DE754979C - Electron microscope with an observation device arranged at an angle to the axis of the electron beam bundle for viewing the luminescent screen image - Google Patents

Electron microscope with an observation device arranged at an angle to the axis of the electron beam bundle for viewing the luminescent screen image

Info

Publication number
DE754979C
DE754979C DEZ26720D DEZ0026720D DE754979C DE 754979 C DE754979 C DE 754979C DE Z26720 D DEZ26720 D DE Z26720D DE Z0026720 D DEZ0026720 D DE Z0026720D DE 754979 C DE754979 C DE 754979C
Authority
DE
Germany
Prior art keywords
electron microscope
observation device
viewing
axis
screen image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DEZ26720D
Other languages
German (de)
Inventor
Kurt Dr Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to DEZ26720D priority Critical patent/DE754979C/en
Application granted granted Critical
Publication of DE754979C publication Critical patent/DE754979C/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/22Optical or photographic arrangements associated with the tube
    • H01J37/224Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Overhead Projectors And Projection Screens (AREA)

Description

Hierzu 1 Blatt Zeichnungen1 sheet of drawings

©95337.54© 95337.54

Claims (3)

PATENTANSPRÜCHE:PATENT CLAIMS: i. Elektronenmikroskop mit einer schräg zu der Achse des Elektronenstrahlenbündels angeordneten Beobachtungseinrichtung zum Betrachten des Leuchtschirmbildes, dadurch gekennzeichnet, daß das Objektiv der Beobachtungseinrichtung so angeordnet ist, daß die Bildebene und die erste Hauptebene des Objektivs sowie die Abbildungsebene und die zweite Hauptebene des Objektivs in optisch konjugierten Geraden einander schneiden.i. Electron microscope with an oblique to the axis of the electron beam arranged observation device for viewing the luminescent screen image, characterized in that that the objective of the observation device is arranged so that the image plane and the first main plane of the Objective and the imaging plane and the second main plane of the objective in optically conjugate straight lines to each other cut. 2. Elektronenmikroskop nach Anspruch i, dadurch gekennzeichnet, daß das Objektiv in einer kardanischen Lagerung justierbar ist.2. Electron microscope according to claim i, characterized in that the lens is adjustable in a gimbal bearing. 3. Elektronenmikroskop nach Anspruch 2, dadurch gekennzeichnet, daß die Lagerung aus einem Kugelgelenk besteht. 3. Electron microscope according to claim 2, characterized in that the bearing consists of a ball joint.
DEZ26720D 1941-11-06 1941-11-07 Electron microscope with an observation device arranged at an angle to the axis of the electron beam bundle for viewing the luminescent screen image Expired DE754979C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DEZ26720D DE754979C (en) 1941-11-06 1941-11-07 Electron microscope with an observation device arranged at an angle to the axis of the electron beam bundle for viewing the luminescent screen image

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE887512X 1941-11-06
DEZ26720D DE754979C (en) 1941-11-06 1941-11-07 Electron microscope with an observation device arranged at an angle to the axis of the electron beam bundle for viewing the luminescent screen image

Publications (1)

Publication Number Publication Date
DE754979C true DE754979C (en) 1954-07-19

Family

ID=25954126

Family Applications (1)

Application Number Title Priority Date Filing Date
DEZ26720D Expired DE754979C (en) 1941-11-06 1941-11-07 Electron microscope with an observation device arranged at an angle to the axis of the electron beam bundle for viewing the luminescent screen image

Country Status (1)

Country Link
DE (1) DE754979C (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007051405A1 (en) * 2007-10-25 2009-04-30 Leica Microsystems (Schweiz) Ag light microscope
EP2316048B1 (en) * 2008-07-31 2020-02-12 IP2IPO Innovations Limited Optical arrangement for oblique plane microscopy

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007051405A1 (en) * 2007-10-25 2009-04-30 Leica Microsystems (Schweiz) Ag light microscope
DE102007051405B4 (en) * 2007-10-25 2014-03-20 Leica Instruments (Singapore) Pte. Ltd. light microscope
EP2316048B1 (en) * 2008-07-31 2020-02-12 IP2IPO Innovations Limited Optical arrangement for oblique plane microscopy
EP3742216A1 (en) * 2008-07-31 2020-11-25 IP2IPO Innovations Limited Optical arrangement for oblique plane microscopy

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