DE8703223U1 - Vacuum clamping plate - Google Patents

Vacuum clamping plate

Info

Publication number
DE8703223U1
DE8703223U1 DE8703223U DE8703223U DE8703223U1 DE 8703223 U1 DE8703223 U1 DE 8703223U1 DE 8703223 U DE8703223 U DE 8703223U DE 8703223 U DE8703223 U DE 8703223U DE 8703223 U1 DE8703223 U1 DE 8703223U1
Authority
DE
Germany
Prior art keywords
clamping plate
clamping
vacuum
clamping surface
workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8703223U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MODELLBAU PAUL APITZ 7913 SENDEN DE
Original Assignee
MODELLBAU PAUL APITZ 7913 SENDEN DE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MODELLBAU PAUL APITZ 7913 SENDEN DE filed Critical MODELLBAU PAUL APITZ 7913 SENDEN DE
Priority to DE8703223U priority Critical patent/DE8703223U1/en
Publication of DE8703223U1 publication Critical patent/DE8703223U1/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Jigs For Machine Tools (AREA)

Description

Modellbau 7913 Senden, den 24.02.87Modellbau 7913 Senden, 24.02.87 Paul Apitz Kirchenweg 12Paul Apitz Kirchenweg 12 Vakuum-SpannplatteVacuum clamping plate

Die Neuerung bezieht eich auf eine Vakuum-Spannplatte mit einer AufepannflSche für Werkstücke gemäß dem Oberbegriff des Schutz-, anepruches 1.The innovation relates to a vacuum clamping plate with a clamping surface for workpieces according to the generic term of the protective claim 1.

Bei derartigen Vakuum-Spannplatten sind die Werkstücke in der Regel nur durch die senkrecht zur Aufspannfläche wirkende Haltekraft des Vakuums an der Spannplatte gehalten. Dagegen wirken die KrSfte aus der spanabhebenden Bearbeitung in Richtung der Aufspannflache auf die Werkstücke ein, so daß die Bearbeitungegeachwindigkeit abhängig ist vom Reibfaktor zwischen Werkstück und Spannplatte. Dabei wird der Reibfaktor stark beeinflußt durch die Beschaffenheit der in Verbindung stehenden Oberflachen von Werkstück und Spannplatte. With such vacuum clamping plates, the workpieces are usually only held to the clamping plate by the holding force of the vacuum acting perpendicular to the clamping surface. In contrast, the forces from the machining act on the workpieces in the direction of the clamping surface, so that the machining speed depends on the friction factor between the workpiece and the clamping plate. The friction factor is strongly influenced by the nature of the surfaces of the workpiece and the clamping plate that are in contact.

Der Neuerung liegt nun die Aufgabe zu Grunde, eine Spannplatte zu schaffen, auf der Werkstücke, auch solche mit unebener Bezugsflache, besser gegen Verschieben gesichert sind.The innovation is now based on the task of creating a clamping plate on which workpieces, even those with an uneven reference surface, are better secured against displacement.

Die Aufgabe ist erfindungagemäß dadurch gelöst, daß die Aufspannflache mit einem Haftbelag versenen ist.The object is achieved according to the invention in that the clamping surface is provided with an adhesive coating.

Durch den Haftbelag ist es möglich. Werkstücke unabhängig vom Werkstoff mit hohem Reibungswiderstand aaf der Spannplatte zu spannen. Sofern dabei der Haftbelag ein* begrenzte Elastizität besitzt, können damit auch Werkstücke mit einer unebenen Bezugs*.18-ehe unter erhöhtem Reibungswiderstand aufgespannt werden.The adhesive coating makes it possible to clamp workpieces with high frictional resistance to the clamping plate, regardless of the material. Provided the adhesive coating has limited elasticity, workpieces with an uneven reference surface can also be clamped with increased frictional resistance.

Gemäß den Merkmalen des Anepruches 2 kann der Haftbelag aus einer gelochten M*tte oder Folie aus Gummi oder Kunststoff bestehen, dieAccording to the features of claim 2, the adhesive coating may consist of a perforated rubber or plastic mat or film, which

in Bedarfsfall lose auf die Aufspannfläche aufgelegt wird. AußerIf necessary, it is placed loosely on the clamping surface. Except

Gummi oder Kunststoff sind auch andere Werkstoffe mit einem hohenRubber or plastic are also other materials with a high Reibbeiwert als Haftbelag geeignet.Coefficient of friction suitable as an adhesive coating. Anstelle einer losen Hatte oder Folie kann der Haftbelag auch aufInstead of a loose hat or foil, the adhesive coating can also be applied to

der Spannplatte aufgeklebt, aufvulkanisiert oder aufgespritztglued, vulcanized or sprayed onto the clamping plate

In der Zeichnung ist ein AuefUhrungsbeispiel der Neuerung darge- &igr;The drawing shows an example of the innovation.

