DE69920311D1 - Flüssigkeitskupplung - Google Patents

Flüssigkeitskupplung

Info

Publication number
DE69920311D1
DE69920311D1 DE69920311T DE69920311T DE69920311D1 DE 69920311 D1 DE69920311 D1 DE 69920311D1 DE 69920311 T DE69920311 T DE 69920311T DE 69920311 T DE69920311 T DE 69920311T DE 69920311 D1 DE69920311 D1 DE 69920311D1
Authority
DE
Germany
Prior art keywords
fluid coupling
coupling
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69920311T
Other languages
English (en)
Other versions
DE69920311T2 (de
Inventor
Michio Yamaji
Tsutomu Shinohara
Kosuke Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE69920311D1 publication Critical patent/DE69920311D1/de
Application granted granted Critical
Publication of DE69920311T2 publication Critical patent/DE69920311T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L29/00—Joints with fluid cut-off means
    • F16L29/02—Joints with fluid cut-off means with a cut-off device in one of the two pipe ends, the cut-off device being automatically opened when the coupling is applied
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S285/00—Pipe joints or couplings
    • Y10S285/906—Equivalents
DE69920311T 1998-03-31 1999-03-29 Flüssigkeitskupplung Expired - Lifetime DE69920311T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8580798 1998-03-31
JP08580798A JP3965512B2 (ja) 1998-03-31 1998-03-31 流体継手および流体継手において使用されるガスケット保持用リテーナ

Publications (2)

Publication Number Publication Date
DE69920311D1 true DE69920311D1 (de) 2004-10-28
DE69920311T2 DE69920311T2 (de) 2005-10-06

Family

ID=13869153

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69920311T Expired - Lifetime DE69920311T2 (de) 1998-03-31 1999-03-29 Flüssigkeitskupplung

Country Status (9)

