc. Ultrasound catheter apparatus
EP1508700A3 (en) * 2003-08-21 2012-02-22 Ebara Corporation Turbo molecular pump
EP1508700A2 (en) * 2003-08-21 2005-02-23 Ebara Corporation Turbo molecular pump
US9433433B2 (en) 2003-09-19 2016-09-06 Flowcardia, Inc. Connector for securing ultrasound catheter to transducer
US11426189B2 (en) 2003-09-19 2022-08-30 Flowcardia, Inc. Connector for securing ultrasound catheter to transducer
US8641630B2 (en) 2003-09-19 2014-02-04 Flowcardia, Inc. Connector for securing ultrasound catheter to transducer
US10349964B2 (en) 2003-09-19 2019-07-16 Flowcardia, Inc. Connector for securing ultrasound catheter to transducer
US8668709B2 (en) 2003-11-24 2014-03-11 Flowcardia, Inc. Steerable ultrasound catheter
US8613751B2 (en) 2003-11-24 2013-12-24 Flowcardia, Inc. Steerable ultrasound catheter
US11109884B2 (en) 2003-11-24 2021-09-07 Flowcardia, Inc. Steerable ultrasound catheter
US10004520B2 (en) 2004-08-26 2018-06-26 Flowcardia, Inc. Ultrasound catheter devices and methods
US10682151B2 (en) 2004-08-26 2020-06-16 Flowcardia, Inc. Ultrasound catheter devices and methods
US8790291B2 (en) 2004-08-26 2014-07-29 Flowcardia, Inc. Ultrasound catheter devices and methods
US8617096B2 (en) * 2004-08-26 2013-12-31 Flowcardia, Inc. Ultrasound catheter devices and methods
US20110125164A1 (en) * 2004-08-26 2011-05-26 Flowcardia, Inc. Ultrasound catheter devices and methods
US11510690B2 (en) 2005-01-20 2022-11-29 Flowcardia, Inc. Vibrational catheter devices and methods for making same
US9282984B2 (en) 2006-04-05 2016-03-15 Flowcardia, Inc. Therapeutic ultrasound system
US8496669B2 (en) 2006-11-07 2013-07-30 Flowcardia, Inc. Ultrasound catheter having protective feature against breakage
US9629643B2 (en) 2006-11-07 2017-04-25 Flowcardia, Inc. Ultrasound catheter having improved distal end
US10537712B2 (en) 2006-11-07 2020-01-21 Flowcardia, Inc. Ultrasound catheter having improved distal end
US11229772B2 (en) 2006-11-07 2022-01-25 Flowcardia, Inc. Ultrasound catheter having improved distal end
JP2010535969A (ja) * 2007-08-10 2010-11-25 オーリコン レイボルド バキューム ゲーエムベーハー ポンプ軸受配置
DE102007037792A1 (de) * 2007-08-10 2009-02-12 Oerlikon Leybold Vacuum Gmbh Pumpen-Lageranordnung
WO2009021809A3 (de) * 2007-08-10 2009-06-11 Oerlikon Leybold Vacuum Gmbh Pumpen-lageranordnung
US9402646B2 (en) 2009-06-12 2016-08-02 Flowcardia, Inc. Device and method for vascular re-entry
US8679049B2 (en) 2009-06-12 2014-03-25 Flowcardia, Inc. Device and method for vascular re-entry
DE202010015593U1 (de) * 2010-11-17 2012-03-01 Oerlikon Leybold Vacuum Gmbh Pumpenlagerung
US10357263B2 (en) 2012-01-18 2019-07-23 C. R. Bard, Inc. Vascular re-entry device
US11191554B2 (en) 2012-01-18 2021-12-07 C.R. Bard, Inc. Vascular re-entry device
WO2013151015A1 (ja) * 2012-04-04 2013-10-10 株式会社島津製作所 真空ポンプ
US11344750B2 (en) 2012-08-02 2022-05-31 Flowcardia, Inc. Ultrasound catheter system
US11633206B2 (en) 2016-11-23 2023-04-25 C.R. Bard, Inc. Catheter with retractable sheath and methods thereof
US11596726B2 (en) 2016-12-17 2023-03-07 C.R. Bard, Inc. Ultrasound devices for removing clots from catheters and related methods
US10758256B2 (en) 2016-12-22 2020-09-01 C. R. Bard, Inc. Ultrasonic endovascular catheter
US10582983B2 (en) 2017-02-06 2020-03-10 C. R. Bard, Inc. Ultrasonic endovascular catheter with a controllable sheath
US11638624B2 (en) 2017-02-06 2023-05-02 C.R. Bard, Inc. Ultrasonic endovascular catheter with a controllable sheath

Similar Documents

Publication Publication Date Title
DE8910040U1 (de) Turbomolekular-Vakuumpumpe
DE3604625C2 (de) Gasturbine
DE10261079B4 (de) Tauchpumpvorrichtung, magnetische Kopplung hierfür und Verfahren zum Pumpen
EP1000247A1 (de) Lagerung für einen rotor einer strömungsmaschine sowie deren verwendung
DE2315093B2 (de) Kreiselverdichter
EP0443473B1 (de) Sperrflüssigkeits-Dichtungsanordnung bei einem Turboverdichter
DE102013208460A1 (de) Pumpenanordnung mit einer Gleitlageranordnung
DE69719928T2 (de) Rotationspumpe für Flüssigkeiten
DE19956789A1 (de) Planetengetriebe zum Anbau an einen Elektromotor
DE68920400T2 (de) Lageranordnung einer Rotationsmaschine.
EP0814275B1 (de) Hydrodynamisches Gleitlager für einen Läufer einer Pumpe
DE1453711A1 (de) Elektromotor-Pumpenaggregat
DE102016209399A1 (de) Lageranordnung
DE202009013629U1 (de) Vakuum-Wälzlageranordnung sowie Vakuumpumpe
EP0078345A1 (de) Spaltrohrmotor-Kreiselpumpe mit Axialschubausgleich
DE8608801U1 (de) Turbomolekular-Vakuumpumpe mit einem Rotor und mindestens einem Wälzlager
DE69114239T2 (de) Dichtung.
DE3121529C2 (zh)
EP0461131B1 (de) Axialschubentlastungseinrichtung
DE10301613B4 (de) Motor-Pumpeneinheit
EP0188713B1 (de) Ölfördereinrichtung für Vakuumpumpen
EP3650702B1 (de) Verwendung eines synthetischen öls in einer vakuumpumpe und vakuumpumpe
CH340106A (de) Turbomaschine mit abgedichterer Welle
EP0243791A1 (de) Dichtung zwischen rotierenden Maschinenteilen
DE9206567U1 (de) Axialkolbenpumpe