«fallt· lln/l uU/l n.flkrAl/.AnJ »llh.^... !...»k.l^K^r. &Ggr;«falls· lln/l uU/l n .flkrAl/. To J »llh.^... !...»kl^K^r. &Ggr;

«•••»&bgr;·· ·*·■·■ WM« W M««M^a*Mi «*M£yWaBW ·■««■■«■«· MSeUII· ««»«U ■«•••»&bgr;·· ·*·■·■ WM« W M««M^a*Mi «*M£yWaBW ·■««■■«■«· MSeUII· ««»«U ■

Eine Vakuum-Spannplatte 1 schließt mit einer Grundplatte 2 eine >' Vakuumkammer 3 ein, welche über Saugbohrungen 4 mit der Oberseite | der Spannplatte 1 als Aufspannflache 5 in Verbindung steht. Auf i der Aufepemnflache 5 werden Werkstücke für die spanabhebende Bearbeitung auf Werkzeugmaschinen mittels Unterdruck gespannt. Um einen möglichst gleichmäßigen Unterdruck über der Auf«pannflache 5 zu er zielen, sind die Saugbohrungen 4 in der Spannplatte 1 gleichmäßig in der Art eines Rasters verteilt angeordnet. Gemäß der Heuerung ist nun die ebene Aufspannflache mit einem Haftbelag 6 versehen. Dieser kann aus einer losen, im gleichen Raster wie die Spannplatte 1, gelochten Matte oder Folie aus einem Werkstoff mit einem hohen Reibbeiwert bestehen. Geeignete Werkstoffe wären beispielsweise Gummi, Kunststoff oder solche Materialen, wie sie bei der Herstellung von Brems- oder Kupplungsbelägen Verwendung finden. A vacuum clamping plate 1 encloses a vacuum chamber 3 with a base plate 2, which is connected to the top of the clamping plate 1 as a clamping surface 5 via suction holes 4. Workpieces for machining on machine tools are clamped to the clamping surface 5 using negative pressure. In order to achieve the most even negative pressure possible over the clamping surface 5, the suction holes 4 in the clamping plate 1 are evenly distributed in the manner of a grid. According to the invention, the flat clamping surface is now provided with an adhesive coating 6. This can consist of a loose mat or film made of a material with a high coefficient of friction, perforated in the same grid as the clamping plate 1. Suitable materials would be, for example, rubber, plastic or materials such as those used in the manufacture of brake or clutch linings.

Anstelle eines losen Haftbelages 6 kann dieser auf der Aufapann-Instead of a loose adhesive layer 6, this can be placed on the mounting

f lache 5 arjf geklebt, auf vulkanisiert oder aufgespritzt sein, tiuch |f lache 5 arjf glued, vulcanized or sprayed on, tiuch |

in der Wahl der Dicke und der Elastizität des Haftbelages bestehen | keine Einschränkungen. Beide Größen hängen in der Regel von der | Beschaffenheit des Werkstückes ab. So wird man beispielsweise bei : Werkstücken mit einer bereite vohandenen ebenen Bezugsflache zur Erzielung einer hohen Bearbeitungequalität einen Haftbelag mit geringer Elastizität und bei solchen mit einer unebenen Bezugsflache einen Haftbelag mit höherer Elastizität verwenden.There are no restrictions on the choice of thickness and elasticity of the adhesive coating. Both values usually depend on the nature of the workpiece. For example, for workpieces with a readily available flat reference surface, an adhesive coating with low elasticity is used to achieve high processing quality, and for workpieces with an uneven reference surface, an adhesive coating with higher elasticity is used.

