DE8703223U1 - - Google Patents

Info

Publication number
DE8703223U1
DE8703223U1 DE8703223U DE8703223U DE8703223U1 DE 8703223 U1 DE8703223 U1 DE 8703223U1 DE 8703223 U DE8703223 U DE 8703223U DE 8703223 U DE8703223 U DE 8703223U DE 8703223 U1 DE8703223 U1 DE 8703223U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8703223U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MODELLBAU PAUL APITZ 7913 SENDEN DE
Original Assignee
MODELLBAU PAUL APITZ 7913 SENDEN DE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MODELLBAU PAUL APITZ 7913 SENDEN DE filed Critical MODELLBAU PAUL APITZ 7913 SENDEN DE
Priority to DE8703223U priority Critical patent/DE8703223U1/de
Publication of DE8703223U1 publication Critical patent/DE8703223U1/de
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
DE8703223U 1987-03-03 1987-03-03 Expired DE8703223U1 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8703223U DE8703223U1 (xx) 1987-03-03 1987-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE8703223U DE8703223U1 (xx) 1987-03-03 1987-03-03

Publications (1)

Publication Number Publication Date
DE8703223U1 true DE8703223U1 (xx) 1987-04-16

Family

ID=6805422

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8703223U Expired DE8703223U1 (xx) 1987-03-03 1987-03-03

Country Status (1)

Country Link
DE (1) DE8703223U1 (xx)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4002469A1 (de) * 1990-01-29 1991-08-01 Handtmann A Punkt Automation Aufspannvorrichtung
DE4030113A1 (de) * 1990-09-24 1992-03-26 Wissner Rolf Vorrichtung zum spannen von zu bearbeitenden platten
WO1992010336A2 (en) * 1990-12-08 1992-06-25 Carne, James, Christopher Vaccum plates
WO1993022104A1 (en) * 1992-05-06 1993-11-11 Carne, James, Christopher Vacuum plates
DE4221222A1 (de) * 1992-06-27 1994-01-05 Ottensteiner Kunststoff Gmbh Vakuum-Aufspannvorrichtung zur Halterung von Werkstücken
EP0652075A2 (de) * 1993-09-14 1995-05-10 Eduard Huber Management Ag Vorrichtung zum Bearbeiten von Werkstücken
EP0665100A1 (de) * 1993-12-28 1995-08-02 CARL AUG. PICARD GMBH & CO. KG. Arbeitsplatte
WO1996014965A1 (en) * 1994-11-09 1996-05-23 Sapim Amada S.P.A. Device for gripping and handling pieces of sheet material and manipulator of pieces of sheet material comprising this device
DE29717608U1 (de) * 1997-10-02 1999-02-04 Schmalz J Gmbh Greifvorrichtung
DE10357268B3 (de) * 2003-12-01 2005-06-09 Mb-Portatec Gmbh Verfahren und Anordnung zur Bearbeitung von Dünnblechen und dünnwandigen, einfach oder doppelt gekrümmten Platten oder Schalen
DE102006014545A1 (de) * 2006-03-21 2007-10-11 Thieme Gmbh & Co. Kg Drucktisch für Siebdruckmaschine
US20090060688A1 (en) * 2005-03-28 2009-03-05 Naoki Asada Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device
US7708854B2 (en) 2002-12-20 2010-05-04 Infineon Technologies Ag Work carrier and method of processing a workpiece
CN102427916A (zh) * 2009-04-22 2012-04-25 Ev集团有限责任公司 用于保持半导体衬底的保持设备
DE10262317B4 (de) * 2002-12-20 2016-05-19 Infineon Technologies Ag Verfahren zum Trennen eines Werkstücks von einem Werkstückträger

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4002469A1 (de) * 1990-01-29 1991-08-01 Handtmann A Punkt Automation Aufspannvorrichtung
DE4030113A1 (de) * 1990-09-24 1992-03-26 Wissner Rolf Vorrichtung zum spannen von zu bearbeitenden platten
WO1992010336A2 (en) * 1990-12-08 1992-06-25 Carne, James, Christopher Vaccum plates
WO1992010336A3 (en) * 1990-12-08 1992-07-23 Carne Ufm Ltd Vaccum plates
WO1993022104A1 (en) * 1992-05-06 1993-11-11 Carne, James, Christopher Vacuum plates
DE4221222A1 (de) * 1992-06-27 1994-01-05 Ottensteiner Kunststoff Gmbh Vakuum-Aufspannvorrichtung zur Halterung von Werkstücken
EP0963808A3 (de) * 1993-09-14 2002-10-23 Eduard Huber Management Ag Als Werkstückhalter ausgebildeter Maschinentisch zum spanabhebenden Bearbeiten von Werkstücken
EP0652075A3 (de) * 1993-09-14 1996-07-03 Huber Eduard Management Ag Vorrichtung zum Bearbeiten von Werkstücken.
EP0652075A2 (de) * 1993-09-14 1995-05-10 Eduard Huber Management Ag Vorrichtung zum Bearbeiten von Werkstücken
EP0665100A1 (de) * 1993-12-28 1995-08-02 CARL AUG. PICARD GMBH & CO. KG. Arbeitsplatte
WO1996014965A1 (en) * 1994-11-09 1996-05-23 Sapim Amada S.P.A. Device for gripping and handling pieces of sheet material and manipulator of pieces of sheet material comprising this device
US5964568A (en) * 1994-11-09 1999-10-12 Codatto; Antonio Device for gripping and handling pieces of sheet material and manipulator of pieces of sheet material comprising this device
DE29717608U1 (de) * 1997-10-02 1999-02-04 Schmalz J Gmbh Greifvorrichtung
US7708854B2 (en) 2002-12-20 2010-05-04 Infineon Technologies Ag Work carrier and method of processing a workpiece
DE10262317B4 (de) * 2002-12-20 2016-05-19 Infineon Technologies Ag Verfahren zum Trennen eines Werkstücks von einem Werkstückträger
DE10260233B4 (de) * 2002-12-20 2016-05-19 Infineon Technologies Ag Verfahren zum Befestigen eines Werkstücks mit einem Feststoff an einem Werkstückträger und Werkstückträger
US7244082B2 (en) 2003-12-01 2007-07-17 Mb-Portatec Gmbh Method and arrangement for processing thin sheets and thin-walled plates or shells that are curved singly or doubly
US7938601B2 (en) 2003-12-01 2011-05-10 Mb - Portatec Gmbh Use of a distributor or diffuser in the form of a thin-walled, air-permeable heat-reactive layer for machining a workpiece
EP1537951A3 (de) * 2003-12-01 2006-02-01 MB-PORTATEC GmbH Verfahren und Anordnung zur Bearbeitung von Dünnblechen und dünnwandigen, einfach oder doppelt gekrümmten Platten oder Schalen
DE10357268B3 (de) * 2003-12-01 2005-06-09 Mb-Portatec Gmbh Verfahren und Anordnung zur Bearbeitung von Dünnblechen und dünnwandigen, einfach oder doppelt gekrümmten Platten oder Schalen
US20090060688A1 (en) * 2005-03-28 2009-03-05 Naoki Asada Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device
US8371564B2 (en) * 2005-03-28 2013-02-12 Nikon Corporation Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device
DE102006014545A1 (de) * 2006-03-21 2007-10-11 Thieme Gmbh & Co. Kg Drucktisch für Siebdruckmaschine
CN102427916A (zh) * 2009-04-22 2012-04-25 Ev集团有限责任公司 用于保持半导体衬底的保持设备
CN102427916B (zh) * 2009-04-22 2016-08-03 Ev集团有限责任公司 用于保持半导体衬底的保持设备

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