Country Link
US (1) US6161875A (de)
EP (1) EP0947753B1 (de)
JP (1) JP3965512B2 (de)
KR (1) KR100558104B1 (de)
CA (1) CA2267453C (de)
DE (1) DE69920311T2 (de)
IL (1) IL129218A (de)
SG (1) SG76603A1 (de)
TW (1) TW381204B (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3965512B2 (ja) * 1998-03-31 2007-08-29 株式会社フジキン 流体継手および流体継手において使用されるガスケット保持用リテーナ
JP3360133B2 (ja) * 1998-11-11 2002-12-24 株式会社フジキン 流体制御装置用継手部材およびその製造方法
US6318734B1 (en) * 1999-12-21 2001-11-20 Dana Corporation Gasket with integral support
JP4517325B2 (ja) * 2000-10-05 2010-08-04 忠弘 大見 流体継手
US6431229B1 (en) * 2001-08-24 2002-08-13 Air Products And Chemicals, Inc. Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals
KR100861973B1 (ko) 2002-03-18 2008-10-07 다다히로 오미 유체 커플링
US6966348B2 (en) * 2002-05-23 2005-11-22 Air Products And Chemicals, Inc. Purgeable container for low vapor pressure chemicals
US6648034B1 (en) 2002-05-23 2003-11-18 Air Products And Chemicals, Inc. Purgeable manifold for low vapor pressure chemicals containers
DE10261887B4 (de) * 2002-12-20 2005-05-12 Visteon Global Technologies, Inc., Dearborn Rohrkupplung
US7748750B2 (en) * 2004-08-19 2010-07-06 Flow International Corporation High fatigue life fittings for high-pressure fluid systems
JP5020758B2 (ja) * 2007-09-25 2012-09-05 東京エレクトロン株式会社 ガス供給装置、半導体製造装置及びガス供給装置用部品
JP5213636B2 (ja) * 2008-10-20 2013-06-19 東京エレクトロン株式会社 継手用シール装置およびこれを備えた流体継手
US20110133415A1 (en) * 2009-12-07 2011-06-09 Kim Ngoc Vu Ring seal and retainer assembly
DE102010002125A1 (de) 2010-02-18 2011-08-18 ZF Friedrichshafen AG, 88046 Dichtungsanordnung
WO2012078576A2 (en) * 2010-12-06 2012-06-14 Microflex Technologies Llc Ring seal retainer assembly and methods
US9074686B2 (en) 2010-12-06 2015-07-07 Microflex Technologies Llc Ring seal retainer assembly and methods
NO334004B1 (no) * 2012-03-20 2013-11-11 Fmc Kongsberg Subsea As Tetningssammenstilling for rørforbindelse
JP5988822B2 (ja) 2012-10-19 2016-09-07 株式会社フジキン 管継手
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5885699B2 (ja) * 2013-05-09 2016-03-15 株式会社フジキン 脆性破壊性光透過窓板の固定構造及びこれを用いた脆性破壊性光透過窓板の固定方法
WO2014181527A1 (ja) * 2013-05-09 2014-11-13 国立大学法人徳島大学 原料流体濃度検出器
KR101895828B1 (ko) * 2014-04-15 2018-09-07 킴 엔곡 부 유로 연결을 위한 이지-실 개스킷
JP1528532S (de) * 2014-09-30 2015-07-13
US10571055B2 (en) * 2015-08-26 2020-02-25 Ti Group Automotive Systems, Llc Block fitting and seal structure
KR20180136468A (ko) * 2016-04-04 2018-12-24 아이커 시스템즈, 인크. 액체 공급 시스템
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7016465B2 (ja) * 2018-02-28 2022-02-07 株式会社フジキン 流体制御装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3127196A (en) * 1964-03-31 Wedged gasket coupling utilizing differential
US4838583A (en) * 1982-08-23 1989-06-13 Cajon Company Fluid coupling
FR2645940B1 (fr) * 1989-04-12 1991-10-04 Sabatier Andre Raccord perfectionne pour conduits de fluide, notamment de gaz de grande purete
US5163721A (en) * 1990-10-24 1992-11-17 Cajon Company Fluid coupling with gasket retainer having interlocking portions
EP0646747A1 (de) * 1993-09-17 1995-04-05 Ck Metals, Ltd. Rohrverbindungsstruktur
JP3388291B2 (ja) * 1993-10-28 2003-03-17 忠弘 大見 管継手
US5423580A (en) * 1994-01-26 1995-06-13 Cajon Company Fluid coupling with gasket retainer
JP3517719B2 (ja) * 1995-05-18 2004-04-12 忠弘 大見 管継手
JP3661040B2 (ja) 1995-05-31 2005-06-15 忠弘 大見 流体制御装置
US5673946A (en) * 1995-07-07 1997-10-07 Ewal Manufacturing Co., Inc. Gasket assembly for a fluid coupling
US5681064A (en) * 1995-07-07 1997-10-28 Ewal Manufacturing Co., Inc. Gasket retainer
US5720505A (en) * 1995-08-09 1998-02-24 Fujikin Incorporated Pipe joint
US5829796A (en) * 1997-03-11 1998-11-03 Robinson; Eric R. Protection of sealing surfaces of metal face seals in tubing fittings
JP3965512B2 (ja) * 1998-03-31 2007-08-29 株式会社フジキン 流体継手および流体継手において使用されるガスケット保持用リテーナ
GB9820445D0 (en) * 1998-09-18 1998-11-11 Beckswift Ltd A holder for a gasket a gasket for recieving a holder and a holdeer and gasket combination

Also Published As

Publication number Publication date
EP0947753B1 (de) 2004-09-22
US6161875A (en) 2000-12-19
IL129218A (en) 2002-08-14
JPH11280967A (ja) 1999-10-15
EP0947753A3 (de) 2001-03-14
KR100558104B1 (ko) 2006-03-10
TW381204B (en) 2000-02-01
SG76603A1 (en) 2000-11-21
EP0947753A2 (de) 1999-10-06
CA2267453C (en) 2008-05-13
IL129218A0 (en) 2000-02-17
KR19990078376A (ko) 1999-10-25
DE69920311T2 (de) 2005-10-06
JP3965512B2 (ja) 2007-08-29
CA2267453A1 (en) 1999-09-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8330 Complete renunciation