Claims (4)

1· It ■ ■ I * · 4 · · · Modellbau 7913 Senden, den 24.02.87 Paul Apltz Kirchenweg 12 Schutzanaprüche1· It ■ ■ I * · 4 · · · Modellbau 7913 Senden, 24.02.87 Paul Apltz Kirchenweg 12 Protection claims 1. Vakuum-Spannplatte mit einer AufspannflHche für Werkstücke und mit Saugbohrungen, über welche die Aufspannflache mit einer Vakuumkammer in Verbindung steht, wobei auf der Aufspannflache abgesetzte Werkstücke durch den sich darunter ausbildenden Unterdruck gegen die Spannplatte gepreßt werden, d a d u r c h gekennzeichnet, daß die Aufspannfläche C5> mit einem Haftbelarj <6> versehen ist.1. Vacuum clamping plate with a clamping surface for workpieces and with suction holes, via which the clamping surface is connected to a vacuum chamber, whereby workpieces placed on the clamping surface are pressed against the clamping plate by the negative pressure that develops underneath, characterized in that the clamping surface C5> is provided with an adhesive layer <6>. 2. Vakuum-Spannplatte nach Anspruch 1, dadurch gekennzeichnet, daß der Haftbelag (&bgr;) aus einer auf die AufspannflHche <5) auflegbaren und im gleichen Raster wie die Spannplatte (1) gelochten Watte aus Gummi oder Kunststoff besteht .2. Vacuum clamping plate according to claim 1, characterized in that the adhesive coating (β) consists of a rubber or plastic wadding that can be placed on the clamping surface and is perforated in the same grid as the clamping plate (1). 3. Vakuum-Spannplatte nach Anpruch 1 oder 2, dadurch gekennzeichnet, daß die Hatte au£' der AufspannfISche (5> aufgeklebt oder aufvulkanisiert ist.3. Vacuum clamping plate according to claim 1 or 2, characterized in that the hat is glued or vulcanized onto the clamping plate (5). 4. Vakuum-Spannplatte nach Anspruch 1 dadurch gekennzeichnet, daß der Haftbelag (6) auf der Aufspannfläche (S) aufgespritzt ist.4. Vacuum clamping plate according to claim 1, characterized in that the adhesive coating (6) is sprayed onto the clamping surface (S).
DE8703223U 1987-03-03 1987-03-03 Vacuum clamping plate Expired DE8703223U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8703223U DE8703223U1 (en) 1987-03-03 1987-03-03 Vacuum clamping plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE8703223U DE8703223U1 (en) 1987-03-03 1987-03-03 Vacuum clamping plate

Publications (1)

Publication Number Publication Date
DE8703223U1 true DE8703223U1 (en) 1987-04-16

Family

ID=6805422

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8703223U Expired DE8703223U1 (en) 1987-03-03 1987-03-03 Vacuum clamping plate

Country Status (1)

Country Link
DE (1) DE8703223U1 (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4002469A1 (en) * 1990-01-29 1991-08-01 Handtmann A Punkt Automation Flat work clamp - has suction passages in rubber support sealed off by work
DE4030113A1 (en) * 1990-09-24 1992-03-26 Wissner Rolf Vacuum clamping of flat workpieces for machining - involves use of filter paper between workpiece and perforated baseplate
WO1992010336A2 (en) * 1990-12-08 1992-06-25 Carne, James, Christopher Vaccum plates
WO1993022104A1 (en) * 1992-05-06 1993-11-11 Carne, James, Christopher Vacuum plates
DE4221222A1 (en) * 1992-06-27 1994-01-05 Ottensteiner Kunststoff Gmbh Vacuum suction device for holding work objects - consists of support panel for objects perforated by vertical holes surrounded by sealing strip with another sealing strip on its underside
EP0652075A2 (en) * 1993-09-14 1995-05-10 Eduard Huber Management Ag Device for the machining of workpieces
EP0665100A1 (en) * 1993-12-28 1995-08-02 CARL AUG. PICARD GMBH &amp; CO. KG. Working table top
WO1996014965A1 (en) * 1994-11-09 1996-05-23 Sapim Amada S.P.A. Device for gripping and handling pieces of sheet material and manipulator of pieces of sheet material comprising this device
DE29717608U1 (en) * 1997-10-02 1999-02-04 J. Schmalz GmbH, 72293 Glatten Gripping device
DE10357268B3 (en) * 2003-12-01 2005-06-09 Mb-Portatec Gmbh Method and arrangement for processing thin sheets and thin-walled, single or double curved sheets or shells
DE102006014545A1 (en) * 2006-03-21 2007-10-11 Thieme Gmbh & Co. Kg Printing table for e.g. flat bed printing machine, has hollow space accessible via withdraw opening and via intake opening, where free cross section of withdraw opening is smaller than free cross section of intake opening
US20090060688A1 (en) * 2005-03-28 2009-03-05 Naoki Asada Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device
US7708854B2 (en) 2002-12-20 2010-05-04 Infineon Technologies Ag Work carrier and method of processing a workpiece
CN102427916A (en) * 2009-04-22 2012-04-25 Ev集团有限责任公司 Receiving device for receiving semiconductor substrates
DE10262317B4 (en) * 2002-12-20 2016-05-19 Infineon Technologies Ag Method for separating a workpiece from a workpiece carrier

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4002469A1 (en) * 1990-01-29 1991-08-01 Handtmann A Punkt Automation Flat work clamp - has suction passages in rubber support sealed off by work
DE4030113A1 (en) * 1990-09-24 1992-03-26 Wissner Rolf Vacuum clamping of flat workpieces for machining - involves use of filter paper between workpiece and perforated baseplate
WO1992010336A2 (en) * 1990-12-08 1992-06-25 Carne, James, Christopher Vaccum plates
WO1992010336A3 (en) * 1990-12-08 1992-07-23 Carne Ufm Ltd Vaccum plates
WO1993022104A1 (en) * 1992-05-06 1993-11-11 Carne, James, Christopher Vacuum plates
DE4221222A1 (en) * 1992-06-27 1994-01-05 Ottensteiner Kunststoff Gmbh Vacuum suction device for holding work objects - consists of support panel for objects perforated by vertical holes surrounded by sealing strip with another sealing strip on its underside
EP0963808A3 (en) * 1993-09-14 2002-10-23 Eduard Huber Management Ag Machine table in the form of a workpiece holder for the machining of the workpieces
EP0652075A3 (en) * 1993-09-14 1996-07-03 Huber Eduard Management Ag Device for the machining of workpieces.
EP0652075A2 (en) * 1993-09-14 1995-05-10 Eduard Huber Management Ag Device for the machining of workpieces
EP0665100A1 (en) * 1993-12-28 1995-08-02 CARL AUG. PICARD GMBH &amp; CO. KG. Working table top
WO1996014965A1 (en) * 1994-11-09 1996-05-23 Sapim Amada S.P.A. Device for gripping and handling pieces of sheet material and manipulator of pieces of sheet material comprising this device
US5964568A (en) * 1994-11-09 1999-10-12 Codatto; Antonio Device for gripping and handling pieces of sheet material and manipulator of pieces of sheet material comprising this device
DE29717608U1 (en) * 1997-10-02 1999-02-04 J. Schmalz GmbH, 72293 Glatten Gripping device
US7708854B2 (en) 2002-12-20 2010-05-04 Infineon Technologies Ag Work carrier and method of processing a workpiece
DE10262317B4 (en) * 2002-12-20 2016-05-19 Infineon Technologies Ag Method for separating a workpiece from a workpiece carrier
DE10260233B4 (en) * 2002-12-20 2016-05-19 Infineon Technologies Ag Method of attaching a workpiece to a solid on a workpiece carrier and workpiece carrier
US7244082B2 (en) 2003-12-01 2007-07-17 Mb-Portatec Gmbh Method and arrangement for processing thin sheets and thin-walled plates or shells that are curved singly or doubly
US7938601B2 (en) 2003-12-01 2011-05-10 Mb - Portatec Gmbh Use of a distributor or diffuser in the form of a thin-walled, air-permeable heat-reactive layer for machining a workpiece
EP1537951A3 (en) * 2003-12-01 2006-02-01 MB-PORTATEC GmbH Method and device for machining thin sheets and thin, single or double curved plates or shells
DE10357268B3 (en) * 2003-12-01 2005-06-09 Mb-Portatec Gmbh Method and arrangement for processing thin sheets and thin-walled, single or double curved sheets or shells
US20090060688A1 (en) * 2005-03-28 2009-03-05 Naoki Asada Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device
US8371564B2 (en) * 2005-03-28 2013-02-12 Nikon Corporation Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device
DE102006014545A1 (en) * 2006-03-21 2007-10-11 Thieme Gmbh & Co. Kg Printing table for e.g. flat bed printing machine, has hollow space accessible via withdraw opening and via intake opening, where free cross section of withdraw opening is smaller than free cross section of intake opening
CN102427916A (en) * 2009-04-22 2012-04-25 Ev集团有限责任公司 Receiving device for receiving semiconductor substrates
CN102427916B (en) * 2009-04-22 2016-08-03 Ev集团有限责任公司 For keeping the holding equipment of Semiconductor substrate

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